CN102724614A - A thermal sounding device and an electronic device - Google Patents

A thermal sounding device and an electronic device Download PDF

Info

Publication number
CN102724614A
CN102724614A CN2011100767005A CN201110076700A CN102724614A CN 102724614 A CN102724614 A CN 102724614A CN 2011100767005 A CN2011100767005 A CN 2011100767005A CN 201110076700 A CN201110076700 A CN 201110076700A CN 102724614 A CN102724614 A CN 102724614A
Authority
CN
China
Prior art keywords
thermo
acoustic device
electrode
sounding component
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2011100767005A
Other languages
Chinese (zh)
Other versions
CN102724614B (en
Inventor
姜开利
林晓阳
肖林
范守善
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Hongfujin Precision Industry Shenzhen Co Ltd
Original Assignee
Tsinghua University
Hongfujin Precision Industry Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University, Hongfujin Precision Industry Shenzhen Co Ltd filed Critical Tsinghua University
Priority to CN201110076700.5A priority Critical patent/CN102724614B/en
Priority to TW100112569A priority patent/TWI465120B/en
Priority to JP2011190486A priority patent/JP5134123B2/en
Priority to US13/335,041 priority patent/US8811632B2/en
Priority to US13/337,228 priority patent/US8958579B2/en
Priority to US13/337,231 priority patent/US8831252B2/en
Priority to US13/337,234 priority patent/US8634579B2/en
Priority to US13/337,232 priority patent/US8625822B2/en
Priority to US13/337,229 priority patent/US8811633B2/en
Priority to US13/337,230 priority patent/US8837753B2/en
Priority to US13/337,233 priority patent/US8767981B2/en
Publication of CN102724614A publication Critical patent/CN102724614A/en
Application granted granted Critical
Publication of CN102724614B publication Critical patent/CN102724614B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

A thermal sounding device comprises a substrate with a network structure, a thermal sounding element arranged on the surface of the substrate, and a heating device used for providing energy to the thermal sounding element to enable the thermal sounding element to produce heat, wherein the substrate comprises at least one lineage structure, the at least one lineage structure comprises a carbon nano tube lineage structure and an insulation layer positioned on the surface of the carbon nano tube lineage structure, the thermal sounding element comprises a composite film, and the composite film comprises at least one carbon nano tube layer and at least one graphene film with the carbon nano tube layer and the graphene film being stacked over each other. The invention further provides an electronic device using the thermal sounding device.

