JP6284076B2 - 物理・化学センサおよび特定物質の測定方法 - Google Patents
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1708—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids with piezotransducers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Acoustics & Sound (AREA)
Description
次に、第1の圧電膜によって可動膜を励振し、その振動を第2の圧電膜によって検出し得るかについて実験したので、当該実験例について説明する。
2 中空部
3 可動膜
4 第1の圧電膜
5 第2の圧電膜
A 抗体
L 光源
31 基礎膜
32 物質固定膜
Claims (11)
- 受光素子の受光面の表面との間で中空部を形成するように設けられたダイヤフラム構造の可動膜と、
この可動膜の表側または裏側の表面に配置され、該可動膜を励振する第1の圧電膜と、
前記可動膜の表側または裏側の表面に配置され、該可動膜の振動により発生する電圧を検出する第2の圧電膜とを備え、
前記可動膜は、少なくとも外側表面に物質固定能を有するとともに、前記受光面の表面とでファブリペロー共振器を形成するものであることを特徴とする物理・化学センサ。 - 前記中空部は、前記受光素子の受光面に対向する所定範囲を開口するように形成されており、前記可動膜は、該中空部の開口を閉塞するように形成されている請求項1に記載の物理・化学センサ。
- 前記中空部の開口は略円形であり、前記可動膜は該中空部の開口を閉塞して略円形のダイヤフラム構造に形成されており、前記第1および第2の圧電膜は、該可動膜の中央から同心の略円環の帯状に形成されるとともに、いずれも該中空部の開口端縁よりも中心側に配置されている請求項2に記載の物理・化学センサ。
- 前記第1および第2の圧電膜は、前記可動膜の表側または裏側のいずれか一方の面にのみ配置され、該第2の圧電膜は、該第1の圧電膜よりも該可動膜の中央側に間隔を有して配置されている請求項3に記載の物理・化学センサ。
- 前記可動膜は、気体または液体に含まれる分子を固定する分子固定能を有する材料で形成されている請求項1ないし4のいずれかに記載の物理・化学センサ。
- 前記可動膜は、柔軟な基礎膜と、該基礎膜の表面に分子固定能を有する材料を積層した分子固定膜とを備える構成である請求項1ないし4のいずれかに記載の物理・化学センサ。
- 前記第1および第2の圧電膜は、ジルコン酸チタン酸鉛(PZT)により形成されている請求項1ないし6のいずれかに記載の物理・化学センサ。
- 前記可動膜の表面は起伏を有して成膜されている請求項1ないし7のいずれかに記載の物理・化学センサ。
- 請求項1ないし8のいずれかに記載の物理・化学センサを使用する特定物質の測定方法であって、
前記第1の圧電膜に印加される電圧の周波数を変化させて可動膜の振動周波数を変化させるとともに、前記第2の圧電膜から出力される電圧に基づいて、前記可動膜の振動時における共振周波数を検出し、該共振周波数の変化量を前記可動膜に固定された特定物質の質量に換算することを特徴とする特定物質の測定方法。 - 請求項1ないし8のいずれかに記載の物理・化学センサを使用する特定物質の測定方法であって、
複数の前記物理・化学センサを同一条件下で形成し、これらの複数の物理・化学センサを検出センサと参照センサに区分するとともに、前記可動膜が固定能を有する検出すべき物質の測定対象である気体または液体試料を検出センサにのみ供給し、
前記両センサに対して同時に、前記第1の圧電膜に印加される電圧の周波数を変化させて可動膜の振動周波数を変化させるとともに、前記第2の圧電膜から出力される電圧に基づいて、前記可動膜の振動時における共振周波数を検出し、前記両センサの各共振周波数を比較することにより、両者の差分を該特定物質の質量に換算することを特徴する特定物質の測定方法。 - 前記第1の圧電膜に電圧を印加した状態において、前記受光素子の受光面に対して光を照射し、特定波長の透過光強度の変化を光電流として計測することにより、該透過光強度の変化により前記可動膜の振動時における共振周波数を推定するものである請求項9または10に記載の特定物質の測定方法。
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JP2013242093A JP6284076B2 (ja) | 2013-11-22 | 2013-11-22 | 物理・化学センサおよび特定物質の測定方法 |
US14/549,371 US20150143911A1 (en) | 2013-11-22 | 2014-11-20 | Physical/chemical sensor and method for measuring specific substance |
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EP3371583A1 (en) * | 2015-11-06 | 2018-09-12 | Qorvo US, Inc. | Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization |
KR101842350B1 (ko) * | 2016-05-17 | 2018-05-14 | 박주성 | 멤브레인의 기계적 공진 특성을 이용한 컨덴서형 멤브레인 센서용 측정 장치 및 방법 |
CN112649597A (zh) * | 2019-10-10 | 2021-04-13 | 鸿富锦精密工业(深圳)有限公司 | 传感器和应用该传感器的检测装置 |
CN117434157B (zh) * | 2023-12-21 | 2024-03-08 | 哈尔滨工业大学 | 一种飞艇囊体材料微孔缺陷快速检测***及方法 |
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US7344678B2 (en) * | 2002-11-15 | 2008-03-18 | The Regents Of The University Of California | Composite sensor membrane |
US7187453B2 (en) * | 2004-04-23 | 2007-03-06 | Opsens Inc. | Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer |
US8542365B2 (en) * | 2009-03-23 | 2013-09-24 | The United States Of America, As Represented By The Secretary Of The Navy | Optical MEMS chemical sensor array |
JP2011053510A (ja) * | 2009-09-03 | 2011-03-17 | Seiko Epson Corp | 波長可変干渉フィルター、測色センサー、測色モジュール、および波長可変干渉フィルターの制御方法 |
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JP5327279B2 (ja) * | 2011-06-13 | 2013-10-30 | 株式会社デンソー | 超音波センサ装置 |
JP5559122B2 (ja) * | 2011-09-29 | 2014-07-23 | 日本電信電話株式会社 | 微小機械振動子および微小機械振動子の制御方法 |
JP5988055B2 (ja) * | 2011-09-30 | 2016-09-07 | 国立大学法人豊橋技術科学大学 | 物理・化学センサおよび物理・化学現象センシングデバイスならびにこれらの製造方法 |
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US20150143911A1 (en) | 2015-05-28 |
JP2015102387A (ja) | 2015-06-04 |
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