CN102724614B - A thermal sounding device and an electronic device - Google Patents

A thermal sounding device and an electronic device Download PDF

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Publication number
CN102724614B
CN102724614B CN201110076700.5A CN201110076700A CN102724614B CN 102724614 B CN102724614 B CN 102724614B CN 201110076700 A CN201110076700 A CN 201110076700A CN 102724614 B CN102724614 B CN 102724614B
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China
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thermo
carbon nano
tube
acoustic device
electrode
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CN102724614A (en
Inventor
姜开利
林晓阳
肖林
范守善
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Tsinghua University
Hongfujin Precision Industry Shenzhen Co Ltd
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Tsinghua University
Hongfujin Precision Industry Shenzhen Co Ltd
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Priority to CN201110076700.5A priority Critical patent/CN102724614B/en
Priority to TW100112569A priority patent/TWI465120B/en
Priority to JP2011190486A priority patent/JP5134123B2/en
Priority to US13/335,041 priority patent/US8811632B2/en
Priority to US13/337,234 priority patent/US8634579B2/en
Priority to US13/337,229 priority patent/US8811633B2/en
Priority to US13/337,231 priority patent/US8831252B2/en
Priority to US13/337,230 priority patent/US8837753B2/en
Priority to US13/337,232 priority patent/US8625822B2/en
Priority to US13/337,233 priority patent/US8767981B2/en
Priority to US13/337,228 priority patent/US8958579B2/en
Publication of CN102724614A publication Critical patent/CN102724614A/en
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Abstract

A thermal sounding device comprises a substrate with a network structure, a thermal sounding element arranged on the surface of the substrate, and a heating device used for providing energy to the thermal sounding element to enable the thermal sounding element to produce heat, wherein the substrate comprises at least one lineage structure, the at least one lineage structure comprises a carbon nano tube lineage structure and an insulation layer positioned on the surface of the carbon nano tube lineage structure, the thermal sounding element comprises a composite film, and the composite film comprises at least one carbon nano tube layer and at least one graphene film with the carbon nano tube layer and the graphene film being stacked over each other. The invention further provides an electronic device using the thermal sounding device.

Description

Thermo-acoustic device and electronic installation
Technical field
The present invention relates to a kind of thermo-acoustic device, particularly relate to a kind of thermo-acoustic device based on Graphene and apply the electronic installation of this thermo-acoustic device.
Background technology
Thermo-acoustic device is generally made up of signal input apparatus and sounding component, by signal input apparatus input signal to this sounding component, and then sounds.Thermo-acoustic device is the one in sound-producing device, it is a kind of thermo-acoustic device based on thermoacoustic effect, refer to document " The Thermophone ", EDWARD C. WENTE, Vol.XIX, No.4, p333-345 and " On Some Thermal Effects of Electric Currents ", William Henry Preece, Proceedings of the Royal Society of London, Vol.30, p408-411 (1879-1881).It discloses a kind of thermo-acoustic device, and this thermo-acoustic device realizes sounding by passing into alternating current in a conductor.This conductor has less thermal capacitance (Heat capacity), thinner thickness, and its inner heat produced can be conducted rapidly to the feature of surrounding gas medium.When alternating current is by conductor, with the change of AC current intensity, the rapid heating and cooling of conductor, and there is rapidly heat exchange with surrounding gas medium, impel surrounding gas medium molecular motion, gas medium density changes thereupon, and then sends sound wave.
In addition, H.D.Arnold and I.B.Crandall is at document " The thermophone as a precision source of sound ", Phys. Rev. 10, disclose a kind of simple thermo-acoustic device in p22-38 (1917), it adopts a platinized platinum to make thermophone element.By the restriction of material itself, adopt this platinized platinum to make the thermo-acoustic device of thermophone element, audible frequency produced is the highest only can reach 4 KHz for it, and phonation efficiency is lower.
Summary of the invention
In view of this, necessaryly provide a kind of audible frequency high and the thermo-acoustic device that sounding effect is good.
A kind of thermo-acoustic device, it comprises: a substrate, and this substrate is a network structure; One thermophone element is arranged at the surface of this substrate; One heating device is used for providing energy to make this thermophone element produce heat to this thermophone element; Wherein, described substrate comprises at least one linear structure, described at least one linear structure comprises a liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface, described thermophone element comprises a composite membrane, and this composite membrane comprises at least one carbon nanotube layer of mutual stacked setting and at least one graphene film.
Compared with prior art, the thermo-acoustic device that the technical program provides has the following advantages: one, because the thermophone element in described thermo-acoustic device comprises a composite membrane be made up of carbon nanotube layer and graphene film, without the need to other labyrinths such as magnet, therefore the structure of this thermo-acoustic device is comparatively simple, is conducive to the cost reducing this thermo-acoustic device.Its two, due to the thinner thickness of composite membrane, thermal capacitance is lower, and therefore, its audible frequency is higher and have higher phonation efficiency.
Accompanying drawing explanation
Fig. 1 is the schematic top plan view of the thermo-acoustic device that first embodiment of the invention provides.
Fig. 2 is the generalized section cut open along II-II line in Fig. 1.
Fig. 3 is the stereoscan photograph of the carbon nano-tube membrane that first embodiment of the invention thermo-acoustic device adopts.
Fig. 4 is the stereoscan photograph of the carbon nano-tube waddingization film that first embodiment of the invention thermo-acoustic device adopts.
Fig. 5 is the stereoscan photograph of the carbon nano-tube laminate that first embodiment of the invention thermo-acoustic device adopts.
Fig. 6 is the stereoscan photograph of the composite membrane that first embodiment of the invention thermo-acoustic device adopts.
Fig. 7 is the test curve figure of thermophone element transparency in Fig. 6 of the present invention.
Fig. 8 is the schematic top plan view of the thermo-acoustic device that second embodiment of the invention provides.
Fig. 9 is the generalized section cut open along IX-IX line in Fig. 8.
Figure 10 is the schematic top plan view of the thermo-acoustic device that third embodiment of the invention provides.
Figure 11 is the generalized section cut open along XI-XI line in Figure 10 in a kind of situation in the 3rd embodiment.
Figure 12 is the generalized section cut open along XI-XI line in Figure 10 in another kind of situation in the 3rd embodiment.
Figure 13 is the schematic top plan view of the thermo-acoustic device that fourth embodiment of the invention provides.
Figure 14 is the generalized section cut open along XIV-XIV line in Figure 13.
Figure 15 is the stereoscan photograph of the liner structure of carbon nano tube of the non-twisted that fourth embodiment of the invention thermo-acoustic device adopts.
Figure 16 is the stereoscan photograph of the liner structure of carbon nano tube of the torsion that fourth embodiment of the invention thermo-acoustic device adopts.
Figure 17 is the surperficial side elevational cross-section schematic diagram of carbon nanotube layer as the thermo-acoustic device of substrate scribbling insulating barrier of employing that fifth embodiment of the invention provides.
Figure 18 is the schematic top plan view of the thermo-acoustic device that sixth embodiment of the invention provides.
Figure 19 is the generalized section cut open along XIX-XIX line in Figure 18.
Figure 20 is the schematic top plan view of the thermo-acoustic device that seventh embodiment of the invention provides.
Figure 21 is the generalized section cut open along XXI-XXI line in Figure 20.
Figure 22 is the side elevational cross-section schematic diagram of the thermo-acoustic device that eighth embodiment of the invention provides.
Figure 23 is the side elevational cross-section schematic diagram of the thermo-acoustic device that ninth embodiment of the invention provides.
The schematic side view of the thermo-acoustic device that Figure 24 provides for tenth embodiment of the invention.
Main element symbol description
Thermo-acoustic device 10；20；30；40；50；60；70；80；90；100
Thermophone element 102
Heating device 104；1004
First electrode 104a
Second electrode 104b
Substrate 208；308；408；508；608；908
Through hole 208a
Blind slot 308a
Surface 308b
First linear structure 408a
Second linear structure 408b
Mesh 408c
Gap 601
First contact conductor 610
Second contact conductor 612
Spacer element 714
First thermophone element 802a
Second thermophone element 802b
First heating device 804
Second heating device 806
First surface 808a
Second surface 808b
Electromagnetic wave signal 1020
Following embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Embodiment
Below with reference to the thermo-acoustic device that the accompanying drawing detailed description embodiment of the present invention provides.Identical label is used to represent identical component in following embodiment.Schematic diagram involved in the embodiment of the present invention is to make the present embodiment better be illustrated, to embodiment not restriction itself.
