CN103529484B - A kind of form of a stroke or a combination of strokes sponge drops detection device - Google Patents
A kind of form of a stroke or a combination of strokes sponge drops detection device Download PDFInfo
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- CN103529484B CN103529484B CN201210232393.XA CN201210232393A CN103529484B CN 103529484 B CN103529484 B CN 103529484B CN 201210232393 A CN201210232393 A CN 201210232393A CN 103529484 B CN103529484 B CN 103529484B
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Abstract
The open a kind of form of a stroke or a combination of strokes sponge of the present invention drops detection device, chemical-mechanical grinding device is provided with second stage cleaner, this second stage cleaner comprises the platform for placing wafer, and it is arranged on the mechanical arm of platform side, the end of mechanical arm is provided with holder, and form of a stroke or a combination of strokes sponge is arranged in this holder；This detection device comprises: fixed support, and it is fixed on the end of mechanical arm；Sensor, it is fixed on support bracket fastened end；Sensor is arranged near form of a stroke or a combination of strokes sponge, and the distance between this form of a stroke or a combination of strokes sponge and sensor is in the investigative range of sensor；The circuit of output terminal of sensor connects external master controller.The present invention arranges photoelectricity proximity transducer in form of a stroke or a combination of strokes sponge side; the situation that drops of form of a stroke or a combination of strokes sponge can be immediately detected; avoid occurring form of a stroke or a combination of strokes sponge to come off in process of production and cause wafer to damage the accident scrapped; it is effectively protected second stage cleaner and wafer, improves service life and the yield of wafer of second stage cleaner.
Description
Technical field
The present invention relates to the detection device of cleaning device in a kind of semicon industry, be specifically related to a kind of form of a stroke or a combination of strokes sponge and drop detection device.
Background technology
EBARA F*REX200 instrument is the chemical-mechanical grinding device a kind of by EBARA company product, for tungsten planarization is processed, and Wafer processing apparatus.
As shown in Figure 1, this processing equipment includes its equipment body, 4 load ports arranged along this body top one side, it is arranged on the mechanical hand that load port is other, and it is arranged on transferring buffered of mechanical hand side, it is arranged on the mechanical hand on transferring buffered side, it is arranged on the rotary transport device that mechanical hand is other, the wafer turner being arranged on rotary transport device, it is arranged on the grinding head that rotary transport device is other, it is arranged on tungsten grinding table and the grinding table of oxide of grinding head side, it is arranged on the first stage cleaner of the grinding table side of tungsten grinding table and oxide, and it is arranged on the second stage cleaner that first stage cleaner is other.First stage cleaner is provided with sponge brush, and second stage cleaner is provided with form of a stroke or a combination of strokes sponge, and after sponge is cleaned, wafer high speed rotating dries.
The workflow of this Wafer processing apparatus is: wafer enters this equipment from load port, it is sent to transferring buffered by mechanical hand, lead to mechanical hand again by wafer transfer to wafer turner, wafer inversion 180 degree, via rotary transport device, then by grinding head by wafer transfer to tungsten grinding table and the grinding table of oxide, wafer is ground after planarization processed, it is transferred to first stage cleaner, by sponge brush, crystal column surface is cleaned, finally it is transferred to second stage cleaner, uses form of a stroke or a combination of strokes sponge in rotary manner wafer to be cleaned.
As shown in Figure 2, second stage cleaner comprises one for the platform 3 ' placing wafer, and it is arranged on the mechanical arm 4 ' of platform side, be provided with one for fixing the holder 2 ' of form of a stroke or a combination of strokes sponge 1 ' in the end of mechanical arm 4 ', form of a stroke or a combination of strokes sponge 1 ' is fixed on the end of mechanical arm 4 ' by this holder 2 '.
During as it is shown on figure 3, second stage cleaner is cleaned work to wafer 5 ', this platform 3 ' periphery is provided with fixed claw, and by firm being fixed on platform 3 ' of wafer 5 ', this platform drives wafer 5 ' to rotate.Meanwhile, form of a stroke or a combination of strokes sponge 1 ' is also secured by device 2 ' and is rotated, and drives decline by mechanical arm, is pressed against on wafer 5 ' surface, by the friction of form of a stroke or a combination of strokes sponge 1 ' with crystal column surface, it is achieved the cleaning to crystal column surface.
Form of a stroke or a combination of strokes sponge is invented by EBARA company, and at present, the sleeve that in prior art, form of a stroke or a combination of strokes sponge is only made by PVC material is fastened under holder.The shortcoming of this design is, this kind of fixed form is firm not, and the situation that in use form of a stroke or a combination of strokes sponge comes off from holder can be caused to occur, in some years in past, carrying out there occurs that the problem that form of a stroke or a combination of strokes sponge drops for several times occurs, it causes following impact:
1, during being cleaned wafer, if form of a stroke or a combination of strokes sponge comes off, not having sponge to clean at crystal column surface, the pollutant of the residual of crystal column surface cannot all be removed, and has considerable influence for some specific product yields, causes wafer loss；
2, owing to being not provided with alarm device on Wafer processing apparatus, so every day on duty must check whether form of a stroke or a combination of strokes sponge has and comes off on time, it causes to spend every day and more manually checks the form of a stroke or a combination of strokes sponge on each equipment with the time.
Summary of the invention
The invention provides a kind of form of a stroke or a combination of strokes sponge to drop detection device, use optical detection, the situation that drops of form of a stroke or a combination of strokes sponge can be detected in time.
For achieving the above object, the invention provides a kind of form of a stroke or a combination of strokes sponge to drop detection device, chemical-mechanical grinding device is provided with second stage cleaner, this second stage cleaner comprises the platform for placing wafer, and it is arranged on the mechanical arm of platform side, the end of mechanical arm is provided with holder, and form of a stroke or a combination of strokes sponge is arranged in this holder；
Being characterized in, this detection device comprises:
Fixed support, it is fixed on the end of mechanical arm；
Sensor, it is fixed on support bracket fastened end；
Above-mentioned sensor is arranged near form of a stroke or a combination of strokes sponge, and the distance between this form of a stroke or a combination of strokes sponge and sensor is in the investigative range of sensor；
The circuit of output terminal of above-mentioned sensor connects external master controller.
Above-mentioned sensor uses photoelectricity proximity transducer.
Above-mentioned sensor comprises the Light-Emitting Diode and phototriode being connected respectively with external main controller circuit, and respectively close at Light-Emitting Diode luminescence and the lens that arrange of phototriode optical receiving end；
Light-Emitting Diode is luminous, light measured object reflection in sensor investigative range, by lens entrance phototriode, when reflecting without measured object, when phototriode can't detect incident illumination, i.e. sends a signal to external master controller.
Form of a stroke or a combination of strokes sponge drops and detects the side of the form of a stroke or a combination of strokes sponge that device is arranged at second stage cleaner, makes form of a stroke or a combination of strokes sponge be in form of a stroke or a combination of strokes sponge and drops in the investigative range detecting device；
In normal operation, the Light-Emitting Diode of its sensor keeps normal bright state, the light transmission lens that Light-Emitting Diode is launched, launch to the form of a stroke or a combination of strokes sponge being in investigative range, the light reflection by form of a stroke or a combination of strokes sponge, it is returned to device arrange, just can pass through lens entrance phototriode, after phototriode receives incident illumination, phototriode turns on, sending a signal to external master controller, external master controller then receives the information that form of a stroke or a combination of strokes sponge normally works；
When form of a stroke or a combination of strokes sponge drops, the light then causing Light-Emitting Diode to be launched cannot be reflected by form of a stroke or a combination of strokes sponge, phototriode does not receives incident illumination, phototriode ends, external master controller i.e. receives form of a stroke or a combination of strokes sponge and drops the information that drops of form of a stroke or a combination of strokes sponge that detection device passes on, and external master controller can alert and stop the work of second stage cleaner to operator.
