CN102691066A - Method and device for treating burrs of electrode plate of lithium battery - Google Patents
Method and device for treating burrs of electrode plate of lithium battery Download PDFInfo
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- CN102691066A CN102691066A CN2012102048241A CN201210204824A CN102691066A CN 102691066 A CN102691066 A CN 102691066A CN 2012102048241 A CN2012102048241 A CN 2012102048241A CN 201210204824 A CN201210204824 A CN 201210204824A CN 102691066 A CN102691066 A CN 102691066A
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Abstract
The invention discloses a method and a device for treating burrs of an electrode plate of a lithium battery. The method comprises the following steps of: S1, providing a plasma etching device; S2, vertically placing the electrode plate of the lithium battery on a second electrode in a cavity of the plasma etching device; S3, pumping the cavity to reach background vacuum, and introducing reaction gas in the cavity, so that the cavity reaches a pre-set air pressure; and S4, turning on and adjusting a first radio frequency source and a second radio frequency source; forming a plasma by exciting the reaction gas in the cavity, and etching by forcing out a section of the electrode plate of the lithium battery. According to the method and device provided by the invention, the section of the electrode plate of the lithium battery is etched by using a dry plasma etching method; and the section of the electrode plate of the lithium battery is forced out by high-energy ions in a plasma in a treating process, and an etching effect is generated, so as to remove metal burrs and metal dust at the edge of the electrode plate. Therefore, the potential safety hazard of internal short circuit, caused by the burrs at the edge of the electrode plate of the lithium battery, is eliminated.
Description
Technical field
The present invention relates to lithium battery pole piece aftertreatment field, particularly relate to a kind of burr treatment process and device of lithium battery pole piece.
Background technology
Lithium ion battery is a kind of novel energy storage cell that grows up after the seventies in 20th century.Because it has high-energy, long lifetime, low consumption, nuisanceless, memory-less effect and advantage such as self-discharge is little, internal resistance is little, cost performance is high, pollution is few; Lithium ion battery has demonstrated huge advantage in progressively using, be widely used in each field such as mobile telephone, notebook computer, pick up camera, digital camera, electromobile, energy storage, space flight.
The technology of lithium cell still also exists a lot of safety issues, like short circuit problem, gaseousness problem etc. along with needs of society has obtained developing by leaps and bounds.In the electrode of lithium cell manufacturing processed, because battery sheet metal collector is ductile, the cutting posterior border can not reach smooth fully and produce a lot of sharp-pointed burrs, has also produced potential safety hazard thus during the cut mechanically electrode slice.Especially carry out in the charge and discharge process at battery, these sharp-pointed burr places can produce stronger electric field, possibly therefore cause the internal short-circuit of battery even cause battery explosion etc.
Removing the method for burr can soak in acid solution, but this treatment process can be dissolved the caking agent of part, causes coming off of electrode materials such as lithium manganate etc., causes the discarded of battery sheet.Conventional treatment method in the industry is to carry out brush back and forth with the hairbrush that speckles with certain acid solution at side to handle, but this method is difficult to fully the aluminium burr disposed.
Therefore, to above-mentioned technical problem, be necessary to provide a kind of burr treatment process and device of lithium battery pole piece, to overcome above-mentioned defective.
Summary of the invention
In view of this, the embodiment of the invention provides a kind of burr treatment process and device of lithium battery pole piece, the method for using plasma dry etching, and the burr that stay on the collector during to cutting lithium battery pole piece are handled.
To achieve these goals, the technical scheme that provides of the embodiment of the invention is following:
A kind of burr treatment process of lithium battery pole piece, said method comprises:
S1, plasma etching apparatus is provided; Said plasma etching apparatus comprises corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with; Be connected with first radio frequency source on said first electrode, second electrode connects and is connected to second radio frequency source;
S2, the lithium battery pole piece vertically is placed on second electrode in the said plasma etching apparatus chamber;
S3, said chamber is evacuated to base vacuum, and in chamber, feeds reactant gases and make chamber reach preset air pressure;
S4, unlatching are also regulated said first radio frequency source and second radio frequency source, the said chamber reaction gases formation plasma body that is excited, and said plasma body bombards to carry out etching the section of lithium battery pole piece.
As further improvement of the present invention, said first electrode and second electrode are the plate electrode that is arranged in parallel.
As further improvement of the present invention, said first electrode is a ruhmkorff coil, and second electrode is a plate electrode, and said first electrode and second electrode laterally arrange.
As further improvement of the present invention, said reactant gases is the mixed gas of sulfur hexafluoride and argon gas.
As further improvement of the present invention, the volumetric flow rate ratio of said sulfur hexafluoride and argon gas is 1:3.
As further improvement of the present invention, the volumetric flow rate of said sulfur hexafluoride and argon gas is respectively 20sccm and 60sccm.
As further improvement of the present invention, said preset air pressure is set at 1.2Pa.
As further improvement of the present invention, the frequency of said first radio frequency source is 40.68MHz, and the frequency of second radio frequency source is 13.56MHz.
As further improvement of the present invention, the power of said first radio frequency source is fixed as 130W.
As further improvement of the present invention, said second electrode bias is fixed as-200V.
Correspondingly, a kind of burr treatment unit of lithium battery pole piece, said device is a plasma etching apparatus, comprising:
Corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with is connected with first radio frequency source on said first electrode, and second electrode connects and is connected to second radio frequency source;
Off-gas pump is used for said chamber is evacuated to base vacuum;
Gas feed is used in chamber, feeding reactant gases.
As further improvement of the present invention, said device also comprises a under meter, is used to regulate and control the flow rate of reactive gas ratio.
Can see by above technical scheme; The method of the burr treatment process of the lithium battery pole piece that the embodiment of the invention provides and device using plasma dry etching is carried out etching processing to lithium battery pole piece section; Energetic ion in the treating processes ionic medium body will bombard the section of lithium battery pole piece and produce etching effect; With metal burr and the metallic dust of removing the electrode slice edge, eliminate the hidden danger that lithium battery pole piece burrs on edges causes internal short-circuit thus; Because adopt the method counter electrode sheet of dry plasma etch to handle, can not produce pollution and other negative impacts by the counter electrode sheet simultaneously.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment that put down in writing among the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The burr treatment unit structural representation of the lithium battery pole piece that Fig. 1 provides for the embodiment of the invention;
The burr process flow synoptic diagram of the lithium battery pole piece that Fig. 2 provides for the embodiment of the invention;
The burr treatment process ionic medium body of the lithium battery pole piece that Fig. 3 provides for the embodiment of the invention is to the structural representation of battery sheet section etching;
Fig. 4 is that former positive electrode material is through the metaloscope section photo after cutting edge;
Fig. 5 is that former positive electrode material is through sem (SEM) the section photo after cutting edge;
Fig. 6 is the metaloscope section photo after the anodal process SF6 plasma treatment of cutting edge in embodiment of the invention Central Plains;
Fig. 7 is the section photo of the sem (SEM) after the anodal process SF6 plasma treatment of cutting edge in embodiment of the invention Central Plains.
Wherein: 10, first electrode; 20, second electrode; 11, first radio frequency source; 21, second radio frequency source; 30, chamber; 31, gas feed.
Embodiment
The invention discloses a kind of burr treatment process of lithium battery pole piece, said method comprises:
S1, plasma etching apparatus is provided; Plasma etching apparatus comprises corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with; Be connected with first radio frequency source on first electrode, second electrode connects and is connected to second radio frequency source;
S2, the lithium battery pole piece vertically is placed on second electrode in the plasma etching apparatus chamber;
S3, chamber is evacuated to base vacuum, and in chamber, feeds reactant gases and make chamber reach preset air pressure;
S4, unlatching are also regulated first radio frequency source and second radio frequency source, the chamber reaction gases formation plasma body that is excited, and plasma body bombards to carry out etching the section of lithium battery pole piece.
Correspondingly, a kind of burr treatment unit of lithium battery pole piece, this device is plasma etching apparatus, comprising:
Corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with is connected with first radio frequency source on first electrode, second electrode connects and is connected to second radio frequency source;
Off-gas pump is used for said chamber is evacuated to base vacuum;
Gas feed is used in chamber, feeding reactant gases.
The method of using plasma dry etching of the present invention, the burr that stay on the collector during to cutting lithium battery pole piece are handled.
In order to make those skilled in the art person understand the technical scheme among the present invention better; To combine the accompanying drawing in the embodiment of the invention below; Technical scheme in the embodiment of the invention is carried out clear, intactly description; Obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all should belong to the scope of the present invention's protection.
Join the burr treatment unit structural representation of the lithium battery pole piece that provides for embodiment of the present invention shown in Figure 1.This device is plasma etching apparatus, comprising:
Being connected with first radio frequency source, 11, the second electrodes 20 on chamber 30, the first electrodes 10 that corresponding up and down first electrode 10, second electrode 20 and first electrode 10 that is provided with and second electrode are 20 connects and is connected to second radio frequency source 21;
Off-gas pump (not shown) is used for chamber 30 is evacuated to base vacuum, and wherein off-gas pump is the associated plant of bleeding, and comprises mechanical pump and molecular pump;
Further, this plasma etching device also comprises a under meter, is used to regulate and control the flow rate of reactive gas ratio.
Plasma etching apparatus is divided into capacitively coupled plasma etching device and inductive coupled plasma etching device, and its difference is the different of first electrode 10 and second electrode 20.In the capacitively coupled plasma etching device, first electrode 10 and the plate electrode of second electrode 20 for being arranged in parallel, and in the inductive coupled plasma etching device, first electrode 10 is set to ruhmkorff coil, second electrode 20 is a plate electrode.Being example with the capacitively coupled plasma etching device in the present invention describes the burr treatment process of lithium battery pole piece, and its method is equally applicable to the inductive coupled plasma etching device.
In conjunction with shown in Figure 2, the burr treatment process of the lithium battery pole piece that embodiment of the present invention provides may further comprise the steps:
S1, plasma etching apparatus is provided; Plasma etching apparatus comprises corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with; Be connected with first radio frequency source on first electrode, second electrode connects and is connected to second radio frequency source;
S2, the lithium battery pole piece vertically is placed on second electrode in the plasma etching apparatus chamber;
S3, startup off-gas pump are evacuated to base vacuum (10 with chamber
-3And in chamber, feed reactant gases through inlet mouth and make chamber reach preset air pressure Pa).Preferably, the reactant gases in this embodiment is sulfur hexafluoride (SF
6) and the mixed gas of argon gas (Ar), and sulfur hexafluoride (SF
6) and the volumetric flow rate ratio of argon gas (Ar) be 1:3, preferably, regulated and control sulfur hexafluoride (SF through the under meter in the experimental installation
6) and the volumetric flow rate of argon gas (Ar) be respectively 20sccm and 60sccm, wherein sccm (standard-state cubic centimeter per minute, mark condition milliliter per minute) is a volumetric flow rate unit, regulates chamber pressure and is fixed as 1.2Pa;
S4, unlatching are also regulated first radio frequency source and second radio frequency source, the chamber reaction gases formation plasma body that is excited, and plasma body bombards to carry out etching the section of lithium battery pole piece.Preferably; The frequency of first radio frequency source is 40.68MHz in this embodiment; The frequency of second radio frequency source is 13.56MHz; The power of first radio frequency source is fixed as 130W simultaneously, and second electrode bias is fixed as-200V, under the exciting of first radio frequency source and second radio frequency source, produces the plasma body of corresponding etching gas.In conjunction with shown in Figure 3, when the ion 2 (ions) in plasma body 1 (plasma) bombarded lithium battery pole piece 3 (sample), the bottom crown bias voltage can improve the ionic bombarding energy, produces higher sputtering yield, produces etching effect with this.Bombardment lower electrode sheet section at energetic ion can be removed the burr on the section thus by effective etching.
Ginseng Fig. 4 is extremely shown in Figure 7 to be the design sketch of practical application.
Fig. 4 is the metaloscope section photo after former positive electrode material process is cut edge, and Fig. 5 is that former positive electrode material is through sem (SEM) the section photo afterwards of cutting edge.Therefrom Fig. 4 can find out that galvanic cell electrode slice collector electrode aluminium sandwich of layers after cutting has tangible burr to exist, and has a large amount of metallic dusts to be embedded in the coating layer, and shinny place is an aluminium in Fig. 4 metaloscope picture; Pattern from the red square frame of Fig. 5 can find out that the galvanic cell collector electrode has tangible extension vestige after cutting, and the dark place is an aluminium in Fig. 5 scanning electron microscope diagram sheet.
And adopt the burr treatment process of above-mentioned lithium battery pole piece, the section that cuts back lithium battery pole piece is carried out the plasma dry etching processing after, the Burr Problem in the galvanic cell electrode slice obtains bigger improvement.
Fig. 6 is the anodal process SF that cuts edge in embodiment of the invention Central Plains
6Metaloscope section photo after the plasma treatment, Fig. 7 are the anodal process SF that cuts edge in embodiment of the invention Central Plains
6The section photo of the sem after the plasma treatment (SEM).Fig. 6 is compared with Fig. 4, can find out for most burrs and metallic dust all not existed, it is more clear bright and clear that the aluminium collector electrode after the processing manifests ground; Fig. 7 aluminium for Fig. 5 is more exposed, and this explanation has tangible etching effect at this, and the lithium battery pole piece after testing plasma soma method etching processing learns that aluminium content is reduced to 15% of original content in the processing rear electrode sheet coating layer.Removing of aluminium bits and burr processing are effective in the plasma dry lithographic method counter electrode sheet that this explanation employing is source gas with the etching gas.
Can see by above technical scheme; The method of the burr treatment process of the lithium battery pole piece that the embodiment of the invention provides and device using plasma dry etching is carried out etching processing to lithium battery pole piece section; Energetic ion in the treating processes ionic medium body will bombard the section of lithium battery pole piece and produce etching effect; With metal burr and the metallic dust of removing the electrode slice edge, eliminated the hidden danger that lithium battery pole piece burrs on edges causes internal short-circuit thus; Because adopt the method counter electrode sheet of dry plasma etch to handle, can not produce pollution and other negative impacts by the counter electrode sheet simultaneously.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned example embodiment, and under the situation that does not deviate from spirit of the present invention or essential characteristic, can realize the present invention with other specific form.Therefore; No matter from which point; All should regard embodiment as exemplary; And be nonrestrictive, scope of the present invention is limited accompanying claims rather than above-mentioned explanation, therefore is intended to the implication of the equivalents that drops on claim and all changes in the scope are included in the present invention.Should any Reference numeral in the claim be regarded as limit related claim.
In addition; Describing according to embodiment though should be appreciated that this specification sheets, is not that each embodiment only comprises an independently technical scheme; This narrating mode of specification sheets only is for clarity sake; Those skilled in the art should make specification sheets as a whole, and the technical scheme among each embodiment also can form other embodiments that it will be appreciated by those skilled in the art that through appropriate combination.
Claims (12)
1. the burr treatment process of a lithium battery pole piece is characterized in that, said method comprises:
S1, plasma etching apparatus is provided; Said plasma etching apparatus comprises corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with; Be connected with first radio frequency source on said first electrode, second electrode connects and is connected to second radio frequency source;
S2, the lithium battery pole piece vertically is placed on second electrode in the said plasma etching apparatus chamber;
S3, said chamber is evacuated to base vacuum, and in chamber, feeds reactant gases and make chamber reach preset air pressure;
S4, unlatching are also regulated said first radio frequency source and second radio frequency source, the said chamber reaction gases formation plasma body that is excited, and said plasma body bombards to carry out etching the section of lithium battery pole piece.
2. method according to claim 1 is characterized in that, said first electrode and second electrode are the plate electrode that is arranged in parallel.
3. method according to claim 1 is characterized in that, said first electrode is a ruhmkorff coil, and second electrode is a plate electrode, and said first electrode and second electrode laterally arrange.
4. method according to claim 1 is characterized in that, said reactant gases is the mixed gas of sulfur hexafluoride and argon gas.
5. method according to claim 4 is characterized in that, the volumetric flow rate ratio of said sulfur hexafluoride and argon gas is 1:3.
6. method according to claim 5 is characterized in that the volumetric flow rate of said sulfur hexafluoride and argon gas is respectively 20sccm and 60sccm.
7. method according to claim 4 is characterized in that said preset air pressure is set at 1.2Pa.
8. method according to claim 1 is characterized in that, the frequency of said first radio frequency source is 40.68MHz, and the frequency of second radio frequency source is 13.56MHz.
9. method according to claim 8 is characterized in that the power of said first radio frequency source is fixed as 130W.
10. method according to claim 8 is characterized in that, said second electrode bias is fixed as-200V.
11. the burr treatment unit of a lithium battery pole piece as claimed in claim 1 is characterized in that, said device is a plasma etching apparatus, comprising:
Corresponding up and down first electrode, second electrode and first electrode and the second interelectrode chamber that is provided with is connected with first radio frequency source on said first electrode, and second electrode connects and is connected to second radio frequency source;
Off-gas pump is used for said chamber is evacuated to base vacuum;
Gas feed is used in chamber, feeding reactant gases.
12. device according to claim 11 is characterized in that, said device also comprises a under meter, is used to regulate and control the flow rate of reactive gas ratio.
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| CN103700597A (en) * | 2013-12-27 | 2014-04-02 | 苏州市奥普斯等离子体科技有限公司 | Preparation method for molded interconnection device |
| CN103700564A (en) * | 2013-12-27 | 2014-04-02 | 苏州市奥普斯等离子体科技有限公司 | Preparation device for molded interconnection device |
| CN104282884A (en) * | 2013-07-05 | 2015-01-14 | 深圳市大成精密设备有限公司 | Processing technology and equipment for removing aluminum skimmings of lithium battery electrode plate by use of plasma |
| CN106252665A (en) * | 2016-09-07 | 2016-12-21 | 清华大学 | Affluxion body in lithium ion batteries and surface spikes processing method thereof |
| CN108511600A (en) * | 2018-02-28 | 2018-09-07 | 云南中烟工业有限责任公司 | A kind of sound causes the preparation method of atomization chip |
| CN108701817A (en) * | 2016-09-01 | 2018-10-23 | 株式会社Lg化学 | The electrode for lithium secondary battery for preparing the method for the electrode for lithium secondary battery and thus preparing |
| CN109860513A (en) * | 2019-02-28 | 2019-06-07 | 中车青岛四方车辆研究所有限公司 | Electrodes of lithium-ion batteries and preparation method thereof and lithium ion battery |
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| CN103700564A (en) * | 2013-12-27 | 2014-04-02 | 苏州市奥普斯等离子体科技有限公司 | Preparation device for molded interconnection device |
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| CN108701817A (en) * | 2016-09-01 | 2018-10-23 | 株式会社Lg化学 | The electrode for lithium secondary battery for preparing the method for the electrode for lithium secondary battery and thus preparing |
| CN106252665A (en) * | 2016-09-07 | 2016-12-21 | 清华大学 | Affluxion body in lithium ion batteries and surface spikes processing method thereof |
| CN106252665B (en) * | 2016-09-07 | 2019-02-05 | 清华大学 | Affluxion body in lithium ion batteries and its surface spikes processing method |
| CN108511600A (en) * | 2018-02-28 | 2018-09-07 | 云南中烟工业有限责任公司 | A kind of sound causes the preparation method of atomization chip |
| CN109860513A (en) * | 2019-02-28 | 2019-06-07 | 中车青岛四方车辆研究所有限公司 | Electrodes of lithium-ion batteries and preparation method thereof and lithium ion battery |
| CN109860513B (en) * | 2019-02-28 | 2020-07-28 | 中车青岛四方车辆研究所有限公司 | Lithium ion battery pole piece, preparation method thereof and lithium ion battery |
| CN113921192A (en) * | 2021-09-22 | 2022-01-11 | 香港城市大学成都研究院 | Preparation method of high-precision patternable micro-nano silver nanowire transparent electrode |
| CN113921192B (en) * | 2021-09-22 | 2024-05-03 | 香港城市大学成都研究院 | Preparation method of high-precision patternable micro-nano silver nanowire transparent electrode |
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Application publication date: 20120926 |