CN104216237B - Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero - Google Patents
Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero Download PDFInfo
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- CN104216237B CN104216237B CN201410427113.XA CN201410427113A CN104216237B CN 104216237 B CN104216237 B CN 104216237B CN 201410427113 A CN201410427113 A CN 201410427113A CN 104216237 B CN104216237 B CN 104216237B
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- projection objective
- decoupling zero
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Abstract
In the photoetching projection objective lens of decoupling zero, lens eccentricity setting device belongs to a lithographic projection manufacturing technology field, and object is to solve the problem of coupling nonlinear error, cost height and adjustment difficulty that prior art exists. The present invention comprises picture frame, sensor and driving mechanism; Picture frame comprises outer picture frame, interior picture frame, support seat, guiding hole, connecting thread hole, flexible guiding mechanism and flexible linking device; Picture frame entirety is circular ring structure, scope frame bottom is fixed with support seat, interior picture frame and outer picture frame running fit, interior picture frame and outer picture frame are connected by the n group flexible linking device of circumference uniform distribution, on circumferential direction, being provided with one group of flexible guiding mechanism between adjacent two flexible linking devices, outer picture frame and flexible guiding mechanism relative answer position to be provided with radial guiding hole, and two guiding holes about center of circle symmetry are respectively arranged with a driving mechanism and a sensor. The flexible leaf spring unit integral structure of the present invention, cost is low, reduces the coupling nonlinear error of orthogonal directions.
Description
Technical field
The invention belongs to lithographic projection manufacturing technology field, it is specifically related in the photoetching projection objective lens of a kind of decoupling zero lens eccentricity setting device.
Background technology
The accuracy requirement being applied to the deep-UV lithography projection object lens that large-scale integrated circuit manufactures is very high. But, in assembling process, etching system degradation can be caused because of assembly stress, its exterior vibration, temperature variation etc. The part produced by above-mentioned reason to compensate rotates asymmetric error, it is possible to by regulating the position of lens in projection object lens to compensate, it is therefore desirable to the eccentric adjustable mechanism device of design specialized.
Publication number is that to disclose a denomination of invention be a kind of technical scheme projecting optical element aligning device in object lens for the Chinese patent of CN102162894. This covering device is divided into grand dynamic tune core module and fine motion to adjust core module. Realize Long Distances by three spiral micrometers and adjust the heart. When fine motion adjusts, drive the motion of picture frame inner ring by two the Piezoelectric Driving devices acted on picture frame flexible body, thus drive optical element to realize accurate fine motion adjustment. According to mechanical work principle, the method rotary motion near linear of little stroke moves, and along with the increase of adjustment stroke, causes the non-linear increase of the coupling error of its orthogonal directions, compensates difficulty and increases.
The Chinese patent that publication number is CN102707404 discloses a denomination of invention for a kind of optical element X-Y-��ZThe technical scheme of three degree of freedom jog adjustment device. This covering device, based on 3-RRR plane mechanism, comprises picture frame, three driving mechanisms and two sensors. Picture frame is integrated, and is made up of picture frame inner ring, outer shroud and three movement branched chain, three movement branched chain circumferentially 120 �� uniform. Two sensors that this device uses can only detect the translational movement in XY two directions, its ��ZMotion cannot detect. Therefore having a driving mechanism to be design redundancy in the program, add manufacturing cost on the one hand, when regulating to displacement on the other hand, closed loop Uncoupling Control Based brings difficulty.
Summary of the invention
It is an object of the invention to propose lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero, solve the problem of coupling nonlinear error, cost height and adjustment difficulty that prior art exists.
For achieving the above object, in the photoetching projection objective lens of a kind of decoupling zero of the present invention, lens eccentricity setting device comprises picture frame, sensor and driving mechanism; Described picture frame comprises outer picture frame, interior picture frame, support seat, guiding hole, connecting thread hole, flexible guiding mechanism and flexible linking device;
Described picture frame entirety is circular ring structure, described scope frame bottom is fixed with support seat, described interior picture frame and described outer picture frame running fit, described interior picture frame and outer picture frame are connected by the n group flexible linking device of circumference uniform distribution, on circumferential direction, it is provided with one group of flexible guiding mechanism between adjacent two flexible linking devices, described outer picture frame and flexible guiding mechanism relative answer position to be provided with radial guiding hole, and two guiding holes about center of circle symmetry are respectively arranged with a driving mechanism and a sensor.
Described n group flexible linking device specifically refers to 4 groups.
Described flexible guiding mechanism comprises four to be had and has along the tangentially flexible compound quadrangular mechanism of outer picture frame along the parallel-crank mechanism of outer picture frame radial compliance and two; Each parallel-crank mechanism connects two rigid link by two flexible leaf springs and forms; Each compound quadrangular mechanism connects 5 movable rigid link by 6 flexible leaf springs and forms.
Described flexible linking device is two Z-shaped flexible leaf springs.
The uniform multiple connecting thread hole of described outer picture frame end face of flange.
The number in described connecting thread hole is 12.
The principle of work of the present invention is: in the photoetching projection objective lens of a kind of decoupling zero of the present invention, in lens eccentricity setting device, lens are fixed on support seat by cementation method, act in flexible guiding mechanism by driving mechanism, picture frame motion in promoting, and then drive lens generation eccentric movement. Flexible linking device connects interior picture frame and outer picture frame, and prevents from rotating in interior picture frame regulate process. In sensor detection, the adjustment displacement amount of picture frame, feeds back to driving mechanism, forms closed loop adjustment.
The useful effect of the present invention is: in the photoetching projection objective lens of a kind of decoupling zero of the present invention, lens eccentricity setting device have employed the structural design scheme of flexible leaf spring unit integral type, picture frame one-piece construction is simple, compact on the one hand, cost is low, has vital role for raising object lens system Integral modes. On the other hand, principle of design, eliminate coupling motion error, obtain the high precision eccentric adjuster of mobile decoupling. In horizontal plane during unidirectional adjustment, the coupling displacement introduced at its orthogonal directions and the ratio of main motion displacement are less than 0.29%, it is less than 0.012% along the ratio of optical axis direction coupling displacement and main motion displacement, reach optical system compensation effect, further increase the performance of optical system, reduce the coupling error of orthogonal directions.
Accompanying drawing explanation
Fig. 1 be a kind of decoupling zero of the present invention photoetching projection objective lens in lens eccentricity setting device one-piece construction schematic diagram;
Fig. 2 be a kind of decoupling zero of the present invention photoetching projection objective lens in picture frame one-piece construction schematic diagram in lens eccentricity setting device.
Fig. 3 be a kind of decoupling zero of the present invention photoetching projection objective lens in flexible guiding mechanism show intention in lens eccentricity setting device;
Fig. 4 be a kind of decoupling zero of the present invention photoetching projection objective lens in the parallel-crank mechanism schematic diagram in flexible guiding mechanism in lens eccentricity setting device;
Fig. 5 be a kind of decoupling zero of the present invention photoetching projection objective lens in the compound quadrangular mechanism schematic diagram in flexible guiding mechanism in lens eccentricity setting device;
Fig. 6 be a kind of decoupling zero of the present invention photoetching projection objective lens in the flexible leaf spring modular construction schematic diagram in flexible guiding mechanism in lens eccentricity setting device;
Fig. 7 be a kind of decoupling zero of the present invention photoetching projection objective lens in flexible linking device schematic diagram in lens eccentricity setting device;
Fig. 8 be a kind of decoupling zero of the present invention photoetching projection objective lens in the Z-shaped flexible board spring structure schematic diagram in flexible linking device in lens eccentricity setting device;
Wherein: 1, lens, 2, outer picture frame, 3, interior picture frame, 4, support seat, 5, guiding hole, 6, connecting thread hole, 7, flexible guiding mechanism, 701, rigid link a, 702, flexible leaf spring a, 703, flexible leaf spring b, 704, rigid link b, 705, rigid link c, 706, rigid link d, 707, flexible leaf spring c, 708, flexible leaf spring d, 709, flexible leaf spring e, 710, rigid link e, 711, rigid link f, 712, rigid link g, 713, flexible leaf spring f, 714, flexible leaf spring g, 715, flexible leaf spring h, 8, flexible linking device, 801, Z-shaped flexible leaf spring, 9, sensor, 10, driving mechanism.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
FIGS 1 and accompanying drawing 2, in the photoetching projection objective lens of a kind of decoupling zero of the present invention, lens eccentricity setting device comprises picture frame, sensor 9 and driving mechanism 10; Described picture frame comprises outer picture frame 2, interior picture frame 3, support seat 4, guiding hole 5, connecting thread hole 6, flexible guiding mechanism 7 and flexible linking device 8;
Described picture frame entirety is circular ring structure, it is fixed with bottom described interior picture frame 3 and supports seat 4, described support seat 4 and lens 1 are cementing fixing, described interior picture frame 3 and described outer picture frame 2 running fit, described interior picture frame 3 and outer picture frame 2 are connected by the n group flexible linking device 8 of circumference uniform distribution, on circumferential direction, it is provided with one group of flexible guiding mechanism 7 between adjacent two flexible linking devices 8, described outer picture frame 2 is provided with radial guiding hole 5 with flexible guiding mechanism 7 opposite position, two guiding holes 5 about center of circle symmetry are respectively arranged with a driving mechanism 10 and a sensor 9.
Described n group flexible linking device 8 specifically refers to 4 groups.
FIGS 3, accompanying drawing 4, accompanying drawing 5 and accompanying drawing 6, described flexible guiding mechanism 7 comprises four to be had and has along the tangential flexible compound quadrangular mechanism of outer picture frame 2 along the parallel-crank mechanism of outer picture frame 2 radial compliance and two; Each parallel-crank mechanism connects two rigid link by two flexible leaf springs and forms, it is specially: each flexible unit comprises flexible leaf spring a702, flexible leaf spring b703, rigid link a701 and rigid link b704, described flexible leaf spring a702 setting parallel with flexible leaf spring b703, two ends are connected respectively at rigid link a701 and rigid link b704;
Each compound quadrangular mechanism connects 5 movable rigid link by 6 flexible leaf springs and forms, and is specially: each compound quadrangular mechanism comprises flexible leaf spring c707, flexible leaf spring d708, flexible leaf spring e709, flexible leaf spring f713, flexible leaf spring g714, flexible leaf spring h715, rigid link c705, rigid link d706, rigid link e710, rigid link f711 and rigid link g712, described flexible leaf spring c707, flexible leaf spring d708, flexible leaf spring e709, flexible leaf spring f713, flexible leaf spring g714 setting parallel with flexible leaf spring h715, rigid link c705, rigid link d706, rigid link e710, rigid link f711 setting parallel with rigid link g712, described flexible leaf spring c707 and flexible leaf spring f713 two ends are connected with rigid link d706 and rigid link f711 respectively, flexible leaf spring d708 two ends are connected with rigid link c705 and rigid link e710 respectively, flexible leaf spring g714 two ends are connected with rigid link d706 and rigid link g712 respectively, flexible leaf spring e709 two ends are connected with rigid link a701 and rigid link e710 respectively, and flexible leaf spring h715 two ends are connected with rigid link g712 and rigid link a701 respectively.
FIGS 7 and accompanying drawing 8, described flexible linking device 8 is two Z-shaped flexible leaf springs 801.
The uniform multiple connecting thread hole 6 of described outer picture frame 2 end face of flange.
The number in described connecting thread hole 6 is 12.