The present invention a kind of form of a stroke or a combination of strokes sponge drop detection device compare with the maintenance technology of form of a stroke or a combination of strokes sponge in prior art, have an advantage in that, easy photoelectricity proximity transducer is arranged at the side of form of a stroke or a combination of strokes sponge by the present invention, when form of a stroke or a combination of strokes sponge drops, the situation that drops of form of a stroke or a combination of strokes sponge can be immediately detected, it is easy in time form of a stroke or a combination of strokes sponge be placed under repair and safeguard, avoid occurring form of a stroke or a combination of strokes sponge to come off in process of production and cause wafer to damage the accident scrapped, it is effectively protected second stage cleaner and wafer, improve service life and the yield of wafer of second stage cleaner.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of chemical-mechanical grinding device in prior art；
Fig. 2 is the structural representation of the second stage cleaner of chemical-mechanical grinding device in prior art；
Fig. 3 is the fundamental diagram of the second stage cleaner of chemical-mechanical grinding device in prior art；
Fig. 4 be the present invention a kind of form of a stroke or a combination of strokes sponge drop detection device structural representation；
Fig. 5 is that the present invention a kind of form of a stroke or a combination of strokes sponge drops the structural representation of sensor of detection device.
Detailed description of the invention
Below in conjunction with accompanying drawing, further illustrate the specific embodiment of the present invention.
As shown in Figure 4, the invention discloses a kind of form of a stroke or a combination of strokes sponge and drop detection device, the form of a stroke or a combination of strokes sponge detection device that drops comprises fixed support 7 and sensor 6.This detection device is arranged on the mechanical arm 4 of second stage cleaner, is provided with holder 2 in the end of mechanical arm 4, and form of a stroke or a combination of strokes sponge 1 is arranged in this holder 2.
Fixed support 7 is vertically arranged, and the two ends of this rack body are respectively top and end, and top is arranged at the top of end, and top is for connecting the end of mechanical arm 4, and end is used for connecting sensor 6.Be designed with horizontal buckling on top and end, it is simple to fixed support 7 respectively with mechanical arm 4, the connection of sensor 6.
Fixed support 7 is fixed on the end side of the mechanical arm 4 of second stage cleaner by its top.
The end of fixed support 7 is then arranged near the sidewall of the form of a stroke or a combination of strokes sponge 1 of second stage cleaner.
Sensor 6 is then fixed on the end of the end of fixed support 7, and sensor 6 is arranged near form of a stroke or a combination of strokes sponge 1, and the distance between this form of a stroke or a combination of strokes sponge 1 and sensor 6 is in the investigative range of sensor 6.
Sensor 6 uses photoelectricity proximity transducer, and the circuit of output terminal of this sensor 6 connects external master controller.
As it is shown in figure 5, in the present embodiment, sensor 6 uses the photoelectricity proximity transducer of the TL-N5ME1 of the model of OMNON company.It comprises the Light-Emitting Diode and phototriode being connected respectively with external main controller circuit, and respectively close at Light-Emitting Diode luminescence and the lens that arrange of phototriode optical receiving end.Generally Light-Emitting Diode Chang Liang, Light-Emitting Diode is luminous, this light is mapped on measured object 8 surface in sensor 6 investigative range by lens, reflect through this measured object 8, light re-shoots phototriode by lens, and phototriode receives incident illumination, and phototriode turns on, then send a signal to external master controller, in sensor 6 investigative range is described, have measured object 8.When in sensor 6 investigative range without measured object 8, then light cannot reflex to phototriode, and when phototriode can't detect incident illumination, phototriode ends, the information without measured object 8 that i.e. sends, to external master controller, illustrates that sensor 6 investigative range is interior without measured object 8.
The present invention a kind of form of a stroke or a combination of strokes sponge drop detection device operation principle as follows:
Form of a stroke or a combination of strokes sponge drops and detects the side of the form of a stroke or a combination of strokes sponge that device is arranged at second stage cleaner, makes form of a stroke or a combination of strokes sponge be in form of a stroke or a combination of strokes sponge and drops in the investigative range detecting device.In normal operation, the Light-Emitting Diode of its sensor 6 keeps normal bright state, the light transmission lens that Light-Emitting Diode is launched, launch to the form of a stroke or a combination of strokes sponge being in investigative range, the light reflection by form of a stroke or a combination of strokes sponge, it is returned to device arrange, just can pass through lens entrance phototriode, after phototriode receives incident illumination, phototriode turns on, sending a signal to external master controller, external master controller then receives the information that form of a stroke or a combination of strokes sponge normally works.