Refer to Fig. 1 and Fig. 2, first embodiment of the invention provides a kind of thermo-acoustic device 10, and this thermo-acoustic device 10 comprises thermophone element 102 and a heating device 104.
Described heating device 104, for providing energy to thermophone element 102, makes thermophone element 102 produce heat, sounds.In the present embodiment, heating device 104 provides electric energy to thermophone element, makes thermophone element 102 produce heat under the effect of Joule heat.This heating device 104 comprises one first electrode 104a and one second electrode 104b.Described first electrode 104a and the second electrode 104b is electrically connected with this thermophone element 102 respectively.In the present embodiment, the first electrode 104a and the second electrode 104b is arranged at the surface of thermophone element 102 respectively, and the limit relative with two of this thermophone element 102 flushes.
In the present embodiment, the first electrode 104a in this heating device 104 and the second electrode 104b is used for providing the signal of telecommunication to thermophone element 102, makes this thermophone element 102 produce Joule heat, and temperature raises, thus sounds.Described first electrode 104a and the second electrode 104b can be stratiform (thread or banded), bar-shaped, strip, bulk or other shape, and the shape of its cross section can be round, square, trapezoidal, triangle, polygon or other is irregularly shaped.This first electrode 104a and the second electrode 104b is fixed on the surface of thermophone element 102 by the mode that binding agent bonds.And be prevent from the heat of thermophone element 102 from too much being absorbed by the first electrode 104a and the second electrode 104b to affect sounding effect, the contact area of this first electrode 104a and the second electrode 104b and thermophone element 102 is as well less, therefore, the shape of this first electrode 104a and the second electrode 104b is preferably thread or banded.This first electrode 104a and the second electrode 104b material may be selected to be metal, conducting resinl, electrocondution slurry, indium tin oxide (ITO), carbon nano-tube or carbon fiber etc.
When the first electrode 104a and the second electrode 104b has some strength, the first electrode 104a and the second electrode 104b can play the effect supporting this thermophone element 102.As being separately fixed on a framework by the two ends of the first electrode 104a and the second electrode 104b, thermophone element 102 is arranged on the first electrode 104a and the second electrode 104b, by the first electrode 104a and the unsettled setting of the second electrode 104b.
In the present embodiment, the first electrode 104a and the second electrode 104b is the thread silver electrode utilized silver to starch to be formed at as silk screen printing by mode of printing in thermophone element 102.
This thermo-acoustic device 10 comprises one first contact conductor (not shown) and one second contact conductor (not shown) further, this first contact conductor and the second contact conductor are electrically connected with the first electrode 104a in thermo-acoustic device 10 and the second electrode 104b respectively, this first electrode 104a is electrically connected with this first contact conductor, this second electrode 104b is electrically connected with this second contact conductor.Described thermo-acoustic device 10 is electrically connected with external circuit by this first contact conductor 106a and the second contact conductor.
Described thermophone element 102 comprises a composite membrane, and this composite membrane comprises at least one carbon nanotube layer and at least one graphene film.Described at least one carbon nanotube layer and the mutual stacked setting of at least one graphene film, namely this at least one graphene film is arranged at the surface of this at least one carbon nanotube layer.Graphene film and carbon nanotube layer can overlappedly be arranged, that is, when the area of graphene film is less, graphene film is attached to the surface of carbon nanotube layer completely; When the area of carbon nanotube layer is less, carbon nanotube layer can be attached to the surface of graphene film completely.When this composite membrane comprises multilayer carbon nanotube layer and multi-layer graphene film, this multilayer carbon nanotube layer and the alternately laminated setting of this multi-layer graphene film.The thickness of described composite membrane is 10 nanometers to 1 millimeter.Length and the width of described composite membrane are not limit, and can carry out cutting according to the requirement of thermo-acoustic device 10.
Described graphene film is the membrane structure with certain area of a two-dimensional structure.The thickness of this graphene film is 0.34 nanometer to 10 nanometer.This graphene film comprises at least one layer graphene.When graphene film comprises multi-layer graphene, this multi-layer graphene can overlap formation graphene film mutually, has larger area to make graphene film; Or this multi-layer graphene can superpose formation graphene film mutually, increase to make the thickness of graphene film.Preferably, this graphene film is a single-layer graphene.Described Graphene is the two-dimension plane structure of the individual layer consisted of sp2 bond hybridization multiple carbon atom.The thickness of this Graphene can be the thickness of monolayer carbon atom.Graphene film has higher light transmission, and the light transmittance of the Graphene of individual layer can reach 97.7%.Because the thickness of graphene film is very thin, therefore have lower thermal capacitance, its thermal capacitance can be less than 2 × 10 -3joules per cm Kelvin, the thermal capacitance of single-layer graphene can be less than 5.57 × 10 -4joules per cm Kelvin.Described graphene film is a self supporting structure, described self-supporting is that graphene film does not need large-area carrier supported, as long as and relatively both sides provide support power can be unsettled on the whole and keep self membranaceous state, when being placed on two supporters that (or being fixed on) interval one fixed range arranges by this graphene film, the graphene film between two supporters can the membranaceous state of unsettled maintenance self.Experiment shows, Graphene is not an absolutely bright and clean smooth two-dimensional films, but has a large amount of microfluctuations on the surface of single-layer graphene, and single-layer graphene maintains self self-supporting and stability just by this mode.
Described carbon nanotube layer comprises multiple equally distributed carbon nano-tube.This carbon nano-tube can be one or more in Single Walled Carbon Nanotube, double-walled carbon nano-tube, multi-walled carbon nano-tubes.Can be combined closely by Van der Waals force between carbon nano-tube in described carbon nanotube layer.Carbon nanotube layer is the structure of a self-supporting.Carbon nano-tube in this carbon nanotube layer is unordered or ordered arrangement.Here lack of alignment refers to that the orientation of carbon nano-tube is irregular, and ordered arrangement here refers to that the orientation of at least most carbon nano-tube has certain rule.Particularly, when carbon nanotube layer comprises the carbon nano-tube of lack of alignment, carbon nano-tube can be wound around or isotropism arrangement mutually; When carbon nanotube layer comprises the carbon nano-tube of ordered arrangement, carbon nano-tube is arranged of preferred orient along a direction or multiple directions.The thickness of this carbon nanotube layer is not limit, and can be 0.5 nanometer ~ 1 centimetre, and preferably, the thickness of this carbon nanotube layer can be 100 microns ~ 0.5 millimeter.This carbon nanotube layer comprises multiple micropore further, and this micropore is formed by the gap between carbon nano-tube.The aperture of the micropore in described carbon nanotube layer can be less than or equal to 50 microns.The unit are thermal capacitance of described carbon nano-tube stratiform structure is less than 2 × 10-4 joules per cm Kelvin.Preferably, the unit are thermal capacitance of described carbon nano-tube stratiform structure can be less than or equal to 1.7 × 10-6 joules per cm Kelvin.Described carbon nanotube layer can comprise at least one deck carbon nano-tube membrane, carbon nano-tube waddingization film or carbon nano-tube laminate.
Refer to Fig. 3, this carbon nano-tube membrane comprises multiple by the interconnective carbon nano-tube of Van der Waals force.Described multiple carbon nano-tube is arranged of preferred orient substantially in the same direction.Described preferred orientation refers to the overall bearing of trend of most of carbon nano-tube in carbon nano-tube membrane substantially in the same direction.And the overall bearing of trend of described most of carbon nano-tube is basically parallel to the surface of carbon nano-tube membrane.Further, in described carbon nano-tube membrane, most carbon nano-tube is joined end to end by Van der Waals force.Particularly, in the most of carbon nano-tube extended substantially in the same direction in described carbon nano-tube membrane, each carbon nano-tube and carbon nano-tube adjacent are in the direction of extension joined end to end by Van der Waals force.Certainly, there is the carbon nano-tube of minority random alignment in described carbon nano-tube membrane, these carbon nano-tube can not form obviously impact to the overall orientation arrangement of carbon nano-tube most of in carbon nano-tube membrane.Described carbon nano-tube membrane is the film of a self-supporting.Described self-supporting is that carbon nano-tube membrane does not need large-area carrier supported, as long as and relatively both sides provide support power can be unsettled on the whole and keep self membranaceous state, when being placed on two supporters that (or being fixed on) interval one fixed range arranges by this carbon nano-tube membrane, the carbon nano-tube membrane between two supporters can the membranaceous state of unsettled maintenance self.Described self-supporting mainly through exist in carbon nano-tube membrane continuously through Van der Waals force join end to end extend arrangement carbon nano-tube and realize.
The thickness of described carbon nano-tube membrane can be 0.5 nanometer ~ 100 micron, and width and length are not limit, and the size according to the second matrix 108 sets.Concrete structure of described carbon nano-tube membrane and preparation method thereof refers to the people such as Fan Shoushan and applies on February 9th, 2007, CN101239712A China's Mainland publication application disclosed in the August 13 in 2008.For saving space, be only incorporated in this, but all technology of described application disclose the part that also should be considered as the present patent application technology and disclose.
When carbon nanotube layer comprises multilayer carbon nanotube membrane, the intersecting angle formed between the bearing of trend of the carbon nano-tube in adjacent two layers carbon nano-tube membrane is not limit.
Refer to Fig. 4, described carbon nano-tube waddingization film is the carbon nano-tube film formed by a waddingization method.This carbon nano-tube waddingization film comprises winding mutually and equally distributed carbon nano-tube.Attracted each other by Van der Waals force between described carbon nano-tube, be wound around, form network-like structure.Described carbon nano-tube waddingization film isotropism.Length and the width of described carbon nano-tube waddingization film are not limit.Due in carbon nano-tube waddingization film, carbon nano-tube is wound around mutually, and therefore this carbon nano-tube waddingization film has good pliability, and is a self supporting structure, can become arbitrary shape and do not break by bending fold.Area and the thickness of described carbon nano-tube waddingization film are not all limit, and thickness is 1 micron ~ 1 millimeter.Described carbon nano-tube waddingization film and preparation method thereof refers to the people such as Fan Shoushan and applies on April 13rd, 2007, No. CN101284662A Chinese publication application " preparation method of carbon nano-tube film " disclosed in the 15 days October in 2008, applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd..For saving space, be only incorporated in this, but all technology of above-mentioned application disclose the part that also should be considered as the present patent application technology and disclose.
Refer to Fig. 5, described carbon nano-tube laminate comprises equally distributed carbon nano-tube, carbon nano-tube in the same direction or different directions be arranged of preferred orient.Carbon nano-tube also can be isotropic.The mutual part of carbon nano-tube in described carbon nano-tube laminate is overlapping, and is attracted each other by Van der Waals force, combines closely.Carbon nano-tube in described carbon nano-tube laminate and the surperficial shape of growth substrate forming carbon nano pipe array have angle β, and wherein, β is more than or equal to 0 degree and is less than or equal to 15 degree (0≤β≤15 °).Different according to the mode rolled, the carbon nano-tube in this carbon nano-tube laminate has different spread patterns.When rolling in the same direction, carbon nano-tube is arranged of preferred orient along a fixed-direction.Be appreciated that, when rolling along different directions, carbon nano-tube can be arranged of preferred orient along multiple directions.This carbon nano-tube laminate thickness is not limit, and is preferably 1 micron ~ 1 millimeter.The area of this carbon nano-tube laminate is not limit, and is determined by the size of the carbon nano pipe array rolling membrane.When the size of carbon nano pipe array is larger, the carbon nano-tube laminate of obtained larger area can be rolled.Described carbon nano-tube laminate and preparation method thereof refers to the people such as Fan Shoushan and to apply on June 1st, 2007, No. CN101314464A Chinese publication application " preparation method of carbon nano-tube film " disclosed in the 3 days December in 2008, applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd..For saving space, be only incorporated in this, but all technology of above-mentioned application disclose the part that also should be considered as the present patent application technology and disclose.
In the present embodiment, described composite membrane comprises two-layer carbon nano-tube membrane mutually arranged in a crossed manner and a graphene film, and this graphene film comprises the overlapped setting of two layer graphenes, and this two-layer cross one another carbon nano-tube membrane is arranged at the surface of graphene film.Fig. 6 is the stereoscan photograph of the composite membrane in the present embodiment, and the film of lower facial cleft is graphene film, is the carbon nano-tube in carbon nano-tube membrane above.Fig. 7 is the light transmittance test curve figure of composite membrane in the present embodiment.As can be seen from Figure 7, the light transmittance of the composite membrane that the present embodiment provides can reach more than 60%, therefore, when adopting composite membrane as thermophone element 102, can obtain transparent sound production device.The resistance of the composite membrane in the present embodiment is 500 ohm, has good conductivity.
Graphene film is holistic film, very fine and close, but intensity is poor; And carbon nanotube layer has certain intensity, and there is a large amount of spaces, composite membrane combines the advantage that the finer and close and carbon nanotube layer of graphene film has larger intensity.When composite membrane is as sounding component, graphene film is arranged on carbon nanotube layer, covers the space of carbon nanotube layer, makes the contact area of composite membrane and surrounding medium become large relative to carbon nanotube layer, therefore, composite membrane can have higher phonation efficiency as thermophone element; Meanwhile, when composite membrane is as thermophone element, relative to graphene film, there is larger intensity, the intensity of thermophone element is increased, there is longer useful life.Described composite membrane also has the following advantages: first, and composite membrane has good wilfulness, can be bent into arbitrarily angled, and therefore, this thermo-acoustic device can be flexible thermo-acoustic device; Secondly, graphene film and carbon nanotube layer all can have good light transmission, and therefore, composite membrane can be also a hyaline membrane, and thermo-acoustic device can cause sound-producing device for transparent heat; Again, graphene film and carbon nanotube layer all have less thickness and thermal capacitance, and therefore, the thickness of composite membrane can be thinner, has less thermal capacitance, can heating and cooling fast, and therefore, this thermo-acoustic device is sensitiveer.
The Preparation Method that causes of described graphene film can be chemical vapour deposition technique, LB method or the employing adhesive tape method that this is got from oriented graphite.In the present embodiment, adopt process for preparing graphenes by chemical vapour deposition film.This graphene film can adopt chemical vapour deposition technique to grow on the surface of a metallic substrates, and this metal can be Copper Foil or nickel foil.Particularly, the preparation method of described graphene film comprises the following steps:
First, a metallic film substrate is provided.
This metallic film can be Copper Foil or nickel foil.The size of described metallic film substrate, shape is not limit, and can adjust according to the size of reative cell and shape.And the area being done the graphene film formed by chemical vapour deposition technique is relevant with the size of metallic film substrate, the thickness of described metallic film substrate can at 12.5 microns ~ 50 microns.In the present embodiment, described metallic film substrate is Copper Foil, the Copper Foil that thickness is 12.5 ~ 50 microns, preferably 25 microns, and area is 4 centimetres and takes advantage of 4 centimetres.
Secondly, reative cell is put in above-mentioned metallic film substrate, at high temperature passes into carbon-source gas, form Graphene at the surface deposition carbon atom of metallic film substrate.
Described reative cell is the quartz ampoule of an inch diameter, particularly, described in reative cell the step of growing graphene comprise the following steps: first annealing reduction under the atmosphere of hydrogen, hydrogen flowing quantity is 2sccm, and annealing temperature is 1000 degrees Celsius, and the time is 1 hour; Then in reative cell, pass into carbon-source gas methane, flow is 25sccm, thus at the surface deposition carbon atom of metallic film substrate, the air pressure of reative cell is 500 millitorrs, and growth time is 10 ~ 60 minutes, is preferably 30 minutes.
Be appreciated that the flow of the gas passed in above-mentioned reative cell is relevant with the size of reative cell, those skilled in the art can according to the flow of the size adjustment gas of reative cell.
Finally, described metallic film substrate is being cooled to room temperature, thus is forming a layer graphene on the surface of described metallic film substrate.
Metallic film substrate, in the process of cooling, continue to pass into carbon source gas and hydrogen in reative cell, until metallic film substrate is cooled to room temperature.In the present embodiment, in cooling procedure, pass into the methane of 25sccm in reative cell, the hydrogen of 2sccm, under 500 millitorr air pressure, cool 1 hour, the substrate of convenient taking-up metallic film, the superficial growth of this metallic film substrate has a layer graphene.
This carbon source gas is preferably cheap gas acetylene, and other hydrocarbon also can be selected as methane, ethane, ethene etc.Protective gas is preferably argon gas, and other inert gases also can be selected as nitrogen etc.The depositing temperature of Graphene is at 800 degrees Celsius to 1000 degrees Celsius.Graphene of the present invention adopts chemical vapour deposition technique preparation, and therefore can have larger area, the minimum dimension of this graphene film can be greater than 2 centimetres.Because this graphene film has larger area, therefore the composite membrane with larger area can be formed with described carbon nanotube layer.
