CN102633442B - 温控针支撑基板进行配向膜预干燥的装置及方法 - Google Patents
温控针支撑基板进行配向膜预干燥的装置及方法 Download PDFInfo
- Publication number
- CN102633442B CN102633442B CN201210117359.8A CN201210117359A CN102633442B CN 102633442 B CN102633442 B CN 102633442B CN 201210117359 A CN201210117359 A CN 201210117359A CN 102633442 B CN102633442 B CN 102633442B
- Authority
- CN
- China
- Prior art keywords
- temperature control
- substrate
- control pin
- pin
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Drying Of Solid Materials (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (2)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210117359.8A CN102633442B (zh) | 2012-04-19 | 2012-04-19 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
PCT/CN2012/074634 WO2013155729A1 (zh) | 2012-04-19 | 2012-04-25 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
US13/515,806 US9075266B2 (en) | 2012-04-19 | 2012-04-25 | Device for prebaking alignment film by using temperature-controllable pin to support substrate and method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210117359.8A CN102633442B (zh) | 2012-04-19 | 2012-04-19 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102633442A CN102633442A (zh) | 2012-08-15 |
CN102633442B true CN102633442B (zh) | 2015-12-09 |
Family
ID=46618044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210117359.8A Expired - Fee Related CN102633442B (zh) | 2012-04-19 | 2012-04-19 | 温控针支撑基板进行配向膜预干燥的装置及方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102633442B (zh) |
WO (1) | WO2013155729A1 (zh) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103309090A (zh) * | 2013-06-20 | 2013-09-18 | 深圳市华星光电技术有限公司 | 用于紫外线硬化配向中支撑基板的装置及其方法 |
CN103466927B (zh) * | 2013-09-09 | 2016-06-08 | 深圳市华星光电技术有限公司 | 对基板进行烤焙处理的装置及方法 |
CN103676296B (zh) * | 2013-12-06 | 2016-08-17 | 深圳市华星光电技术有限公司 | 用于显示器的玻璃基板及其制造方法 |
US9382622B2 (en) | 2013-12-06 | 2016-07-05 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Glass substrate for display and manufacturing method thereof |
KR101689058B1 (ko) * | 2014-03-07 | 2016-12-22 | 동우 화인켐 주식회사 | 착색 감광성 수지 조성물 및 이를 이용하는 컬러 필터 |
CN104096896B (zh) * | 2014-07-11 | 2016-04-06 | 桂林天祥机械制造有限公司 | 通孔内键槽自动加工设备 |
CN104570419B (zh) * | 2014-12-26 | 2018-01-30 | 深圳市华星光电技术有限公司 | 吸附式载台及其吸附方法 |
CN104932135B (zh) * | 2015-05-18 | 2017-11-10 | 合肥京东方光电科技有限公司 | 一种探针更换装置及方法 |
CN106111492B (zh) * | 2016-08-26 | 2022-09-27 | 合肥京东方光电科技有限公司 | 一种固化设备及固化方法 |
CN106607320B (zh) * | 2016-12-22 | 2019-10-01 | 武汉华星光电技术有限公司 | 适用于柔性基板的热真空干燥装置 |
CN106894002A (zh) * | 2017-03-31 | 2017-06-27 | 昆山国显光电有限公司 | 一种pecvd成膜装置及其成膜方法 |
CN107357141B (zh) * | 2017-07-28 | 2020-11-10 | 武汉华星光电技术有限公司 | 一种基板烘烤装置及方法 |
CN107505739B (zh) * | 2017-09-04 | 2020-04-28 | 深圳市华星光电半导体显示技术有限公司 | 基板支撑件及配向膜预烘烤装置 |
CN107942549B (zh) * | 2017-12-05 | 2020-09-29 | 张家港康得新光电材料有限公司 | 配向膜烘干装置 |
CN108761872A (zh) * | 2018-04-11 | 2018-11-06 | 深圳市华星光电技术有限公司 | 一种用于基板上的支撑针及支撑件 |
CN108251821B (zh) * | 2018-04-13 | 2020-04-10 | 昆山国显光电有限公司 | 一种应用于pecvd成膜的基座 |
CN108803260A (zh) * | 2018-06-01 | 2018-11-13 | 上海华力集成电路制造有限公司 | 曝光后烘焙装置及晶圆线宽优化方法 |
CN109283806A (zh) * | 2018-11-14 | 2019-01-29 | 蚌埠高华电子股份有限公司 | 一种ito光刻胶坚膜烘焙调控装置 |
CN111721092A (zh) * | 2020-06-26 | 2020-09-29 | 贾萍 | 一种红木家具加工用烘干设备及其烘干方法 |
JP7366086B2 (ja) * | 2021-07-29 | 2023-10-20 | 芝浦メカトロニクス株式会社 | 加熱処理装置 |
CN114454628A (zh) * | 2022-01-28 | 2022-05-10 | Tcl华星光电技术有限公司 | 真空干燥装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000181079A (ja) * | 1998-12-16 | 2000-06-30 | Tokyo Electron Ltd | 基板処理装置 |
TW591346B (en) * | 2002-11-19 | 2004-06-11 | Au Optronics Corp | Soft baking equipment for photoresist and method for forming a patterned photoresist |
CN1708190A (zh) * | 2004-05-26 | 2005-12-14 | 京瓷株式会社 | 加热器和晶片加热装置及加热器的制造方法 |
CN101598908A (zh) * | 2008-06-05 | 2009-12-09 | 东京毅力科创株式会社 | 减压干燥装置 |
CN102085511A (zh) * | 2010-11-22 | 2011-06-08 | 深圳市华星光电技术有限公司 | 配向膜干燥装置及干燥方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3965579B2 (ja) * | 2003-07-03 | 2007-08-29 | セイコーエプソン株式会社 | 圧電体層の形成方法 |
-
2012
- 2012-04-19 CN CN201210117359.8A patent/CN102633442B/zh not_active Expired - Fee Related
- 2012-04-25 WO PCT/CN2012/074634 patent/WO2013155729A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000181079A (ja) * | 1998-12-16 | 2000-06-30 | Tokyo Electron Ltd | 基板処理装置 |
TW591346B (en) * | 2002-11-19 | 2004-06-11 | Au Optronics Corp | Soft baking equipment for photoresist and method for forming a patterned photoresist |
CN1708190A (zh) * | 2004-05-26 | 2005-12-14 | 京瓷株式会社 | 加热器和晶片加热装置及加热器的制造方法 |
CN101598908A (zh) * | 2008-06-05 | 2009-12-09 | 东京毅力科创株式会社 | 减压干燥装置 |
CN102085511A (zh) * | 2010-11-22 | 2011-06-08 | 深圳市华星光电技术有限公司 | 配向膜干燥装置及干燥方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2013155729A1 (zh) | 2013-10-24 |
CN102633442A (zh) | 2012-08-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102633442B (zh) | 温控针支撑基板进行配向膜预干燥的装置及方法 | |
JP6400532B2 (ja) | エピタキシャル反応炉の温度制御システムおよび方法 | |
JP2011139068A5 (zh) | ||
CN102722054B (zh) | 一种液晶材料的光配向方法及装置 | |
WO2014173089A1 (zh) | 取向膜预固化设备 | |
WO2012021321A3 (en) | Composite substrates for direct heating and increased temperature uniformity | |
CN103309090A (zh) | 用于紫外线硬化配向中支撑基板的装置及其方法 | |
CN104752136A (zh) | 一种等离子体处理装置及其静电卡盘 | |
WO2014134887A1 (zh) | 取向膜制备方法及*** | |
US9075266B2 (en) | Device for prebaking alignment film by using temperature-controllable pin to support substrate and method thereof | |
CN103048832B (zh) | 聚酰亚胺溶液涂布方法及装置 | |
WO2013014258A3 (de) | Plasma-abscheideprozess zur herstellung einer optischen vorform mit einer mantelglasschicht aus fluordotiertem quarzglas | |
CN203811280U (zh) | 非制冷无基底光读出红外fpa探测器的温控结构 | |
CN202661756U (zh) | 取向液预固化设备 | |
CN104536165A (zh) | 显示设备的加工机台和玻璃基板的加工方法 | |
KR101848759B1 (ko) | 온도조절부재를 구비한 플라스틱 광학 렌즈 제조용 금형장치 | |
JP2010243110A (ja) | 塗布膜形成用加熱乾燥装置 | |
JP2010243109A (ja) | 塗布膜形成用加熱乾燥装置 | |
KR101261399B1 (ko) | 히터시스템의 온도 제어시스템 및 이를 이용한 온도 제어방법 | |
JP5292799B2 (ja) | 基板用支持ピン | |
CN104708897A (zh) | 一种膜转印设备、转印版组件、转印设备吸附力控制装置 | |
WO2018196327A1 (zh) | 加热设备 | |
Gu et al. | An improved approach to fabricate distributed feedback laser based on nanoimprint lithography | |
KR101552935B1 (ko) | 롤 임프린팅 장치 및 그 방법 | |
JP2019114378A (ja) | 基板の局所加熱装置、流動物が付与された基板の前記流動物の端部膜厚の制御装置、流動物のコーティング装置、基板上に付与された流動物の乾燥装置および流動物の端部厚みの制御方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Device and method for prebaking polyemid by supporting base plate with temperature control pins Effective date of registration: 20190426 Granted publication date: 20151209 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20151209 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151209 |