CN102576149A - 用于移动微型机械元件的致动器 - Google Patents
用于移动微型机械元件的致动器 Download PDFInfo
- Publication number
- CN102576149A CN102576149A CN2010800407361A CN201080040736A CN102576149A CN 102576149 A CN102576149 A CN 102576149A CN 2010800407361 A CN2010800407361 A CN 2010800407361A CN 201080040736 A CN201080040736 A CN 201080040736A CN 102576149 A CN102576149 A CN 102576149A
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- actuator
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Links
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- 239000012190 activator Substances 0.000 claims description 11
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims 1
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- 238000010168 coupling process Methods 0.000 abstract description 4
- 238000005859 coupling reaction Methods 0.000 abstract description 4
- 229910052710 silicon Inorganic materials 0.000 description 24
- 239000010703 silicon Substances 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 23
- 235000012431 wafers Nutrition 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 6
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- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000411 transmission spectrum Methods 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 102000000584 Calmodulin Human genes 0.000 description 1
- 108010041952 Calmodulin Proteins 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 208000004350 Strabismus Diseases 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 229910052799 carbon Inorganic materials 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1827—Motorised alignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
- Lasers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20093022A NO336140B1 (no) | 2009-09-18 | 2009-09-18 | Aktuator for mikro optisk enhet |
NO20093022 | 2009-09-18 | ||
PCT/EP2010/063628 WO2011033028A1 (en) | 2009-09-18 | 2010-09-16 | Actuator for moving a micro mechanical element |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102576149A true CN102576149A (zh) | 2012-07-11 |
CN102576149B CN102576149B (zh) | 2016-01-20 |
Family
ID=43416478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080040736.1A Active CN102576149B (zh) | 2009-09-18 | 2010-09-16 | 用于移动微型机械元件的致动器 |
Country Status (10)
Country | Link |
---|---|
US (2) | US9250418B2 (zh) |
EP (1) | EP2478404B1 (zh) |
JP (1) | JP5778677B2 (zh) |
CN (1) | CN102576149B (zh) |
BR (1) | BR112012006044B1 (zh) |
CA (1) | CA2770937C (zh) |
DK (1) | DK2478404T3 (zh) |
EA (1) | EA021493B1 (zh) |
NO (1) | NO336140B1 (zh) |
WO (1) | WO2011033028A1 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105612764A (zh) * | 2013-09-09 | 2016-05-25 | 奥迪欧彼塞尔斯有限公司 | 用于产生物理效应的微机电装置 |
CN106533250A (zh) * | 2016-12-21 | 2017-03-22 | 深圳大学 | 一种多定子平面阵列结构的超声波电机 |
CN106707415A (zh) * | 2015-11-18 | 2017-05-24 | 财团法人工业技术研究院 | 可调式光学装置 |
CN107324275A (zh) * | 2017-08-29 | 2017-11-07 | 山东大学 | 一种串联环扇形压电三维微伺服平台的结构 |
CN107403864A (zh) * | 2016-04-25 | 2017-11-28 | 首尔大学校产学协力团 | 环连接的智能变形执行器 |
CN109384190A (zh) * | 2017-08-07 | 2019-02-26 | 意法半导体股份有限公司 | 包括膜和致动器的mems器件 |
WO2021077396A1 (zh) * | 2019-10-25 | 2021-04-29 | 深圳市海谱纳米光学科技有限公司 | 一种可调光学滤波器件 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9236552B2 (en) | 2013-04-04 | 2016-01-12 | William N. Carr | Thermoelectric micro-platform for cooling and temperature sensing |
DE102013105557B4 (de) * | 2013-05-29 | 2015-06-11 | Michael Förg | Piezoelektrischer Aktor |
JP6284076B2 (ja) * | 2013-11-22 | 2018-02-28 | 国立大学法人豊橋技術科学大学 | 物理・化学センサおよび特定物質の測定方法 |
JP6284427B2 (ja) * | 2014-05-21 | 2018-02-28 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
US9481572B2 (en) | 2014-07-17 | 2016-11-01 | Texas Instruments Incorporated | Optical electronic device and method of fabrication |
US9372114B2 (en) * | 2014-08-20 | 2016-06-21 | William N. Carr | Spectrophotometer comprising an integrated Fabry-Perot interferometer |
KR20180031744A (ko) | 2015-07-22 | 2018-03-28 | 오디오 픽셀즈 리미티드 | Dsr 스피커 요소 및 그 제조 방법 |
US10567883B2 (en) | 2015-07-22 | 2020-02-18 | Audio Pixels Ltd. | Piezo-electric actuators |
NO344002B1 (en) | 2015-09-29 | 2019-08-12 | Sintef Tto As | Optical gas detector |
NO20151312A1 (en) | 2015-10-05 | 2017-04-06 | Sintef Tto As | Infrared source |
NO20161086A1 (no) | 2016-06-29 | 2018-01-01 | Tunable As | Modulerbar Fabry-Perot |
DE102018200378A1 (de) | 2018-01-11 | 2019-07-11 | Robert Bosch Gmbh | Interferometer und Verfahren zum Herstellen eines Interferometers |
DE102018220451A1 (de) * | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Optische Filtereinrichtung und Verfahren zum Herstellen einer optischen Filtereinrichtung |
DE102018220422A1 (de) * | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Aktuationseinrichtung für ein mikromechanisches Bauelement, mikromechanisches Bauelement und Verfahren zum Herstellen eines mikromechanisches Bauelements |
NO20191052A1 (en) | 2019-09-02 | 2021-03-03 | Optronics Tech As | Gas detector |
GB201914045D0 (en) | 2019-09-30 | 2019-11-13 | Sintef Tto As | Wireless charging of devices |
DE102020205599A1 (de) | 2020-05-04 | 2021-11-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Mikromechanischer Strahlungsdetektor, mikromechanisches Spektrometer und Verfahren zur Strahlungsmessung |
GB202007601D0 (en) | 2020-05-21 | 2020-07-08 | Sintef Tto As | Wireless charging of devices |
WO2021234399A1 (en) | 2020-05-21 | 2021-11-25 | Sintef Tto As | Relay wireless charging system |
JP7409721B2 (ja) * | 2020-08-24 | 2024-01-09 | 深▲せん▼市海譜納米光学科技有限公司 | 可動ミラーを有する調整可能なファブリーペローキャビティデバイス及びその製造方法 |
US11899143B2 (en) | 2021-07-12 | 2024-02-13 | Robert Bosch Gmbh | Ultrasound sensor array for parking assist systems |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6178033B1 (en) * | 1999-03-28 | 2001-01-23 | Lucent Technologies | Micromechanical membrane tilt-mirror switch |
US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
US20040027671A1 (en) * | 2002-08-09 | 2004-02-12 | Xingtao Wu | Tunable optical filter |
US7359124B1 (en) * | 2004-04-30 | 2008-04-15 | Louisiana Tech University Research Foundation As A Division Of The Louisiana Tech University Foundation | Wide-angle variable focal length lens system |
Family Cites Families (20)
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JPS58152201A (ja) * | 1982-03-08 | 1983-09-09 | Matsushita Electric Ind Co Ltd | フアブリペロ型光学変調器 |
US4859060A (en) * | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
JPH01101421A (ja) * | 1987-10-15 | 1989-04-19 | Sharp Corp | 可変干渉装置 |
US5550373A (en) * | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
CA2316858A1 (en) * | 1997-12-29 | 1999-07-08 | Coretek, Inc. | Microelectromechanically, tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter |
US6830944B1 (en) * | 1999-03-18 | 2004-12-14 | Trustees Of Boston University | Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same |
JP3999473B2 (ja) * | 2000-04-19 | 2007-10-31 | 日本碍子株式会社 | 耐久性に優れた一体型圧電/電歪膜型素子およびその製造方法 |
US6518690B2 (en) * | 2000-04-19 | 2003-02-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film type elements and process for producing the same |
DE10046379A1 (de) * | 2000-09-20 | 2002-03-28 | Zeiss Carl | System zur gezielten Deformation von optischen Elementen |
GB2371119A (en) * | 2000-09-25 | 2002-07-17 | Marconi Caswell Ltd | Micro electro-mechanical systems |
US7369723B1 (en) | 2001-11-09 | 2008-05-06 | The Charles Stark Draper Laboratory, Inc. | High speed piezoelectric optical system with tunable focal length |
US7265477B2 (en) * | 2004-01-05 | 2007-09-04 | Chang-Feng Wan | Stepping actuator and method of manufacture therefore |
EP1684406A1 (en) * | 2004-06-07 | 2006-07-26 | Matsushita Electric Industrial Co., Ltd. | Actuator, fine motion mechanism including the actuator, and camera module including the fine motion mechanism |