Description

Thermo-acoustic device and electronic installation
Technical field
The present invention relates to a kind of thermo-acoustic device, relate in particular to a kind of based on Graphene thermo-acoustic device and use the electronic installation of this thermo-acoustic device.
Background technology
Thermo-acoustic device generally is made up of signal input apparatus and sounding component, arrives this sounding component through the signal input apparatus input signal, and then sounds.Thermo-acoustic device is a kind of in the sound-producing device, and it is a kind of thermo-acoustic device based on thermoacoustic effect, sees also document " The Thermophone "; EDWARD C. WENTE, Vol.XIX, No.4; P333-345 and " On Some Thermal Effects of Electric Currents ", William Henry Preece, Proceedings of the Royal Society of London; Vol.30, p408-411 (1879-1881).It discloses a kind of thermo-acoustic device, and this thermo-acoustic device is realized sounding through in a conductor, feeding alternating current.This conductor has less thermal capacitance (Heat capacity), the thickness that approaches, and can be with the characteristics of the rapid conduction of its inner heat that produces to surrounding gas medium.When alternating current passes through conductor, with the variation of AC current intensity, the rapid heating and cooling of conductor, and heat exchange takes place rapidly with surrounding gas medium, and impel the surrounding gas medium molecular motion, gas medium density changes thereupon, and then sends sound wave.
In addition; H.D.Arnold and I.B.Crandall are at document " The thermophone as a precision source of sound "; Phys. Rev. 10, disclosed a kind of simple thermo-acoustic device among the p22-38 (1917), and it adopts a platinized platinum to make the thermic sounding component.Receive the restriction of material itself, adopt this platinized platinum to make the thermo-acoustic device of thermic sounding component, the highest 4 KHzs that only can reach of the audible frequency that it produced, and phonation efficiency is lower.
Summary of the invention
In view of this, necessary a kind of audible frequency height and the good thermo-acoustic device of sounding effect of providing.
A kind of thermo-acoustic device, it comprises: a substrate, this substrate are a network structure; One thermic sounding component is arranged at the surface of this substrate; One heating device is used for providing energy to make this thermic sounding component produce heat to this thermic sounding component; Wherein, Said substrate comprises at least one linear structure; Said at least one linear structure comprises a liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface; Said thermic sounding component comprises a composite membrane, and this composite membrane comprises at least one carbon nanotube layer and at least one graphene film of mutual range upon range of setting.
Compared with prior art; The thermo-acoustic device that the present technique scheme is provided has the following advantages: one of which; Because the thermic sounding component in the said thermo-acoustic device comprises the composite membrane be made up of carbon nanotube layer and graphene film; Need not other labyrinths such as magnet,, help reducing the cost of this thermo-acoustic device so the structure of this thermo-acoustic device is comparatively simple.Its two because the thinner thickness of composite membrane, thermal capacitance is lower, therefore, its audible frequency is higher and have a higher phonation efficiency.
Description of drawings
Fig. 1 is the schematic top plan view of the thermo-acoustic device that provides of first embodiment of the invention.
Fig. 2 is the generalized section of cutting open along II-II line among Fig. 1.
Fig. 3 is the stereoscan photograph of the CNT membrane that adopted of first embodiment of the invention thermo-acoustic device.
Fig. 4 is the stereoscan photograph of the CNT waddingization film that adopted of first embodiment of the invention thermo-acoustic device.
Fig. 5 is the stereoscan photograph of the CNT laminate that adopted of first embodiment of the invention thermo-acoustic device.
Fig. 6 is the stereoscan photograph of the composite membrane that adopted of first embodiment of the invention thermo-acoustic device.
Fig. 7 is the test curve figure of thermic sounding component transparency among Fig. 6 of the present invention.
Fig. 8 is the schematic top plan view of the thermo-acoustic device that provides of second embodiment of the invention.
Fig. 9 is the generalized section of cutting open along IX-IX line among Fig. 8.
Figure 10 is the schematic top plan view of the thermo-acoustic device that provides of third embodiment of the invention.
Figure 11 is the generalized section that the XI-XI line is cut open among a kind of situation lower edge Figure 10 among the 3rd embodiment.
Figure 12 is the generalized section that the XI-XI line is cut open among another kind of situation lower edge Figure 10 among the 3rd embodiment.
Figure 13 is the schematic top plan view of the thermo-acoustic device that provides of fourth embodiment of the invention.
Figure 14 is the generalized section of cutting open along XIV-XIV line among Figure 13.
Figure 15 is the stereoscan photograph of the non-liner structure of carbon nano tube that reverses that adopted of fourth embodiment of the invention thermo-acoustic device.
Figure 16 is the stereoscan photograph of the liner structure of carbon nano tube that reverses that adopted of fourth embodiment of the invention thermo-acoustic device.
Figure 17 is that the employing surface that fifth embodiment of the invention provides scribbles the side-looking generalized section of the carbon nanotube layer of insulating barrier as the thermo-acoustic device of substrate.
Figure 18 is the schematic top plan view of the thermo-acoustic device that provides of sixth embodiment of the invention.
Figure 19 is the generalized section of cutting open along XIX-XIX line among Figure 18.
Figure 20 is the schematic top plan view of the thermo-acoustic device that provides of seventh embodiment of the invention.
Figure 21 is the generalized section of cutting open along XXI-XXI line among Figure 20.
Figure 22 is the side-looking generalized section of the thermo-acoustic device that provides of eighth embodiment of the invention.
Figure 23 is the side-looking generalized section of the thermo-acoustic device that provides of nineth embodiment of the invention.
The schematic side view of the thermo-acoustic device that Figure 24 provides for tenth embodiment of the invention.
The main element symbol description
Thermo-acoustic device 10；20；30；40；50；60；70；80；90；100
The thermic sounding component 102
Heating device 104；1004
First electrode 104a
Second electrode 104b
Substrate
208；308；408；508；608；908
Through hole 208a
Blind groove 308a
The surface 308b
First linear structure 408a
Second linear structure 408b
Mesh 408c
The gap 601
First contact conductor 610
Second contact conductor 612
Spacer element 714
The first thermic sounding component 802a
The second thermic sounding component 802b
First heating device 804
Second heating device 806
First surface 808a
Second surface 808b
Electromagnetic wave signal 1020
Following embodiment will combine above-mentioned accompanying drawing to further specify the present invention.
Embodiment
Below will be described with reference to the accompanying drawings the thermo-acoustic device that the embodiment of the invention provides.Below use identical label to represent identical component among each embodiment.Related sketch map is in order present embodiment better to be explained, embodiment itself not to be had restriction in the embodiment of the invention.
See also Fig. 1 and Fig. 2, first embodiment of the invention provides a kind of thermo-acoustic device 10, and this thermo-acoustic device 10 comprises a thermic sounding component 102 and a heating device 104.
Said heating device 104 is used for to thermic sounding component 102 energy being provided, and makes thermic sounding component 102 produce heat, sounds.In the present embodiment, heating device 104 provides electric energy to the thermic sounding component, makes thermic sounding component 102 under the effect of Joule heat, produce heat.This heating device 104 comprises one first electrode 104a and one second electrode 104b.The said first electrode 104a and the second electrode 104b are electrically connected with this thermic sounding component 102 respectively.In the present embodiment, the first electrode 104a and the second electrode 104b are arranged at the surface of thermic sounding component 102 respectively, and flush with two of this thermic sounding component 102 relative limits.
In the present embodiment, the first electrode 104a and the second electrode 104b in this heating device 104 are used for to thermic sounding component 102 signal of telecommunication being provided, and make this thermic sounding component 102 produce Joule heat, and temperature raises, thereby sounds.The said first electrode 104a and the second electrode 104b can be stratiform (thread or banded), bar-shaped, strip, bulk or other shape, and that the shape of its cross section can be is round, square, trapezoidal, triangle, polygon or other are irregularly shaped.This first electrode 104a and the second electrode 104b can be fixed in the surface of thermic sounding component 102 through the mode of binding agent bonding.And be that the heat that prevents thermic sounding component 102 is influenced sounding effect by the first electrode 104a and too much absorption of the second electrode 104b; The contact area of this first electrode 104a and the second electrode 104b and thermic sounding component 102 is less for well; Therefore, the shape of this first electrode 104a and the second electrode 104b is preferably thread or banded.This first electrode 104a and the second electrode 104b material may be selected to be metal, conducting resinl, electrocondution slurry, indium tin oxide (ITO), CNT or carbon fiber etc.
When the first electrode 104a and the second electrode 104b had certain intensity, the first electrode 104a and the second electrode 104b can play the effect of supporting this thermic sounding component 102.Be separately fixed on the framework like the two ends with the first electrode 104a and the second electrode 104b, thermic sounding component 102 is arranged on the first electrode 104a and the second electrode 104b, through the first electrode 104a and the unsettled setting of the second electrode 104b.
In the present embodiment, the first electrode 104a and the second electrode 104b utilize the silver slurry to be formed at the thread silver electrode on the thermic sounding component 102 through mode of printing such as silk screen printing.
This thermo-acoustic device 10 further comprises one first contact conductor (figure does not show) and one second contact conductor (figure does not show); This first contact conductor and second contact conductor respectively with thermo-acoustic device 10 in the first electrode 104a and the second electrode 104b be electrically connected; This first electrode 104a is electrically connected with this first contact conductor, this second electrode 104b is electrically connected with this second contact conductor.Said thermo-acoustic device 10 is electrically connected with external circuit through this first contact conductor 106a and second contact conductor.
Said thermic sounding component 102 comprises a composite membrane, and this composite membrane comprises at least one carbon nanotube layer and at least one graphene film.The mutual range upon range of setting of said at least one carbon nanotube layer and at least one graphene film, promptly this at least one graphene film is arranged at the surface of this at least one carbon nanotube layer.Graphene film and carbon nanotube layer can overlappedly be provided with, that is, when the area of graphene film hour, graphene film is attached to the surface of carbon nanotube layer fully; When the area of carbon nanotube layer hour, carbon nanotube layer can be attached to the surface of graphene film fully.When this composite membrane comprises multilayer carbon nanotube layer and multi-layer graphene film, this multilayer carbon nanotube layer and the alternately laminated setting of this multi-layer graphene film.The thickness of said composite membrane is 10 nanometers to 1 millimeter.The length and the width of said composite membrane are not limit, and can carry out cutting according to the requirement of thermo-acoustic device 10.
Said graphene film is the membrane structure with certain area of a two-dimensional structure.The thickness of this graphene film is 0.34 nanometer to 10 nanometer.This graphene film comprises at least one layer graphene.When graphene film comprised multi-layer graphene, this multi-layer graphene can overlap the formation graphene film each other, so that graphene film has bigger area; Perhaps this multi-layer graphene can mutual superposition form graphene film, so that the thickness of graphene film increases.Preferably, this graphene film is a single-layer graphene.Said Graphene is the two-dimension plane structure of the individual layer that is made up of through the sp2 bond hybridization a plurality of carbon atoms.The thickness of this Graphene can be the thickness of monolayer carbon atom.Graphene film has higher light transmission, and the light transmittance of the Graphene of individual layer can reach 97.7%.Because the thickness of graphene film is extremely thin, therefore have lower thermal capacitance, its thermal capacitance can be less than 2 * 10 -3Every square centimeter of Kelvin of joule, the thermal capacitance of single-layer graphene can be less than 5.57 * 10 -4Every square centimeter of Kelvin of joule.Said graphene film is a self supporting structure; Said self-supporting is that graphene film does not need large-area supported; And as long as the relative both sides power of providing support can be unsettled on the whole and keep self membranaceous state; When being about to this graphene film and placing (or being fixed in) at interval on two supporters being provided with of a fixed range, the graphene film between two supporters can the membranaceous state of unsettled maintenance self.Experiment shows that Graphene is not a hundred-percent bright and clean smooth two-dimensional films, but a large amount of microfluctuations is arranged on the surface of single-layer graphene, and single-layer graphene is kept self-supporting property and the stability of self just by this mode.