Claims (5)
1. a lens eccentricity setting device in the photoetching projection objective lens of decoupling zero, comprises picture frame, sensor (9) and driving mechanism (10); It is characterized in that, described picture frame comprises outer picture frame (2), interior picture frame (3), support seat (4), guiding hole (5), connecting thread hole (6), flexible guiding mechanism (7) and flexible linking device (8);
Described picture frame entirety is circular ring structure, described interior picture frame (3) bottom is fixed with and supports seat (4), described interior picture frame (3) and described outer picture frame (2) running fit, described interior picture frame (3) and outer picture frame (2) are connected by n group flexible linking device (8) of circumference uniform distribution, on circumferential direction, it is provided with one group of flexible guiding mechanism (7) between adjacent two flexible linking devices (8), described outer picture frame (2) and flexible guiding mechanism (7) opposite position are provided with radial guiding hole (5), two guiding hole (5) about center of circle symmetry are respectively arranged with a driving mechanism (10) and a sensor (9),
Described flexible guiding mechanism (7) comprises four to be had and has along the tangential flexible compound quadrangular mechanism of outer picture frame (2) along the parallel-crank mechanism of outer picture frame (2) radial compliance and two; Each parallel-crank mechanism connects two rigid link by two flexible leaf springs and forms; Each compound quadrangular mechanism connects 5 movable rigid link by 6 flexible leaf springs and forms.
2. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 1, it is characterised in that, described n group flexible linking device (8) specifically refers to 4 groups.
3. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 1, it is characterised in that, described flexible linking device (8) is two Z-shaped flexible leaf springs (801).
4. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 1, it is characterised in that, the uniform multiple connecting thread hole (6) of described outer picture frame (2) end face of flange.
5. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 4, it is characterised in that, the number of described connecting thread hole (6) is 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410427113.XA CN104216237B (en) | 2014-08-26 | 2014-08-26 | Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410427113.XA CN104216237B (en) | 2014-08-26 | 2014-08-26 | Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero |
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| CN104216237A CN104216237A (en) | 2014-12-17 |
| CN104216237B true CN104216237B (en) | 2016-06-01 |
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| CN201410427113.XA Expired - Fee Related CN104216237B (en) | 2014-08-26 | 2014-08-26 | Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019154459A1 (en) * | 2018-02-12 | 2019-08-15 | Jenoptik Optical Systems Gmbh | Lens mount which is optimized with respect to installation space and which comprises elastic connection structures |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105807384B (en) * | 2014-12-29 | 2019-02-01 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN106547063B (en) * | 2015-09-17 | 2019-03-26 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN105137562B (en) * | 2015-10-15 | 2017-04-26 | 中国科学院长春光学精密机械与物理研究所 | Optical element three-degree-of-freedom micro displacement adjusting device |
| CN105259651B (en) * | 2015-10-30 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of anamorphotic attachment that can produce a variety of aberrations |
| CN105739248B (en) * | 2016-04-01 | 2018-01-09 | 中国科学院长春光学精密机械与物理研究所 | Optical element support structure, unit microscope group, exposure optical system and litho machine |
| CN109917559A (en) * | 2017-12-13 | 2019-06-21 | 长光华大基因测序设备（长春）有限公司 | High-precision optical lens eccentricity adjusts structure and method |
| CN109633857A (en) * | 2019-01-18 | 2019-04-16 | 长春奥普光电技术股份有限公司 | The symmetrical secondary mirror flexible installing structure of outer circle |
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| EP1220012A2 (en) * | 2000-12-15 | 2002-07-03 | Carl Zeiss | Optical mount unit and oscillation damping system |
| CN102854758A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | X-Y micro-adjustment apparatus for optical element in lithographic projection objective |
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| EP1220012A2 (en) * | 2000-12-15 | 2002-07-03 | Carl Zeiss | Optical mount unit and oscillation damping system |
| CN102854758A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | X-Y micro-adjustment apparatus for optical element in lithographic projection objective |
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| WO2019154459A1 (en) * | 2018-02-12 | 2019-08-15 | Jenoptik Optical Systems Gmbh | Lens mount which is optimized with respect to installation space and which comprises elastic connection structures |
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