CN102565983B - Axial fine-adjustment device for movable mirror - Google Patents
Axial fine-adjustment device for movable mirror Download PDFInfo
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- CN102565983B CN102565983B CN201110369197.2A CN201110369197A CN102565983B CN 102565983 B CN102565983 B CN 102565983B CN 201110369197 A CN201110369197 A CN 201110369197A CN 102565983 B CN102565983 B CN 102565983B
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- flexible hinge
- group
- mounting groove
- index glass
- movable mirror
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Abstract
The invention discloses an axial fine-adjustment device for a movable mirror. The device comprises a first group of flexible hinges, a second group of flexible hinges, a third group of flexible hinges, a movable mirror frame, an external cylindrical surface, a first installation groove, a second installation groove and a third installation groove, wherein flexible hinges which have the same structure and are independent of one another in the first group of flexible hinges, the second group of flexible hinges and the third group of flexible hinges serve as supporting frames of the movable mirror frame; the first installation groove, the second installation groove and the third installation groove are formed on the external cylindrical surface of the movable mirror frame at equal intervals; the first group of flexible hinges, the second group of flexible hinges and the third group of flexible hinges are embedded and fixed into the first installation groove, the second installation groove and the third installation groove; and according to a lever principle, internal friction transmission is preformed through the flexible hinges, tilt adjustment of the movable mirror in the Z direction is performed, and assembly errors are corrected. In order to improve imaging quality, the tilt adjustment of a lens in an objective in the Z direction is required, so the assembly errors are corrected, and the imaging quality is improved.
Description
Technical field
The present invention relates to installation and the adjustment of object lens in a kind of litho machine, also can be used for installation and measuring and debugging to workpiece in enterprise's production.
Background technology
In projection mask aligner after object lens have been debug, due to the rigging error that inevitably occurs producing in mismachining tolerance and assembling process in manufacture process, can cause objective system image quality to decline, deviation theory value, for improving image quality, need to carry out the adjusting in Z direction to some particular optic in object lens, to proofread and correct rigging error, improve image quality.
Summary of the invention
For the technical matters solving, the object of this invention is to provide a kind of axial fine-adjustment device for movable mirror.
In order to realize described object, axial fine-adjustment device for movable mirror provided by the invention, solving the technical scheme that its technical matters adopts comprises: first group of flexible hinge, second group of flexible hinge, the 3rd group of flexible hinge, index glass frame, external cylindrical surface, the first mounting groove, the second mounting groove and the 3rd mounting groove, adopt first group of flexible hinge, second group of flexible hinge and the bracing frame of the 3rd group of flexible hinge that flexible hinge structure is identical and separate as index glass frame; Have the first mounting groove, the second mounting groove, the 3rd mounting groove in the external cylindrical surface equal intervals of index glass frame, and first group of flexible hinge, second group of flexible hinge, the 3rd group of flexible hinge are embedded and be fixed in the first mounting groove, the second mounting groove, the 3rd mounting groove, utilize lever principle, carry out interior friction transmission by flexible hinge, index glass is carried out to the tilt adjustments in Z direction, in order to proofread and correct rigging error.
Principle of the present invention is: this device has used lever principle, make index glass adjust time, by flexible hinge carry out interior friction transmission, highly sensitive, there is no lost motion intervention, control accuracy is high.
The invention has the beneficial effects as follows: in projection mask aligner after object lens have been debug, due to the rigging error that inevitably occurs producing in mismachining tolerance and assembling process in manufacture process, can cause objective system image quality to decline, deviation theory value, for improving image quality, need to carry out the tilt adjustments in Z direction to some particular optic in object lens, device of the present invention has designed the bracing frame of the identical and separate flexible hinge structure of three groups of structures as index glass frame, can carry out the tilt adjustments in Z direction to index glass, to proofread and correct rigging error.The invention enables index glass can not produce stress deformation because of the effect of external force in installation adjustment process, improve the debug precision of object lens to axle center, the optical axis that has ensured object lens is vertical with silicon chip face, and, compliant mechanism after adjustment completes has good rigidity and thermal stability, ensure that picture element and focal plane are stable, ensured photoetching quality.This device is in the time adjusting index glass position, and index glass is not subject to internal stress influence, there is no lost motion intervention, and transmission efficiency is high; And, adjust rear flexible hinge chain rigidity and thermal stability very good, ensure the stable of picture element and focal plane.
Brief description of the drawings
Fig. 1 is the structural drawing of device of the present invention;
Fig. 2 is flexible hinge structural drawing of the present invention;
Fig. 3 is the front view of a flexible hinge of the present invention;
Fig. 4 is the vertical view of a flexible hinge of the present invention;
Fig. 5 is pedestal front view of the present invention;
Fig. 6 is pedestal vertical view of the present invention;
Fig. 7 is piezoelectric ceramic actuator front view of the present invention;
Fig. 8 is piezoelectric ceramic actuator vertical view of the present invention;
Fig. 9 is index glass frame vertical view of the present invention;
Figure 10 is index glass frame right side view of the present invention;
Figure 11 is index glass frame cut-open view of the present invention.
The explanation of element numbers shown in figure
The first flexible hinge 1, piezoelectric ceramic actuator 2, piezoelectric ceramics 3,
Pedestal 4, counterbore 5, counterbore 6,
Through hole 7, index glass frame 8, step 9,
Index glass 10, circular hole 11, bottom 12,
Upper end 13, the first attachment screw 20, the second attachment screws 21,
Front supporting plate 22, rear carrier plate 23, the first gib screws 30,
The second gib screw 31, the three gib screw 32, the four gib screws 33,
The first lock-screw 40, the second lock-screw 41, the three lock-screws 42,
The 4th lock-screw 43, external cylindrical surface 50, the first mounting grooves 51,
53, the first groups of flexible hinges 101 of the second mounting groove 52, the three mounting groove,
201, the three groups of flexible hinges 301 of second group of flexible hinge, the centre line L 1 of fulcrum C,
Fulcrum A, lower end B, fulcrum C.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
As illustrating, Fig. 9 the inventive system comprises: first group of flexible hinge 101, second group of flexible hinge 201, the 3rd group of flexible hinge 301, index glass frame 8, external cylindrical surface 50, the first mounting groove 51, the second mounting groove 52 and the 3rd mounting groove 53, adopt the bracing frame of first group of flexible hinge 101, second group of flexible hinge 201 flexible hinge identical and separate with the 3rd group of flexible hinge 301 structure as index glass frame; Have the first mounting groove 51, the second mounting groove 52, the 3rd mounting groove 53 in external cylindrical surface 50 equal intervals of index glass frame 8, and first group of flexible hinge 101, second group of flexible hinge 201, the 3rd group of flexible hinge 301 are embedded and be fixed in the first mounting groove 51, the second mounting groove 52, the 3rd mounting groove 53, utilize lever principle, carry out interior friction transmission by described flexible hinge, index glass is carried out to the tilt adjustments in Z direction, in order to proofread and correct rigging error.
Now set forth as an example of first group of flexible hinge 101 example, structure and the principle of work of second group of flexible hinge 201, the 3rd group of flexible hinge 301 are identical with first group of flexible hinge 101, repeat no more structure and the principle of work of second group of flexible hinge 201, the 3rd group of flexible hinge 301 for this reason.As shown in Figure 1, the present invention is that the structure of first group of flexible hinge is made up of index glass frame 8, the first flexible hinge 1, piezoelectric ceramic actuator 2, piezoelectric ceramics 3, pedestal 4, the first attachment screw 20, the second attachment screw 21, the first gib screw 30, the second gib screw 31, the 3rd gib screw 32, the 4th gib screw 33, the first lock-screw 40, the second lock-screw 41, the 3rd lock-screw 42, the 4th lock-screw 43, index glass 10.
As Fig. 9, Figure 10, Figure 11, index glass frame 8 is T-shaped cylindrical structure, and centre has a circular hole 11 and with a step 9, index glass 10 is placed on step 9.External cylindrical surface 50 equal intervals of index glass frame 8 have the first mounting groove 51, the second mounting groove 52, the 3rd mounting groove 53.First group of flexible hinge 1, second group of flexible hinge 201, the 3rd group of flexible hinge 301 be respectively to be equidistantly distributed on the external cylindrical surface 50 of index glass frame 8, and respectively each flexible hinge structure is embedded in the first mounting groove 51 on the external cylindrical surface 50 that is fixed on index glass frame 8, the second mounting groove 52, the 3rd mounting groove 53 by the first attachment screw 20, the second attachment screw 21.
As shown in Fig. 2 to Fig. 8, the bottom 12 of the rear carrier plate 23 of the first flexible hinge 1 is by locking the first tight screw 40, the second lock-screw 41, the 3rd lock-screw 42, the 4th lock-screw 43 and being connected at pedestal 4.There are two counterbores 5 and 6 upper end 13 of the first flexible hinge 1, the first attachment screw 20, the second attachment screw 21 are placed in respectively this two counterbores 5 and 6, the upper end 13 of the first flexible hinge 1 is embedded in the first mounting groove 51, and by the first attachment screw 20, the second attachment screw 21, the first flexible hinge 1 is connected with index glass frame 8.Piezoelectric ceramic actuator 2 is connected with the rear carrier plate 23 of the first flexible hinge 1 by the first gib screw 30, the second gib screw 31, the 3rd gib screw 32, the 4th gib screw 33, piezoelectric ceramics 3 adopts elliposoidal structure, and withstands on the lower end B point place of the front supporting plate 22 of the first flexible hinge 1 through the through hole 7 on the rear carrier plate 23 of the first flexible hinge 1.
In the time that piezoelectric ceramic actuator 2 moves forward and backward piezoelectric ceramics 3, because piezoelectric ceramics 3 withstands on the B place, lower end of front supporting plate 22, and the fulcrum A of the first flexible hinge 1 is positioned on rear carrier plate 23, fixed as fulcrum, therefore, under the effect of lever principle, in the time that piezoelectric ceramics 3 moves forward and backward, front supporting plate 22 will move forward and backward with it, and drives the fulcrum C of front supporting plate 22 upper ends to produce, thereby realizes the displacement of index glass frame in Z direction.
The first flexible hinge 1 use 65Mn metal material is made, and makes flexible hinge have good elastic performance.The center of circle of two circular arcs of fulcrum C should be in same centre line L 1.To ensure the elastic deformation of flexible hinge.
Because device of the present invention has used lever principle, and carry out interior friction transmission by flexible hinge, therefore, in the position adjustment of index glass 10, index glass 10 is not subject to the impact of internal stress, can not produce stress deformation because of the effect of external force, and, there is no lost motion intervention, transmission efficiency is high; And, adjust rear flexible hinge chain rigidity and thermal stability very good, ensure the stable of picture element and focal plane.
The above; be only the embodiment in the present invention, but protection scope of the present invention is not limited to this, any people who is familiar with this technology is in the disclosed technical scope of the present invention; can understand conversion or the replacement expected, all should be encompassed in of the present invention comprise scope within.
Claims (5)
1. an axial fine-adjustment device for movable mirror, it is characterized in that: described device comprises: first group of flexible hinge, second group of flexible hinge, the 3rd group of flexible hinge, index glass frame, external cylindrical surface, the first mounting groove, the second mounting groove and the 3rd mounting groove, adopt first group of flexible hinge, second group of flexible hinge and the bracing frame of the 3rd group of flexible hinge that flexible hinge structure is identical and separate as index glass frame; Have the first mounting groove, the second mounting groove, the 3rd mounting groove in the external cylindrical surface equal intervals of index glass frame, and first group of flexible hinge, second group of flexible hinge, the 3rd group of flexible hinge are embedded and be fixed in the first mounting groove, the second mounting groove, the 3rd mounting groove, utilize lever principle, carry out interior friction transmission by flexible hinge, index glass is carried out to the tilt adjustments in Z direction, in order to proofread and correct rigging error;
Every group of flexible hinge is made up of flexible hinge, piezoelectric ceramic actuator, piezoelectric ceramics, pedestal;
The bottom of the rear carrier plate of every group of flexible hinge be connected at pedestal, the upper end of every group of flexible hinge is embedded in the first mounting groove, and flexible hinge is connected with index glass frame, piezoelectric ceramic actuator is connected with the rear carrier plate of every group of flexible hinge; Piezoelectric ceramics withstands on the lower extreme point place of the front supporting plate of every group of flexible hinge through the through hole on the rear carrier plate of every group of flexible hinge; Fulcrum A is positioned at rear carrier plate upper end, and fulcrum C is positioned at front supporting plate upper end;
In the time that piezoelectric ceramic actuator moves forward and backward piezoelectric ceramics, because piezoelectric ceramics withstands on the lower end of front supporting plate, therefore, in the time that piezoelectric ceramics moves forward and backward, front supporting plate will move forward and backward with it, because the fulcrum of every group of flexible hinge is positioned on rear carrier plate, front supporting plate is fixed relatively, therefore under the effect of lever principle, moving forward and backward of every group of flexible hinge front supporting plate produces drive upper end fulcrum C tilt, thereby realizes the movement of index glass frame in Z direction.
