CN103529484A - Detection device for fall-off of pen-shaped sponge - Google Patents
Detection device for fall-off of pen-shaped sponge Download PDFInfo
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- CN103529484A CN103529484A CN201210232393.XA CN201210232393A CN103529484A CN 103529484 A CN103529484 A CN 103529484A CN 201210232393 A CN201210232393 A CN 201210232393A CN 103529484 A CN103529484 A CN 103529484A
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- stroke
- combination
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Abstract
The invention discloses a detection device for fall-off of a pen-shaped sponge. A chemical mechanical polishing device is provided with a second-stage cleaner. The second-stage cleaner includes a platform used for displacing a wafer and a mechanical arm arranged at one side of the platform. The end part of the mechanical arm is provided with a fixator. The pen-shaped sponge is arranged in the fixator. The detection device includes a fixing support which is fixed at the end part of the mechanical arm and a sensor which is fixed at the end part of the fixing support. The sensor is arranged to be adjacent to the pen-shaped sponge. The distance between the pen-shaped sponge and the sensor is within a detection range of the sensor. An output-end circuit of the sensor is connected with an externally connected main controller. In the detection device for the fall-off of the pen-shaped sponge, a photoelectric proximity sensor is arranged at the side edge of the pen-shaped sponge and is capable of detecting the fall-off condition of the pen-shaped sponge and preventing an accident of damage and scrap of the wafer, resulted from fall-off of the pen-shaped sponge in a production process so that the second-stage cleaner and the wafer are protected effectively and the service life of the second-stage cleaner and the yield of the wafer are improved.
Description
Technical field
The present invention relates to the sniffer of the cleaning device in a kind of semicon industry, be specifically related to a kind of form of a stroke or a combination of strokes sponge sniffer that drops.
Background technology
EBARA F*REX200 instrument Shi You EBARA company a kind of chemical-mechanical grinding device of producing, for to tungsten planarization, wafer-process equipment.
As shown in Figure 1, this treatment facility includes its equipment body, 4 load ports that arrange along this main body top one side, be arranged on the other mechanical arm of load port, and be arranged on transferring buffered of mechanical arm one side, be arranged on the mechanical arm on transferring buffered side, be arranged on the other rotation carrier of mechanical arm, be arranged on the wafer turner on rotation carrier, be arranged on the other grinding head of rotation carrier, be arranged on and grind the tungsten grinding table of first side and the grinding table of oxide, be arranged on the first stage clearer of grinding table one side of tungsten grinding table and oxide, and the subordinate phase clearer that is arranged on first stage clearer side.First stage clearer is provided with sponge brush, and subordinate phase clearer is provided with form of a stroke or a combination of strokes sponge, and after sponge is cleaned, wafer High Rotation Speed dries.
The workflow of this wafer-process equipment is: wafer enters this equipment from load port, by mechanical arm, be sent to transferring buffered, again logical mechanical arm by wafer transfer to wafer turner, wafer inversion 180 degree, via rotation carrier, then by grinding head by wafer transfer the grinding table to tungsten grinding table and oxide, wafer is carried out after grinding-flatening finishes dealing with, be transferred to first stage clearer, by sponge brush, crystal column surface is cleaned, finally be transferred to subordinate phase clearer, adopting form of a stroke or a combination of strokes sponge in rotary manner wafer to be cleaned.
As shown in Figure 2, subordinate phase clearer comprises one for placing the platform 3 ' of wafer, and the mechanical arm 4 ' that is arranged on platform one side, in the end of mechanical arm 4 ', be provided with one for the fixing fixator 2 ' of form of a stroke or a combination of strokes sponge 1 ', form of a stroke or a combination of strokes sponge 1 ' is fixed on the end of mechanical arm 4 ' by this fixator 2 '.
As shown in Figure 3, when subordinate phase clearer carries out cleaning to wafer 5 ', this platform 3 ' periphery is provided with fixed claw, and by firm being fixed on platform 3 ' of wafer 5 ', this platform drives wafer 5 ' rotation.Meanwhile, form of a stroke or a combination of strokes sponge 1 ' is also by its fixator 2 ' driven rotary, and drives decline by mechanical arm, and by being pressed in, wafer 5 ' surface is upper, and the friction by form of a stroke or a combination of strokes sponge 1 ' with crystal column surface realizes clean to crystal column surface.
The invention of form of a stroke or a combination of strokes sponge Shi You EBARA company, at present, the sleeve that in prior art, form of a stroke or a combination of strokes sponge is only made by PVC material is fastened under fixator.The shortcoming of this design is, this kind of fixed form is firm not, can cause the situation that in use form of a stroke or a combination of strokes sponge comes off from fixator to occur, in some years in the past, the problem that form of a stroke or a combination of strokes sponge drops has for several times occurred and occurred, it has caused following impact:
1, wafer is being carried out in cleaning course, if form of a stroke or a combination of strokes sponge comes off, do not having sponge to clean at crystal column surface, the residual pollutant of crystal column surface cannot all be removed, and for some specific product yields, has considerable influence, causes wafer loss;
2,, due to warning device not being set on wafer-process equipment, so on dutyly must check whether form of a stroke or a combination of strokes sponge has and come off every day on time, it has caused more artificial and time of necessary cost every day to check the form of a stroke or a combination of strokes sponge on each equipment.
Summary of the invention
The invention provides a kind of form of a stroke or a combination of strokes sponge sniffer that drops, adopt optical detection, can survey in time the situation that drops of form of a stroke or a combination of strokes sponge.
For achieving the above object, the invention provides a kind of form of a stroke or a combination of strokes sponge sniffer that drops, in chemical-mechanical grinding device, be provided with subordinate phase clearer, this subordinate phase clearer comprises for placing the platform of wafer, and the mechanical arm that is arranged on platform one side, the end of mechanical arm is provided with fixator, and form of a stroke or a combination of strokes sponge is arranged in this fixator;
Be characterized in, this sniffer comprises:
Fixed support, it is fixed on the end of mechanical arm;
Sensor, it is fixed on support bracket fastened end;
Above-mentioned sensor arranges near form of a stroke or a combination of strokes sponge, and the distance between this form of a stroke or a combination of strokes sponge and sensor is in the investigative range of sensor;
The circuit of output terminal of above-mentioned sensor connects external master controller.
Above-mentioned sensor adopts photoelectricity proximity transducer.
Above-mentioned sensor comprises respectively light emitting diode and the phototriode being connected with external main controller circuit, and the lens that arrange near the luminous place of light emitting diode and phototriode optical receiving end respectively;
Light emitting diode is luminous, and light is through the measured object reflection in sensor investigative range, and scioptics incident phototriode, when without measured object reflection, when phototriode can't detect incident light, sends a signal to external master controller.
The form of a stroke or a combination of strokes sponge sniffer that drops is arranged at the side of the form of a stroke or a combination of strokes sponge of subordinate phase clearer, makes form of a stroke or a combination of strokes sponge in form of a stroke or a combination of strokes sponge drops the investigative range of sniffer;
In normal operation, the light emitting diode of its sensor keeps normal bright state, the light transmission lens of light emitting diode transmitting, are emitted on the form of a stroke or a combination of strokes sponge in investigative range, and light is by the reflection of form of a stroke or a combination of strokes sponge, get back to again device setting, just in time can see through lens incident phototriode, phototriode receives after incident light, phototriode conducting, send a signal to external master controller, external master controller receives the information of form of a stroke or a combination of strokes sponge normal operation;
When form of a stroke or a combination of strokes sponge drops, cause the light of light emitting diode transmitting to reflect by form of a stroke or a combination of strokes sponge, phototriode does not receive incident light, phototriode cut-off, external master controller receives the form of a stroke or a combination of strokes sponge information that form of a stroke or a combination of strokes sponge that sniffer passes on drops that drops, and external master controller can carry out alarm and stop the work of subordinate phase clearer operating personnel.
A kind of form of a stroke or a combination of strokes sponge of the present invention sniffer that drops is compared with the maintenance technology of form of a stroke or a combination of strokes sponge in prior art, its advantage is, the present invention is arranged at easy photoelectricity proximity transducer on the side of form of a stroke or a combination of strokes sponge, when the dropping of form of a stroke or a combination of strokes sponge, the situation that drops of form of a stroke or a combination of strokes sponge can be detected immediately, be convenient in time form of a stroke or a combination of strokes sponge is placed under repair and safeguarded, avoiding occurring in process of production form of a stroke or a combination of strokes sponge comes off and causes wafer to damage the accident of scrapping, subordinate phase clearer and wafer have effectively been protected, improve the serviceable life of subordinate phase clearer and the yield of wafer.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of chemical-mechanical grinding device in prior art;
Fig. 2 is the structural representation of the subordinate phase clearer of chemical-mechanical grinding device in prior art;
Fig. 3 is the fundamental diagram of the subordinate phase clearer of chemical-mechanical grinding device in prior art;
Fig. 4 is the drop structural representation of sniffer of a kind of form of a stroke or a combination of strokes sponge of the present invention;
Fig. 5 is the drop structural representation of sensor of sniffer of a kind of form of a stroke or a combination of strokes sponge of the present invention.
Embodiment
Below in conjunction with accompanying drawing, further illustrate specific embodiments of the invention.
As shown in Figure 1, the invention discloses a kind of form of a stroke or a combination of strokes sponge sniffer that drops, the form of a stroke or a combination of strokes sponge sniffer that drops comprises fixed support 7 and sensor 6.This sniffer is arranged on the mechanical arm 4 of subordinate phase clearer, in the end of mechanical arm 4, is provided with fixator 2, and form of a stroke or a combination of strokes sponge 1 is arranged in this fixator 2.
Fixed support 7 vertically arranges, and the two ends of this rack body are respectively top and end, and top is arranged at the top of end, and top is for connecting the end of mechanical arm 4, and end is for connecting sensor 6.On top and end, be all provided with horizontal buckling, be convenient to fixed support 7 respectively with being connected of mechanical arm 4, sensor 6.
Fixed support 7 is fixed on the end side of the mechanical arm 4 of subordinate phase clearer by its top.
The end of fixed support 7 is the sidewall setting of the form of a stroke or a combination of strokes sponge 1 of close subordinate phase clearer.
6 ends that are fixed on the end of fixed support 7 of sensor, and sensor 6 arranges near form of a stroke or a combination of strokes sponge 1, and the distance between this form of a stroke or a combination of strokes sponge 1 and sensor 6 is in the investigative range of sensor 6.
As shown in Figure 5, in the present embodiment, the photoelectricity proximity transducer of the TL-N5ME1 of the model of sensor 6 employing OMNON companies.It comprises respectively light emitting diode and the phototriode being connected with external main controller circuit, and the lens that arrange near the luminous place of light emitting diode and phototriode optical receiving end respectively.Common light emitting diode Chang Liang, light emitting diode is luminous, these light scioptics are mapped on measured object 8 surfaces in sensor 6 investigative ranges, through these measured object 8 reflections, light scioptics reenter penetrates phototriode, and phototriode receives incident light, phototriode conducting, send a signal to external master controller, illustrate in sensor 6 investigative ranges and have measured object 8.In sensor 6 investigative ranges during without measured object 8, light cannot reflex to phototriode, when phototriode can't detect incident light, and phototriode cut-off, send without the information of measured object 8 to external master controller, illustrate that sensor 6 investigative ranges are interior without measured object 8.
The drop principle of work of sniffer of a kind of form of a stroke or a combination of strokes sponge of the present invention is as follows:
The form of a stroke or a combination of strokes sponge sniffer that drops is arranged at the side of the form of a stroke or a combination of strokes sponge of subordinate phase clearer, makes form of a stroke or a combination of strokes sponge in form of a stroke or a combination of strokes sponge drops the investigative range of sniffer.In normal operation, the light emitting diode of its sensor 6 keeps normal bright state, the light transmission lens of light emitting diode transmitting, are emitted on the form of a stroke or a combination of strokes sponge in investigative range, and light is by the reflection of form of a stroke or a combination of strokes sponge, get back to again device setting, just in time can see through lens incident phototriode, phototriode receives after incident light, phototriode conducting, send a signal to external master controller, external master controller receives the information of form of a stroke or a combination of strokes sponge normal operation.
When form of a stroke or a combination of strokes sponge drops, cause the light of light emitting diode transmitting to reflect by form of a stroke or a combination of strokes sponge, phototriode does not receive incident light, phototriode cut-off, external master controller receives the form of a stroke or a combination of strokes sponge information that form of a stroke or a combination of strokes sponge that sniffer passes on drops that drops, and external master controller can carry out alarm and stop the work of subordinate phase clearer operating personnel.
Although content of the present invention has been done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.Those skilled in the art, read after foregoing, for multiple modification of the present invention with to substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (3)
1. the form of a stroke or a combination of strokes sponge sniffer that drops, in chemical-mechanical grinding device, be provided with subordinate phase clearer, this subordinate phase clearer comprises for placing the platform (3 ') of wafer, and the mechanical arm (4) that is arranged on platform (3 ') side, the end of mechanical arm (4) is provided with fixator (2), and form of a stroke or a combination of strokes sponge (1) is arranged in this fixator (2);
It is characterized in that, this sniffer comprises:
Fixed support (7), it is fixed on the end of described mechanical arm (4);
Sensor (6), it is fixed on the end of described fixed support (7);
Described sensor (6) arranges near described form of a stroke or a combination of strokes sponge (1), and the distance between this form of a stroke or a combination of strokes sponge (1) and sensor (6) is in the investigative range of sensor (6);
The circuit of output terminal of described sensor (6) connects external master controller.
2. a kind of form of a stroke or a combination of strokes sponge as claimed in claim 1 sniffer that drops, is characterized in that, described sensor (6) adopts photoelectricity proximity transducer.
3. a kind of form of a stroke or a combination of strokes sponge as claimed in claim 2 sniffer that drops, it is characterized in that, described sensor (6) comprises respectively light emitting diode and the phototriode being connected with external main controller circuit, and the lens that arrange near the luminous place of light emitting diode and phototriode optical receiving end respectively;
Light emitting diode is luminous, and light is through the measured object reflection in sensor (6) investigative range, scioptics incident phototriode; When without measured object reflection, when phototriode can't detect incident light, send a signal to external master controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210232393.XA CN103529484B (en) | 2012-07-06 | 2012-07-06 | A kind of form of a stroke or a combination of strokes sponge drops detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210232393.XA CN103529484B (en) | 2012-07-06 | 2012-07-06 | A kind of form of a stroke or a combination of strokes sponge drops detection device |
Publications (2)
| Publication Number | Publication Date |
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| CN103529484A true CN103529484A (en) | 2014-01-22 |
| CN103529484B CN103529484B (en) | 2016-09-21 |
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| CN201210232393.XA Active CN103529484B (en) | 2012-07-06 | 2012-07-06 | A kind of form of a stroke or a combination of strokes sponge drops detection device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677195A (en) * | 1992-08-26 | 1994-03-18 | Ebara Corp | Semiconductor-wafer cleaning apparatus |
| JPH08274145A (en) * | 1995-03-30 | 1996-10-18 | Toshiba Mach Co Ltd | Wafer detection device |
| US20040151890A1 (en) * | 2001-04-20 | 2004-08-05 | Drury Thomas J. | Polyvinyl acetal composition skinless roller brush |
| JP2005181157A (en) * | 2003-12-19 | 2005-07-07 | Inax Corp | Reflection-type photosensor |
| CN201960449U (en) * | 2010-12-30 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Chemical mechanical polishing device |
| CN202200170U (en) * | 2011-07-05 | 2012-04-25 | 中芯国际集成电路制造(上海)有限公司 | Grinding head and chemical mechanical grinding equipment |
-
2012
- 2012-07-06 CN CN201210232393.XA patent/CN103529484B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677195A (en) * | 1992-08-26 | 1994-03-18 | Ebara Corp | Semiconductor-wafer cleaning apparatus |
| JPH08274145A (en) * | 1995-03-30 | 1996-10-18 | Toshiba Mach Co Ltd | Wafer detection device |
| US20040151890A1 (en) * | 2001-04-20 | 2004-08-05 | Drury Thomas J. | Polyvinyl acetal composition skinless roller brush |
| JP2005181157A (en) * | 2003-12-19 | 2005-07-07 | Inax Corp | Reflection-type photosensor |
| CN201960449U (en) * | 2010-12-30 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Chemical mechanical polishing device |
| CN202200170U (en) * | 2011-07-05 | 2012-04-25 | 中芯国际集成电路制造(上海)有限公司 | Grinding head and chemical mechanical grinding equipment |
Non-Patent Citations (1)
| Title |
|---|
| 许宝兴: "半导体制造中清洗技术的新动向", 《电子工业专用设备》 * |
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| CN103529484B (en) | 2016-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140421 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20140421 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |