CN102576149B - 用于移动微型机械元件的致动器 - Google Patents
用于移动微型机械元件的致动器 Download PDFInfo
- Publication number
- CN102576149B CN102576149B CN201080040736.1A CN201080040736A CN102576149B CN 102576149 B CN102576149 B CN 102576149B CN 201080040736 A CN201080040736 A CN 201080040736A CN 102576149 B CN102576149 B CN 102576149B
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- Prior art keywords
- film
- stiffener
- frame
- actuator
- actuator component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 210000000056 organ Anatomy 0.000 title description 2
- 239000003351 stiffener Substances 0.000 claims abstract description 54
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 238000005259 measurement Methods 0.000 claims description 12
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 8
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 description 24
- 239000010703 silicon Substances 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 23
- 239000012190 activator Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000411 transmission spectrum Methods 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 102000000584 Calmodulin Human genes 0.000 description 1
- 108010041952 Calmodulin Proteins 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1827—Motorised alignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
- Lasers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20093022A NO336140B1 (no) | 2009-09-18 | 2009-09-18 | Aktuator for mikro optisk enhet |
NO20093022 | 2009-09-18 | ||
PCT/EP2010/063628 WO2011033028A1 (en) | 2009-09-18 | 2010-09-16 | Actuator for moving a micro mechanical element |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102576149A CN102576149A (zh) | 2012-07-11 |
CN102576149B true CN102576149B (zh) | 2016-01-20 |
Family
ID=43416478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080040736.1A Active CN102576149B (zh) | 2009-09-18 | 2010-09-16 | 用于移动微型机械元件的致动器 |
Country Status (10)
Country | Link |
---|---|
US (2) | US9250418B2 (zh) |
EP (1) | EP2478404B1 (zh) |
JP (1) | JP5778677B2 (zh) |
CN (1) | CN102576149B (zh) |
BR (1) | BR112012006044B1 (zh) |
CA (1) | CA2770937C (zh) |
DK (1) | DK2478404T3 (zh) |
EA (1) | EA021493B1 (zh) |
NO (1) | NO336140B1 (zh) |
WO (1) | WO2011033028A1 (zh) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9236552B2 (en) | 2013-04-04 | 2016-01-12 | William N. Carr | Thermoelectric micro-platform for cooling and temperature sensing |
DE102013105557B4 (de) * | 2013-05-29 | 2015-06-11 | Michael Förg | Piezoelektrischer Aktor |
US9510103B2 (en) * | 2013-09-09 | 2016-11-29 | Audio Pixels Ltd. | Microelectromechanical apparatus for generating a physical effect |
JP6284076B2 (ja) * | 2013-11-22 | 2018-02-28 | 国立大学法人豊橋技術科学大学 | 物理・化学センサおよび特定物質の測定方法 |
JP6284427B2 (ja) * | 2014-05-21 | 2018-02-28 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
US9481572B2 (en) | 2014-07-17 | 2016-11-01 | Texas Instruments Incorporated | Optical electronic device and method of fabrication |
US9372114B2 (en) * | 2014-08-20 | 2016-06-21 | William N. Carr | Spectrophotometer comprising an integrated Fabry-Perot interferometer |
KR20180031744A (ko) | 2015-07-22 | 2018-03-28 | 오디오 픽셀즈 리미티드 | Dsr 스피커 요소 및 그 제조 방법 |
US10567883B2 (en) | 2015-07-22 | 2020-02-18 | Audio Pixels Ltd. | Piezo-electric actuators |
NO344002B1 (en) | 2015-09-29 | 2019-08-12 | Sintef Tto As | Optical gas detector |
NO20151312A1 (en) | 2015-10-05 | 2017-04-06 | Sintef Tto As | Infrared source |
TWI581004B (zh) * | 2015-11-18 | 2017-05-01 | 財團法人工業技術研究院 | 可調式光學裝置 |
KR101722876B1 (ko) | 2016-04-25 | 2017-04-03 | 서울대학교산학협력단 | 루프로 연결되어 지능적으로 변형하는 구동기 |
NO20161086A1 (no) | 2016-06-29 | 2018-01-01 | Tunable As | Modulerbar Fabry-Perot |
CN106533250B (zh) * | 2016-12-21 | 2018-08-24 | 深圳大学 | 一种多定子平面阵列结构的超声波电机 |
IT201700091226A1 (it) * | 2017-08-07 | 2019-02-07 | St Microelectronics Srl | Dispositivo mems comprendente una membrana ed un attuatore per controllare la curvatura della membrana e compensare deformazioni indesiderate della membrana |
CN107324275B (zh) * | 2017-08-29 | 2019-01-04 | 山东大学 | 一种串联环扇形压电三维微伺服平台的结构 |
DE102018200378A1 (de) | 2018-01-11 | 2019-07-11 | Robert Bosch Gmbh | Interferometer und Verfahren zum Herstellen eines Interferometers |
DE102018220451A1 (de) * | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Optische Filtereinrichtung und Verfahren zum Herstellen einer optischen Filtereinrichtung |
DE102018220422A1 (de) * | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Aktuationseinrichtung für ein mikromechanisches Bauelement, mikromechanisches Bauelement und Verfahren zum Herstellen eines mikromechanisches Bauelements |
NO20191052A1 (en) | 2019-09-02 | 2021-03-03 | Optronics Tech As | Gas detector |
GB201914045D0 (en) | 2019-09-30 | 2019-11-13 | Sintef Tto As | Wireless charging of devices |
WO2021077396A1 (zh) * | 2019-10-25 | 2021-04-29 | 深圳市海谱纳米光学科技有限公司 | 一种可调光学滤波器件 |
DE102020205599A1 (de) | 2020-05-04 | 2021-11-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Mikromechanischer Strahlungsdetektor, mikromechanisches Spektrometer und Verfahren zur Strahlungsmessung |
GB202007601D0 (en) | 2020-05-21 | 2020-07-08 | Sintef Tto As | Wireless charging of devices |
WO2021234399A1 (en) | 2020-05-21 | 2021-11-25 | Sintef Tto As | Relay wireless charging system |
JP7409721B2 (ja) * | 2020-08-24 | 2024-01-09 | 深▲せん▼市海譜納米光学科技有限公司 | 可動ミラーを有する調整可能なファブリーペローキャビティデバイス及びその製造方法 |
US11899143B2 (en) | 2021-07-12 | 2024-02-13 | Robert Bosch Gmbh | Ultrasound sensor array for parking assist systems |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
US7359124B1 (en) * | 2004-04-30 | 2008-04-15 | Louisiana Tech University Research Foundation As A Division Of The Louisiana Tech University Foundation | Wide-angle variable focal length lens system |
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JPS58152201A (ja) * | 1982-03-08 | 1983-09-09 | Matsushita Electric Ind Co Ltd | フアブリペロ型光学変調器 |
US4859060A (en) * | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
JPH01101421A (ja) * | 1987-10-15 | 1989-04-19 | Sharp Corp | 可変干渉装置 |
US5550373A (en) * | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
CA2316858A1 (en) * | 1997-12-29 | 1999-07-08 | Coretek, Inc. | Microelectromechanically, tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter |
US6830944B1 (en) * | 1999-03-18 | 2004-12-14 | Trustees Of Boston University | Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same |
US6178033B1 (en) | 1999-03-28 | 2001-01-23 | Lucent Technologies | Micromechanical membrane tilt-mirror switch |
JP3999473B2 (ja) * | 2000-04-19 | 2007-10-31 | 日本碍子株式会社 | 耐久性に優れた一体型圧電/電歪膜型素子およびその製造方法 |
US6518690B2 (en) * | 2000-04-19 | 2003-02-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film type elements and process for producing the same |
DE10046379A1 (de) * | 2000-09-20 | 2002-03-28 | Zeiss Carl | System zur gezielten Deformation von optischen Elementen |
GB2371119A (en) * | 2000-09-25 | 2002-07-17 | Marconi Caswell Ltd | Micro electro-mechanical systems |
US7369723B1 (en) | 2001-11-09 | 2008-05-06 | The Charles Stark Draper Laboratory, Inc. | High speed piezoelectric optical system with tunable focal length |
US6822798B2 (en) | 2002-08-09 | 2004-11-23 | Optron Systems, Inc. | Tunable optical filter |
US7265477B2 (en) * | 2004-01-05 | 2007-09-04 | Chang-Feng Wan | Stepping actuator and method of manufacture therefore |
EP1684406A1 (en) * | 2004-06-07 | 2006-07-26 | Matsushita Electric Industrial Co., Ltd. | Actuator, fine motion mechanism including the actuator, and camera module including the fine motion mechanism |
US8148874B2 (en) * | 2005-04-15 | 2012-04-03 | University Of Florida Research Foundation, Inc. | Microactuator having multiple degrees of freedom |
JP2007139841A (ja) * | 2005-11-15 | 2007-06-07 | Funai Electric Co Ltd | 形状可変ミラー装置 |
JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
JP2007304411A (ja) * | 2006-05-12 | 2007-11-22 | Kyoto Univ | 形状可変ミラー |
JP2008097683A (ja) * | 2006-10-10 | 2008-04-24 | Funai Electric Co Ltd | 可変形ミラー及びそれを備えた光ピックアップ装置 |
CN101715561B (zh) * | 2007-02-12 | 2011-12-07 | 珀莱特公司 | 具有可变焦距的柔性透镜组件 |
JP2010518443A (ja) * | 2007-02-12 | 2010-05-27 | ポライト エイエス | 手持ちカメラで安定画像を与える装置 |
-
2009
- 2009-09-18 NO NO20093022A patent/NO336140B1/no unknown
-
2010
- 2010-09-16 US US13/394,209 patent/US9250418B2/en active Active
- 2010-09-16 DK DK10765764.5T patent/DK2478404T3/da active
- 2010-09-16 JP JP2012529273A patent/JP5778677B2/ja active Active
- 2010-09-16 BR BR112012006044-9A patent/BR112012006044B1/pt active IP Right Grant
- 2010-09-16 EP EP10765764.5A patent/EP2478404B1/en active Active
- 2010-09-16 WO PCT/EP2010/063628 patent/WO2011033028A1/en active Application Filing
- 2010-09-16 CA CA2770937A patent/CA2770937C/en active Active
- 2010-09-16 CN CN201080040736.1A patent/CN102576149B/zh active Active
- 2010-09-16 EA EA201290157A patent/EA021493B1/ru not_active IP Right Cessation
-
2014
- 2014-10-01 US US14/504,100 patent/US9329360B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
US7359124B1 (en) * | 2004-04-30 | 2008-04-15 | Louisiana Tech University Research Foundation As A Division Of The Louisiana Tech University Foundation | Wide-angle variable focal length lens system |
Also Published As
Publication number | Publication date |
---|---|
JP5778677B2 (ja) | 2015-09-16 |
US9250418B2 (en) | 2016-02-02 |
US9329360B2 (en) | 2016-05-03 |
DK2478404T3 (da) | 2020-05-11 |
EA021493B1 (ru) | 2015-06-30 |
JP2013505471A (ja) | 2013-02-14 |
EA201290157A1 (ru) | 2013-01-30 |
NO336140B1 (no) | 2015-05-26 |
EP2478404B1 (en) | 2020-03-11 |
US20150109650A1 (en) | 2015-04-23 |
EP2478404A1 (en) | 2012-07-25 |
BR112012006044A2 (pt) | 2020-08-18 |
CA2770937C (en) | 2018-04-17 |
US20120162664A1 (en) | 2012-06-28 |
CN102576149A (zh) | 2012-07-11 |
WO2011033028A1 (en) | 2011-03-24 |
NO20093022A1 (no) | 2011-03-21 |
BR112012006044B1 (pt) | 2021-08-31 |
CA2770937A1 (en) | 2011-03-24 |
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Address after: Trondheim Patentee after: Norwegian Foundation for Scientific and Industrial Research Address before: Trondheim Patentee before: Norwegian Institute of Technology Industry |
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Effective date of registration: 20190124 Address after: Trondheim Patentee after: SINTEF TTO A/S Address before: Trondheim Patentee before: Norwegian Foundation for Scientific and Industrial Research |