Said carbon nanotube layer comprises a plurality of equally distributed CNTs.This CNT can be in SWCN, double-walled carbon nano-tube, the multi-walled carbon nano-tubes one or more.Can combine closely through Van der Waals force between the CNT in the said carbon nanotube layer.Carbon nanotube layer is the structure of a self-supporting.CNT in this carbon nanotube layer is unordered or orderly arrangement.The lack of alignment here refers to that the orientation of CNT is irregular, and the orderly arrangement here refers to that the orientation of most at least CNTs has certain rule.Particularly, when carbon nanotube layer comprised the CNT of lack of alignment, CNT can twine each other or isotropism is arranged; When carbon nanotube layer comprised orderly carbon nanotubes arranged, CNT was arranged of preferred orient along a direction or a plurality of directions.The thickness of this carbon nanotube layer is not limit, and can be 0.5 nanometer ~ 1 centimetre, and preferably, the thickness of this carbon nanotube layer can be 100 microns ~ 0.5 millimeter.This carbon nanotube layer further comprises a plurality of micropores, and this micropore is formed by the gap between the CNT.The aperture of the micropore in the said carbon nanotube layer can be smaller or equal to 50 microns.The unit are thermal capacitance of said CNT stratiform structure is less than every square centimeter of Kelvin of 2 * 10-4 joule.Preferably, the unit are thermal capacitance of said CNT stratiform structure can be smaller or equal to every square centimeter of Kelvin of 1.7 * 10-6 joule.Said carbon nanotube layer can comprise one deck CNT membrane, CNT waddingization film or CNT laminate at least.
See also Fig. 3, this CNT membrane comprises a plurality of through the interconnective CNT of Van der Waals force.Said a plurality of CNT is basic to be arranged of preferred orient along same direction.The whole bearing of trend that said preferred orientation is meant most of CNTs in the CNT membrane basically in the same direction.And the whole bearing of trend of said most of CNTs is basically parallel to the surface of CNT membrane.Further, most CNTs are to join end to end through Van der Waals force in the said CNT membrane.Particularly, each CNT joins end to end through Van der Waals force with adjacent CNT on bearing of trend in the most of CNTs that extend basically in the same direction in the said CNT membrane.Certainly, have the CNT of minority random alignment in the said CNT membrane, these CNTs can not arranged the overall orientation of most of CNTs in the CNT membrane and constitute obviously influence.Said CNT membrane is the film of a self-supporting.Said self-supporting is that the CNT membrane does not need large-area supported; And as long as the relative both sides power of providing support can be unsettled on the whole and keep self membranaceous state; When being about to this CNT membrane and placing (or being fixed in) at interval on two supporters being provided with of a fixed range, the CNT membrane between two supporters can the membranaceous state of unsettled maintenance self.Said self-supporting is mainly through existing the continuous Van der Waals force that passes through to join end to end and extend carbon nanotubes arranged and realize in the CNT membrane.
The thickness of said CNT membrane can be 0.5 nanometer ~ 100 micron, and width and length are not limit, and sets according to the size of second matrix 108.Concrete structure of said CNT membrane and preparation method thereof saw also people such as Fan Shoushan in application on February 9th, 2007, in disclosed CN101239712A China's Mainland publication application in Augusts 13 in 2008.For saving space, only be incorporated in this, but all technology of said application disclose the part that also should be regarded as application technology of the present invention exposure.
When carbon nanotube layer comprised the multilayer carbon nanotube membrane, the intersecting angle that forms between the bearing of trend of the CNT in the adjacent two layers CNT membrane was not limit.
See also Fig. 4, the carbon nano-tube film of said CNT waddingization film for forming through a waddingization method.This CNT waddingization film comprises mutual winding and equally distributed CNT.Attract each other, twine through Van der Waals force between the said CNT, form network-like structure.Said CNT waddingization film isotropism.The length and the width of said CNT waddingization film are not limit.Because in CNT waddingization film, CNT twines each other, so this CNT waddingization film has good flexible, and is a self supporting structure, can bending fold becomes arbitrary shape and does not break.The area and the thickness of said CNT waddingization film are not all limit, and thickness is 1 micron ~ 1 millimeter.Said CNT waddingization film and preparation method thereof sees also people such as Fan Shoushan in application on April 13rd, 2007; In disclosed CN101284662A number Chinese publication application on October 15 " preparation method of carbon nano-tube film " in 2008; Applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd..For saving space, only be incorporated in this, but all technology of above-mentioned application disclose the part that also should be regarded as application technology of the present invention exposure.
See also Fig. 5, said CNT laminate comprises equally distributed CNT, and CNT is arranged of preferred orient along same direction or different directions.CNT also can be isotropic.CNT in said CNT laminate part each other overlaps, and attracts each other through Van der Waals force, combines closely.CNT in the said CNT laminate forms an angle β with the surface of the growth substrate that forms carbon nano pipe array, and wherein, β is more than or equal to 0 degree and smaller or equal to 15 degree (0≤β≤15 °).Different according to the mode that rolls, the CNT in this CNT laminate has different spread patterns.When rolling along same direction, CNT is arranged of preferred orient along a fixed-direction.Be appreciated that CNT can be arranged of preferred orient along a plurality of directions when when different directions rolls.This CNT laminate thickness is not limit, and being preferably is 1 micron ~ 1 millimeter.The area of this CNT laminate is not limit, by the size decision of the carbon nano pipe array that rolls membrane.When the size of carbon nano pipe array is big, can rolls and make larger area CNT laminate.Said CNT laminate and preparation method thereof sees also people such as Fan Shoushan in application on June 1st, 2007; In disclosed CN101314464A number Chinese publication application on December 3 " preparation method of carbon nano-tube film " in 2008; Applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd..For saving space, only be incorporated in this, but all technology of above-mentioned application disclose the part that also should be regarded as application technology of the present invention exposure.
In the present embodiment, said composite membrane comprises a two-layer CNT membrane and a graphene film arranged in a crossed manner each other, and this graphene film comprises the overlapped setting of two layer graphenes, and this two-layer cross one another CNT membrane is arranged at the surface of graphene film.Fig. 6 is the stereoscan photograph of the composite membrane in the present embodiment, and the film of following facial cleft is a graphene film, is the CNT in the CNT membrane above.Fig. 7 is the light transmittance test curve figure of composite membrane in the present embodiment.As can be seen from Figure 7, the light transmittance of the composite membrane that present embodiment provided can reach more than 60%, therefore, when adopting composite membrane as thermic sounding component 102, can obtain transparent sound-producing device.The resistance of the composite membrane in the present embodiment is 500 ohm, has good electrical conductivity.
Graphene film is holistic film, and is very fine and close, but intensity is relatively poor; And carbon nanotube layer has certain intensity, and exists a large amount of spaces, composite membrane to combine the fine and close more and carbon nanotube layer of graphene film to have the advantage than hard intensity.Composite membrane is during as sounding component; Graphene film is arranged on the carbon nanotube layer, has covered the space of carbon nanotube layer, makes the contact area of composite membrane and surrounding medium become big with respect to carbon nanotube layer; Therefore, composite membrane can have higher phonation efficiency as the thermic sounding component; Simultaneously, composite membrane has bigger intensity with respect to graphene film during as the thermic sounding component, and the intensity of thermic sounding component is increased, and has longer useful life.Said composite membrane also has the following advantages: at first, composite membrane has preferably wilful, can be bent into arbitrarily angledly, and therefore, this thermo-acoustic device can be the thermo-acoustic device of flexibility; Secondly, graphene film and carbon nanotube layer all can have good light transmittance, and therefore, composite membrane also can be a hyaline membrane, and thermo-acoustic device can cause sound-producing device for transparent heat; Once more, graphene film and carbon nanotube layer all have less thickness and thermal capacitance, and therefore, the thickness of composite membrane can be thinner, has less thermal capacitance, heating and cooling fast, and therefore, this thermo-acoustic device is relatively sensitiveer.
The causing Preparation Method and can or adopt adhesive tape this method of getting from the oriented graphite of said graphene film for chemical vapour deposition technique, LB method.In the present embodiment, adopt the process for preparing graphenes by chemical vapour deposition film.This graphene film can adopt chemical vapour deposition technique to be grown in the surface of a metallic substrates, and this metal can be Copper Foil or nickel foil.Particularly, the preparation method of said graphene film may further comprise the steps:
At first, a metallic film substrate is provided.
This metallic film can be Copper Foil or nickel foil.The size of said metallic film substrate, shape is not limit, and can adjust according to the size and the shape of reative cell.And the area of graphene film of doing formation through chemical vapour deposition technique is relevant with the size of metallic film substrate, and the thickness of said metallic film substrate can be at 12.5 microns～50 microns.In the present embodiment, said metallic film substrate is a Copper Foil, the Copper Foil that thickness is 12.5 ~ 50 microns, and preferred 25 microns, area is 4 centimetres and takes advantage of 4 centimetres.
Secondly, reative cell is put in above-mentioned metallic film substrate, at high temperature fed carbon-source gas, at the surface deposition carbon atom formation Graphene of metallic film substrate.
Said reative cell is the quartz ampoule of an inch diameter, and particularly, said step of in reative cell, growing Graphene may further comprise the steps: annealing reduction under the atmosphere of hydrogen earlier, and hydrogen flowing quantity is 2sccm, and annealing temperature is 1000 degrees centigrade, and the time is 1 hour; In reative cell, feed carbon-source gas methane then, flow is 25sccm, thereby at the surface deposition carbon atom of metallic film substrate, the air pressure of reative cell is 500 millitorrs, and growth time is 10 ~ 60 minutes, is preferably 30 minutes.
The flow that is appreciated that the gas that feeds in the above-mentioned reative cell is relevant with the size of reative cell, and those skilled in the art can adjust the flow of gas according to the size of reative cell.
At last, said metallic film substrate is being cooled to room temperature, thereby is forming a layer graphene on the surface of said metallic film substrate.
The metallic film substrate will continue in reative cell, to feed carbon source gas and hydrogen in the process of cooling, is cooled to room temperature up to the metallic film substrate.In the present embodiment, in cooling procedure, in reative cell, feed the methane of 25sccm, the hydrogen of 2sccm under 500 millitorr air pressure, cooled off 1 hour, the substrate of convenient taking-up metallic film, and the superficial growth of this metallic film substrate has a layer graphene.
This carbon source gas is preferably cheap gas acetylene, also can select other hydrocarbon such as methane, ethane, ethene etc. for use.Protective gas is preferably argon gas, also can select other inert gases such as nitrogen etc. for use.The depositing temperature of Graphene is at 800 degrees centigrade to 1000 degrees centigrade.Graphene of the present invention adopts the chemical vapour deposition technique preparation, therefore can have bigger area, and the minimum dimension of this graphene film can be greater than 2 centimetres.Because this graphene film has bigger area, therefore can have the larger area composite membrane with said carbon nanotube layer formation.
Pass through chemical vapour deposition technique after the metal substrate surface growth obtains graphene film, can carbon nanotube layer be taped against above-mentioned graphene film surface, adopting mechanical force that carbon nanotube layer and graphene film are pressed together.At last, can above-mentioned metallic film substrate be fallen with solution corrosion, thus the composite membrane that acquisition is made up of graphene film and carbon nanotube layer.
Adopt said method prepared graphene film can be the Graphene of individual layer, also can comprise several layer graphenes.Through control reaction temperature, conditions such as base material can be controlled the number of plies of graphene layer in the graphene film.In the present embodiment, because the ability of the copper product dissolved carbon of Copper Foil substrate is lower, therefore, the graphene film that makes only comprises one deck graphene layer.
The working media of said thermic sounding component 102 is not limit, and only need satisfy its resistivity and get final product greater than the resistivity of said thermic sounding component 102.Said medium comprises gaseous medium or liquid medium.Said gaseous medium can be air.Said liquid medium comprises one or more in non-electrolytic solution, water and the organic solvent etc.The resistivity of said liquid medium is greater than 0.01 ohm meter, and preferably, said liquid medium is a pure water.Pure electrical conductivity of water can reach 1.5 * 10 7Ohm meter, and its unit are thermal capacitance is also bigger, can conduct the heat that thermic sounding component 102 produces, thereby can dispel the heat to thermic sounding component 102.In the present embodiment, said medium is an air.