When form of a stroke or a combination of strokes sponge drops, the light then causing Light-Emitting Diode to be launched cannot be reflected by form of a stroke or a combination of strokes sponge, phototriode does not receives incident illumination, phototriode ends, external master controller i.e. receives form of a stroke or a combination of strokes sponge and drops the information that drops of form of a stroke or a combination of strokes sponge that detection device passes on, and external master controller can alert and stop the work of second stage cleaner to operator.
Although present disclosure has been made to be discussed in detail by above preferred embodiment, but it should be appreciated that the description above is not considered as limitation of the present invention.After those skilled in the art have read foregoing, multiple amendment and replacement for the present invention all will be apparent from.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (3)
1. a form of a stroke or a combination of strokes sponge drops detection device, chemical-mechanical grinding device is provided with second stage cleaner, this second stage cleaner comprises the platform (3 ') for placing wafer, and it is arranged on the mechanical arm (4) of platform (3 ') side, the end of mechanical arm (4) is provided with holder (2), and form of a stroke or a combination of strokes sponge (1) is arranged in this holder (2)；
It is characterized in that, this detection device comprises:
Fixed support (7), it is fixed on the end of described mechanical arm (4)；
Sensor (6), it is fixed on the end of described fixed support (7)；
Described sensor (6) is arranged near described form of a stroke or a combination of strokes sponge (1), and the distance between this form of a stroke or a combination of strokes sponge (1) and sensor (6) is in the investigative range of sensor (6)；
The circuit of output terminal of described sensor (6) connects external master controller.
2. form of a stroke or a combination of strokes sponge as claimed in claim 1 a kind of drops detection device, it is characterised in that described sensor (6) uses photoelectricity proximity transducer.
3. form of a stroke or a combination of strokes sponge as claimed in claim 2 a kind of drops detection device, it is characterized in that, described sensor (6) comprises the Light-Emitting Diode and phototriode being connected respectively with external main controller circuit, and respectively close at Light-Emitting Diode luminescence and the lens that arrange of phototriode optical receiving end；
Light-Emitting Diode is luminous, and light measured object reflection in sensor (6) investigative range, by lens entrance phototriode；When reflecting without measured object, when phototriode can't detect incident illumination, i.e. send a signal to external master controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210232393.XA CN103529484B (en) | 2012-07-06 | 2012-07-06 | A kind of form of a stroke or a combination of strokes sponge drops detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210232393.XA CN103529484B (en) | 2012-07-06 | 2012-07-06 | A kind of form of a stroke or a combination of strokes sponge drops detection device |
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| Publication Number | Publication Date |
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| CN103529484A CN103529484A (en) | 2014-01-22 |
| CN103529484B true CN103529484B (en) | 2016-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210232393.XA Active CN103529484B (en) | 2012-07-06 | 2012-07-06 | A kind of form of a stroke or a combination of strokes sponge drops detection device |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201960449U (en) * | 2010-12-30 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Chemical mechanical polishing device |
| CN202200170U (en) * | 2011-07-05 | 2012-04-25 | 中芯国际集成电路制造(上海)有限公司 | Grinding head and chemical mechanical grinding equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677195A (en) * | 1992-08-26 | 1994-03-18 | Ebara Corp | Semiconductor-wafer cleaning apparatus |
| JP3604444B2 (en) * | 1995-03-30 | 2004-12-22 | 東芝機械株式会社 | Wafer detector |
| US20020155273A1 (en) * | 2001-04-20 | 2002-10-24 | Drury Thomas J. | Polyvinyl acetal composition skinless roller brush |
| JP2005181157A (en) * | 2003-12-19 | 2005-07-07 | Inax Corp | Reflection-type photosensor |
-
2012
- 2012-07-06 CN CN201210232393.XA patent/CN103529484B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201960449U (en) * | 2010-12-30 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Chemical mechanical polishing device |
| CN202200170U (en) * | 2011-07-05 | 2012-04-25 | 中芯国际集成电路制造(上海)有限公司 | Grinding head and chemical mechanical grinding equipment |
Non-Patent Citations (1)
| Title |
|---|
| 半导体制造中清洗技术的新动向;许宝兴;《电子工业专用设备》;20050731(第126期);第1-6、10页 * |
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| CN103529484A (en) | 2014-01-22 |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140421 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20140421 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
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