CN102942183A - 氯硅烷残液处理工艺 - Google Patents
氯硅烷残液处理工艺 Download PDFInfo
- Publication number
- CN102942183A CN102942183A CN2012105312710A CN201210531271A CN102942183A CN 102942183 A CN102942183 A CN 102942183A CN 2012105312710 A CN2012105312710 A CN 2012105312710A CN 201210531271 A CN201210531271 A CN 201210531271A CN 102942183 A CN102942183 A CN 102942183A
- Authority
- CN
- China
- Prior art keywords
- chlorosilane
- raffinate
- evaporation
- evaporator
- sent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 71
- 238000005516 engineering process Methods 0.000 title abstract description 3
- 238000001704 evaporation Methods 0.000 claims abstract description 18
- 230000008020 evaporation Effects 0.000 claims abstract description 17
- 230000005494 condensation Effects 0.000 claims abstract description 16
- 238000009833 condensation Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 21
- 239000003795 chemical substances by application Substances 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 20
- 238000009413 insulation Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 9
- 238000010791 quenching Methods 0.000 claims description 7
- 239000003507 refrigerant Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000011084 recovery Methods 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract 1
- 238000009827 uniform distribution Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 229920005591 polysilicon Polymers 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000006200 vaporizer Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
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Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210531271.0A CN102942183B (zh) | 2012-12-11 | 2012-12-11 | 氯硅烷残液处理工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210531271.0A CN102942183B (zh) | 2012-12-11 | 2012-12-11 | 氯硅烷残液处理工艺 |
Publications (2)
Publication Number | Publication Date |
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CN102942183A true CN102942183A (zh) | 2013-02-27 |
CN102942183B CN102942183B (zh) | 2014-04-02 |
Family
ID=47725206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201210531271.0A Active CN102942183B (zh) | 2012-12-11 | 2012-12-11 | 氯硅烷残液处理工艺 |
Country Status (1)
Country | Link |
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CN (1) | CN102942183B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106927470A (zh) * | 2017-04-12 | 2017-07-07 | 中国恩菲工程技术有限公司 | 氯硅烷废液的回收方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7204963B2 (en) * | 1999-12-28 | 2007-04-17 | Degussa Ag | Process for the separation of chlorosilanes from gas streams |
CN102372271A (zh) * | 2011-08-17 | 2012-03-14 | 乐山乐电天威硅业科技有限责任公司 | 改良西门子法生产多晶硅中废弃氯硅烷的回收方法 |
CN102602936A (zh) * | 2012-03-14 | 2012-07-25 | 天津大学 | 四氯化硅残液的处理方法及其装置 |
-
2012
- 2012-12-11 CN CN201210531271.0A patent/CN102942183B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7204963B2 (en) * | 1999-12-28 | 2007-04-17 | Degussa Ag | Process for the separation of chlorosilanes from gas streams |
CN102372271A (zh) * | 2011-08-17 | 2012-03-14 | 乐山乐电天威硅业科技有限责任公司 | 改良西门子法生产多晶硅中废弃氯硅烷的回收方法 |
CN102602936A (zh) * | 2012-03-14 | 2012-07-25 | 天津大学 | 四氯化硅残液的处理方法及其装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106927470A (zh) * | 2017-04-12 | 2017-07-07 | 中国恩菲工程技术有限公司 | 氯硅烷废液的回收方法 |
Also Published As
Publication number | Publication date |
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CN102942183B (zh) | 2014-04-02 |
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Effective date of registration: 20220210 Address after: 611400 No. 445, Qingyun South Road, Puxing street, Xinjin District, Xinjin County, Chengdu, Sichuan Patentee after: Sichuan mintian Technology Development Co.,Ltd. Address before: 610016 Shuling company, 21 / F, block a, No. 8 Xiyu street, Qingyang District, Chengdu, Sichuan Patentee before: CHENGDU SHULING TECHNOLOGY DEVELOPMENT Co.,Ltd. |
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Effective date of registration: 20240318 Address after: 610000 Xincai 18th Road, new material industrial functional zone, Xinjin Industrial Park, Xinjin County, Chengdu City, Sichuan Province Patentee after: CHENGDU SHULING TECHNOLOGY DEVELOPMENT Co.,Ltd. Country or region after: China Address before: 611400 No. 445, Qingyun South Road, Puxing street, Xinjin District, Xinjin County, Chengdu, Sichuan Patentee before: Sichuan mintian Technology Development Co.,Ltd. Country or region before: China |