2. axial fine-adjustment device for movable mirror as claimed in claim 1, is characterized in that: flexible hinge 65Mn metal material is made, and makes flexible hinge have good elastic performance.
3. axial fine-adjustment device for movable mirror as claimed in claim 1, is characterized in that: the center of circle of two circular arcs of fulcrum should be on same center line, to ensure the elastic deformation of flexible hinge.
4. axial fine-adjustment device for movable mirror as claimed in claim 1, is characterized in that: piezoelectric ceramics adopts elliposoidal structure.
5. axial fine-adjustment device for movable mirror as claimed in claim 1, is characterized in that: index glass frame is T-shaped cylindrical structure, and centre has circular hole, and with step, index glass is placed on step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110369197.2A CN102565983B (en) | 2011-11-18 | 2011-11-18 | Axial fine-adjustment device for movable mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110369197.2A CN102565983B (en) | 2011-11-18 | 2011-11-18 | Axial fine-adjustment device for movable mirror |
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| Publication Number | Publication Date |
|---|---|
| CN102565983A CN102565983A (en) | 2012-07-11 |
| CN102565983B true CN102565983B (en) | 2014-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110369197.2A Expired - Fee Related CN102565983B (en) | 2011-11-18 | 2011-11-18 | Axial fine-adjustment device for movable mirror |
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Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103567954B (en) * | 2012-08-10 | 2016-09-28 | 上海微电子装备有限公司 | Two-dimensional adjusting mechanism and two-dimension adjustment method |
| CN103472555B (en) * | 2013-09-25 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Dual-motor optical element axial adjustment device |
| CN103823275B (en) * | 2014-03-26 | 2015-12-09 | 中国人民解放军国防科学技术大学 | Based on the adaptive optic fiber collimating apparatus of flexible hinge |
| CN105807384B (en) * | 2014-12-29 | 2019-02-01 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN104656225B (en) * | 2015-02-25 | 2017-03-22 | 武汉理工大学 | Annular amplifying mechanism based lens driving device and method |
| CN106547064B (en) * | 2015-09-17 | 2019-04-12 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN106547065B (en) * | 2015-09-17 | 2019-04-12 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN105372949B (en) * | 2015-11-25 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical element gravity deformation compensation device |
| CN105487248B (en) * | 2015-12-16 | 2018-11-23 | 宁波舜宇光电信息有限公司 | The compensation method of optical system imaging quality is realized by adjusting eyeglass |
| CN108398761A (en) * | 2018-03-28 | 2018-08-14 | 中国科学院光电技术研究所 | A kind of Three-Dimensional Dynamic adjusts and retaining mechanism |
| CN111856884B (en) * | 2019-04-30 | 2021-11-05 | 上海微电子装备（集团）股份有限公司 | Lens adjusting device, adjustable optical system, photoetching equipment and centering unit |
| CN113540975B (en) * | 2021-05-28 | 2022-11-18 | 中国电子科技集团公司第四十一研究所 | Grating pitching angle centering fine-adjustment device |
| CN113917646B (en) * | 2021-11-01 | 2023-06-13 | 中国科学院光电技术研究所 | Three-degree-of-freedom fine tuning device for movable mirror |
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| CN101369104A (en) * | 2008-10-08 | 2009-02-18 | 上海微电子装备有限公司 | Micro-adjusting device of optical element |
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003532136A (en) * | 2000-04-25 | 2003-10-28 | エーエスエムエル ユーエス，インコーポレイテッド | Apparatus, system, and method for precisely positioning and aligning a lens in an optical system |
| DE10051706A1 (en) * | 2000-10-18 | 2002-05-02 | Zeiss Carl | Device for supporting optical element, has approximately T-shaped joints with connection points between holders at outer ends of T-bearer and manipulators engaging T-support |
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2011
- 2011-11-18 CN CN201110369197.2A patent/CN102565983B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101369104A (en) * | 2008-10-08 | 2009-02-18 | 上海微电子装备有限公司 | Micro-adjusting device of optical element |
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
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| CN102565983A (en) | 2012-07-11 |
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