CN103198991B - Based on field emission cathode structure and the manufacture method of sea urchin type nickel particles template - Google Patents
Based on field emission cathode structure and the manufacture method of sea urchin type nickel particles template Download PDFInfo
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- CN103198991B CN103198991B CN201310107581.4A CN201310107581A CN103198991B CN 103198991 B CN103198991 B CN 103198991B CN 201310107581 A CN201310107581 A CN 201310107581A CN 103198991 B CN103198991 B CN 103198991B
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Abstract
The present invention relates to a kind of field emission cathode structure based on sea urchin type nickel particles template and manufacture method, this structure comprises a metallic bottom electrode layer, be arranged on the sea urchin type nickel particles template on described bottom electrode layer, cover nano material or the film on described nickel particles surface.Utilize orientation and the distribution density at template to regulate field-transmitting cathode tip, improve field emission performance with nano material coated in template, solve the uncontrollable difficult problem of feds performance.This cathode construction operating voltage is low, and electronic transmitting efficiency is high, and launch reliable and stable, preparation technology is simple.
Description
Technical field
The invention belongs to vacuum electronics technology field, relate to flat display field, particularly a kind of field emission cathode structure based on sea urchin type nickel particles template and manufacture method.
Background technology
Field Emission Display (Field Emission Display, FED) is the cathode emission electronics utilizing back substrate, and the bombardment fluorescence coating of prebasal plate and a kind of new device of luminescence is the product that flat panel display combines with vacuum microelectronics.FED is considered to the flat-panel monitor most possibly competed mutually with plasma scope (PDP) and liquid crystal display (LCD), have both the advantage of cathode-ray tube display (CRT) and LCD, there is fast response time, wide viewing angle, brightness be high, resolution is high, the advantage such as color reprodubility is good, high-low temperature resistant, anti-vibrating and impact, electromagnetic radiation is atomic, production cost is low, have wide market and good application prospect, be expected to become the desirable flat-panel screens of a new generation.
According to the materials and structures of field-transmitting cathode, FED can be divided into several large class.Metal material field emission array adopts micro-point of enough points, requires very high, because emission is low, cost is high, so seldom use this technology in large scale display to apparatus and process.It is higher to there is emission threshold threshold voltage in field emission of silicon material, and conduction, heat conductivility are poor, and emission current is unstable, the problems such as vulnerable to pollution.Carbon nano-tube (CNT), because of the electric conductivity of its high intensity, toughness and excellence, is subject to Flied emission field extensive concern.The orientation of CNT emission tip and the direct Effect Field emission uniformity of transmitting site distribution density and stability.But due to the restriction of current preparation and fabrication technology, no matter be in situ synthesis or later stage technology for placing, be all difficult to effectively realize vertical orientated, homodisperse carbon nanometer structure.Therefore, anode can not be pointed in most of tip, and the distribution density of emission tip is also wayward, causes its emission uniformity, less stable.
In sum, be necessary to research and develop a kind of low cost electron emission source that can overcome above-mentioned shortcoming.The present invention introduces the theory of template Wehnelt cathode structure, proposes the new approaches solving the uncontrollable problem of field emission performance.
Summary of the invention
The object of the invention is to provide a kind of field emission cathode structure based on sea urchin type nickel particles template, utilizes orientation and the distribution density of sea urchin type nickel particles template to regulate field-transmitting cathode, by clad nano material in template to improve field emission performance.It is simple that this cathode construction has preparation technology, and electron emission is even, stable, reliable, easily realizes the features such as large area field application.
For achieving the above object, technical scheme of the present invention is:
Based on a field emission cathode structure for sea urchin type nickel particles template, it is characterized in that: this field emission cathode structure comprises:
Substrate;
Bottom electrode layer, is arranged on described substrate, and
Sea urchin type nickel particles, to be arranged on described metallic bottom electrode layer and as template; Described template surface is coated with nano material.
In an embodiment of the present invention, described sea urchin type nickel particles has ectonexine double-layer structure, and skin is nickel nanocone, and this nickel nanocone is distributed in endothecium structure surface radially.
In an embodiment of the present invention, described sea urchin type nickel particles is prepared by hydro thermal method, and the quantity of its surface nano tip and pattern control by changing chemical synthesis parameter.
In an embodiment of the present invention, described nickel particles is of a size of 0.3-15 μm, and the cone dot spacing of described nanocone is 0.05-2 μm.
In an embodiment of the present invention, described nano material is nickel oxide nano film prepared by in-situ thermal oxidation.
In an embodiment of the present invention, described nano material is the thin graphene at nickel surface low-temperature epitaxy.
In an embodiment of the present invention, described nano material is by low work function sull or nanostructure.
In an embodiment of the present invention, described nano material is metal nanoparticle.
Another object of the present invention is to provide a kind of manufacture method of the field emission cathode structure based on sea urchin type nickel particles template, and the method comprises the following steps:
(1) on substrate, bottom electrode layer is prepared;
(2) hydro thermal method is adopted to prepare nickel particles; And adopt printing or spraying coating process, micro-for nickel cloth is placed on described bottom electrode layer as template;
(3) sample prepared by step (2) is heated in atmospheric atmosphere, heating rate 1-10 DEG C/s, keep 1-30 min to 250-350 DEG C, be cooled to room temperature rapidly, form nickel oxide thin layer as electronic emission material in described template surface oxidation.
Another object of the present invention is to provide a kind of manufacture method of the field emission cathode structure based on sea urchin type nickel particles template, the method is characterized in that and comprises the following steps:
(1) on substrate, bottom electrode layer is prepared;
(2) hydro thermal method is adopted to prepare nickel particles; And adopt printing or spraying coating process, nickel particles cloth is placed on described bottom electrode layer as template;
(3) form electronic emission material at template surface by evaporation coating, sputter coating, chemical vapour deposition (CVD) or electrochemical deposition method, this electronic emission material is nano material.
Remarkable advantage of the present invention is:
(1) sea urchin type nickel particles surface has the nanocone of radial distribution, and as the template supporting emissive material, no matter in which way cloth is placed on bottom electrode layer, has more pointed cone and points to anode, ensure that field emission cathode structure has good orientation.
(2) the nanocone quantity on nickel particles surface and geometry controllable, therefore can regulate and control launch point distribution density.
(3) electronic emission material that template surface covers makes threshold electric field little, and electron emission is more stable, even.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention 1.
Fig. 2 is the structural representation of the embodiment of the present invention 2.
Embodiment
A kind of field emission cathode structure based on sea urchin type nickel particles template of the present invention is illustrated below in conjunction with drawings and Examples.The invention provides preferred embodiment, but should not be considered to be only limitted to embodiment set forth herein.In the drawings, in order to the clear thickness being exaggerated layer and region, but should not be considered to as schematic diagram the proportionate relationship strictly reflecting physical dimension.Below in conjunction with attached Fig. 1 and 2, a kind of field emission cathode structure based on sea urchin type nickel particles template of the preferred embodiments of the present invention and manufacture method thereof are set forth.
Embodiment 1
A kind of field emission cathode structure based on sea urchin type nickel particles template that first embodiment of the invention provides comprises: substrate 11; Bottom electrode layer 12, is arranged on described substrate; And sea urchin type nickel particles 13, to be arranged on described metallic bottom electrode layer and as template; Described template surface is coated with nano material 24.In an embodiment of the present invention, described sea urchin type nickel particles has ectonexine double-layer structure, outer for nickel nanocone 14 is in order to regulate and control Flied emission point orientation and distribution, this nickel nanocone is distributed in described template surface radially, and part of nickel nanocone points to anode.Described nickel particles is of a size of 0.3-15 μm, and the cone dot spacing of described nickel nanocone is 0.05-2 μm.Described nano material can be nickel oxide film prepared by in-situ thermal oxidation, also can be the carbon nanomaterial of thin graphene at nickel surface low-temperature epitaxy or other structures, can also be low work function sull or nanostructure, also can be metal nanoparticle.The preparation method of this structure comprises the following steps:
1) be that bottom electrode layer 12 prepared by substrate 11 in conventional clear glass.
Bottom electrode layer 12 material therefor can select Cu, W, Co, Ni, Ta, TaN, Ti, Zn, Al, the clad metal electrode of Cr, Ag metal electrode or two kinds and above combination thereof also can be tin indium oxide (ITO), Al-Doped ZnO (AZO) transparent conductive film.The methods such as physical vapour deposition (PVD), chemical vapour deposition (CVD) or electrochemical deposition can be passed through formed.The parameter such as width, thickness of electrode is not restrictive, and those skilled in the art can make a choice as the case may be.The composition of electrode layer 12 is formed and can be realized by lithographic process steps.The present embodiment preferably adopts magnetically controlled sputter method to make Ag conductive film and subsequent optical carving technology forms bottom electrode layer 12.
2) on bottom electrode layer 12, nickel particles template 13 is prepared.
Hydro thermal method is adopted to prepare nickel particles.Be specially: be the NiSO of 1.4M by 20ml concentration
4the aqueous solution and 5ml concentration are that the NaOH aqueous solution of 6.8M mixes in beaker, then are added into the Na of 5.936g
2cO
3, beaker is placed in water-bath, utilizes blender to stir and form homogeneous mixture.After mixture temperature reaches 95 DEG C, pour 20ml hydrazine hydrate (purity more than 98%) into, after 5-10 minute, black precipitate in filtering solution, obtains sea urchin type nickel particles.Adopt printing or spraying coating process, nickel particles cloth is placed on bottom electrode layer 12.
3) electronic emission material is prepared over the pattern 13.
Above-mentioned prepared sample is heated in atmospheric atmosphere, heating rate 1-10 DEG C/s, keep 1-30 min to 250-350 DEG C, be cooled to room temperature rapidly, form nickel oxide thin layer as electronic emission material in the oxidation of nickel particles template surface.Preferably, above-mentioned programming rate can be 5 DEG C/s, keeps 2 min to 350 DEG C.
So far, a kind of preparation of the field emission cathode structure based on sea urchin type nickel particles template is formed.Above preparation method's technique is simple, process is easy to compatible with existing flat-panel display device manufacturing process, can realize large area, large-scale industrial production.
Embodiment 2
The preparation method of a kind of field emission cathode structure based on sea urchin type nickel particles template that second embodiment of the invention provides comprises the following steps:
(1) be that bottom electrode layer 22 prepared by substrate 21 at polyvinylchloride, this process is identical with the first embodiment step 1).
(2) on bottom electrode layer 22, nickel particles template 23 is prepared, this process and the first embodiment step 2) identical.
(3) in template 23, electronic emission material 24 is prepared.
Electronic emission material 24 material therefor can select zinc oxide, tin oxide, magnesium oxide, cupric oxide, titanium oxide, manganese oxide, iron oxide, cobalt oxide, nickel oxide, silver oxide, tungsten oxide, lead oxide, bismuth oxide, the composite material that a kind of nano material in aluminium nitride or multiple nano material are formed also can be Titanium, aluminium, gold, silver, copper, plumbous, tin, molybdenum, chromium, a kind of nano material in iron or the composite construction of multiple nano material.The methods such as evaporation coating, sputter coating, chemical vapour deposition (CVD) or electrochemical deposition can be passed through formed.
Above example mainly describes the preparation method of a kind of field emission cathode structure based on sea urchin type nickel particles template of the present invention.Although be only described some of them embodiments of the present invention, those of ordinary skill in the art should understand, and the present invention can implement with other forms many not departing from its purport and scope.Therefore, the example shown and way of example are regarded as illustrative and not restrictive, when do not depart from as appended each claim define the present invention spirit and scope, the present invention may contain various amendments and replacement.The foregoing is only preferred embodiment of the present invention, all equalizations done according to the present patent application the scope of the claims change and modify, and all should belong to covering scope of the present invention.
Claims (7)
1. based on a field emission cathode structure for sea urchin type nickel particles template, it is characterized in that: this field emission cathode structure comprises:
Substrate;
Bottom electrode layer, is arranged on described substrate; And
Sea urchin type nickel particles, to be arranged on described bottom electrode layer and as template; Described template surface is coated with nano material;
Described sea urchin type nickel particles has inside and outside double-layer structure, and skin is nickel nanocone, and this nickel nanocone is distributed in endothecium structure surface radially;
Described nickel particles is of a size of 0.3-15 μm, and the cone dot spacing of described nickel nanocone is 0.05-2 μm;
Described sea urchin type nickel particles is prepared by hydro thermal method, and the quantity of its surface nano tip and pattern control by changing chemical synthesis parameter.
2. the field emission cathode structure based on sea urchin type nickel particles template according to claim 1, is characterized in that: described nano material is nickel oxide nano film prepared by in-situ thermal oxidation.
3. the field emission cathode structure based on sea urchin type nickel particles template according to claim 1, is characterized in that: described nano material is the thin graphene at nickel surface low-temperature epitaxy.
4. the field emission cathode structure based on sea urchin type nickel particles template according to claim 1, is characterized in that: described nano material is low work function sull or nanostructure.
5. the field emission cathode structure based on sea urchin type nickel particles template according to claim 1, is characterized in that: described nano material is metal nanoparticle.
6., based on a manufacture method for the field emission cathode structure of sea urchin type nickel particles template, it is characterized in that comprising the following steps:
(1) on substrate, bottom electrode layer is prepared;
(2) adopt hydro thermal method to prepare nickel particles, the quantity of its surface nano tip and pattern control by changing chemical synthesis parameter; And adopt printing or spraying coating process, nickel particles cloth is placed on described bottom electrode layer as template;
(3) sample prepared by step (2) is heated in oxygen or atmospheric atmosphere, heating rate 1-10 DEG C/s, keep 1-30 min to 250-350 DEG C, be cooled to room temperature rapidly, form nickel oxide thin layer as electronic emission material in described template surface oxidation.
7., based on a manufacture method for the field emission cathode structure of sea urchin type nickel particles template, it is characterized in that comprising the following steps:
(1) on substrate, bottom electrode layer is prepared;
(2) adopt hydro thermal method to prepare nickel particles, the quantity of its surface nano tip and pattern control by changing chemical synthesis parameter; And adopt printing or spraying coating process, nickel particles cloth is placed on described bottom electrode layer as template;
(3) form electronic emission material at template surface by evaporation coating, sputter coating, chemical vapour deposition (CVD) or electrochemical deposition method, this electronic emission material is nano material.
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| CN104835708B (en) * | 2015-05-12 | 2017-01-25 | 江苏师范大学 | Preparation method of graphene oxide field emission flat plate display instrument |
| CN109585238B (en) * | 2018-12-03 | 2020-06-09 | 深圳先进技术研究院 | Field emission electrode and method for manufacturing the same |
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| CN101412541A (en) * | 2007-10-19 | 2009-04-22 | 中国科学院大连化学物理研究所 | Method for synthesizing rod-like and echinoid molybdena-based nano-material |
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| JP2001158681A (en) * | 1999-12-01 | 2001-06-12 | Kazunori Koto | Powder of sea urchin shell and method for producing the same |
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| CN101412541A (en) * | 2007-10-19 | 2009-04-22 | 中国科学院大连化学物理研究所 | Method for synthesizing rod-like and echinoid molybdena-based nano-material |
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| Title |
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| 镍基纳米针阵列的场发射性能研究;李红;《中国优秀硕士学位论文全文数据库-工程科技Ⅰ辑》;20080615;B020-37 * |
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