Being obtained after graphene film in metal substrate surface growth by chemical vapour deposition technique, carbon nanotube layer can be taped against above-mentioned graphene membrane surface, adopt mechanical force carbon nanotube layer and graphene film to be pressed together.Finally, above-mentioned metallic film substrate solution corrosion can be fallen, thus obtain the composite membrane be made up of graphene film and carbon nanotube layer.
The graphene film of employing prepared by said method can be the Graphene of individual layer, also can comprise a few layer graphene.By controlling reaction temperature, the conditions such as base material can control the number of plies of graphene layer in graphene film.In the present embodiment, because the ability of the copper product dissolved carbon of Copper Foil substrate is lower, therefore, obtained graphene film only comprises one deck graphene layer.
The working media of described thermophone element 102 is not limit, and only need meet the resistivity that its resistivity is greater than described thermophone element 102.Described medium comprises gaseous medium or liquid medium.Described gaseous medium can be air.Described liquid medium comprise in non-electrolytic solution, water and organic solvent etc. one or more.The resistivity of described liquid medium is greater than 0.01 ohm meter, and preferably, described liquid medium is pure water.Pure electrical conductivity of water can reach 1.5 × 10 7ohm meter, and its unit are thermal capacitance is also comparatively large, can conduct the heat that thermophone element 102 produces, thus can dispel the heat to thermophone element 102.In the present embodiment, described medium is air.
The thermo-acoustic device 10 of the present embodiment is electrically connected with external circuit by the first electrode 104a and the second electrode 104b, and accesses external signal sounding thus.Because thermophone element 102 comprises this composite membrane, composite membrane has less unit are thermal capacitance and larger area of dissipation, at heating device 104 after thermophone element 102 input signal, described thermophone element 102 can heating and cooling rapidly, produce periodic variations in temperature, and carry out heat exchange fast with surrounding medium, change with making the density cycling of surrounding medium, and then sound.In brief, the thermophone element 102 of the embodiment of the present invention is to reach sounding by the conversion of " electricity-Re-sound ".In addition, utilize the high-transmittance of composite membrane, this thermo-acoustic device 10 is in a transparent thermo-acoustic device.
The sound pressure level of the thermo-acoustic device 10 that the present embodiment provides is greater than 50 decibels of every watt of sound pressure levels, and audible frequency scope is 1 hertz to 100,000 hertz (i.e. 1Hz-100kHz).The distortion factor of described thermo-acoustic device in 500 hertz of-4 ten thousand frequency range can be less than 3%.
In addition, composite membrane in the present embodiment has good toughness and mechanical strength, so graphene film can make the thermo-acoustic device 10 of various shape and size easily, this thermo-acoustic device 10 can be conveniently used in various can in the device of sounding, as sound equipment, mobile phone, MP3, MP4, TV, computer etc. can in the devices of sounding.
Refer to Fig. 8 and Fig. 9, second embodiment of the invention provides a kind of thermo-acoustic device 20.The main difference part of the thermo-acoustic device 20 that the present embodiment provides and the thermo-acoustic device 10 that the first embodiment provides is, this thermo-acoustic device 20 in the present embodiment comprises a substrate 208 further.Described thermophone element 102 is arranged at the surface of this substrate 208.Described first electrode 104a and the second electrode 104b is arranged at the surface of this thermophone element 102.The thermophone element 102 of the present embodiment with the relation of substrate can be: the first, and this at least one carbon nanotube layer is arranged between substrate 208 and this at least one graphene film; The second, this at least one graphene film is arranged between this substrate 208 and this at least one carbon nanotube layer; 3rd, when composite membrane comprises multilayer carbon nanotube layer and multi-layer graphene film is mutually arranged alternately, carbon nanotube layer directly contacts with substrate 208 or graphene film directly contacts with substrate 208.This carbon nanotube layer is identical with the structure of the carbon nanotube layer that the first embodiment discloses.In the present embodiment, thermophone element 102 comprises one deck carbon nano-tube membrane and a layer graphene, and this carbon nano-tube membrane is arranged between Graphene and substrate 208.Because Graphene itself is dense, when Graphene is positioned on carbon nano-tube membrane, thermophone element 102 and extraneous medium can be made to have larger contact area.
The shape of described substrate 208, size and thickness are not all limit, and the surface of this substrate 208 can be plane or curved surface.The material of this substrate 208 is not limit, can for having hard material or the flexible material of some strength.Preferably, the resistance of the material of this substrate 208 should be greater than the resistance of this thermophone element 102, and has good heat-insulating property, thus too much being absorbed by this substrate 208 of the heat preventing this thermophone element 102 from producing.Particularly, described insulating material can be glass, pottery, quartz, diamond, plastics, resin or wood materials.
In the present embodiment, described substrate 208 comprises at least one through hole 208a.The degree of depth of this through hole 208a is the thickness of described substrate 208.The shape of the cross section of described through hole 208a is not limit, and can be circle, square, rectangle, triangle, polygon, I-shaped or irregular figure.When this substrate 208 comprises multiple through hole 208a, the plurality of through hole 208a can be uniformly distributed, with certain rule distribution or be randomly distributed in this substrate 208.Often the spacing of adjacent two through hole 208a is not limit, and is preferably 100 microns to 3 millimeters.In the present embodiment, described through hole 208a is cylindrical, and it is uniformly distributed in substrate 208.
This thermophone element 102 is arranged at the surface of substrate 208, and relative to the unsettled setting of through hole 208a in substrate 208.In the present embodiment, because this thermophone element 102 is positioned at the unsettled setting of part above through hole 208a, thermophone element 102 two sides of this part all contacts with surrounding medium, add the area that thermophone element 102 contacts with ambient gas or liquid medium, and, because this thermophone element 102 another part directly contacts with the surface of this substrate 208, and supported by this substrate 208, therefore this thermophone element 102 is not easily destroyed.
Refer to Figure 10, third embodiment of the invention provides a kind of thermo-acoustic device 30.The difference of the thermo-acoustic device 30 that the present embodiment provides and the thermo-acoustic device 20 that the second embodiment provides is, in the present embodiment, the substrate 308 of this thermo-acoustic device 30 comprises at least one blind slot 308a, and this blind slot 308a is arranged at a surperficial 308b of substrate 308.Described blind slot 308a makes this surperficial 308b form a rough surface.The degree of depth of this blind slot 308a is less than the thickness of described substrate 308, and the length of this blind slot 308a is not limit.The shape of this blind slot 308a on the surperficial 308b of this substrate 308 can be rectangle, arc, polygon, oblateness or other are irregularly shaped.Refer to Fig. 9, in the present embodiment, substrate 308 is provided with multiple blind slot 308a, the shape of this blind slot 308a on the surperficial 308b of substrate 308 is rectangle.Refer to Figure 11, this blind slot 308a cross section is in their length direction rectangle, that is, this blind slot 308a is a rectangular structure.Refer to Figure 12, this blind slot 308a cross section is in their length direction triangle, that is, this blind slot 308a is a triangular prism structure.When the surperficial 308b of this substrate 308 has multiple blind slot, the plurality of blind slot can be uniformly distributed, with certain rule distribution or the surperficial 308b being randomly distributed in this substrate 308.Refer to Figure 12, the separation of adjacent two blind slots can close to 0, and the region that namely described substrate 308 contacts with this thermophone element 102 is multiple line.Be appreciated that in other embodiments, by changing the shape of this blind slot 308a, the region that this thermophone element 102 contacts with this substrate 308 is multiple points, namely can be point cantact, linear contact lay or face between this thermophone element 102 with this substrate 308 and contacts.
Described in the thermo-acoustic device 30 of the present embodiment, substrate 308 comprises at least one blind slot 308a.This blind slot can reflect the sound wave that described thermophone element 102 sends, thus strengthens the intensity of phonation of described thermo-acoustic device 30 in thermophone element 102 side.Distance between the blind slot that this is adjacent close to 0 time, this substrate 308 can support this thermophone element 102, and the maximized surface that this thermophone element 102 can be made again to have contact with surrounding medium amasss.
Be appreciated that when the degree of depth of this blind slot 308a reaches a certain value, the sound wave reflected by this blind slot 308a can be produced with primary sound ripple and superpose, thus causes destructive interference, affects the sounding effect of thermophone element 102.For avoiding this phenomenon, preferably, the degree of depth of this blind slot 308a is less than or equal to 10 millimeters.In addition, when the degree of depth of this blind slot 308a is too small, by thermophone element 102 and substrate 308 hypotelorism of the unsettled setting of substrate 308, be unfavorable for the heat radiation of this thermophone element 102.Therefore, preferably, the degree of depth of this blind slot 308a is more than or equal to 10 microns.
Refer to Figure 13 and Figure 14, fourth embodiment of the invention provides a kind of thermo-acoustic device 40.The difference of the thermo-acoustic device 40 that the present embodiment provides and the thermo-acoustic device 20 that the second embodiment provides is, in the present embodiment, the substrate 408 of this thermo-acoustic device 40 is a network structure.Described substrate 408 comprises multiple first linear structure 408a and multiple second linear structure 408b.Described linear structure also can be structure that is banded or strip.The plurality of first linear structure 408a and the cancellated substrate 408 of the mutual formation one arranged in a crossed manner of the plurality of second linear structure 408b.Described multiple first linear structure 408a can be parallel to each other, also can not be parallel to each other, described multiple second linear structure 408b can be parallel to each other, also can not be parallel to each other, when multiple first linear structure 408a is parallel to each other, and when multiple second linear structure 408b is parallel to each other, particularly, the axis of described multiple first linear structure 408a all extends along first direction L1, and the distance between the first adjacent linear structure 408a can equally also can not wait.Distance between two adjacent the first linear structure 408a is not limit, and preferably, its spacing is less than or equal to 1 centimetre.In the present embodiment, between the plurality of first linear structure 408a, equidistant interval is arranged, and the distance between two adjacent the first linear structure 408a is 2 centimetres.Described multiple second linear structure 408b is intervally installed and it is axially all basic along second direction L2 extension, and the distance between the second adjacent linear structure 408b can equally also can not wait.Distance between two adjacent the second linear structure 408b is not limit, and preferably, its spacing is less than or equal to 1 centimetre.First direction L1 and second direction L2 shape have angle α, 0 ° of < α≤90 °.In the present embodiment, the angle between first direction L1 and second direction L2 is 90 °.Described multiple first linear structure 408a and the plurality of second linear structure 408b mode arranged in a crossed manner is not limit.In the present embodiment, the first linear structure 408a and the second linear structure 408b weaves formation one network structure mutually.In another embodiment, described multiple spaced second linear structure 408b contact is arranged at the same side of described multiple first linear structure 408a.The contact site of the plurality of second linear structure 408b and the plurality of first linear structure 408a is fixedly installed by binding agent, also can be fixedly installed by the mode of welding.When the fusing point of the first linear structure 408a is lower, also by the mode of hot pressing, the second linear structure 408b and the first linear structure 408a can be fixedly installed.
Described substrate 408 has multiple mesh 408c.The plurality of mesh 408c is surrounded by described multiple first linear structure 408a mutually arranged in a crossed manner and multiple second linear structure 408b.Described mesh 408c is quadrangle.Different with the angle arranged in a crossed manner of the plurality of second linear structure 408b according to the plurality of first linear structure 408a, mesh 408c can be square, rectangle or rhombus.The size of mesh 408c is determined by the distance between adjacent two the second linear structure 408b of the Distance geometry between adjacent two the first linear structure 408a.In the present embodiment, because described multiple first linear structure 408a and multiple second linear structure 408b equidistantly be arranged in parallel respectively, and the plurality of first linear structure 408a is mutually vertical with the plurality of second linear structure 408b, so mesh 408c is square, its length of side is 2 centimetres.
The diameter of described first linear structure 408a is not limit, and is preferably 10 microns ~ 5 millimeters.The material of this first linear structure 408a is made up of insulating material, and this material comprises fiber, plastics, resin or silica gel etc.Described first linear structure 408a can be textile material, particularly, this first linear structure 408a can comprise in string, animal origin, wood-fibred and mineral fibres one or more, as cotton thread, linen thread, knitting wool, silk line, nylon wire or spandex etc.Preferably, this insulating material should have certain heat-resisting character and flexibility, as nylon or polyester etc.In addition, this first linear structure 408a also can be the conductive filament that appearance is surrounded by insulating barrier.This conductive filament can be wire or liner structure of carbon nano tube.Described metal comprises metal simple-substance or alloy, and this elemental metals can be aluminium, copper, tungsten, molybdenum, gold, titanium, neodymium, palladium or caesium etc., and this metal alloy can be the alloy of above-mentioned elemental metals combination in any.The material of this insulating barrier can be resin, plastics, silicon dioxide or metal oxide etc.In the present embodiment, this first linear structure 408a is the liner structure of carbon nano tube that surface-coated has silicon dioxide, and liner structure of carbon nano tube wraps up by the insulating barrier that silicon dioxide is formed, thus forms this first linear structure 408a.
The structure and material of described second linear structure 408b is identical with the structure and material of the first linear structure 408a.In the same embodiment, the structure and material of the second linear structure 408b can be identical with the structure and material of the first linear structure 408a, also can not be identical.In the present embodiment, the second linear structure 408b is the liner structure of carbon nano tube that surface-coated has insulating barrier.
Described liner structure of carbon nano tube comprises at least one carbon nano tube line, and this carbon nano tube line comprises multiple carbon nano-tube.This carbon nano-tube can be one or more in Single Walled Carbon Nanotube, double-walled carbon nano-tube, multi-walled carbon nano-tubes.Described carbon nano tube line can for the pure structure be made up of multiple carbon nano-tube.When liner structure of carbon nano tube comprises many carbon nano tube lines, these many carbon nano tube lines can be arranged in parallel.When liner structure of carbon nano tube comprises many carbon nano tube lines, these many carbon nano tube lines can spiral winding mutually.Many carbon nano tube lines in liner structure of carbon nano tube also can be interfixed by binding agent.
Described carbon nano tube line can be the carbon nano tube line of non-twisted or the carbon nano tube line of torsion.Refer to Figure 15, the carbon nano tube line of this non-twisted comprises and multiplely to extend and end to end carbon nano-tube along carbon nano tube line length direction.Preferably, the carbon nano tube line of this non-twisted comprises multiple carbon nano-tube fragment, is joined end to end between the plurality of carbon nano-tube fragment by Van der Waals force, and each carbon nano-tube fragment comprises multiple being parallel to each other and the carbon nano-tube of being combined closely by Van der Waals force.This carbon nano-tube fragment has arbitrary length, thickness, uniformity and shape.The carbon nano-tube line length of this non-twisted is not limit, and diameter is 0.5 nanometer ~ 100 micron.
The carbon nano tube line of described torsion is that the carbon nano tube line of described non-twisted is reversed acquisition by employing one mechanical force in opposite direction.Refer to Figure 16, the carbon nano tube line of this torsion comprises multiple carbon nano-tube around the arrangement of carbon nano tube line axial screw.Preferably, the carbon nano tube line of this torsion comprises multiple carbon nano-tube fragment, is joined end to end between the plurality of carbon nano-tube fragment by Van der Waals force, and each carbon nano-tube fragment comprises multiple being parallel to each other and the carbon nano-tube of being combined closely by Van der Waals force.This carbon nano-tube fragment has arbitrary length, thickness, uniformity and shape.The carbon nano-tube line length of this torsion is not limit, and diameter is 0.5 nanometer ~ 100 micron.Described carbon nano tube line and preparation method thereof refers to the people such as Fan Shoushan and to apply on September 16th, 2002, in No. CN100411979C Chinese issued patents " a kind of Nanotubes and manufacture method thereof " of bulletin on August 20th, 2008, applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd., and disclosed in the 20 days June in 2007 No. CN1982209A Chinese publication application " carbon nano-tube filament and preparation method thereof ", applicant: Tsing-Hua University, Hongfujin Precise Industry (Shenzhen) Co., Ltd..For saving space, be only incorporated in this, but all technology of above-mentioned application disclose the part that also should be considered as the present patent application technology and disclose.
The thermo-acoustic device 40 that the present embodiment provides adopts cancellated substrate 408 to have the following advantages: one, network structure comprises multiple mesh, while providing support to thermophone element 102, thermophone element 102 and surrounding medium can be made to have larger contact area.Its two, cancellated substrate 408 can have good pliability, and therefore, thermo-acoustic device 40 has good pliability.They are three years old, as the first linear structure 408a or/and when the second linear structure 408b comprises the liner structure of carbon nano tube being coated with insulating barrier, liner structure of carbon nano tube can have less diameter, further add the contact area of thermophone element 102 and surrounding medium; Liner structure of carbon nano tube has less density, and therefore, the quality of thermo-acoustic device 40 can be less; Liner structure of carbon nano tube has good pliability, can repeatedly bend and not be destroyed, and therefore, this thermo-acoustic device 40 can have longer useful life.
Refer to Figure 17, fifth embodiment of the invention provides a kind of thermo-acoustic device 50.The difference of the thermo-acoustic device 50 that the present embodiment provides and the thermo-acoustic device 20 that the second embodiment provides is, in the present embodiment, the substrate 508 of this thermo-acoustic device 50 is a composite structure of carbon nano tube.
This composite structure of carbon nano tube comprises a carbon nanotube layer and is coated in the insulation material layer on this carbon nanotube layer surface.The structure of the carbon nanotube layer that the structure of described carbon nanotube layer and the first embodiment disclose is thought same.Described insulation material layer is positioned at the surface of carbon nanotube layer, and acting as of this insulation material layer makes carbon nanotube layer and thermophone element 102 mutually insulated.This insulation material layer is only distributed in the surface of carbon nanotube layer, or the every root carbon nano-tube in insulation material layer parcel carbon nanotube layer.When the thinner thickness of insulation material layer, can not by the blockage of the micro orifice in carbon nanotube layer, therefore, this composite structure of carbon nano tube comprises multiple micropore.Multiple micropore makes thermophone element 102 and extraneous contact area larger.
The thermo-acoustic device 50 that the present embodiment provides adopts composite structure of carbon nano tube as substrate 508, have the following advantages: first, composite structure of carbon nano tube comprises carbon nanotube layer and is coated in the insulation material layer on carbon nanotube layer surface, due to the structure that carbon nanotube layer can be made up of pure carbon nano-tube, therefore, the density of carbon nanotube layer is little, quality is relatively light, therefore, thermo-acoustic device 50 has less quality, convenient application; Second, micropore in carbon nanotube layer be by carbon nano-tube between gap form, be evenly distributed, when insulation material layer is thinner, composite structure of carbon nano tube can keep this equally distributed microcellular structure, therefore, thermophone element 102 can be contacted with outside air more equably by this substrate 508; 3rd, described carbon nanotube layer has good pliability, can repeatedly bend and not be destroyed, therefore, composite structure of carbon nano tube has good pliability, adopt composite structure of carbon nano tube to be the sound-producing device of a flexibility as the thermo-acoustic device 50 of substrate 508, any shape can be arranged to unrestricted.
Refer to Figure 18 and Figure 19, sixth embodiment of the invention provides a kind of thermo-acoustic device 60, and this thermo-acoustic device 60 comprises substrate 608, heating device 104 and a thermophone element 102.This heating device 104 comprises multiple first electrode 104a and multiple second electrode 104b, and described multiple first electrode 104a and multiple second electrode 104b is electrically connected with thermophone element 102 respectively.This thermophone element 102 comprises a graphene film.
Described multiple first electrode 104a and multiple second electrode 104b alternate intervals are arranged at substrate 608.Described thermophone element 102 is arranged on the plurality of first electrode 104a and multiple second electrode 104b, make the plurality of first electrode 104a and multiple second electrode 104b between substrate 608 and thermophone element 102, this thermophone element 102 is unsettled relative to substrate 608 part.That is, multiple first electrode 104a, multiple second electrode 104b, thermophone element 102 and substrate 608 are formed with multiple gap 601 jointly, thus make this thermophone element 102 produce larger contact area with surrounding air.Each first adjacent electrode 104a and the distance between the second electrode 104b can equal also can be unequal.Preferably, each first adjacent electrode 104a is equal with the distance between the second electrode 104b.Distance between the first adjacent electrode 104a and the second electrode 104b is not limit, and is preferably 10 microns ~ 1 centimetre.
Described substrate 608 mainly plays carrying first electrode 104a and the second electrode 104b.Shape and the size of this substrate 608 are not limit, and material is the material of insulating material or poorly conductive.In addition, the material of this substrate 608 should have good heat-insulating property, thus the heat preventing this thermophone element 102 from producing is absorbed by this substrate 608, and cannot reach the object of heats surrounding media and then sounding.In the present embodiment, the material of this substrate 608 can be glass, resin or pottery etc.In the present embodiment, described substrate 608 is a foursquare glass plate, and its length of side is 4.5 centimetres, and thickness is 1 millimeter.
This gap 601 is defined by a first electrode 104a, a second electrode 104b and substrate 608, and the height in this gap 601 depends on the height of the first electrode 104a and the second electrode 104b.In the present embodiment, the altitude range of the first electrode 104a and the second electrode 104b is 1 micron ~ 1 centimetre.Preferably, the height of the first electrode 60a4 and the second electrode 104b is 15 microns.
Described first electrode 104a and the second electrode 104b can be stratiform (thread or banded), bar-shaped, strip, bulk or other shape, and the shape of its cross section can be round, square, trapezoidal, triangle, polygon or other is irregularly shaped.This first electrode 104a and the second electrode 104b are connected by bolt or the mode such as binding agent bonding is fixed on substrate 608.And be prevent from the heat of thermophone element 102 from too much being absorbed by the first electrode 104a and the second electrode 104b to affect sounding effect, the contact area of this first electrode 104a and the second electrode 104b and thermophone element 102 is as well less, therefore, the shape of this first electrode 104a and the second electrode 104b is preferably thread or banded.This first electrode 104a and the second electrode 104b material may be selected to be metal, conducting resinl, electrocondution slurry, indium tin oxide (ITO), carbon nano-tube or carbon fiber etc.When the material of the first electrode 104a or the second electrode 104b is carbon nano-tube, this first electrode 104a or the second electrode 104b can be a liner structure of carbon nano tube.The structure of this liner structure of carbon nano tube is identical with the liner structure of carbon nano tube that the 4th embodiment provides.Because the carbon nano-tube in liner structure of carbon nano tube joins end to end, therefore, liner structure of carbon nano tube has good conductivity, can be used as electrode.
This sound-producing device 60 comprises one first contact conductor 610 and one second contact conductor 612 further, this first contact conductor 610 and the second contact conductor 612 are connected with the first electrode 104a in thermo-acoustic device 60 and the second electrode 104b respectively, multiple first electrode 104a is electrically connected with this first contact conductor 610 respectively, multiple second electrode 104b is electrically connected with this second contact conductor 612 respectively.Described sound-producing device 60 is electrically connected with external circuit by this first contact conductor 610 and the second contact conductor 612.This connected mode can make the square resistance of the thermophone element 102 between the first contact conductor 610 and the second contact conductor 612 greatly reduce, and can improve the phonation efficiency of thermophone element 102.
In the present embodiment, multiple first electrode 104a and multiple second electrode 104b can play the effect supporting thermophone element 102, therefore, and the element that substrate 608 is non-essential.When the thermo-acoustic device 60 in the present embodiment does not comprise substrate 608, the first electrode 104a and the second electrode 104b, while making thermophone element 102 be electrically connected with external circuit, can also protect and support thermophone element 102.
In the present embodiment, the first electrode 104a and the second electrode 104b is the thread silver electrode formed with method for printing screen.First electrode 104a quantity is four, and the second electrode 104b quantity is four, these four the first electrode 104a and four the second electrode 104b alternately and spaced set in substrate 608.The length of each first electrode 104a and the second electrode 104b is 3 centimetres, is highly 15 microns, and the distance between the first adjacent electrode 104a and the second electrode 104b is 5 millimeters.
In the thermo-acoustic device 60 that the present embodiment provides, thermophone element 102 is by multiple first electrode 104a and the unsettled setting of multiple second electrode 104b, add the contact area of thermophone element 102 and surrounding air, be conducive to thermophone element 102 and surrounding air heat exchange, improve phonation efficiency.
Refer to Figure 20 and Figure 21, seventh embodiment of the invention provides a kind of thermo-acoustic device 70.This thermo-acoustic device 70 comprises substrate 608, heating device 104 and a thermophone element 102.This heating device 104 comprises multiple first electrode 104a and multiple second electrode 104b, and described multiple first electrode 104a and multiple second electrode 104b is electrically connected with thermophone element 102 respectively.This thermophone element 102 comprises a graphene film.The thermo-acoustic device 70 that the present embodiment provides is substantially identical with the structure of the thermo-acoustic device 60 that the 6th embodiment provides, its difference is, in the present embodiment, between two adjacent the first electrode 104a and the second electrode 104b, comprise at least one spacer element 714 further.
Described spacer element 714 can for the element be separated with substrate 608, and this spacer element 714 is fixed on substrate 608 by the such as mode such as bolt connection or binding agent bonding.In addition, this spacer element 714 also can be one-body molded with substrate 608, and namely the material of spacer element 714 is identical with the material of substrate 608.The shape of this spacer element 714 is not limit, and can be spherical, thread or banded structure.For keeping thermophone element 102, there is good sounding effect, this spacer element 714 should have less contact area with thermophone element 102 while support thermophone element 102, and being preferably is point cantact or linear contact lay between this spacer element 714 and thermophone element 102.
In the present embodiment, the material of this spacer element 714 is not limit, and can be the insulating material of glass, pottery or resin etc., also can be the electric conducting material of metal, alloy or indium tin oxide etc.When spacer element 714 is electric conducting material, itself and the first electrode 104a and the second electrode 104b are electrically insulated, and preferably, spacer element 714 is parallel with the second electrode 104b with the first electrode 104a.The height of this spacer element 714 is not limit, and is preferably 10 microns ~ 1 centimetre.In the present embodiment, this spacer element 714 is the thread silver adopting method for printing screen to be formed, and the height of this spacer element 714 is identical with the height of described first electrode 104a and the second electrode 104b, is 20 microns.Spacer element 714 and the first electrode 104a and the second electrode 104b be arranged in parallel.Because the height of spacer element 714 is identical with the height of the second electrode 104b with the first electrode 104a, therefore, described thermophone element 102 is positioned at same plane.
Described thermophone element 102 is arranged at spacer element 714, first electrode 104a and the second electrode 104b.This thermophone element 102 is arranged by this spacer element 714 and substrate 608 interval, and being formed with a space 701 with this substrate 608, this space 701 is jointly formed by described first electrode 104a or described second electrode 104b, described spacer element 714, substrate 608 and thermophone element 102.Further, for preventing thermophone element 102 from producing standing wave, keep the sounding effect that thermophone element 102 is good, the distance between this thermophone element 102 and substrate 608 is preferably 10 microns ~ 1 centimetre.In the present embodiment, because the height of the first electrode 104a, the second electrode 104b and spacer element 714 is 20 microns, described thermophone element 102 is arranged at the first electrode 104a, the second electrode 104b and spacer element 714, therefore, the distance between this thermophone element 102 and substrate 608 is 20 microns.
Be appreciated that, first electrode 104a and the second electrode 104b also has certain supporting role to thermophone element 102, but when the distance between the first electrode 104a and the second electrode 104b is larger, not good to the support effect of thermophone element 102, between the first electrode 104a and the second electrode 104b, spacer element 714 is set, the effect better supporting thermophone element 102 can be played, make thermophone element 102 and substrate 608 interval arrange and be formed with a space 701 with substrate 608, thus ensure that thermophone element 102 has good sounding effect.
Refer to Figure 22, eighth embodiment of the invention provides a kind of thermo-acoustic device 80.This thermo-acoustic device 80 comprises at least one heating device and multiple thermophone element.The situation of described multiple thermophone element comprises two kinds: the first, and the quantity of the plurality of thermophone element is at least two, does not contact with each other between thermophone element; The second, the quantity of the plurality of thermophone element is one, and this thermophone element is arranged at one and has in the substrate of curved surface, makes its normal direction be multiple or is arranged in different planes after the bending of this thermophone element.Heating device can with thermophone element one_to_one corresponding, also can the corresponding multiple thermophone element of heating device.This heating device also can be the overall structure be made up of multiple positions of the described multiple thermophone element of correspondence.In the present embodiment, this thermo-acoustic device 80 comprises one first heating device 804,1 second heating device 806, substrate 208,1 first thermophone element 802a and one second thermophone element 802b.
Described substrate 208 comprises an a first surface 808a and second surface 808b.The shape of described substrate 208, size and thickness are not all limit.Described first surface 808a and second surface 808b can be plane, curved surface or rough surface.First surface 808a and second surface 808b can be two adjacent surfaces, also can be two relative surfaces.In the present embodiment, described substrate 208 is a rectangular structure, and first surface 808a and second surface 808b are two relative surfaces.Described substrate 208 comprises multiple through hole 810 further, and this through hole 810 through first surface 808a and second surface 808b, thus makes first surface 808a and second surface 808b become rough surface.Described multiple through hole 208a can be arranged in parallel.
Described first thermophone element 802a is arranged on the first surface 808a of substrate 208, and relative at least part of unsettled setting of this first surface 808a.Described second thermophone element 802b is arranged on second surface 808b, and unsettled setting at least part of relative to second surface 808b.Described first thermophone element 802a is a composite membrane, and this composite membrane is identical with the character of the composite membrane that the first embodiment discloses.Described second thermophone element 802b is a graphene film, a carbon nanotube layer or this composite membrane.The structure of described carbon nanotube layer is identical with the structure of the carbon nanotube layer disclosed in the first embodiment.
Described first heating device 804 comprises one first electrode 104a and one second electrode 104b.Described first electrode 104a and the second electrode 104b is electrically connected with this first thermophone element 802a respectively.In the present embodiment, the first electrode 104a and the second electrode 104b is arranged at the surface of the first thermophone element 802a respectively, and the limit relative with two of this first thermophone element 802a flushes.Described second heating device 806 comprises one first electrode 104a and one second electrode 104b.Described first electrode 104a and the second electrode 104b is electrically connected with this second thermophone element 802b respectively.In the present embodiment, the first electrode 104a and the second electrode 104b is arranged at the surface of the second thermophone element 802b respectively, and the limit relative with two of this first thermophone element 802a flushes.
Thermo-acoustic device that the present embodiment provides 80 is two-sided sound-producing device, and by arranging thermophone element on two different surfaces, the sound transmission scope that thermophone element can be made to send more greatly and more clear.Can select to allow any one thermophone element sound by controlling heating device, or sound simultaneously, make the scope of application of this thermo-acoustic device more extensive.Further, when a thermophone element breaks down, another thermophone element can work on, and improves the useful life of this thermo-acoustic device.
Refer to Figure 23, ninth embodiment of the invention provides a kind of thermo-acoustic device 90.Described thermo-acoustic device 90 comprises a substrate 908, multiple thermophone element 102 and multiple heating device 104.Described substrate 908 comprises multiple surperficial 908a, and each thermophone element 102 correspondence is arranged on a surperficial 908a, and thermophone element 102 and heating device 104 are one-to-one relationship.The thermo-acoustic device 90 that the present embodiment provides is substantially identical with the structure of the thermo-acoustic device 80 that the 8th embodiment provides, and its difference is, the thermo-acoustic device 90 that the present embodiment provides is a multiaspect sound-producing device.
In the present embodiment, described substrate 908 is a rectangular structure, and it comprises four different surperficial 908a, and these four different surfaces are rough surface.Described thermo-acoustic device 90 comprises four thermophone element 102, and wherein at least one thermophone element 102 is a composite membrane, and other thermophone element 102 can be graphene film or carbon nanotube layer.
Each heating device 104 comprises a first electrode 104a and the second electrode 104b respectively.First electrode 104a and the second electrode 104b is electrically connected with a thermophone element 102 respectively.
The thermo-acoustic device 90 that the present embodiment provides can realize propagating sound to multiple directions.
Refer to Figure 24, tenth embodiment of the invention provides a kind of thermo-acoustic device 100.This thermo-acoustic device 100 comprises thermophone element 102, substrate 208 and a heating device 1004.Described thermophone element 102 is arranged at described substrate 208.The thermo-acoustic device 100 that the present embodiment provides is substantially identical with the structure of the thermo-acoustic device 20 that the second embodiment provides, its difference is, in the thermo-acoustic device 100 that the present embodiment provides, heating device 1004 is a laser, or other electromagnetic wave signal sound-producing device.The electromagnetic wave signal 1020 sent from this heating device 1004 is passed to this thermophone element 102, this thermophone element 102 sounding.
This heating device 1004 can just be arranged this thermophone element 102.When heating device 1004 is a laser, when this substrate 208 is transparency carrier, this laser may correspond to and arranges in the surface of this substrate 208 away from this thermophone element 102, thus makes the laser sent from laser be passed to this thermophone element 102 through substrate 208.In addition, when this heating device 1004 send be an electromagnetic wave signal time, this electromagnetic wave signal can pass through substrate 208 and is passed to this thermophone element 102, and now, this heating device 1004 also can be arranged corresponding to the surface of this substrate 208 away from this thermophone element 102.
In the thermo-acoustic device 100 of the present embodiment, when thermophone element 102 is subject to as electromagnetic irradiations such as laser, this thermophone element 102 is stimulated because of the energy of electromagnetic wave absorption, and makes that the luminous energy of absorption is all or part of changes heat into by non-radiative.This thermophone element 102 temperature changes according to the change of electromagnetic wave signal 1020 frequency and intensity, and and ambient air or other gas or liquid medium carry out heat exchange rapidly, thus make the temperature of its surrounding medium also produce equifrequent change, cause surrounding medium expand rapidly and shrink, thus sound.
Operation principle due to this thermo-acoustic device is that the energy of certain forms is converted to heat at a terrific speed, and carries out heat exchange fast with ambient gas or liquid medium, thus makes this media expansion and contraction, thus sounds.Be appreciated that; described form of energy is not limited to electric energy or luminous energy; this heating device is also not limited to electrode in above-described embodiment or electromagnetic wave signal generator; any this thermophone element that can make is generated heat; and all can regard a heating device as according to the device of audio frequency change heats surrounding media, and in scope.
Composite membrane in the present invention has good toughness and mechanical strength, so composite membrane can make the thermo-acoustic device of various shape and size easily.Thermo-acoustic device of the present invention not only can use as loud speaker separately, also can be conveniently used in various needs in the electronic installation of sound-producing device.This thermo-acoustic device can be built in case of electronic device or housing outer surface, as the phonation unit of electronic installation.This thermo-acoustic device can replace traditional phonation unit of electronic installation, also can combinationally use with traditional phonation unit.This thermo-acoustic device can with other electronic component utility power or common processor etc. of electronic installation, also can be connected with electronic installation by wired or wireless mode, wired mode is as by the combination such as USB interface of signal transmssion line and electronic installation, and wireless mode is connected with electronic installation as by bluetooth approach.This thermo-acoustic device also can be installed or be integrated on the display screen of electronic installation, as the phonation unit of electronic installation.This electronic installation can be sound equipment, mobile phone, MP3, MP4, game machine, digital camera, Digital Video, TV or computer etc.Such as, when electronic installation is mobile phone, the thermo-acoustic device provided due to the present embodiment is a transparent structure, and this thermo-acoustic device can be fitted in the surface of mobile phone display screen by mechanical means or binding agent.When electronic installation is MP3, this thermo-acoustic device can be built in MP3, is electrically connected with the circuit board of MP3 inside, and when MP3 is energized, this thermo-acoustic device can be sounded.Be appreciated that, thermic sounding sound-producing device provided by the present invention also can directly be applied in electronic installation by the sounding component substituted in existing electronic installation, because thermo-acoustic device of the present invention is without magnetic structure, there is less volume and weight, therefore, when it substitutes existing sound-producing device with time in an electronic, the weight saving of electronic installation can be made, electronic installation also can be made to have less volume or possess ultra-thin structure simultaneously.
In addition, those skilled in the art also can do other changes in spirit of the present invention, and certainly, these changes done according to the present invention's spirit, all should be included within the present invention's scope required for protection.

Claims (25)

1. a thermo-acoustic device, it comprises:
One substrate, this substrate is a network structure;
One thermophone element is arranged at the surface of this substrate;
One heating device is used for providing energy to make this thermophone element produce heat to this thermophone element;
It is characterized in that, described substrate comprises at least one linear structure, described at least one linear structure comprises a liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface, described thermophone element comprises a composite membrane, and this composite membrane comprises at least one carbon nanotube layer of mutual stacked setting and at least one graphene film.
2. thermo-acoustic device as claimed in claim 1, it is characterized in that, described graphene film comprises multi-layer graphene, and this multi-layer graphene mutually overlaps or mutually superposes setting.
3. thermo-acoustic device as claimed in claim 1, it is characterized in that, described graphene film is single-layer graphene.
4. thermo-acoustic device as claimed in claim 1, it is characterized in that, the thickness of described graphene film is 0.34 nanometer to 10 nanometer.
5. thermo-acoustic device as claimed in claim 1, it is characterized in that, described carbon nanotube layer and described graphene film overlap.
6. thermo-acoustic device as claimed in claim 1, is characterized in that, described carbon nanotube layer to be interconnected by Van der Waals force by multiple carbon nano-tube and to form.
7. thermo-acoustic device as claimed in claim 1, it is characterized in that, described carbon nanotube layer is a self supporting structure, and described graphene film is supported by described carbon nanotube layer.
8. thermo-acoustic device as claimed in claim 7, it is characterized in that having multiple micropore in described carbon nanotube layer, this micropore is formed by the gap between carbon nano-tube.
9. thermo-acoustic device as claimed in claim 1, it is characterized in that, multiple micropores of described carbon nanotube layer are covered by described graphene film.
10. thermo-acoustic device as claimed in claim 1, it is characterized in that, described composite membrane comprises multilayer carbon nanotube layer and multi-layer graphene film, this multilayer carbon nanotube layer and the alternately laminated setting of this multi-layer graphene film.
11. thermo-acoustic devices as claimed in claim 1, it is characterized in that, described substrate comprises multiple first linear structure and multiple second linear structure, the plurality of first linear structure and the plurality of second linear structure mutually arranged in a crossed manner, described first linear structure comprises this liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface.
12. thermo-acoustic devices as claimed in claim 11, is characterized in that, described second linear structure comprises a liner structure of carbon nano tube and is arranged at the insulating barrier on this liner structure of carbon nano tube surface.
13. thermo-acoustic devices as described in claim 11 or 12, it is characterized in that, described liner structure of carbon nano tube comprises at least one carbon nano tube line, and this carbon nano tube line comprises multiple carbon nano-tube.
14. thermo-acoustic devices as claimed in claim 13, is characterized in that, the carbon nano-tube in described carbon nano tube line joins end to end and the bearing of trend of carbon nano-tube is parallel to the axial direction of carbon nano tube line.
15. thermo-acoustic devices as claimed in claim 13, it is characterized in that, the carbon nano-tube in described carbon nano tube line joins end to end and spiral winding.
16. thermo-acoustic devices as claimed in claim 13, is characterized in that, described carbon nano tube line is the pure structure be made up of the plurality of carbon nano-tube.
17. thermo-acoustic devices as claimed in claim 1, it is characterized in that, described substrate comprises multiple mesh, and this thermophone element is relative to the unsettled setting of this mesh.
18. thermo-acoustic devices as claimed in claim 1, is characterized in that, described heating device comprises one first electrode and one second electrode is electrically connected with this thermophone element respectively.
19. thermo-acoustic devices as claimed in claim 1, is characterized in that, described heating device is an electromagnetic wave signal generating means.
20. thermo-acoustic devices as claimed in claim 19, it is characterized in that, described heating device is a laser.
21. 1 kinds of electronic installations, is characterized in that, this electronic installation comprises the thermo-acoustic device as described in claim 1 to 20 any one.
22. electronic installations as claimed in claim 21, is characterized in that, described thermo-acoustic device is built in this electronic installation or is directly arranged at the shell of this electronic installation.
23. electronic installations as claimed in claim 21, is characterized in that, described thermo-acoustic device to be connected with this electronic installation by USB interface or by bluetooth and this electronic installation wireless connections.
24. electronic installations as claimed in claim 21, it is characterized in that, described electronic installation comprises sound equipment, mobile phone, MP3, MP4, game machine, digital camera, Digital Video, TV or computer.
25. electronic installations as claimed in claim 21, it is characterized in that, this electronic installation comprises a display screen further, and described thermo-acoustic device is arranged at the surface of this display screen.
CN201110076700.5A 2011-03-29 2011-03-29 A thermal sounding device and an electronic device Active CN102724614B (en)

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CN201110076700.5A CN102724614B (en) 2011-03-29 2011-03-29 A thermal sounding device and an electronic device
TW100112569A TWI465120B (en) 2011-03-29 2011-04-12 Thermal acoustic device and electric device
JP2011190486A JP5134123B2 (en) 2011-03-29 2011-09-01 Thermoacoustic device
US13/335,041 US8811632B2 (en) 2011-03-29 2011-12-22 Thermoacoustic device
US13/337,229 US8811633B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,231 US8831252B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,234 US8634579B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,230 US8837753B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,232 US8625822B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,233 US8767981B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device
US13/337,228 US8958579B2 (en) 2011-03-29 2011-12-26 Thermoacoustic device

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