CN102717554A - 一种两层型挠性覆铜板 - Google Patents
一种两层型挠性覆铜板 Download PDFInfo
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- CN102717554A CN102717554A CN2012102280205A CN201210228020A CN102717554A CN 102717554 A CN102717554 A CN 102717554A CN 2012102280205 A CN2012102280205 A CN 2012102280205A CN 201210228020 A CN201210228020 A CN 201210228020A CN 102717554 A CN102717554 A CN 102717554A
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 147
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 131
- 239000010949 copper Substances 0.000 title claims abstract description 131
- 229910052751 metal Inorganic materials 0.000 claims abstract description 61
- 239000002184 metal Substances 0.000 claims abstract description 61
- 238000001659 ion-beam spectroscopy Methods 0.000 claims abstract description 56
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 35
- 238000007747 plating Methods 0.000 claims abstract description 24
- 238000002360 preparation method Methods 0.000 claims abstract description 16
- 238000004544 sputter deposition Methods 0.000 claims abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 54
- 238000009713 electroplating Methods 0.000 claims description 54
- 150000002500 ions Chemical class 0.000 claims description 53
- 229920006254 polymer film Polymers 0.000 claims description 45
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 25
- 229910052759 nickel Inorganic materials 0.000 claims description 25
- -1 molybdenum ion Chemical class 0.000 claims description 14
- 241000209094 Oryza Species 0.000 claims description 13
- 235000007164 Oryza sativa Nutrition 0.000 claims description 13
- 235000009566 rice Nutrition 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 10
- 229920000620 organic polymer Polymers 0.000 claims description 9
- 229910021645 metal ion Inorganic materials 0.000 claims description 8
- 229920002521 macromolecule Polymers 0.000 claims description 7
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 6
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910001453 nickel ion Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 3
- 229910001431 copper ion Inorganic materials 0.000 claims description 3
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 3
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 239000012300 argon atmosphere Substances 0.000 claims 1
- 229910001430 chromium ion Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 8
- 239000010408 film Substances 0.000 description 169
- 239000004642 Polyimide Substances 0.000 description 70
- 229920001721 polyimide Polymers 0.000 description 70
- 238000000034 method Methods 0.000 description 31
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 30
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 30
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 30
- 238000002161 passivation Methods 0.000 description 26
- 239000007788 liquid Substances 0.000 description 24
- 238000000151 deposition Methods 0.000 description 23
- 230000008021 deposition Effects 0.000 description 20
- 230000007246 mechanism Effects 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 229910052786 argon Inorganic materials 0.000 description 15
- 239000011889 copper foil Substances 0.000 description 15
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 14
- 239000000243 solution Substances 0.000 description 12
- 238000001035 drying Methods 0.000 description 10
- 238000002513 implantation Methods 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 8
- 230000009849 deactivation Effects 0.000 description 8
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 210000004379 membrane Anatomy 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 230000005658 nuclear physics Effects 0.000 description 7
- 238000003825 pressing Methods 0.000 description 7
- 238000011160 research Methods 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- 238000005266 casting Methods 0.000 description 6
- 150000005690 diesters Chemical class 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 238000010924 continuous production Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005576 amination reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920005575 poly(amic acid) Polymers 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 210000002469 basement membrane Anatomy 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
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- Electroplating Methods And Accessories (AREA)
Abstract
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Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103243304A (zh) * | 2013-05-14 | 2013-08-14 | 西南交通大学 | 一种提高金属工件表面力学性能的方法 |
CN105873352A (zh) * | 2015-11-06 | 2016-08-17 | 珠海市创元开耀电子材料有限公司 | 高频通信用基板及其制造方法 |
CN107841723A (zh) * | 2017-10-30 | 2018-03-27 | 深圳市西陆光电技术有限公司 | 一种无胶双重挠性覆铜板加工用直流溅射装置 |
CN108688278A (zh) * | 2018-04-11 | 2018-10-23 | 南京大学 | 一种ptfe基pcb覆铜板及压合方法 |
CN109097772A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097748A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097751A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097750A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097726A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097749A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109518131A (zh) * | 2018-12-25 | 2019-03-26 | 胡旭日 | 一种带载体的极薄铜箔、极薄铜箔生产方法及装置 |
CN109554738A (zh) * | 2018-12-19 | 2019-04-02 | 胡旭日 | 一种锂离子电池负极铜箔生产设备及方法 |
CN110418507A (zh) * | 2019-08-19 | 2019-11-05 | 台山市精诚达电路有限公司 | 高频高速挠性电路板制造工艺 |
CN112210760A (zh) * | 2020-10-13 | 2021-01-12 | 廖斌 | 一种超薄聚合物的表面处理方法 |
CN112724446A (zh) * | 2020-12-23 | 2021-04-30 | 深圳市信维通信股份有限公司 | 一种有机高分子薄膜金属化方法及天线 |
CN113667952A (zh) * | 2021-08-27 | 2021-11-19 | 江苏耀鸿电子有限公司 | 一种磁控溅射柔性覆铜基板及其制备方法 |
Citations (4)
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WO1997038851A1 (en) * | 1996-04-18 | 1997-10-23 | Gould Electronics Inc. | Adhesiveless flexible laminate and process for making adhesiveless flexible laminate |
US20080090095A1 (en) * | 2004-09-01 | 2008-04-17 | Sumitomo Metal Mining Co., Ltd. | Adhesiveless Copper Clad Laminates And Method For Manufacturing Thereof |
US20080182112A1 (en) * | 2005-08-04 | 2008-07-31 | Hisayasu Kaneshiro | Metal-coated polyimide film |
CN102021576A (zh) * | 2010-09-30 | 2011-04-20 | 深圳市信诺泰创业投资企业(普通合伙) | 一种连续生产挠性覆铜板的方法 |
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2012
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Patent Citations (4)
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WO1997038851A1 (en) * | 1996-04-18 | 1997-10-23 | Gould Electronics Inc. | Adhesiveless flexible laminate and process for making adhesiveless flexible laminate |
US20080090095A1 (en) * | 2004-09-01 | 2008-04-17 | Sumitomo Metal Mining Co., Ltd. | Adhesiveless Copper Clad Laminates And Method For Manufacturing Thereof |
US20080182112A1 (en) * | 2005-08-04 | 2008-07-31 | Hisayasu Kaneshiro | Metal-coated polyimide film |
CN102021576A (zh) * | 2010-09-30 | 2011-04-20 | 深圳市信诺泰创业投资企业(普通合伙) | 一种连续生产挠性覆铜板的方法 |
Non-Patent Citations (1)
Title |
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田民波: "《薄膜技术与薄膜材料》", 31 August 2006, article "离子束溅射沉积", pages: 512-515 * |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103243304A (zh) * | 2013-05-14 | 2013-08-14 | 西南交通大学 | 一种提高金属工件表面力学性能的方法 |
CN103243304B (zh) * | 2013-05-14 | 2015-05-20 | 西南交通大学 | 一种提高金属工件表面力学性能的方法 |
CN105873352A (zh) * | 2015-11-06 | 2016-08-17 | 珠海市创元开耀电子材料有限公司 | 高频通信用基板及其制造方法 |
CN105873352B (zh) * | 2015-11-06 | 2019-02-01 | 武汉光谷创元电子有限公司 | 高频通信用基板及其制造方法 |
CN107841723A (zh) * | 2017-10-30 | 2018-03-27 | 深圳市西陆光电技术有限公司 | 一种无胶双重挠性覆铜板加工用直流溅射装置 |
CN109097749A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097751A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097750A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097726A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097772A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN109097748A (zh) * | 2017-12-15 | 2018-12-28 | 深圳科诺桥科技股份有限公司 | 挠性覆铜板的制备方法 |
CN108688278A (zh) * | 2018-04-11 | 2018-10-23 | 南京大学 | 一种ptfe基pcb覆铜板及压合方法 |
CN109554738A (zh) * | 2018-12-19 | 2019-04-02 | 胡旭日 | 一种锂离子电池负极铜箔生产设备及方法 |
CN109518131A (zh) * | 2018-12-25 | 2019-03-26 | 胡旭日 | 一种带载体的极薄铜箔、极薄铜箔生产方法及装置 |
CN110418507A (zh) * | 2019-08-19 | 2019-11-05 | 台山市精诚达电路有限公司 | 高频高速挠性电路板制造工艺 |
CN110418507B (zh) * | 2019-08-19 | 2020-11-06 | 台山市精诚达电路有限公司 | 高频高速挠性电路板制造工艺 |
CN112210760A (zh) * | 2020-10-13 | 2021-01-12 | 廖斌 | 一种超薄聚合物的表面处理方法 |
CN112210760B (zh) * | 2020-10-13 | 2021-05-07 | 廖斌 | 一种超薄聚合物的表面处理方法 |
CN112724446A (zh) * | 2020-12-23 | 2021-04-30 | 深圳市信维通信股份有限公司 | 一种有机高分子薄膜金属化方法及天线 |
CN113667952A (zh) * | 2021-08-27 | 2021-11-19 | 江苏耀鸿电子有限公司 | 一种磁控溅射柔性覆铜基板及其制备方法 |
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Free format text: CORRECT: APPLICANT; FROM: ZHUHAI CHUANGYUAN ELECTRONIC CO., LTD. TO: WUHAN GUANGGU CHUANGYUAN ELECTRONIC CO., LTD. Free format text: CORRECT: ADDRESS; FROM: 519031 ZHUHAI, GUANGDONG PROVINCE TO: 430070 WUHAN, HUBEI PROVINCE |
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Effective date of registration: 20221229 Address after: 518105 Complete set of building A, plant 20 Songtang Road, Xiayong Community, Yanluo Street, Bao'an District, Shenzhen, Guangdong Patentee after: Junyou Electrical and Electronic Products (Shenzhen) Co.,Ltd. Address before: 430070 room 1-201, building 6, Great Wall coordinate city, 519 Guanshan Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee before: RICHVIEW ELECTRONICS Co.,Ltd. |
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