US8148874B2 (en) * | 2005-04-15 | 2012-04-03 | University Of Florida Research Foundation, Inc. | Microactuator having multiple degrees of freedom |
JP2007139841A (ja) * | 2005-11-15 | 2007-06-07 | Funai Electric Co Ltd | 形状可変ミラー装置 |
JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
JP2007304411A (ja) * | 2006-05-12 | 2007-11-22 | Kyoto Univ | 形状可変ミラー |
JP2008097683A (ja) * | 2006-10-10 | 2008-04-24 | Funai Electric Co Ltd | 可変形ミラー及びそれを備えた光ピックアップ装置 |
CN101715561B (zh) * | 2007-02-12 | 2011-12-07 | 珀莱特公司 | 具有可变焦距的柔性透镜组件 |
JP2010518443A (ja) * | 2007-02-12 | 2010-05-27 | ポライト エイエス | 手持ちカメラで安定画像を与える装置 |
-
2009
- 2009-09-18 NO NO20093022A patent/NO336140B1/no unknown
-
2010
- 2010-09-16 US US13/394,209 patent/US9250418B2/en active Active
- 2010-09-16 DK DK10765764.5T patent/DK2478404T3/da active
- 2010-09-16 JP JP2012529273A patent/JP5778677B2/ja active Active
- 2010-09-16 BR BR112012006044-9A patent/BR112012006044B1/pt active IP Right Grant
- 2010-09-16 EP EP10765764.5A patent/EP2478404B1/en active Active
- 2010-09-16 WO PCT/EP2010/063628 patent/WO2011033028A1/en active Application Filing
- 2010-09-16 CA CA2770937A patent/CA2770937C/en active Active
- 2010-09-16 CN CN201080040736.1A patent/CN102576149B/zh active Active
- 2010-09-16 EA EA201290157A patent/EA021493B1/ru not_active IP Right Cessation
-
2014
- 2014-10-01 US US14/504,100 patent/US9329360B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6178033B1 (en) * | 1999-03-28 | 2001-01-23 | Lucent Technologies | Micromechanical membrane tilt-mirror switch |
US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
US20040027671A1 (en) * | 2002-08-09 | 2004-02-12 | Xingtao Wu | Tunable optical filter |
US7359124B1 (en) * | 2004-04-30 | 2008-04-15 | Louisiana Tech University Research Foundation As A Division Of The Louisiana Tech University Foundation | Wide-angle variable focal length lens system |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105612764A (zh) * | 2013-09-09 | 2016-05-25 | 奥迪欧彼塞尔斯有限公司 | 用于产生物理效应的微机电装置 |
CN105612764B (zh) * | 2013-09-09 | 2018-10-09 | 奥迪欧彼塞尔斯有限公司 | 用于产生物理效应的微机电装置 |
US11137590B2 (en) | 2015-11-18 | 2021-10-05 | Industrial Technology Research Institute | Tunable optical device |
CN106707415A (zh) * | 2015-11-18 | 2017-05-24 | 财团法人工业技术研究院 | 可调式光学装置 |
CN106707415B (zh) * | 2015-11-18 | 2020-08-11 | 财团法人工业技术研究院 | 可调式光学装置 |
CN107403864A (zh) * | 2016-04-25 | 2017-11-28 | 首尔大学校产学协力团 | 环连接的智能变形执行器 |
US10458397B2 (en) | 2016-04-25 | 2019-10-29 | Snu R&Db Foundation | Loop linked smart morphing actuator |
CN107403864B (zh) * | 2016-04-25 | 2020-05-29 | 首尔大学校产学协力团 | 环连接的智能变形执行器 |
CN106533250A (zh) * | 2016-12-21 | 2017-03-22 | 深圳大学 | 一种多定子平面阵列结构的超声波电机 |
CN109384190B (zh) * | 2017-08-07 | 2024-01-09 | 意法半导体股份有限公司 | 包括膜和致动器的mems器件 |
CN109384190A (zh) * | 2017-08-07 | 2019-02-26 | 意法半导体股份有限公司 | 包括膜和致动器的mems器件 |
CN107324275A (zh) * | 2017-08-29 | 2017-11-07 | 山东大学 | 一种串联环扇形压电三维微伺服平台的结构 |
CN107324275B (zh) * | 2017-08-29 | 2019-01-04 | 山东大学 | 一种串联环扇形压电三维微伺服平台的结构 |
WO2021077396A1 (zh) * | 2019-10-25 | 2021-04-29 | 深圳市海谱纳米光学科技有限公司 | 一种可调光学滤波器件 |
Also Published As
Publication number | Publication date |
---|---|
JP5778677B2 (ja) | 2015-09-16 |
US9250418B2 (en) | 2016-02-02 |
US9329360B2 (en) | 2016-05-03 |
DK2478404T3 (da) | 2020-05-11 |
EA021493B1 (ru) | 2015-06-30 |
JP2013505471A (ja) | 2013-02-14 |
EA201290157A1 (ru) | 2013-01-30 |
NO336140B1 (no) | 2015-05-26 |
EP2478404B1 (en) | 2020-03-11 |
US20150109650A1 (en) | 2015-04-23 |
CN102576149B (zh) | 2016-01-20 |
EP2478404A1 (en) | 2012-07-25 |
BR112012006044A2 (pt) | 2020-08-18 |
CA2770937C (en) | 2018-04-17 |
US20120162664A1 (en) | 2012-06-28 |
WO2011033028A1 (en) | 2011-03-24 |
NO20093022A1 (no) | 2011-03-21 |
BR112012006044B1 (pt) | 2021-08-31 |
CA2770937A1 (en) | 2011-03-24 |
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