CN101369104A - Micro-adjusting device of optical element - Google Patents
Micro-adjusting device of optical element Download PDFInfo
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- CN101369104A CN101369104A CNA2008102009185A CN200810200918A CN101369104A CN 101369104 A CN101369104 A CN 101369104A CN A2008102009185 A CNA2008102009185 A CN A2008102009185A CN 200810200918 A CN200810200918 A CN 200810200918A CN 101369104 A CN101369104 A CN 101369104A
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Abstract
The invention provides a micro-adjustment device for an optical component, which comprises: an inner lens cone which can keep the optics component, at least three groups of friction positioning devices and an exterior lens cone which is used for bearing and storing the inner lens cone and the friction positioning devices; the optical component is arranged in the inner lens cone along the radial direction, an axial line is along the weight direction, the three groups of friction positioning devices are completely arranged around the inner lens cone, one end of the device is fixedly connected with the inner lens cone, and the other end is connected with the exterior lens cone and used for keeping slide restriction; a group of weight balance plate springs are evenly arranged around the inner lens cone, and a schistocity plane of the plate spring is parallel to the radial direction of the inner lens cone optical component, one end of the plate spring is connected with a base plate of the exterior lens cone, and the other end is connected with the inner lens cone. The friction positioning device can adjust the positioning optical component along the axial line of the optical component direction through a piezoelectric executor, and is provided with three free-degree adjusting capability of high precision and long stroke.
Description
Technical field
The present invention relates to a kind of high-precision optical element Adjustment System, relate in particular to a kind of fine-regulation system.
Background technology
Optical precision instrument and machinery require wherein in a lot of occasions that optical element has high precision, low heat release, the characteristics of long stroke.For example in the technology of semiconductor element, adopt the lithography step of exposure sources to play key effect, along with the Highgrade integration of semiconductor element in IC makes, the live width size of photoetching is more and more littler, the picture that requires litho machine to carry out figure trickle under the high precision shifts, this has proposed harsh more requirement to the wave aberration of projection optical system or distortion, with the environmental change of compensation projection optical system (as heat affecting etc.).Wave aberration or distortion are determined with reference to bearing accuracy with it by the performance of optical element self.
Publication number is in the patent documentation of CN1317725A, a kind of optical component keeper of exposure sources is disclosed, can drive the adjustment of the long stroke of optical element with degree of precision, it has adopted three piezo actuators, and is simple in structure, make and also realization easily of control mode, but a shortcoming is arranged, and wherein enlarger has but reduced the rigidity of its structure when the stroke that optical facilities are adjusted increases, make when adjusting optical element, reduced the stability of its system.Therefore how can adjust in the optical element by high-precision large-range in exposure system, the rigidity of structure that guarantees its adjusting mechanism is technical issues that need to address.
Summary of the invention
Technical purpose of the present invention is to provide the optical element micro-regulating mechanism of a kind of use at exposure sources, can be along optical element axis direction adjustment location optical element, possess the axial three freedom degree adjustment capability of the long stroke of high precision, and have good system stability.
A kind of micro-adjusting device of optical element of the present invention comprises: one keeps the inner lens cone of optical element, at least three groups friction detent mechanism, and the outer lens barrel of above-mentioned inner lens cone and friction detent mechanism is held in a carrying; Optical element radially is installed in the inner lens cone, and axis is along gravity direction, and described three groups of friction detent mechanisms evenly are arranged on around the inner lens cone, and an end is fixedlyed connected with inner lens cone, and the other end is connected and keeps the constraint of sliding with outer lens barrel; One group of gravitational equilibrium reed evenly is provided with around inner lens cone, and the sheet face of reed is parallel to the inner lens cone optical element radially, and an end connects the pedestal of outer lens barrel, and the other end connects inner lens cone.
The xsect of outer lens barrel inboard and inner lens cone is all rounded, the cylindrical shell outer of inner lens cone is provided with at least three along its circumferential equally distributed side cut installed surface, fixedly connected with an end of friction detent mechanism by this installed surface, and by one " protruding " font mounting base, perpendicular to first piezo actuator that is axially installed with of optical element.
The friction detent mechanism comprises a double-T shaped lever construction, double-T shaped lever construction comprise a upper branch arm, a lower branch arm and with a cantilever, be parallel to each other between the upper and lower support arm, both the same sides are hinged with cantilever by flexible hinge respectively, constituted the groove that holds first piezo actuator between the three, the front end of first piezo actuator is a ball-type, and contacts with the medial surface of cantilever, and cantilever has C shape groove corresponding to the lateral surface of contact point.Lower branch arm also is provided with a groove that holds friction block, and the side of friction block contacts with lower branch arm and cantilever, fixedlys connected with second actuator of the axis direction that is parallel to optical element mirror group by flexible structure in the bottom.Second actuator is installed on the pedestal of outer lens barrel.
The cantilever two ends of double-T shaped lever construction corresponding two flexible hinges are divided into upper cantilever, lower cantalever; Described upper cantilever is provided with a teat and adjusts the friction block compressing with the wedge shape that outer lens barrel inwall is provided with and contact, and does not contact between lower cantalever and the outer lens barrel inwall.Outer lens barrel inwall is provided with skewed slot corresponding to the double-T shaped lever construction of friction detent mechanism, and groove face is provided with some mounting holes that wedge shape is adjusted friction block that are used for fixing along the mirror group parallel axes direction of optical element.The inclined-plane that wedge shape is adjusted friction block is arranged in the skewed slot as stationary plane, and the another side that contacts with the upper cantilever compressing is parallel to the mirror group axis of optical element,
As preferred version, the present invention also comprises displacement transducer, comprises a probe and an objective body, displacement sensor probe be arranged at one with packing ring that outer lens barrel is fixedlyed connected on, the sensor target body is arranged at corresponding friction detent mechanism, can monitor the radial motion of inner lens cone.
In the micro-adjusting device of optical element of the present invention, first piezo actuator radially is by the compressing to cantilever middle part in the double-T shaped lever construction, make the compressing normal pressure between the wedge of upper cantilever and outer lens barrel change, change the size of the friction force of the constraint of sliding between friction detent mechanism and the outer lens barrel, and the second axial piezoelectricity device, pass to the friction detent mechanism with high-precision with the bottom friction piece that the moves through optical axis parallel direction, controlled moving of inner lens cone simultaneously along optical axis direction.The gravitational equilibrium reed group that is provided with between inner lens cone and the outer lens barrel pedestal, because reed has the stress and deformation one-way, make inner lens cone move constraint much smaller than its radial motion, thereby realized radially deviation is avoided in the axial high precision fine setting of the optical element that keeps in the inner lens cone simultaneously axially (also being gravity direction).
The present invention also kept the suitable rigidity of structure in the other direction in the axial high precision fine setting of optical element, avoided radially skew and the harmful effect of rotation, improve the stability of system.
Description of drawings
Fig. 1 is the axle side synoptic diagram of micro-adjusting device of optical element of the present invention;
Fig. 2 is the vertical view of micro-adjusting device of optical element of the present invention;
Fig. 3 is the cut-open view of micro-adjusting device of optical element of the present invention;
Fig. 4 is the cut-open view of double-T shaped lever construction of the present invention;
Fig. 5 is the diagrammatic cross-section of gravitational equilibrium reed of the present invention.
Embodiment
Below in conjunction with Figure of description a specific embodiment of the present invention is elaborated.
As shown in Figure 1, 2, 3, optical element 5 radially is installed on inner lens cone 4 with the form of glueing joint among the present invention, and inner lens cone 4 has enough structural strengths, and big deformation takes place when avoiding being subjected to external force, and its xsect is circular.Outside cylindrical shell, have three along the equally distributed side cut installed surface of its excircle, the mounting base 6 of fixedly connected " protruding " font structure on its installed surface, its top stationary plane is in order to fix first piezo actuator 7, fixedlys connected with the double-T shaped lever construction of friction detent mechanism in both sides.
As shown in Figure 4, the double-T shaped lever construction 11 of friction detent mechanism is formed by the upper and lower support arm of pair of parallel and with both hinged cantilevers, upper and lower support arm one side is fixed on the mounting base 6, opposite side connects cantilever by two flexible hinge 11b, and the two ends of cantilever are divided into upper cantilever 11a, lower cantalever 11d.
When mounted, upper cantilever 11a adjusts friction block 10 compressings by an outstanding part and the wedge shape that is installed on outer lens barrel 2 inwalls and contacts.Wedge shape is adjusted friction block 10 and is installed in the skewed slot of outer lens barrel 2 inboards, and groove face is provided with the some mounting holes along the axial setting of inner lens cone optical element.Wedge shape is adjusted a skew back face of friction block 10 as stationary plane, be fixed in skewed slot by mounting hole, use different mounting holes to fix, can adjust wedge shape and adjust the axial location of friction block, the surface of contact that makes wedge shape adjust friction block 10 and upper cantilever 11a simultaneously produces radial displacement, change the deformation size of upper cantilever 11a, form scalable precompression between the two.
As Fig. 3, upper and lower support arm and cantilever three have formed a groove that holds first piezo actuator 7 jointly, the front end of actuator 7 is spherical, contact with the cantilever medial surface, Fig. 4 for another example, cantilever has a C shape groove 11C at the lateral surface of the contact point of correspondence, is convenient to spherical front end cantilever generation deformation when the compressing cantilever of actuator 7, and upper cantilever 11a and lower cantalever 11d are the axle center rotation with two flexible hinge 11b easily.
Lower cantalever also is provided with a groove that can hold friction block 12, power up under the situation of oppressing cantilever outward at the first pressure actuator 7, lower cantalever 11d produces the deformation that turns clockwise, make the side of friction block 12 be subjected to the normal pressure of lower cantalever 11d and lower branch arm, thereby can not slide relatively because of bigger friction force between them, just retrained the axial contingent rotation of inner lens cone on the whole around optical element.
Same principle powers up when oppressing cantilever outward at the first pressure actuator 7, upper cantilever 11a produces the deformation that is rotated counterclockwise, this deformation direction is identical with the precompression direction that the suffered wedge shape of upper cantilever 11a is adjusted friction block 10, thereby offsets the precompression that upper cantilever 11a produces because of initial deformation of assembling.See on the whole, can weaken even eliminate like this inner lens cone when moving axially, rub detent mechanism and outside friction between the lens barrel 2.
As shown in Figure 2, some gravitational equilibrium reeds 1 evenly are arranged at the excircle of inner lens cone 4, Fig. 3 and for example, one end of reed 1 is connected in the pedestal of outer lens barrel 2, the other end connects inner lens cone 4, its detail view such as Fig. 5, the end 1a that reed connects outer lens barrel pedestal is fixedly connected, other end 1b is connected in inner lens cone 4 by major part screw 14, wherein also leave bigger free gap between major part screw 14 and the reed termination 1b, this is for convenience of contingent radial displacement (about promptly among the figure) between reed 1 and the inner lens cone 4, in addition because reed has the character of single load bearing deformation, the mirror group radial parallel of optical element in sheet face and the inner lens cone 4 when it is provided with, in balance inner lens cone 4 self gravitations, do axial displacement adjustment (promptly among the figure about) along gravity direction when inner lens cone 4, make its suffered constraining force much smaller than radially, strengthened its rigidity of structure, avoided in the axial trim process radial missing taking place.
As shown in Figure 2, second piezo actuator 13 be parallel to inner lens cone 4 optical element axially, be arranged on the pedestal of outer lens barrel 2, fixedly connected by a flexible structure with friction block 12 in its termination, because radial displacement may take place or rotate around axial in inner lens cone 4, friction block 12 can be subjected to radially stressed, can avoid the eccentric force infringement is caused in the termination of second piezo actuator 13 by flexible structure like this.The power source that second piezo actuator 13 provides the axial displacement of inner lens cone 4 to adjust.
Generally speaking, projection objective is a real-time online for the aberration compensation that has heat affecting to cause, which optical element or which group optical element need be adjusted the complexity that the result that depends on the sensibility analysis of optical system aberration and optical element itself are structurally adjusted in a plurality of optical elements of object lens, according to projection objective adjust optical element in the course of the work the state difference can be defined as two kinds, a kind of is " steady state (SS) ", optical element and adjusting mechanism adjustment thereof action stops under this state, and optical element is stable at a certain fixed position; Another kind is " an adjustment state ", adjusting mechanism is done continuously or intermittent exercise under this state, adopt intermittent exercise among the present invention, in the intermittent exercise process, definition " motion adjustment state " and " the adjustment state of having a rest " respectively is when " motion adjustment state ", actuator and optical element and adjustment object all are kept in motion, and at " the adjustment state of having a rest ", actuator is kept in motion, and optical element is promptly adjusted object and remained static.Elaborate the sequence of movement and the adjustment process of steady state (SS), motion adjustment state and the adjustment state of having a rest of apparatus of the present invention mirror group hereinafter.
Under the steady state (SS), piezo actuator 7 on-load voltages, produce bigger outer Zhang Weiyi, the cantilever stage casing of double-T shaped lever construction 11 is subjected to pointing to the compressing of outer lens barrel, upper cantilever 11a and lower cantalever 11d produce the side force of pointing to inner lens cone, than 11b opposite rotation deformation takes place around flexible, the side force that lower cantalever 11d produces makes between friction block 12 and the double-T shaped lever construction 11 and produces stiction, and the deformation that upper cantilever 11a produces has been offset the double-T shaped lever construction 11 of part because of the precompression between the wedge shape adjustment friction block 10 on initial assembling and the urceolus mirror.
Under the motion adjustment state, piezo actuator 7 loads bigger voltage, continue to produce certain outer Zhang Weiyi, principle is the same with steady state (SS), produced bigger stiction between friction block 12 and the double-T shaped lever construction 11, stoped inner lens cone 4 may center on the swing offset that axially takes place on the one hand, on the other hand when piezo actuator 13 adjustment friction detent mechanisms drive inner lens cones 4 carry out axial displacement, avoid friction block 12 that axial displacements take place even come off, and the side force that this moment, upper cantilever 11a produced has been offset most of double-T shaped lever construction 11 because of the precompression between the wedge shape adjustment friction block 10 on initial assembling and the outer lens barrel, has reduced friction between the two.Piezo actuator 13 loaded or reduced voltage this moment second, the thrust or the pulling force of the mirror group axially parallel of generation and optical element, this thrust or pulling force have overcome inner lens cone 4 and the self gravitation of the optical element mirror group of fixedlying connected with it, friction detent mechanism etc., the elastic force of gravitational equilibrium reed 1, also have the upper cantilever 11a of double-T shaped lever construction and the stiction between the wedge shape adjustment friction block 10, make whole optical system axial displacement (rise or descend).
Have a rest under the adjustment state, first piezo actuator, 7 release voltages, the cantilever of double-T shaped lever construction 11 produces the trend of recovering to free state, this moment is with respect to motion adjustment state, pressure reduces or both disengagings between friction block 12 and the double-T shaped lever construction 11, and the upper cantilever 11a of double-T shaped lever construction and wedge shape are adjusted the initial precompression of recovery between the friction block 10, second piezo actuator 13 is fixed current axial locations then, release voltage again, return to its free state, begin until next motion cycle.
By above-mentioned " motion adjustment state " and " the motion adjustment state of having a rest ", whole inner lens cone 4 and fixedly connected optical element mirror group, friction detent mechanism thereof can produce intermittent elevation or decline, the less stroke of second piezo actuator 13 are converted into the high precision displacement adjustment of the longer stroke of mirror group.
In above-mentioned optical element adjustment process, because of inner lens cone 4 might produce radial displacement or around radially upset, this can detect by displacement transducer, this displacement transducer comprises sensor probe 8 and sensor target body 9, displacement sensor probe 8 is fixed on the packing ring that is connected with outer lens barrel 2, and displacement transducer objective body 9 is fixed on the upper branch arm of double-T shaped lever construction 11 in the detent mechanism that rubs; If produce upset, then adjust in second piezo actuator 13 wherein one or more, if produce radial displacement, then adjust wherein one or more in first piezo actuator 7.
Though this micro-adjusting device of optical element fundamental purpose is to realize the axially high precision displacement adjustment of long stroke, but also can carry out certain radially little displacement regulates, realize in the following way: under steady state (SS), optical element and holding device bottom thereof are supported by gravitational equilibrium reed 1 and friction block 12, then locate by the vertical friction that the upper cantilever 11a and the outer lens barrel 2 inboard wedge shapes of double-T shaped lever construction in the friction detent mechanism are adjusted between the friction block 10 on top, this moment, optical element and holding device thereof had certain rotary freedom around the flexibility hinge 11b of double-T shaped lever construction, friction block 12 and gravitational equilibrium reed 1 also have certain rotation or displacement space simultaneously, therefore produce displacement by control actuator 7, reach the purpose that little displacement moves radially optical element.
That more than introduces only is based on a preferred embodiment of the present invention, can not limit scope of the present invention with this.Any mechanism of the present invention is done replacement, the combination, discrete of parts well know in the art, and the invention process step is done well know in the art being equal to change or replace and all do not exceed exposure of the present invention and protection domain.
Claims (15)
1. a micro-adjusting device of optical element comprises that one keeps the inner lens cone of optical element, at least three groups friction detent mechanism, and the outer lens barrel of above-mentioned inner lens cone and friction detent mechanism is held in a carrying; The axis that it is characterized in that optical element is along gravity direction, and radially is installed in the inner lens cone, and described three groups of friction detent mechanisms evenly are arranged on the outer ring of inner lens cone, and an end is fixedlyed connected with inner lens cone, and the other end is connected with outer lens barrel and keeps slip to retrain.
2. a kind of micro-adjusting device of optical element as claimed in claim 1, it is characterized in that also comprising one group of gravitational equilibrium reed that evenly is provided with along inner lens cone on every side, the sheet face of reed is parallel to the inner lens cone optical element radially, one end connects the pedestal of outer lens barrel, and the other end connects the cylindrical shell of inner lens cone.
3. a kind of micro-adjusting device of optical element as claimed in claim 2 is characterized in that reed is connected by the major part screw with inner lens cone, leaves the free gap between screw and the reed.
4. a kind of micro-adjusting device of optical element as claimed in claim 1, it is characterized in that, the xsect of the inner lens cone of outer lens barrel inboard and maintenance optical element is all rounded, the cylindrical shell outer of inner lens cone is provided with at least three along its circumferential equally distributed side cut installed surface, by this installed surface the friction detent mechanism is installed.
5. a kind of micro-adjusting device of optical element as claimed in claim 4 is characterized in that, described friction detent mechanism comprises a double T type lever construction; First piezo actuator that the vertical optical element axially is provided with, its termination contacts with double-T shaped lever construction; Second piezo actuator that the collimating optics element axially is provided with, its termination contacts with double-T shaped lever construction by friction block.
6. a kind of micro-adjusting device of optical element as claimed in claim 5, it is characterized in that described side cut installed surface fixedlys connected with one " protruding " font mounting base, the top stationary plane of " protruding " shape structure is installed first piezo actuator, and first piezo actuator is provided with perpendicular to the mirror group axis direction of optical element.
7. as claim 1 or 5 described a kind of micro-adjusting device of optical element, it is characterized in that described double-T shaped lever construction, double-T shaped lever construction comprise a upper branch arm, a lower branch arm and with a cantilever, be parallel to each other between the upper and lower support arm, both the same sides are hinged with cantilever by flexible hinge respectively, and opposite side is fixedlyed connected with the side cut installed surface of inner lens cone.
8. a kind of micro-adjusting device of optical element as claimed in claim 7, it is characterized in that forming the groove that holds first piezo actuator between described parallel upper and lower support arm and the cantilever three, the front end of first piezo actuator is a ball-type, and contact with the medial surface of cantilever, cantilever has C shape groove corresponding to the lateral surface of contact point.
9. a kind of micro-adjusting device of optical element as claimed in claim 7, it is characterized in that described lower branch arm is provided with a groove that holds friction block, the end in contact that the side of friction block is corresponding with lower branch arm and cantilever, fixedly connected with second actuator by flexible structure in the bottom.
10. a kind of micro-adjusting device of optical element as claimed in claim 9 is characterized in that the mirror group axis direction that described second actuator is parallel to optical element is installed on the pedestal of outer lens barrel.
11. a kind of micro-adjusting device of optical element as claimed in claim 7 is characterized in that the cantilever two ends corresponding two flexible hinges of described double-T shaped double lever structure are divided into upper cantilever, lower cantalever; Described upper cantilever is provided with a teat and adjusts to oppress between the friction block with the wedge shape that outer lens barrel inwall is provided with and contact, and does not contact between lower cantalever and the outer lens barrel inwall.
12. a kind of micro-adjusting device of optical element as claimed in claim 11, it is characterized in that the double-T shaped lever construction of described outer lens barrel inwall corresponding to the friction detent mechanism, be provided with at least three skewed slots, groove face is provided with at least two mounting holes along the mirror group parallel axes direction of optical element, and described wedge shape is adjusted friction block and is fixed in the groove by mounting hole by screw.
13. a kind of micro-adjusting device of optical element as claimed in claim 12 is characterized in that the inclined-plane of described wedge shape adjustment friction block is arranged in the skewed slot as stationary plane, the another side that contacts with the upper cantilever compressing is parallel to the mirror group axis of optical element.
14. as claim 1 or 4 described a kind of micro-adjusting device of optical element, it is characterized in that also comprising displacement transducer, described displacement transducer comprises a probe and an objective body, displacement sensor probe be arranged at one with packing ring that outer lens barrel is fixedlyed connected on, the sensor target body is arranged at corresponding friction detent mechanism.
15., it is characterized in that described inner lens cone inwall and optical element gluing as claim 1 or 4 described a kind of micro-adjusting device of optical element.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008102009185A CN101369104B (en) | 2008-10-08 | 2008-10-08 | Micro-adjusting device of optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102009185A CN101369104B (en) | 2008-10-08 | 2008-10-08 | Micro-adjusting device of optical element |
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| CN101369104A true CN101369104A (en) | 2009-02-18 |
| CN101369104B CN101369104B (en) | 2010-09-15 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102565983A (en) * | 2011-11-18 | 2012-07-11 | 中国科学院光电技术研究所 | Axial fine adjustment device for movable mirror |
| CN103901576A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Fine adjustment mechanism of movable lens |
| CN105403973A (en) * | 2016-01-12 | 2016-03-16 | 中国科学院上海光学精密机械研究所 | Centering adjustment mechanism of optical element |
| CN105467546A (en) * | 2015-12-22 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Micro-motion adjustment device for optical component with slit flexible structure |
| CN107145040A (en) * | 2017-06-30 | 2017-09-08 | 中国科学院长春光学精密机械与物理研究所 | Optical element motion support meanss, projection objective and litho machine |
| WO2017186171A1 (en) * | 2016-04-29 | 2017-11-02 | 上海微电子装备（集团）股份有限公司 | Side vertical mirror group and installation method thereof |
| CN107577048A (en) * | 2017-05-27 | 2018-01-12 | 深圳多哚新技术有限责任公司 | Optical mirror slip focusing component |
| CN110297302A (en) * | 2019-07-31 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | A kind of optical elements of large caliber clamping device |
| CN111853481A (en) * | 2020-08-14 | 2020-10-30 | 西安应用光学研究所 | Multi-degree-of-freedom flexible supporting structure and photoelectric stabilized sighting turret universal frame |
| CN113933948A (en) * | 2020-06-29 | 2022-01-14 | 上海微电子装备（集团）股份有限公司 | Lens group adjusting mechanism, adjustable optical system and photoetching equipment |
| CN116088122A (en) * | 2023-03-07 | 2023-05-09 | 陕西省计量科学研究院 | Axial adjusting device for optical element |
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2008
- 2008-10-08 CN CN2008102009185A patent/CN101369104B/en active Active
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| CN102565983B (en) * | 2011-11-18 | 2014-08-20 | 中国科学院光电技术研究所 | Axial fine adjustment device for movable mirror |
| CN102565983A (en) * | 2011-11-18 | 2012-07-11 | 中国科学院光电技术研究所 | Axial fine adjustment device for movable mirror |
| CN103901576B (en) * | 2012-12-28 | 2016-09-28 | 上海微电子装备有限公司 | Movable lens micro-adjusting mechanism |
| CN103901576A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Fine adjustment mechanism of movable lens |
| CN105467546B (en) * | 2015-12-22 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical element jog adjustment device of slit flexible structure |
| CN105467546A (en) * | 2015-12-22 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Micro-motion adjustment device for optical component with slit flexible structure |
| CN105403973A (en) * | 2016-01-12 | 2016-03-16 | 中国科学院上海光学精密机械研究所 | Centering adjustment mechanism of optical element |
| CN105403973B (en) * | 2016-01-12 | 2018-04-13 | 中国科学院上海光学精密机械研究所 | Optical element is to neutral adjustment mechanism |
| WO2017186171A1 (en) * | 2016-04-29 | 2017-11-02 | 上海微电子装备（集团）股份有限公司 | Side vertical mirror group and installation method thereof |
| CN107577048A (en) * | 2017-05-27 | 2018-01-12 | 深圳多哚新技术有限责任公司 | Optical mirror slip focusing component |
| CN107145040A (en) * | 2017-06-30 | 2017-09-08 | 中国科学院长春光学精密机械与物理研究所 | Optical element motion support meanss, projection objective and litho machine |
| CN110297302A (en) * | 2019-07-31 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | A kind of optical elements of large caliber clamping device |
| CN113933948A (en) * | 2020-06-29 | 2022-01-14 | 上海微电子装备（集团）股份有限公司 | Lens group adjusting mechanism, adjustable optical system and photoetching equipment |
| CN113933948B (en) * | 2020-06-29 | 2023-04-07 | 上海微电子装备（集团）股份有限公司 | Lens group adjusting mechanism, adjustable optical system and photoetching equipment |
| CN111853481A (en) * | 2020-08-14 | 2020-10-30 | 西安应用光学研究所 | Multi-degree-of-freedom flexible supporting structure and photoelectric stabilized sighting turret universal frame |
| CN111853481B (en) * | 2020-08-14 | 2022-04-05 | 西安应用光学研究所 | Multi-degree-of-freedom flexible supporting structure and photoelectric stabilized sighting turret universal frame |
| CN116088122A (en) * | 2023-03-07 | 2023-05-09 | 陕西省计量科学研究院 | Axial adjusting device for optical element |
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Address after: No. 1525 Zhangjiang Road, Zhangjiang, Shanghai, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: No. 1525 Zhangjiang Road, Zhangjiang, Shanghai, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |