CN103567954B - Two-dimensional adjusting mechanism and two-dimension adjustment method - Google Patents
Two-dimensional adjusting mechanism and two-dimension adjustment method Download PDFInfo
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- CN103567954B CN103567954B CN201210285503.9A CN201210285503A CN103567954B CN 103567954 B CN103567954 B CN 103567954B CN 201210285503 A CN201210285503 A CN 201210285503A CN 103567954 B CN103567954 B CN 103567954B
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- adjusted
- adjusting mechanism
- dimensional adjusting
- adjustment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
- B23P19/10—Aligning parts to be fitted together
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Abstract
The invention discloses a kind of two-dimensional adjusting mechanism, it is adjusted part position on the surface of support member for adjusting, including connecting piece, pretension loading unit and adjustment driver element, the described part that is adjusted is pressed on the surface of support member by described pretension loading unit by described connecting piece, described adjustment driver element and described pretension loading unit connect, in order to provide driving force.The invention also discloses a kind of two-dimension adjustment method using two-dimensional adjusting mechanism as above.The two-dimensional adjusting mechanism of present invention offer and two-dimension adjustment method, can solve the problem that space constraint, the independent adjustment of two dimension is realized in the confined space, simultaneously, adjustment positioning precision can be improved, reduce the locking error after having adjusted, additionally, adjustment can not affect, from being adjusted part removing this two-dimensional adjusting mechanism, the long-time stability being adjusted part after completing.
Description
Technical field
The present invention relates to a kind of two-dimensional adjusting mechanism and two-dimension adjustment method.
Background technology
Precision instrument, during debuging, tends not to reach to position fixed precision by directly processing, but
Need to be realized by various regulation schemes.Adjustment i.e. two-dimension adjustment in a plane, often through mutually
Vertical both direction adjusts, simultaneously need to both direction solves even, to reach fast velocity modulation during adjusting
By fixed form, the purpose of whole to required position, after adjustment completes, determines that this element is at whole group
Position in part.
Existing two-dimensional adjusting structure, as shown in Figure 4, by mutually perpendicular two guide posts, resolves into
Double-layer structure, it is achieved be adjusted the two dimension linkage regulation of part, using polished rod as guide post, silk during adjustment
Bar is as actuator.It addition, also have by jackscrew as actuator, spring realizes two dimension as restoring force and adjusts
Whole.With upper type adjust to common parts adjust location it is achieved that but relate to precision parts, exist
Following shortcoming:
1. this structure is by space constraint, in fine setting instrument, it is impossible to realize this knot in being adjusted part
Structure.
2. this adjustment mode exist positioning precision the highest and fixing locking error big.
3. after this structural adjustment completes, it is impossible to removing from being adjusted part, impact is adjusted the long-time stability of part.
Summary of the invention
It is an object of the invention to provide a kind of two-dimensional adjusting mechanism, it is possible to solve space constraint, at limited sky
Between realize that this two dimension is independent to be adjusted, meanwhile, adjustment positioning precision can be improved, reduce after having adjusted
Locking error, it addition, from being adjusted part removing this two-dimensional adjusting mechanism after having adjusted, do not affect and adjusted
The long-time stability of one integral piece.
To achieve the above object, the present invention adopts the following technical scheme that
A kind of two-dimensional adjusting mechanism, is adjusted part position on the surface of support member for adjusting, including connection
Knot part, pretension loading unit and adjustment driver element, described pretension loading unit will by described connecting piece
The described part that is adjusted is pressed on the surface of support member, and described adjustment driver element and described pretension loading unit are even
Connect, in order to provide driving force.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described pretension loading unit includes flexible piece, lever
Mechanism, pre-loading screw, stop jackscrew and grip block, one end of described flexible piece is fixed with described connecting piece
Connecting, the other end of described flexible piece is connected with the outfan of leverage, and described leverage is installed on institute
Stating on grip block, described pre-loading screw is arranged at the input of leverage, and described stop jackscrew is arranged at institute
State on grip block, described leverage can be fixed by adjusting stop jackscrew.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described leverage include bracer, pivot pin and
Pivot pin nut, described bracer is installed on described grip block by pivot pin and pivot pin nut, described bracer
Can rotate with described pivot pin for rotary shaft, the other end of described flexible piece connects with one end of described bracer
Connecing, the other end of described bracer is provided with the screw hole mated with described pre-loading screw, by adjusting stop
Jackscrew enables to one end of stop jackscrew and extrudes and fixes described bracer.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described flexible piece uses single-axle flexible hinge arrangement,
The hinge axis of flexible piece is oriented parallel to the surface of support member.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described adjustment driver element includes keyset and drives
Dynamic slide unit, described driving slide unit is connected with described pretension loading unit by described keyset.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described driving slide unit uses by slide unit guide rail and differential
The manual slide unit of head composition.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described driving slide unit uses automatic sports platform.
Preferably, in above-mentioned two-dimensional adjusting mechanism, described keyset is with described grip block in a vertical manner
Fixing connection.
The invention also discloses a kind of two-dimension adjustment method, comprise the steps:
First, will be adjusted after part is fixed on support member by fixing screw, assembling two dimension as above
Guiding mechanism so that connecting piece is fixing with the one end being adjusted part and flexible piece respectively to be connected;
Then, after unclamping fixing screw, by adjusting pre-loading screw so that flexible piece deformation, flexible piece shape
Sell of one's property raw elastic force closely connected on the surface of support member by being adjusted part;
Then, utilize adjustment driver element to make to be adjusted part and arrive desired location;
Then, adjust locking after reaching predetermined accuracy and be adjusted the fixing screw of part, complete to be adjusted determining of part
Position is fixing;
Finally, remove connecting piece, pretension loading unit and adjust driver element, it is achieved two-dimensional adjusting structure and
It is adjusted the separation of part;
Finally, will be adjusted after part is fixed on support member by fixing screw, remove connecting piece, pretension adds
Carrier unit and adjustment driver element, it is achieved two-dimensional adjusting structure and the separation being adjusted part.
The two-dimensional adjusting mechanism of present invention offer and two-dimension adjustment method, use connecting piece, pretension loading unit
And adjustment driver element, the described part that is adjusted is pressed in by described pretension loading unit by described connecting piece
On the surface (i.e. positioning stationary plane) of support member, described adjustment driver element and described pretension loading unit connect,
In order to provide driving force.On the one hand, by arranging connecting piece, space constraint can be overcome, it is possible to limited
Space in realize adjusting the two dimension being adjusted part is independent, on the other hand, be in course of adjustment and pass through pretension
Loading unit adds pretightning force, and can being in course of adjustment so that being adjusted part, to fit in location all the time fixing
On face, thus reduce locking error, improve positioning precision;Another further aspect, due to two-dimensional adjusting mechanism
It is independently arranged with the described part that is adjusted, therefore, can adjust from being adjusted part removing this two dimension after having adjusted
Complete machine structure, does not affect the long-time stability being adjusted part.
It addition, described pretension loading unit uses flexible piece to provide pretightning force, described flexible piece uses single shaft soft
Property hinge arrangement, the hinge axis of flexible piece is oriented parallel to the surface of support member, on the one hand, can ensure that pre-
In tight loading procedure, it is provided that loading force, on the other hand, occur during can avoiding locking crosses location,
Location can be eliminated by the deformation of this flexible piece during locking, ensure non-locking direction tool simultaneously
There is enough rigidity.
Accompanying drawing explanation
Two-dimensional adjusting mechanism and the two-dimension adjustment method of the present invention are given by below example and accompanying drawing.
Fig. 1 is the structural representation of the two-dimensional adjusting mechanism of one embodiment of the invention.
Fig. 2 is the structural representation of the pretension loading unit in one embodiment of the invention.
Fig. 3 a is the structural representation of the flexible piece in one embodiment of the invention.
Fig. 3 b is the side view of Fig. 3 a.
Fig. 4 is conventional two-dimensional adjusting structure in prior art.
Fig. 5 is a kind of application schematic diagram of the two-dimensional adjusting mechanism in one embodiment of the invention
In figure, 1-support member, 2-is adjusted part, 3-connecting piece, 41-flexible piece, 42-pivot pin, and 421,422-
Pivot pin nut, 43-stop jackscrew, 44-grip block, 45-trip bolt, 46-props up bracer, 47-pre-loading screw,
51-keyset, 52-drives slide unit.
Detailed description of the invention
Below with reference to accompanying drawings the present invention is described in more detail, which show the preferred real of the present invention
Execute example, it should be appreciated that those skilled in the art can revise invention described herein and still realize the present invention
Advantageous effects.Therefore, it is widely known that description below is appreciated that for those skilled in the art,
And it is not intended as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.In the following description, it is not described in detail public affairs
The function known and structure, because they can make to due to the fact that unnecessary details and chaotic.Will be understood that
In the exploitation of any practical embodiments, it is necessary to make a large amount of implementation detail to realize the specific objective of developer,
Such as according to about system or about the restriction of business, an embodiment change into another embodiment.Separately
Outward, it should think that this development is probably complicated and time-consuming, but for people in the art
It it is only routine work for Yuan.
For making the purpose of the present invention, feature become apparent, below in conjunction with the accompanying drawings the present invention is embodied as
Mode is further described.It should be noted that, accompanying drawing all uses the form simplified very much and all uses non-essence
Accurate ratio, only in order to facilitate, to aid in illustrating lucidly the purpose of the embodiment of the present invention.
Refer to Fig. 1 and Fig. 2, the two-dimensional adjusting mechanism that the present embodiment provides, it is adjusted part 2 for adjustment
Position on the surface of support member 1, including connecting piece 3, pretension loading unit and adjustment driver element,
The described part 2 that is adjusted is pressed in the surface of support member 1 by described connecting piece 3 by described pretension loading unit
On, described adjustment driver element and described pretension loading unit connect, in order to provide driving force.Use above-mentioned
Structure, on the one hand, by arranging connecting piece 3, space constraint can be overcome, it is possible in limited space
Realize adjusting the two dimension being adjusted part 2 is independent;On the other hand, it is in course of adjustment and loads list by pretension
Unit add pretightning force so that be adjusted part 2 be in course of adjustment fit in all the time location stationary plane on,
Thus reduce locking error, improve positioning precision;Another further aspect, due to two-dimensional adjusting mechanism and described
It is adjusted part 2 to be independently arranged, therefore, can be from being adjusted part 2 removing this two-dimension adjustment after having adjusted
Mechanism, does not affect the long-time stability being adjusted part 2.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, described pretension loading unit includes flexible piece
41, leverage, pre-loading screw 47, stop jackscrew 43, bracer 46 and grip block 44, described
Leverage is installed on described grip block 44, one end of described flexible piece 41 by trip bolt 45 with
Described connecting piece 3 is fixing to be connected, and described connecting piece 3 (is not schemed by screw assembly with the described part 2 that is adjusted
Show) detachable connection, the described other end of flexible piece 41 is connected with the outfan of leverage, described
Pre-loading screw 47 is arranged at the input of leverage, and described stop jackscrew 43 is arranged at described grip block
On 44, described leverage can be fixed by adjusting described stop jackscrew 43.During use, by adjusting
Pre-loading screw 47, utilizes lever principle so that flexible piece 41 deforms, thus drive connecting piece 3 and
The be adjusted part 2 that be connected fixing with connecting piece 3 is pressed on the surface of support member 1, so that follow-up adjustment
Displacement error will not be produced during locking after good position.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, described leverage include a bracer 46,
Pivot pin 42 and pivot pin nut 421,422, described bracer 46 by pivot pin 42 and pivot pin nut 421,
422 are installed on described grip block 44, and described bracer 46 can turn with described pivot pin 42 for rotary shaft
Dynamic, the other end of described flexible piece 41 is connected with one end of described bracer 46, described bracer 46
The other end is provided with the screw hole mated with described pre-loading screw 47, by adjusting described stop jackscrew 43
The one end enabling to stop jackscrew 43 extrudes and fixes described bracer 46.When adjusting pre-loading screw 47
Time, the other end (as the input of leverage) of support block 46 can be made to move so that a bracer
46 rotate around described pivot pin 42, so that one end (as the input of leverage) of a bracer 46
Move therewith, thus drive the one end with a bracer 46 to fix the other end motion of the flexible piece 41 being connected,
And then flexible piece 41 is deformed, one end of the flexible piece 41 that be connected fixing with connecting piece 3 produces
Elastic force, is loaded into by connecting piece 3 and is adjusted on part 2.Under this pretightning force effect, it is adjusted part 2
Fit tightly with the surface of support member 1, very close to each other, so that will not produce during follow-up locking
Displacement error, improves positioning precision.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, described flexible piece 41 uses single-axle flexible to cut with scissors
Chain structure, as shown in Figure 3 a and Figure 3 b shows, the thickness at the two ends of described flexible piece 41 is more than described flexible piece
Thickness in the middle part of in the of 41, in order to described flexible piece 41 by two ends respectively with connecting piece 3 and prop up bracer 46
Fixing connection, the hinge axis of flexible piece 41 is oriented parallel to the surface of support member 1.By to described flexibility
One end of part 41 structure applies power, retrains the other end of described flexible piece 41 so that it is deform around axis of rotation
Thering is provided pretightning force, the applying of deformation force is not limited to the helical structure described in the present embodiment i.e. pre-loading screw.Adopt
With the flexible piece 41 of said structure, on the one hand, can ensure that in pretension loading procedure, it is provided that loading force,
On the other hand, occur during can avoiding locking crosses location, can be by this flexibility during locking
The deformation of part 41 eliminated location, ensured that non-locking direction has enough rigidity simultaneously.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, the quantity of described flexible piece 41 is two.
So that being more uniformly stressed of connecting piece 3, and then make to be adjusted being more uniformly stressed of part 2.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, described adjustment driver element includes keyset
51 and drive slide unit 52, described driving slide unit 52 loads single by described keyset 51 and described pretension
Unit connects, and described driving slide unit 52 is used for providing driving force.By arranging keyset 51, can make to be adjusted
One integral piece 2 is adjusted outside realization of parts by driving slide unit or other adjustment driver elements, such that it is able to
Implementing to adjust work farther away from the position being adjusted part 2.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, described keyset 51 and described grip block 44
Fixing connection in a vertical manner.Driving force (i.e. carrying out the power of self-driven slide unit 52) is adjusted such that it is able to change
Force direction, it is simple to apply flexibly to adjust driving force.
It is also preferred that the left in the two-dimensional adjusting mechanism of the present embodiment, described driving slide unit 52 can use by sliding
Platform guide rail and the manual slide unit of differential head composition, it would however also be possible to employ sports platform automatically, it is achieved motor drives.By
It is ordinary skill in the art means in manual slide unit and automatic sports platform, therefore does not repeats them here.
Please continue to refer to Fig. 1 and Fig. 2, present invention also offers a kind of two-dimension adjustment method, including walking as follows
Rapid:
First, will be adjusted after part 2 is fixed on support member 1 by fixing screw, assembling as above
Two-dimensional adjusting mechanism so that connecting piece 3 is fixing with the one end being adjusted part 2 and flexible piece 41 respectively to be connected.
Then, after unclamping fixing screw, by adjusting pre-loading screw 47 so that flexible piece 41 deformation, soft
Property part 41 deformation produce elastic force closely connected on the surface of support member 1 by being adjusted part 2.Pretension executes load
Mode can be by the structure of similar lever principle, by regulation pre-loading screw 47, apply certain pre-
Clamp force, to connecting piece 3, makes flexible piece 41 deform, utilizes elastic force to load.Under pretightning force effect,
The surface (i.e. binding face) being adjusted part 2 and support member 1 fits tightly, very close to each other, so that
Follow-up locking process will not produce displacement error.
Then, utilize adjustment driver element to make to be adjusted part 2 and arrive desired location.Specifically can be such that
Adjust and drive slide unit 52, driving to be adjusted part 2 and move along slide unit guide rail direction on binding face, flexible piece
The hinge axis of 41 is parallel to binding face (being i.e. adjusted the plane of motion of part 2), it is ensured that the quilt during adjustment
Adjustment part 2 is in the rigidity of moving direction, and provides plastic deformation to eliminate lock in the direction being perpendicular to binding face
Crossing during Jin positions.
Then, adjust locking after reaching predetermined accuracy and be adjusted the fixing screw of part 2, complete to be adjusted part 2
Location fix.
Finally, remove connecting piece 3, pretension loading unit and adjust driver element, it is achieved two-dimensional adjusting structure
With the separation being adjusted part 2.Thus, it is ensured that it is adjusted the long-time stability of part 2, can also improve simultaneously
The utilization rate of this two-dimensional adjusting mechanism.
As it is shown in figure 5, the present embodiment is applied in alignment image-forming module, illuminate into optical assembly (as quilt
Adjustment part 2) need to carry out high-precision two-dimension adjustment, it is locked after having adjusted in image-forming assembly (phase
When in support member 1) on.This guiding mechanism uses the two-dimensional adjusting mechanism in case, it is achieved lighting optical axis
Accurately adjust and fixing.
In sum, the two-dimensional adjusting mechanism of present invention offer and two-dimension adjustment method, including connecting piece, in advance
Tight loading unit and adjustment driver element, described pretension loading unit is adjusted described by described connecting piece
One integral piece is pressed on the surface (i.e. positioning stationary plane) of support member, and described adjustment driver element and described pretension add
Carrier unit connects, in order to provide driving force.On the one hand, by arranging connecting piece, space constraint can be overcome,
Can realize adjusting, on the other hand, in the process of adjustment the two dimension being adjusted part is independent in limited space
In add pretightning force by pretension loading unit, can be in course of adjustment fit all the time so that being adjusted part
On the stationary plane of location, thus reduce locking error, improve positioning precision;Another further aspect, due to two
Dimension guiding mechanism and the described part that is adjusted are independently arranged, and therefore, can tear open from being adjusted part after having adjusted
Except this two-dimensional adjusting mechanism, do not affect the long-time stability being adjusted part.
It addition, described pretension loading unit uses flexible piece to provide pretightning force, described flexible piece uses single shaft soft
Property hinge arrangement, the hinge axis of flexible piece is oriented parallel to the surface of support member, on the one hand, can ensure that pre-
In tight loading procedure, it is provided that loading force, on the other hand, occur during can avoiding locking crosses location,
Location can be eliminated by the deformation of this flexible piece during locking, ensure non-locking direction tool simultaneously
There is enough rigidity.
Obviously, those skilled in the art can carry out various change and modification without deviating from this to the present invention
Bright spirit and scope.So, if the present invention these amendment and modification belong to the claims in the present invention and
Within the scope of its equivalent technologies, then the present invention is also intended to comprise these change and modification.
Claims (8)
1. a two-dimensional adjusting mechanism, is adjusted part position on the surface of support member, its feature for adjusting
It is, including connecting piece, pretension loading unit and adjustment driver element, described pretension loading unit
By described connecting piece, the described part that is adjusted is pressed on the surface of support member, described adjustment driver element
Connect with described pretension loading unit, in order to provide driving force, and adjusted from described after adjustment completes
Remove this two-dimensional adjusting mechanism in one integral piece, described pretension loading unit include flexible piece, leverage,
Pre-loading screw, stop jackscrew and grip block, one end of described flexible piece is fixing with described connecting piece even
Connecing, the other end of described flexible piece is connected with the outfan of leverage, and described leverage is installed on
On described grip block, described pre-loading screw is arranged at the input of leverage, and described stop jackscrew sets
It is placed on described grip block, described leverage can be fixed by adjusting described stop jackscrew.
Two-dimensional adjusting mechanism the most according to claim 1, it is characterised in that described leverage includes propping up
Bracer, pivot pin and pivot pin nut, described bracer is installed on described folder by pivot pin and pivot pin nut
Holding on plate, described bracer can rotate with described pivot pin for rotary shaft, the other end of described flexible piece
Being connected with one end of described bracer, the other end of described bracer is provided with and described pre-loading screw
The screw hole joined, the one end enabling to stop jackscrew by adjusting stop jackscrew extrudes and fixes described
Prop up bracer.
Two-dimensional adjusting mechanism the most according to claim 1, it is characterised in that described flexible piece uses single shaft
Flexible hinge structure, the hinge axis of flexible piece is oriented parallel to the surface of support member.
Two-dimensional adjusting mechanism the most according to claim 1, it is characterised in that described adjustment driver element bag
Including keyset and drive slide unit, described driving slide unit loads single by described keyset and described pretension
Unit connects.
Two-dimensional adjusting mechanism the most according to claim 4, it is characterised in that described driving slide unit use by
Slide unit guide rail and the manual slide unit of differential head composition.
Two-dimensional adjusting mechanism the most according to claim 4, it is characterised in that described driving slide unit uses certainly
Dynamic sports platform.
Two-dimensional adjusting mechanism the most according to claim 4, it is characterised in that described keyset and described folder
Hold the rectilinear fixing connection of plate.
8. a two-dimension adjustment method, it is characterised in that comprise the steps:
First, will be adjusted after part is fixed on support member by fixing screw, assembling such as claim 2~7
Two-dimensional adjusting mechanism described in middle any one so that connecting piece respectively with the one end being adjusted part and flexible piece
Fixing connection;
Then, after unclamping fixing screw, by adjusting pre-loading screw so that flexible piece deformation, flexible piece shape
Sell of one's property raw elastic force closely connected on the surface of support member by being adjusted part;
Then, utilize adjustment driver element to make to be adjusted part and arrive desired location;
Then, adjust locking after reaching predetermined accuracy and be adjusted the fixing screw of part, complete to be adjusted determining of part
Position is fixing;
Finally, will be adjusted after part is fixed on support member by fixing screw, remove connecting piece, pretension adds
Carrier unit and adjustment driver element, it is achieved two-dimensional adjusting structure and the separation being adjusted part.
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CN201210285503.9A CN103567954B (en) | 2012-08-10 | 2012-08-10 | Two-dimensional adjusting mechanism and two-dimension adjustment method |
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CN201210285503.9A CN103567954B (en) | 2012-08-10 | 2012-08-10 | Two-dimensional adjusting mechanism and two-dimension adjustment method |
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CN103567954B true CN103567954B (en) | 2016-09-28 |
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CN108614395B (en) * | 2018-05-09 | 2019-03-26 | 哈尔滨工业大学 | Parallel motion mechanism based on shaft flexible hinge adjusts device |
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CN201876595U (en) * | 2010-11-19 | 2011-06-22 | 无锡荣兴科技有限公司 | Universal plane mirror two-dimensional angular adjustment mechanism |
CN102243357B (en) * | 2011-07-12 | 2013-08-14 | 中国科学院微电子研究所 | Two-dimensional fine-adjustable miniature electric translation table |
CN202185751U (en) * | 2011-07-22 | 2012-04-11 | 航天科工防御技术研究试验中心 | Pretightening-force-adjustable quick clamp |
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SU1732316A1 (en) * | 1989-05-29 | 1992-05-07 | Научно-исследовательский институт автоматики и приборостроения | Adjusting device |
DE102004043130A1 (en) * | 2003-09-10 | 2005-04-21 | Valeo Systemes Dessuyage | Mounting tool for a windshield wiper mechanism and mounting method using such a tool |
CN1908735A (en) * | 2006-08-11 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | Precision optical adjusting rack |
CN201681253U (en) * | 2010-04-16 | 2010-12-22 | 上海微电子装备有限公司 | Precise adjustable positioning device |
CN202103033U (en) * | 2011-04-14 | 2012-01-04 | 武汉华工正源光子技术有限公司 | Passive accurate aligning cap sealing system |
CN102565983A (en) * | 2011-11-18 | 2012-07-11 | 中国科学院光电技术研究所 | Axial fine adjustment device for movable mirror |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |