CN102633442A - 温控针支撑基板进行配向膜预干燥的装置及方法 - Google Patents
温控针支撑基板进行配向膜预干燥的装置及方法 Download PDFInfo
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- CN102633442A CN102633442A CN2012101173598A CN201210117359A CN102633442A CN 102633442 A CN102633442 A CN 102633442A CN 2012101173598 A CN2012101173598 A CN 2012101173598A CN 201210117359 A CN201210117359 A CN 201210117359A CN 102633442 A CN102633442 A CN 102633442A
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- temperature control
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- control pin
- supporting substrate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Drying Of Solid Materials (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210117359.8A CN102633442B (zh) | 2012-04-19 | 2012-04-19 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
US13/515,806 US9075266B2 (en) | 2012-04-19 | 2012-04-25 | Device for prebaking alignment film by using temperature-controllable pin to support substrate and method thereof |
PCT/CN2012/074634 WO2013155729A1 (zh) | 2012-04-19 | 2012-04-25 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210117359.8A CN102633442B (zh) | 2012-04-19 | 2012-04-19 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102633442A true CN102633442A (zh) | 2012-08-15 |
CN102633442B CN102633442B (zh) | 2015-12-09 |
Family
ID=46618044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210117359.8A Expired - Fee Related CN102633442B (zh) | 2012-04-19 | 2012-04-19 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102633442B (zh) |
WO (1) | WO2013155729A1 (zh) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103466927A (zh) * | 2013-09-09 | 2013-12-25 | 深圳市华星光电技术有限公司 | 对基板进行烤焙处理的装置及方法 |
CN103676296A (zh) * | 2013-12-06 | 2014-03-26 | 深圳市华星光电技术有限公司 | 用于显示器的玻璃基板及其制造方法 |
CN104096896A (zh) * | 2014-07-11 | 2014-10-15 | 桂林天祥机械制造有限公司 | 通孔内键槽自动加工设备 |
WO2014201704A1 (zh) * | 2013-06-20 | 2014-12-24 | 深圳市华星光电技术有限公司 | 温控针、用于紫外线硬化配向中支撑基板的装置及其方法 |
CN104570419A (zh) * | 2014-12-26 | 2015-04-29 | 深圳市华星光电技术有限公司 | 吸附式载台及其吸附方法 |
CN104898373A (zh) * | 2014-03-07 | 2015-09-09 | 东友精细化工有限公司 | 着色感光性树脂组合物及利用其的滤色器 |
CN104932135A (zh) * | 2015-05-18 | 2015-09-23 | 合肥京东方光电科技有限公司 | 一种探针更换装置及方法 |
US9382622B2 (en) | 2013-12-06 | 2016-07-05 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Glass substrate for display and manufacturing method thereof |
CN106111492A (zh) * | 2016-08-26 | 2016-11-16 | 合肥京东方光电科技有限公司 | 一种固化设备及固化方法 |
CN106894002A (zh) * | 2017-03-31 | 2017-06-27 | 昆山国显光电有限公司 | 一种pecvd成膜装置及其成膜方法 |
CN107357141A (zh) * | 2017-07-28 | 2017-11-17 | 武汉华星光电技术有限公司 | 一种基板烘烤装置及方法 |
CN107505739A (zh) * | 2017-09-04 | 2017-12-22 | 深圳市华星光电半导体显示技术有限公司 | 基板支撑件及配向膜预烘烤装置 |
CN107942549A (zh) * | 2017-12-05 | 2018-04-20 | 张家港康得新光电材料有限公司 | 配向膜烘干装置 |
WO2018113015A1 (zh) * | 2016-12-22 | 2018-06-28 | 武汉华星光电技术有限公司 | 适用于柔性基板的热真空干燥装置 |
CN108251821A (zh) * | 2018-04-13 | 2018-07-06 | 昆山国显光电有限公司 | 一种应用于pecvd成膜的基座 |
CN108761872A (zh) * | 2018-04-11 | 2018-11-06 | 深圳市华星光电技术有限公司 | 一种用于基板上的支撑针及支撑件 |
CN108803260A (zh) * | 2018-06-01 | 2018-11-13 | 上海华力集成电路制造有限公司 | 曝光后烘焙装置及晶圆线宽优化方法 |
CN111721092A (zh) * | 2020-06-26 | 2020-09-29 | 贾萍 | 一种红木家具加工用烘干设备及其烘干方法 |
CN114454628A (zh) * | 2022-01-28 | 2022-05-10 | Tcl华星光电技术有限公司 | 真空干燥装置 |
CN115672686A (zh) * | 2021-07-29 | 2023-02-03 | 芝浦机械电子装置株式会社 | 加热处理装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109283806A (zh) * | 2018-11-14 | 2019-01-29 | 蚌埠高华电子股份有限公司 | 一种ito光刻胶坚膜烘焙调控装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000181079A (ja) * | 1998-12-16 | 2000-06-30 | Tokyo Electron Ltd | 基板処理装置 |
TW591346B (en) * | 2002-11-19 | 2004-06-11 | Au Optronics Corp | Soft baking equipment for photoresist and method for forming a patterned photoresist |
CN1708190A (zh) * | 2004-05-26 | 2005-12-14 | 京瓷株式会社 | 加热器和晶片加热装置及加热器的制造方法 |
CN101598908A (zh) * | 2008-06-05 | 2009-12-09 | 东京毅力科创株式会社 | 减压干燥装置 |
CN102085511A (zh) * | 2010-11-22 | 2011-06-08 | 深圳市华星光电技术有限公司 | 配向膜干燥装置及干燥方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3965579B2 (ja) * | 2003-07-03 | 2007-08-29 | セイコーエプソン株式会社 | 圧電体層の形成方法 |
-
2012
- 2012-04-19 CN CN201210117359.8A patent/CN102633442B/zh not_active Expired - Fee Related
- 2012-04-25 WO PCT/CN2012/074634 patent/WO2013155729A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000181079A (ja) * | 1998-12-16 | 2000-06-30 | Tokyo Electron Ltd | 基板処理装置 |
TW591346B (en) * | 2002-11-19 | 2004-06-11 | Au Optronics Corp | Soft baking equipment for photoresist and method for forming a patterned photoresist |
CN1708190A (zh) * | 2004-05-26 | 2005-12-14 | 京瓷株式会社 | 加热器和晶片加热装置及加热器的制造方法 |
CN101598908A (zh) * | 2008-06-05 | 2009-12-09 | 东京毅力科创株式会社 | 减压干燥装置 |
CN102085511A (zh) * | 2010-11-22 | 2011-06-08 | 深圳市华星光电技术有限公司 | 配向膜干燥装置及干燥方法 |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014201704A1 (zh) * | 2013-06-20 | 2014-12-24 | 深圳市华星光电技术有限公司 | 温控针、用于紫外线硬化配向中支撑基板的装置及其方法 |
CN103466927A (zh) * | 2013-09-09 | 2013-12-25 | 深圳市华星光电技术有限公司 | 对基板进行烤焙处理的装置及方法 |
CN103466927B (zh) * | 2013-09-09 | 2016-06-08 | 深圳市华星光电技术有限公司 | 对基板进行烤焙处理的装置及方法 |
US9382622B2 (en) | 2013-12-06 | 2016-07-05 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Glass substrate for display and manufacturing method thereof |
CN103676296A (zh) * | 2013-12-06 | 2014-03-26 | 深圳市华星光电技术有限公司 | 用于显示器的玻璃基板及其制造方法 |
CN104898373A (zh) * | 2014-03-07 | 2015-09-09 | 东友精细化工有限公司 | 着色感光性树脂组合物及利用其的滤色器 |
CN104898373B (zh) * | 2014-03-07 | 2020-08-14 | 东友精细化工有限公司 | 着色感光性树脂组合物及利用其的滤色器 |
CN104096896A (zh) * | 2014-07-11 | 2014-10-15 | 桂林天祥机械制造有限公司 | 通孔内键槽自动加工设备 |
CN104570419A (zh) * | 2014-12-26 | 2015-04-29 | 深圳市华星光电技术有限公司 | 吸附式载台及其吸附方法 |
CN104570419B (zh) * | 2014-12-26 | 2018-01-30 | 深圳市华星光电技术有限公司 | 吸附式载台及其吸附方法 |
CN104932135A (zh) * | 2015-05-18 | 2015-09-23 | 合肥京东方光电科技有限公司 | 一种探针更换装置及方法 |
CN104932135B (zh) * | 2015-05-18 | 2017-11-10 | 合肥京东方光电科技有限公司 | 一种探针更换装置及方法 |
CN106111492A (zh) * | 2016-08-26 | 2016-11-16 | 合肥京东方光电科技有限公司 | 一种固化设备及固化方法 |
CN106111492B (zh) * | 2016-08-26 | 2022-09-27 | 合肥京东方光电科技有限公司 | 一种固化设备及固化方法 |
WO2018113015A1 (zh) * | 2016-12-22 | 2018-06-28 | 武汉华星光电技术有限公司 | 适用于柔性基板的热真空干燥装置 |
CN106894002A (zh) * | 2017-03-31 | 2017-06-27 | 昆山国显光电有限公司 | 一种pecvd成膜装置及其成膜方法 |
CN107357141A (zh) * | 2017-07-28 | 2017-11-17 | 武汉华星光电技术有限公司 | 一种基板烘烤装置及方法 |
CN107357141B (zh) * | 2017-07-28 | 2020-11-10 | 武汉华星光电技术有限公司 | 一种基板烘烤装置及方法 |
CN107505739A (zh) * | 2017-09-04 | 2017-12-22 | 深圳市华星光电半导体显示技术有限公司 | 基板支撑件及配向膜预烘烤装置 |
CN107942549A (zh) * | 2017-12-05 | 2018-04-20 | 张家港康得新光电材料有限公司 | 配向膜烘干装置 |
CN108761872A (zh) * | 2018-04-11 | 2018-11-06 | 深圳市华星光电技术有限公司 | 一种用于基板上的支撑针及支撑件 |
CN108251821A (zh) * | 2018-04-13 | 2018-07-06 | 昆山国显光电有限公司 | 一种应用于pecvd成膜的基座 |
CN108803260A (zh) * | 2018-06-01 | 2018-11-13 | 上海华力集成电路制造有限公司 | 曝光后烘焙装置及晶圆线宽优化方法 |
CN111721092A (zh) * | 2020-06-26 | 2020-09-29 | 贾萍 | 一种红木家具加工用烘干设备及其烘干方法 |
CN115672686A (zh) * | 2021-07-29 | 2023-02-03 | 芝浦机械电子装置株式会社 | 加热处理装置 |
CN115672686B (zh) * | 2021-07-29 | 2024-06-11 | 芝浦机械电子装置株式会社 | 加热处理装置 |
CN114454628A (zh) * | 2022-01-28 | 2022-05-10 | Tcl华星光电技术有限公司 | 真空干燥装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2013155729A1 (zh) | 2013-10-24 |
CN102633442B (zh) | 2015-12-09 |
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GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Device and method for prebaking polyemid by supporting base plate with temperature control pins Effective date of registration: 20190426 Granted publication date: 20151209 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
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Date of cancellation: 20201016 Granted publication date: 20151209 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
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