The thermo-acoustic device 10 of present embodiment can be electrically connected with external circuit through the first electrode 104a and the second electrode 104b, and inserts the external signal sounding thus.Because thermic sounding component 102 comprises this composite membrane; Composite membrane has less unit are thermal capacitance and bigger area of dissipation, at heating device 104 behind thermic sounding component 102 input signals, the heating and cooling rapidly of said thermic sounding component 102; Produce periodic variations in temperature; And carry out heat exchange fast with surrounding medium, make surrounding medium property density cycle change, and then sound.In brief, the thermic sounding component 102 of the embodiment of the invention is that conversion by " electricity-Re-sound " reaches sounding.In addition, utilize the high-transmittance of composite membrane, this thermo-acoustic device 10 is a transparent thermo-acoustic device.
The sound pressure level of the thermo-acoustic device 10 that present embodiment provides is greater than 50 decibels of every watt of sound pressure levels, and the audible frequency scope is 1 hertz to 100,000 hertz (being 1Hz-100kHz).The distortion factor of said thermo-acoustic device in 500 hertz-40,000 hertz frequency scopes can be less than 3%.
In addition; Composite membrane in the present embodiment has toughness and mechanical strength preferably; So graphene film can be processed the thermo-acoustic device 10 of different shape and size easily; But this thermo-acoustic device 10 can be conveniently used in the device of various sounding, but in the device like sounding such as sound equipment, mobile phone, MP3, MP4, TV, computers.
See also Fig. 8 and Fig. 9, second embodiment of the invention provides a kind of thermo-acoustic device 20.The main difference part of the thermo-acoustic device 10 that the thermo-acoustic device 20 that present embodiment provided and first embodiment provide is that this thermo-acoustic device 20 in the present embodiment further comprises a substrate 208.Said thermic sounding component 102 is arranged at the surface of this substrate 208.The said first electrode 104a and the second electrode 104b are arranged at the surface of this thermic sounding component 102.The thermic sounding component 102 of present embodiment and the relation of substrate can for: the first, this at least one carbon nanotube layer is arranged between substrate 208 and this at least one graphene film; The second, this at least one graphene film is arranged between this substrate 208 and this at least one carbon nanotube layer; The 3rd, when composite membrane comprised that multilayer carbon nanotube layer and multi-layer graphene film are arranged alternately each other, carbon nanotube layer directly contacts with substrate 208 or graphene film directly contacts with substrate 208.This carbon nanotube layer is identical with the structure of the carbon nanotube layer that first embodiment discloses.In the present embodiment, thermic sounding component 102 comprises an one deck CNT membrane and a layer graphene, and this CNT membrane is arranged between Graphene and the substrate 208.Because Graphene itself is dense, when Graphene is positioned on the CNT membrane, can make thermic sounding component 102 and extraneous medium have bigger contact area.
The shape of said substrate 208, size and thickness are not all limit, and the surface of this substrate 208 can be plane or curved surface.The material of this substrate 208 is not limit, and can be hard material or the flexible material with certain intensity.Preferably, the resistance of the material of this substrate 208 should be greater than the resistance of this thermic sounding component 102, and have heat-insulating property preferably, thereby prevent too much being absorbed by this substrate 208 of heat that this thermic sounding component 102 produces.Particularly, said insulating material can be glass, pottery, quartz, diamond, plastics, resin or wood materials.
In the present embodiment, said substrate 208 comprises at least one through hole 208a.The degree of depth of this through hole 208a is the thickness of said substrate 208.The shape of the cross section of said through hole 208a is not limit, and can be circle, square, rectangle, triangle, polygon, I-shaped or irregular figure.When this substrate 208 comprised a plurality of through hole 208a, these a plurality of through hole 208a can evenly distribute, distribute or be randomly distributed in this substrate 208 with certain rule.The spacing of every adjacent two through hole 208a is not limit, and is preferably 100 microns to 3 millimeters.In the present embodiment, said through hole 208a is cylindrical, and it is uniformly distributed in substrate 208.
This thermic sounding component 102 is arranged at the surface of substrate 208, and with respect to the unsettled setting of through hole 208a in the substrate 208.In the present embodiment; Because this thermic sounding component 102 is positioned at the unsettled setting of part of through hole 208a top, thermic sounding component 102 two sides of this part all contact with surrounding medium, have increased the area that thermic sounding component 102 contacts with ambient gas or liquid medium; And; Because these thermic sounding component 102 another part directly contact with the surface of this substrate 208, and support through this substrate 208, so this thermic sounding component 102 is difficult for being destroyed.
See also Figure 10, third embodiment of the invention provides a kind of thermo-acoustic device 30.The difference of the thermo-acoustic device 20 that the thermo-acoustic device 30 that present embodiment provided and second embodiment provide is; In the present embodiment; The substrate 308 of this thermo-acoustic device 30 comprises at least one blind groove 308a, and this blind groove 308a is arranged at a surperficial 308b of substrate 308.Said blind groove 308a makes this surface 308b form a rough surface.The degree of depth of this blind groove 308a is less than the thickness of said substrate 308, and the length of this blind groove 308a is not limit.The shape of this blind groove 308a on the surperficial 308b of this substrate 308 can be rectangle, arc, polygon, oblateness or other are irregularly shaped.See also Fig. 9, in the present embodiment, substrate 308 is provided with a plurality of blind groove 308a, and this blind groove 308a is shaped as rectangle on the surperficial 308b of substrate 308.See also Figure 11, the cross section of this blind groove 308a on its length direction is rectangle, that is, this blind groove 308a is a rectangular structure.See also Figure 12, the cross section of this blind groove 308a on its length direction is triangle, that is, this blind groove 308a is a triangular prism structure.When the surperficial 308b of this substrate 308 had a plurality of blind groove, these a plurality of blind grooves can evenly distribute, distribute or be randomly distributed in the surperficial 308b of this substrate 308 with certain rule.See also Figure 12, the separation of adjacent two blind grooves can approach 0, and the zone that promptly said substrate 308 contacts with this thermic sounding component 102 is a plurality of lines.Be appreciated that in other embodiments through changing the shape of this blind groove 308a, the zone that this thermic sounding component 102 contacts with this substrate 308 is a plurality of points, promptly can be between this thermic sounding component 102 and this substrate 308 contact, line contact or face contact.
Substrate 308 described in the thermo-acoustic device 30 of present embodiment comprises at least one blind groove 308a.This blind groove can reflect the sound wave that said thermic sounding component 102 sends, thereby strengthens the intensity of phonation of said thermo-acoustic device 30 in thermic sounding component 102 1 sides.When the distance between this adjacent blind groove approached 0, this substrate 308 can be supported this thermic sounding component 102, can make this thermic sounding component 102 have the maximum surface area that contacts with surrounding medium again.
Be appreciated that when the degree of depth of this blind groove 308a reaches a certain value, can produce stack with former sound wave through this blind groove 308a reflected sound wave, thereby cause destructive interference, influence the sounding effect of thermic sounding component 102.For avoiding this phenomenon, preferably, the degree of depth of this blind groove 308a is smaller or equal to 10 millimeters.In addition, too small when the degree of depth of this blind groove 308a, thermic sounding component 102 and substrate 308 hypotelorisms through substrate 308 unsettled settings are unfavorable for the heat radiation of this thermic sounding component 102.Therefore, preferably, the degree of depth of this blind groove 308a is more than or equal to 10 microns.
See also Figure 13 and Figure 14, fourth embodiment of the invention provides a kind of thermo-acoustic device 40.The difference of the thermo-acoustic device 20 that the thermo-acoustic device 40 that present embodiment provided and second embodiment provide is that in the present embodiment, the substrate 408 of this thermo-acoustic device 40 is a network structure.Said substrate 408 comprises a plurality of first linear structure 408a and a plurality of second linear structure 408b.Described linear structure also can be the structure of band shape or strip.These a plurality of first linear structure 408a and the mutual formation one cancellated substrate 408 arranged in a crossed manner of these a plurality of second linear structure 408b.Said a plurality of first linear structure 408a can be parallel to each other, and also can not be parallel to each other, and said a plurality of second linear structure 408b can be parallel to each other; Can not be parallel to each other yet; When a plurality of first linear structure 408a are parallel to each other, and a plurality of second linear structure 408b is when being parallel to each other, particularly; Said a plurality of first linear structure 408a axially all extend along first direction L1, and the distance between the first adjacent linear structure 408a can equate also can not wait.Distance between two the first adjacent linear structure 408a is not limit, and preferably, its spacing is smaller or equal to 1 centimetre.In the present embodiment, equidistantly be provided with at interval between these a plurality of first linear structure 408a, the distance between two the first adjacent linear structure 408a is 2 centimetres.Said a plurality of second linear structure 408b is intervally installed and it axially all extends along second direction L2 basically, and the distance between the second adjacent linear structure 408b can equate also can not wait.Distance between two the second adjacent linear structure 408b is not limit, and preferably, its spacing is smaller or equal to 1 centimetre.First direction L1 and second direction L2 form an angle, 0 ° of < α≤90 °.In the present embodiment, the angle between first direction L1 and the second direction L2 is 90 °.Said a plurality of first linear structure 408a does not limit with these a plurality of second linear structure 408b mode arranged in a crossed manner.In the present embodiment, the first linear structure 408a and the second linear structure 408b weave each other and form a network structure.In another embodiment, the second linear structure 408b contact of said a plurality of intervals setting is arranged at the same side of said a plurality of first linear structure 408a.These a plurality of second linear structure 408b can fixedly install through binding agent with the contact site of these a plurality of first linear structure 408a, also can fixedly install through the mode of welding.When the fusing point of the first linear structure 408a hangs down, also can the second linear structure 408b and the first linear structure 408a be fixedly installed through the mode of hot pressing.
Said substrate 408 has a plurality of mesh 408c.These a plurality of mesh 408c are surrounded by mutual said a plurality of first linear structure 408a and a plurality of second linear structure 408b arranged in a crossed manner.Said mesh 408c is a quadrangle.Different with the angle arranged in a crossed manner of these a plurality of second linear structure 408b according to these a plurality of first linear structure 408a, mesh 408c can be square, rectangle or rhombus.The size of mesh 408c is by the distance decision between distance between two the first adjacent linear structure 408a and adjacent two the second linear structure 408b.In the present embodiment; Because said a plurality of first linear structure 408a and a plurality of second linear structure 408b equidistantly laterally arrange respectively; And these a plurality of first linear structure 408a are vertical each other with these a plurality of second linear structure 408b, so mesh 408c is a square, its length of side is 2 centimetres.
The diameter of the said first linear structure 408a is not limit, and is preferably 10 microns ~ 5 millimeters.The material of this first linear structure 408a is processed by insulating material, and this material comprises fiber, plastics, resin or silica gel etc.The said first linear structure 408a can be textile material; Particularly; This first linear structure 408a can comprise one or more in string, animal origin, wood-fibred and the mineral fibres, like cotton thread, linen thread, knitting wool, silk line, nylon wire or spandex etc.Preferably, this insulating material should have certain heat-resisting character and flexibility, like nylon or polyester etc.In addition, this first linear structure 408a also can be the conductive filament that appearance is surrounded by insulating barrier.This conductive filament can be wire or liner structure of carbon nano tube.Said metal comprises metal simple-substance or alloy, and this elemental metals can be aluminium, copper, tungsten, molybdenum, gold, titanium, neodymium, palladium or caesium etc., and this metal alloy can be the alloy of above-mentioned elemental metals combination in any.The material of this insulating barrier can be resin, plastics, silicon dioxide or metal oxide etc.In the present embodiment, this first linear structure 408a is the liner structure of carbon nano tube that surfaces coated is covered with silicon dioxide, and the insulating barrier that silicon dioxide constitutes wraps up liner structure of carbon nano tube, thereby constitutes this first linear structure 408a.
The structure and material of the said second linear structure 408b is identical with the structure and material of the first linear structure 408a.In same embodiment, the structure and material of the second linear structure 408b can be identical with the structure and material of the first linear structure 408a, also can be inequality.In the present embodiment, the second linear structure 408b is the liner structure of carbon nano tube that surfaces coated is covered with insulating barrier.
Said liner structure of carbon nano tube comprises at least one carbon nano tube line, and this carbon nano tube line comprises a plurality of CNTs.This CNT can be in SWCN, double-walled carbon nano-tube, the multi-walled carbon nano-tubes one or more.Said carbon nano tube line can be the pure structure of being made up of a plurality of CNTs.When liner structure of carbon nano tube comprised many carbon nano tube lines, these many carbon nano tube lines can be arranged in parallel.When liner structure of carbon nano tube comprised many carbon nano tube lines, these many carbon nano tube lines spiral each other twined.Many carbon nano tube lines in the liner structure of carbon nano tube also can interfix through binding agent.
Said carbon nano tube line can be non-carbon nano tube line that reverses or the carbon nano tube line that reverses.See also Figure 15, this non-carbon nano tube line that reverses comprises a plurality of along extension of carbon nano tube line length direction and end to end CNT.Preferably, this non-carbon nano tube line that reverses comprises a plurality of CNT fragments, joins end to end through Van der Waals force between these a plurality of CNT fragments, and each CNT fragment comprises a plurality of CNTs that are parallel to each other and combine closely through Van der Waals force.This CNT fragment has length, thickness, uniformity and shape arbitrarily.This non-CNT line length of reversing is not limit, and diameter is 0.5 nanometer ~ 100 micron.
The said carbon nano tube line that reverses reverses acquisition for adopting a mechanical force with the said non-carbon nano tube line that reverses in opposite direction.See also Figure 16, this carbon nano tube line that reverses comprises a plurality of around carbon nano tube line axial screw carbon nanotubes arranged.Preferably, this carbon nano tube line that reverses comprises a plurality of CNT fragments, joins end to end through Van der Waals force between these a plurality of CNT fragments, and each CNT fragment comprises a plurality of CNTs that are parallel to each other and combine closely through Van der Waals force.This CNT fragment has length, thickness, uniformity and shape arbitrarily.The CNT line length that this reverses is not limit, and diameter is 0.5 nanometer ~ 100 micron.Said carbon nano tube line and preparation method thereof sees also people such as Fan Shoushan in application on September 16th, 2002; CN100411979C number China's bulletin patent " a kind of CNT rope and manufacturing approach thereof " in bulletin on August 20th, 2008; Applicant: Tsing-Hua University; Hongfujin Precise Industry (Shenzhen) Co., Ltd.; And in disclosed CN1982209A number Chinese publication application " carbon nano-tube filament and preparation method thereof " on June 20 in 2007, applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd..For saving space, only be incorporated in this, but all technology of above-mentioned application disclose the part that also should be regarded as application technology of the present invention exposure.
The thermo-acoustic device 40 that present embodiment provided adopts cancellated substrate 408 to have the following advantages: one of which; Network structure comprises a plurality of mesh; When providing support for thermic sounding component 102, can make thermic sounding component 102 and surrounding medium have bigger contact area.Its two, cancellated substrate 408 can have pliability preferably, therefore, thermo-acoustic device 40 has pliability preferably.They are three years old; As the first linear structure 408a or/and the second linear structure 408b when comprising the liner structure of carbon nano tube that is coated with insulating barrier; Liner structure of carbon nano tube can have less diameter, has further increased the contact area of thermic sounding component 102 with surrounding medium; Liner structure of carbon nano tube has less density, and therefore, the quality of thermo-acoustic device 40 can be less; Liner structure of carbon nano tube has pliability preferably, can repeatedly bend and is not destroyed, and therefore, this thermo-acoustic device 40 can have longer useful life.
See also Figure 17, fifth embodiment of the invention provides a kind of thermo-acoustic device 50.The difference of the thermo-acoustic device 20 that the thermo-acoustic device 50 that present embodiment provided and second embodiment provide is that in the present embodiment, the substrate 508 of this thermo-acoustic device 50 is a composite structure of carbon nano tube.
This composite structure of carbon nano tube comprises a carbon nanotube layer and is coated in the insulation material layer of this CNT laminar surface.The structure of the carbon nanotube layer that the structure of said carbon nanotube layer and first embodiment are disclosed is thought together.Said insulation material layer is positioned at the surface of carbon nanotube layer, and acting as of this insulation material layer makes carbon nanotube layer and thermic sounding component 102 mutually insulateds.This insulation material layer only is distributed in the surface of carbon nanotube layer, perhaps every CNT in the insulation material layer parcel carbon nanotube layer.When the thinner thickness of insulation material layer, can the micropore in the carbon nanotube layer not stopped up, therefore, this composite structure of carbon nano tube comprises a plurality of micropores.A plurality of micropores make thermic sounding component 102 and extraneous contact area bigger.
The thermo-acoustic device 50 that present embodiment provided adopts composite structure of carbon nano tube as substrate 508, has the following advantages: the first, and composite structure of carbon nano tube comprises carbon nanotube layer and the insulation material layer that is coated in the CNT laminar surface; Because the structure that carbon nanotube layer can be made up of pure CNT, therefore, the density of carbon nanotube layer is little; Quality is lighter relatively; Therefore, thermo-acoustic device 50 has less quality, the convenient application; Second; Micropore in the carbon nanotube layer is to be made up of the gap between the CNT; Be evenly distributed, under the thin situation of insulation material layer, composite structure of carbon nano tube can keep this equally distributed microcellular structure; Therefore, thermic sounding component 102 can contact with outside air through this substrate 508 more equably; The 3rd; Said carbon nanotube layer has good pliability; Can repeatedly bend and be not destroyed, therefore, composite structure of carbon nano tube has pliability preferably; Adopting composite structure of carbon nano tube is the sound-producing device of a flexibility as the thermo-acoustic device 50 of substrate 508, and it is unrestricted to be arranged to Any shape.
See also Figure 18 and Figure 19, sixth embodiment of the invention provides a kind of thermo-acoustic device 60, and this thermo-acoustic device 60 comprises a substrate 608, a heating device 104 and a thermic sounding component 102.This heating device 104 comprises a plurality of first electrode 104a and a plurality of second electrode 104b, and said a plurality of first electrode 104a and a plurality of second electrode 104b are electrically connected with thermic sounding component 102 respectively.This thermic sounding component 102 comprises a graphene film.
Said a plurality of first electrode 104a and a plurality of second electrode 104b alternate intervals are arranged at substrate 608.Said thermic sounding component 102 is arranged on these a plurality of first electrode 104a and a plurality of second electrode 104b; Make these a plurality of first electrode 104a and a plurality of second electrode 104b between substrate 608 and thermic sounding component 102, this thermic sounding component 102 is unsettled with respect to substrate 608 parts.That is, a plurality of first electrode 104a, a plurality of second electrode 104b, thermic sounding component 102 and substrate 608 are formed with a plurality of gaps 601 jointly, thereby make this thermic sounding component 102 and surrounding air produce bigger contact area.Each first adjacent electrode 104a and distance between the second electrode 104b can equate also can be unequal.Preferably, each first adjacent electrode 104a equates with distance between the second electrode 104b.First adjacent electrode 104a and the distance between the second electrode 104b are not limit, and are preferably 10 microns ~ 1 centimetre.
Said substrate 608 mainly works to carry the first electrode 104a and the second electrode 104b.The shape and the size of this substrate 608 are not limit, and material is the material of insulating material or poorly conductive.In addition, the material of this substrate 608 should have heat-insulating property preferably, thereby prevents that the heat that this thermic sounding component 102 produces from being absorbed by this substrate 608, and can't reach the purpose of circumference medium and then sounding.In the present embodiment, the material of this substrate 608 can be glass, resin or pottery etc.In the present embodiment, said substrate 608 is a foursquare glass plate, and its length of side is 4.5 centimetres, and thickness is 1 millimeter.
This gap 601 is by one first electrode 104a, second electrode 104b and substrate 608 definition, and the height in this gap 601 depends on the height of the first electrode 104a and the second electrode 104b.In the present embodiment, the altitude range of the first electrode 104a and the second electrode 104b is 1 micron ~ 1 centimetre.Preferably, the height of the first electrode 60a4 and the second electrode 104b is 15 microns.
The said first electrode 104a and the second electrode 104b can be stratiform (thread or banded), bar-shaped, strip, bulk or other shape, and that the shape of its cross section can be is round, square, trapezoidal, triangle, polygon or other are irregularly shaped.This first electrode 104a and the second electrode 104b can be connected or mode such as binding agent bonding is fixed in substrate 608 through bolt.And be that the heat that prevents thermic sounding component 102 is influenced sounding effect by the first electrode 104a and too much absorption of the second electrode 104b; The contact area of this first electrode 104a and the second electrode 104b and thermic sounding component 102 is less for well; Therefore, the shape of this first electrode 104a and the second electrode 104b is preferably thread or banded.This first electrode 104a and the second electrode 104b material may be selected to be metal, conducting resinl, electrocondution slurry, indium tin oxide (ITO), CNT or carbon fiber etc.When the material of the first electrode 104a or the second electrode 104b was CNT, this first electrode 104a or the second electrode 104b can be a liner structure of carbon nano tube.The structure of this liner structure of carbon nano tube is identical with the liner structure of carbon nano tube that the 4th embodiment provides.Because the CNT in the liner structure of carbon nano tube joins end to end, therefore, liner structure of carbon nano tube has good electrical conductivity, can be used as electrode.
This sound-producing device 60 further comprises one first contact conductor 610 and one second contact conductor 612; This first contact conductor 610 and second contact conductor 612 respectively with thermo-acoustic device 60 in the first electrode 104a be connected with the second electrode 104b; A plurality of first electrode 104a are electrically connected with this first contact conductor 610 respectively, a plurality of second electrode 104b are electrically connected with this second contact conductor 612 respectively.Said sound-producing device 60 is electrically connected with external circuit through this first contact conductor 610 and second contact conductor 612.This connected mode can make the square resistance of the thermic sounding component 102 between first contact conductor 610 and second contact conductor 612 reduce greatly, can improve the phonation efficiency of thermic sounding component 102.
In the present embodiment, a plurality of first electrode 104a and a plurality of second electrode 104b can play the effect of supporting thermic sounding component 102, therefore, and substrate 608 and nonessential element.When the thermo-acoustic device in the present embodiment 60 did not comprise substrate 608, the first electrode 104a and the second electrode 104b can also protect and support thermic sounding component 102 when making thermic sounding component 102 and external circuit is electrically connected.
In the present embodiment, the first electrode 104a and the second electrode 104b are the thread silver electrode that forms with method for printing screen.The first electrode 104a quantity is four, and the second electrode 104b quantity is four, these four first electrode 104a and four second electrode 104b alternately and spaced set in substrate 608.The length of each the first electrode 104a and the second electrode 104b is 3 centimetres, highly is 15 microns, and first adjacent electrode 104a and the distance between the second electrode 104b are 5 millimeters.
In the thermo-acoustic device 60 that present embodiment provides; Thermic sounding component 102 is through a plurality of first electrode 104a and the unsettled setting of a plurality of second electrode 104b; Increased the contact area of thermic sounding component 102 with surrounding air; Help thermic sounding component 102 and surrounding air heat exchange, improved phonation efficiency.
See also Figure 20 and Figure 21, seventh embodiment of the invention provides a kind of thermo-acoustic device 70.This thermo-acoustic device 70 comprises a substrate 608, a heating device 104 and a thermic sounding component 102.This heating device 104 comprises a plurality of first electrode 104a and a plurality of second electrode 104b, and said a plurality of first electrode 104a and a plurality of second electrode 104b are electrically connected with thermic sounding component 102 respectively.This thermic sounding component 102 comprises a graphene film.The structure of the thermo-acoustic device 60 that thermo-acoustic device 70 that present embodiment provided and the 6th embodiment are provided is basic identical; Its difference is; In the present embodiment, further comprise at least one spacer element 714 between adjacent two the first electrode 104a and the second electrode 104b.
Said spacer element 714 can be the element that separates with substrate 608, and this spacer element 714 is fixed in substrate 608 through for example modes such as bolt connection or binding agent bonding.In addition, this spacer element 714 also can be one-body molded with substrate 608, and promptly the material of spacer element 714 is identical with the material of substrate 608.The shape of this spacer element 714 is not limit, and can be sphere, thread or banded structure.For keeping thermic sounding component 102 to have good sounding effect; This spacer element 714 should have less contact area with thermic sounding component 102 when supporting thermic sounding component 102, be preferably to contact for point between this spacer element 714 and the thermic sounding component 102 or line contacts.
In the present embodiment, the material of this spacer element 714 is not limit, and can be the insulating material of glass, pottery or resin etc., can be the electric conducting material of metal, alloy or indium tin oxide etc. yet.When spacer element 714 was electric conducting material, itself and the first electrode 104a and the second electrode 104b were electrically insulated, and preferably, spacer element 714 is parallel with the second electrode 104b with the first electrode 104a.The height of this spacer element 714 is not limit, and is preferably 10 microns ~ 1 centimetre.In the present embodiment, the thread silver of this spacer element 714 for adopting method for printing screen to form, the height of this spacer element 714 is identical with the height of the said first electrode 104a and the second electrode 104b, is 20 microns.The spacer element 714 and the first electrode 104a and the second electrode 104b laterally arrange.Because the height of spacer element 714 is identical with the height of the first electrode 104a and the second electrode 104b, therefore, said thermic sounding component 102 is positioned at same plane.
Said thermic sounding component 102 is arranged at spacer element 714, the first electrode 104a and the second electrode 104b.This thermic sounding component 102 is provided with through this spacer element 714 and substrate 608 at interval; And be formed with a space 701 with this substrate 608, this space 701 is to be formed jointly by the said first electrode 104a or the said second electrode 104b, said spacer element 714, substrate 608 and thermic sounding component 102.Further, produce standing waves for preventing thermic sounding component 102, keep the good sounding effect of thermic sounding component 102, the distance between this thermic sounding component 102 and the substrate 608 is preferably 10 microns ~ 1 centimetre.In the present embodiment; Because the height of the first electrode 104a, the second electrode 104b and spacer element 714 is 20 microns; Said thermic sounding component 102 is arranged at the first electrode 104a, the second electrode 104b and spacer element 714; Therefore, the distance between this thermic sounding component 102 and the substrate 608 is 20 microns.
Be appreciated that; The first electrode 104a and the second electrode 104b also have certain supporting role to thermic sounding component 102; But when the distance between the first electrode 104a and the second electrode 104b is big; Support effect to thermic sounding component 102 is not good, between the first electrode 104a and the second electrode 104b, spacer element 714 is set, and can play the effect of better support thermic sounding component 102; Make thermic sounding component 102 be formed with a space 701, thereby guarantee that thermic sounding component 102 has good sounding effect with substrate 608 interval settings and with substrate 608.
See also Figure 22, eighth embodiment of the invention provides a kind of thermo-acoustic device 80.This thermo-acoustic device 80 comprises at least one heating device and a plurality of thermic sounding component.The situation of said a plurality of thermic sounding components comprises two kinds: the first, and the quantity of these a plurality of thermic sounding components is at least two, is not in contact with one another between the thermic sounding component; The second, the quantity of these a plurality of thermic sounding components is one, and this thermic sounding component is arranged at one to have in the substrate of curved surface, to make its normal direction be a plurality of or this thermic sounding component bending after be arranged on the different plane.Heating device can be corresponding one by one with the thermic sounding component, also can the corresponding a plurality of thermic sounding components of heating device.This heating device overall structure that a plurality of positions of corresponding said a plurality of thermic sounding components are formed of also can serving as reasons.In the present embodiment, this thermo-acoustic device 80 comprises one first heating device 804, one second heating device 806, a substrate 208, one first thermic sounding component 802a and one second thermic sounding component 802b.
Said substrate 208 comprises a first surface 808a and a second surface 808b.The shape of said substrate 208, size and thickness are not all limit.Said first surface 808a and second surface 808b can be plane, curved surface or rough surface.First surface 808a and second surface 808b can be two adjacent surfaces, also can be two relative surfaces.In the present embodiment, said substrate 208 is a rectangular structure, and first surface 808a and second surface 808b are two facing surfaces.Said substrate 208 further comprises a plurality of through holes 810, and this through hole 810 is through first surface 808a and second surface 808b, thereby makes first surface 808a and second surface 808b become rough surface.Said a plurality of through hole 208a can be arranged in parallel.
The said first thermic sounding component 802a is arranged on the first surface 808a of substrate 208, and with respect to this first surface 808a unsettled setting of part at least.The said second thermic sounding component 802b is arranged on the second surface 808b, and with respect to the second surface 808b unsettled setting of part at least.The said first thermic sounding component 802a is a composite membrane, and this composite membrane is identical with the character of the composite membrane that first embodiment is disclosed.The said second thermic sounding component 802b is a graphene film, a carbon nanotube layer or this composite membrane.The structure of the carbon nanotube layer that is disclosed among the structure of said carbon nanotube layer and first embodiment is identical.
Said first heating device 804 comprises one first electrode 104a and one second electrode 104b.The said first electrode 104a and the second electrode 104b are electrically connected with this first thermic sounding component 802a respectively.In the present embodiment, the first electrode 104a and the second electrode 104b are arranged at the surface of the first thermic sounding component 802a respectively, and flush with two relative limits of this first thermic sounding component 802a.Said second heating device 806 comprises one first electrode 104a and one second electrode 104b.The said first electrode 104a and the second electrode 104b are electrically connected with this second thermic sounding component 802b respectively.In the present embodiment, the first electrode 104a and the second electrode 104b are arranged at the surface of the second thermic sounding component 802b respectively, and flush with two relative limits of this first thermic sounding component 802a.
The thermo-acoustic device 80 that present embodiment provided is two-sided sound-producing device, and through the thermic sounding component is set on two different surface, the sound transmission scope that the thermic sounding component is sent is bigger and more clear.Can select to let any one thermic sounding component sound through the control heating device, perhaps sound simultaneously, make the scope of application of this thermo-acoustic device more extensive.Further, when a thermic sounding component broke down, another thermic sounding component can work on, and has improved the useful life of this thermo-acoustic device.
See also Figure 23, nineth embodiment of the invention provides a kind of thermo-acoustic device 90.Said thermo-acoustic device 90 comprises a substrate 908, a plurality of thermic sounding components 102 and a plurality of heating device 104.Said substrate 908 comprises a plurality of surperficial 908a, and each thermic sounding component 102 correspondence is arranged on the surperficial 908a, and thermic sounding component 102 is an one-to-one relationship with heating device 104.The structure of the thermo-acoustic device 80 that thermo-acoustic device 90 that present embodiment provided and the 8th embodiment provide is basic identical, and its difference is that the thermo-acoustic device 90 that present embodiment provided is a multiaspect sound-producing device.
In the present embodiment, said substrate 908 is a rectangular structure, and it comprises four different surface 908a, and these four different surface are rough surface.Said thermo-acoustic device 90 comprises four thermic sounding components 102, and wherein at least one thermic sounding component 102 is a composite membrane, and other thermic sounding component 102 can be graphene film or carbon nanotube layer.
Each heating device 104 comprises one first electrode 104a and one second electrode 104b respectively.The first electrode 104a and the second electrode 104b are electrically connected with a thermic sounding component 102 respectively.
The thermo-acoustic device 90 that present embodiment provided can be realized propagating sound to a plurality of directions.
See also Figure 24, tenth embodiment of the invention provides a kind of thermo-acoustic device 100.This thermo-acoustic device 100 comprises a thermic sounding component 102, a substrate 208 and a heating device 1004.Said thermic sounding component 102 is arranged at said substrate 208.The structure of the thermo-acoustic device 20 that the thermo-acoustic device 100 that present embodiment provided and second embodiment provide is basic identical; Its difference is; In the thermo-acoustic device 100 that present embodiment provided, heating device 1004 is a laser, or other electromagnetic wave signal sound-producing device.The electromagnetic wave signal 1020 that sends from this heating device 1004 is passed to this thermic sounding component 102, these thermic sounding component 102 sounding.
This heating device 1004 can be provided with over against this thermic sounding component 102.When heating device 1004 is a laser; When this substrate 208 is transparency carrier; This laser can be provided with away from the surface of this thermic sounding component 102 corresponding to this substrate 208, is passed to this thermic sounding component 102 thereby make the laser that sends from laser pass substrate 208.In addition; When this heating device 1004 send be an electromagnetic wave signal time; This electromagnetic wave signal can see through substrate 208 and be passed to this thermic sounding component 102, and at this moment, this heating device 1004 also can be provided with corresponding to the surface of this substrate 208 away from this thermic sounding component 102.
In the thermo-acoustic device 100 of present embodiment; When thermic sounding component 102 receives like electromagnetic irradiations such as laser; This thermic sounding component 102 is stimulated because of absorbing electromagnetic energy, and makes all or part of heat that changes into of luminous energy of absorption through non-radiation.These thermic sounding component 102 temperature change according to the variation of electromagnetic wave signal 1020 frequencies and intensity; And carry out heat exchange rapidly with ambient air or other gas or liquid medium; Thereby make the temperature of its surrounding medium also produce equifrequent variation; Cause surrounding medium to expand rapidly and shrink, thereby sound.
Because the operation principle of this thermo-acoustic device converts heat at a terrific speed for the energy with a definite form, and carries out heat exchange fast with ambient gas or liquid medium, thereby make this media expansion and contraction, thereby sound.Be appreciated that; Said form of energy is not limited to electric energy or luminous energy; This heating device also is not limited to electrode or the electromagnetic wave signal generator in the foregoing description; Any this thermic sounding component that can make generates heat, and all can regard a heating device as according to the device of audio frequency variation circumference medium, and in protection range of the present invention.
Composite membrane among the present invention has toughness and mechanical strength preferably, so composite membrane can be processed the thermo-acoustic device of different shape and size easily.Thermo-acoustic device of the present invention not only can be used as loud speaker separately and uses, and also can be conveniently used in the various electronic installations that need sound-producing device.This thermo-acoustic device can be built in the case of electronic device or housing outer surface, as the phonation unit of electronic installation.This thermo-acoustic device can replace traditional phonation unit of electronic installation, also can use with traditional phonation unit combination.This thermo-acoustic device can with other electronic component utility powers of electronic installation or common processor etc.; Also can be connected with electronic installation through wired or wireless mode; Wired mode combines such as the USB interface through signal transmssion line and electronic installation etc., and wireless mode is connected with electronic installation such as passing through bluetooth approach.This thermo-acoustic device also can be installed or be integrated on the display screen of electronic installation, as the phonation unit of electronic installation.This electronic installation can be sound equipment, mobile phone, MP3, MP4, game machine, digital camera, DV, TV or computer etc.For example, when electronic installation was mobile phone, because the thermo-acoustic device that provides of present embodiment is a transparent structure, this thermo-acoustic device can be fitted in the surface of mobile phone display screen through mechanical means or binding agent.When electronic installation was MP3, this thermo-acoustic device can be built among the MP3, and the circuit board inner with MP3 is electrically connected, and when MP3 switched on, this thermo-acoustic device can be sounded.Be appreciated that; The sounding component that thermic sounding sound-producing device provided by the present invention also can directly substitute in the existing electronic installation is applied in the electronic installation, because thermo-acoustic device of the present invention is no magnetic structure, has smaller volume and weight; Therefore; When its alternative existing sound-producing device is used in the electronic installation, can make the weight saving of electronic installation, the while also can make electronic installation have littler volume or possess ultra-thin structure.
In addition, those skilled in the art also can do other variations in spirit of the present invention, and certainly, these all should be included within the present invention's scope required for protection according to the variation that the present invention's spirit is done.

Claims (25)

1. thermo-acoustic device, it comprises:
One substrate, this substrate are a network structure;
One thermic sounding component is arranged at the surface of this substrate;
One heating device is used for providing energy to make this thermic sounding component produce heat to this thermic sounding component;
It is characterized in that; Said substrate comprises at least one linear structure; Said at least one linear structure comprises a liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface; Said thermic sounding component comprises a composite membrane, and this composite membrane comprises at least one carbon nanotube layer and at least one graphene film of mutual range upon range of setting.
2. thermo-acoustic device as claimed in claim 1 is characterized in that said graphene film comprises multi-layer graphene, and this multi-layer graphene overlaps or the mutual superposition setting each other.
3. thermo-acoustic device as claimed in claim 1 is characterized in that, said graphene film is a single-layer graphene.
4. thermo-acoustic device as claimed in claim 1 is characterized in that, the thickness of said graphene film is 0.34 nanometer to 10 nanometer.
5. thermo-acoustic device as claimed in claim 1 is characterized in that, said carbon nanotube layer and the overlapping setting of said graphene film.
6. thermo-acoustic device as claimed in claim 1 is characterized in that, said carbon nanotube layer is interconnected through Van der Waals force by a plurality of CNTs to be formed.
7. thermo-acoustic device as claimed in claim 1 is characterized in that, said carbon nanotube layer is a self supporting structure, and said graphene film supports through said carbon nanotube layer.
8. thermo-acoustic device as claimed in claim 7 is characterized in that, has a plurality of micropores in the said carbon nanotube layer, and this micropore is formed by the gap between the CNT.
9. thermo-acoustic device as claimed in claim 1 is characterized in that, a plurality of micropores of said carbon nanotube layer are covered by said graphene film.
10. thermo-acoustic device as claimed in claim 1 is characterized in that, said composite membrane comprises multilayer carbon nanotube layer and multi-layer graphene film, this multilayer carbon nanotube layer and the alternately laminated setting of this multi-layer graphene film.
11. thermo-acoustic device as claimed in claim 1; It is characterized in that; Said substrate comprises a plurality of first linear structures and a plurality of second linear structure; These a plurality of first linear structures are arranged in a crossed manner each other with these a plurality of second linear structures, and said first linear structure comprises this liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface.
12. thermo-acoustic device as claimed in claim 11 is characterized in that, said second linear structure comprises a liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface.
13. like claim 11 or 12 described thermo-acoustic devices, it is characterized in that said liner structure of carbon nano tube comprises at least one carbon nano tube line, this carbon nano tube line comprises a plurality of CNTs.
14. thermo-acoustic device as claimed in claim 13 is characterized in that, the CNT in the said carbon nano tube line joins end to end and the bearing of trend of CNT is parallel to the axial direction of carbon nano tube line.
15. thermo-acoustic device as claimed in claim 13 is characterized in that, the CNT in the said carbon nano tube line joins end to end and spiral twines.
16. thermo-acoustic device as claimed in claim 13 is characterized in that, the said carbon nano tube line pure structure that these a plurality of CNTs are formed of serving as reasons.
17. thermo-acoustic device as claimed in claim 1 is characterized in that, said substrate comprises a plurality of mesh, and this thermic sounding component is with respect to the unsettled setting of this mesh.
18. thermo-acoustic device as claimed in claim 1 is characterized in that, said heating device comprises that one first electrode and one second electrode are electrically connected with this thermic sounding component respectively.
19. thermo-acoustic device as claimed in claim 1 is characterized in that, said heating device is an electromagnetic wave signal generating means.
20. thermo-acoustic device as claimed in claim 19 is characterized in that, said heating device is a laser.
21. an electronic installation is characterized in that, this electronic installation comprises like claim 1 to 20 any described thermo-acoustic device.
22. electronic installation as claimed in claim 21 is characterized in that, said thermo-acoustic device is built in this electronic installation or directly is arranged at the shell of this electronic installation.
23. electronic installation as claimed in claim 21 is characterized in that, said thermo-acoustic device is connected with this electronic installation perhaps through bluetooth and this electronic installation wireless connections through USB interface.
24. electronic installation as claimed in claim 21 is characterized in that, said electronic installation comprises sound equipment, mobile phone, MP3, MP4, game machine, digital camera, DV, TV or computer.
25. electronic installation as claimed in claim 21 is characterized in that, this electronic installation further comprises a display screen, and said thermo-acoustic device is arranged at the surface of this display screen.
CN201110076700.5A 2011-03-29 2011-03-29 A thermal sounding device and an electronic device Active CN102724614B (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
CN201110076700.5A CN102724614B (en) 2011-03-29 2011-03-29 A thermal sounding device and an electronic device
TW100112569A TWI465120B (en) 2011-03-29 2011-04-12 Thermal acoustic device and electric device
JP2011190486A JP5134123B2 (en) 2011-03-29 2011-09-01 Thermoacoustic device
US13/335,041 US8811632B2 (en) 2011-03-29 2011-12-22 Thermoacoustic device
US13/337,231 US8831252B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,234 US8634579B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,228 US8958579B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,232 US8625822B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,229 US8811633B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,230 US8837753B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,233 US8767981B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110076700.5A CN102724614B (en) 2011-03-29 2011-03-29 A thermal sounding device and an electronic device

Publications (2)

Publication Number Publication Date
CN102724614A true CN102724614A (en) 2012-10-10
CN102724614B CN102724614B (en) 2015-06-03

Family

ID=46950250

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110076700.5A Active CN102724614B (en) 2011-03-29 2011-03-29 A thermal sounding device and an electronic device

Country Status (3)

Country Link
JP (1) JP5134123B2 (en)
CN (1) CN102724614B (en)
TW (1) TWI465120B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117324753B (en) * 2023-10-18 2024-04-02 广东工业大学 Processing method of laser-induced silver-doped graphene communication device and communication device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101734650A (en) * 2009-12-23 2010-06-16 沈阳建筑大学 Method for preparing graphene-carbon nano tube hybrid composite
CN101751916A (en) * 2008-12-12 2010-06-23 清华大学 ultrasonic acoustic generator
CN101783995A (en) * 2009-01-15 2010-07-21 北京富纳特创新科技有限公司 Thermoacoustic device
CN101820572A (en) * 2009-02-27 2010-09-01 清华大学 Thermoacoustic device
CN101841759A (en) * 2010-05-10 2010-09-22 北京富纳特创新科技有限公司 Thermo-acoustic device
CN101964292A (en) * 2009-07-24 2011-02-02 清华大学 Graphene sheet-carbon nanotube film composite structure and preparation method thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105696139B (en) * 2004-11-09 2019-04-16 得克萨斯大学体系董事会 The manufacture and application of nano-fibre yams, band and plate
DE102007005293A1 (en) * 2007-01-29 2008-08-07 Technische Universität Ilmenau Device and method for micromechanical positioning and manipulation of an object
WO2010102655A2 (en) * 2009-02-16 2010-09-16 Bayer International Sa A compound material comprising a metal and nano particles and a method for producing the same
JP2010245797A (en) * 2009-04-06 2010-10-28 Panasonic Corp Capacitor microphone
CN101964291B (en) * 2009-07-24 2012-03-28 清华大学 Micro grid of transmission electron microscope and preparation method thereof
CN101998200A (en) * 2009-08-25 2011-03-30 鸿富锦精密工业（深圳）有限公司 Earphone line and earphone with same
JP2011171790A (en) * 2010-02-16 2011-09-01 Panasonic Corp Speaker system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101751916A (en) * 2008-12-12 2010-06-23 清华大学 ultrasonic acoustic generator
CN101783995A (en) * 2009-01-15 2010-07-21 北京富纳特创新科技有限公司 Thermoacoustic device
CN101820572A (en) * 2009-02-27 2010-09-01 清华大学 Thermoacoustic device
CN101964292A (en) * 2009-07-24 2011-02-02 清华大学 Graphene sheet-carbon nanotube film composite structure and preparation method thereof
CN101734650A (en) * 2009-12-23 2010-06-16 沈阳建筑大学 Method for preparing graphene-carbon nano tube hybrid composite
CN101841759A (en) * 2010-05-10 2010-09-22 北京富纳特创新科技有限公司 Thermo-acoustic device

Also Published As

Publication number Publication date
JP5134123B2 (en) 2013-01-30
JP2012209917A (en) 2012-10-25
CN102724614B (en) 2015-06-03
TWI465120B (en) 2014-12-11
TW201240482A (en) 2012-10-01

Similar Documents

Publication Publication Date Title
CN102724621B (en) Thermoacoustic device and electronic device
CN102724613B (en) A thermal sounding device and an electronic device
CN102724619A (en) Thermoacoustic device and electronic device
CN102056064B (en) Loudspeaker
CN102724617B (en) Thermoacoustic device and electronic device
CN102065363B (en) Sound production device
CN102724615B (en) A thermal sounding device and an electronic device
CN101771922A (en) Sounding device
CN101783996B (en) Thermoacoustic device
CN102724620B (en) Thermoacoustic device and electronic device
JP2010257973A (en) Surface heat source
CN102724614B (en) A thermal sounding device and an electronic device
CN102724618B (en) Thermoacoustic device and electronic device
CN102724616B (en) Thermoacoustic device and electronic device
TWI400984B (en) Planar heater
TWI513357B (en) Three-dimensional heat source
TWI400983B (en) Planar heater
TWI501685B (en) Three-dimensional heat source
TWI478617B (en) Method for making three-dimensional heat source
TWI501687B (en) Three-dimensional heat source
TWI375946B (en) Acoustic device
TWI382399B (en) Acoustic device
TWI501686B (en) Three-dimensional heat source

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant