CN102409387A - Surface Processing Device - Google Patents
Surface Processing Device Download PDFInfo
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- CN102409387A CN102409387A CN2011101815222A CN201110181522A CN102409387A CN 102409387 A CN102409387 A CN 102409387A CN 2011101815222 A CN2011101815222 A CN 2011101815222A CN 201110181522 A CN201110181522 A CN 201110181522A CN 102409387 A CN102409387 A CN 102409387A
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/20—Electroplating using ultrasonics, vibrations
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
- C25D17/08—Supporting racks, i.e. not for suspending
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/04—Removal of gases or vapours ; Gas or pressure control
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The invention provides a surface processing device. The surface processing device can remove bubbles adhering to the surface and in holes of a work piece physically, and improve the surface processing ability. The surface processing device used for processing the surface of the work piece (20) is provided with a guide rail (201, 231-235); a transporting fixture (30) guided by the guide rail and transporting and retaining the work piece in a transporting direction (A) along the guide rail; a surface processing groove (200) used for surface processing of the work piece retained by the transporting fixture; a front processing groove (230A) arranged on a side of the upper stream of the transporting direction (A) of the surface processing groove and dipping the work piece retained by the transporting fixture into processing liquid (290) for processing; and a vibration giving part (500) giving vibration to the transporting fixture retaining the work piece dipped in the processing liquid in the preprocessing groove, thereby letting the work piece vibrate in the processing liquid.
Description
Technical field
The present invention relates to a kind of surface processing device with surface treatment groove and pre-treatment groove.
Background technology
As surface processing device, for example workpiece surface is carried out the metallide treatment unit of electroplating processes, known have a continuous plating apparatus that in plating tank, transports workpiece such as circuit substrate continuously.Workpiece is kept by the anchor clamps that transport that transport along power supply rail (guide rail) floppily.Workpiece transports in plating tank via transporting the anchor clamps power supply while being powered track continuously.The both sides that the workpiece that in plating tank, becomes negative electrode transports the path dispose anode.Thereby between K-A, form electric field, electroplate liquid is carried out electric decomposition, workpiece surface is electroplated.
At this, known have the structure (patent documentation 1) that above plating tank, has disposed power supply rail, and extend the structure (patent documentation 2) that power supply rail is set abreast at the length direction of position of above plating tank, leaving and plating tank.Through the structure of patent documentation 2, the dust that can prevent to be produced when transporting anchor clamps slides on power supply rail falls and sneaks in the plating tank.
Workpiece is substrate that is used for by electronics and semiconductor device etc., forms sometimes as the open-work of communicating pores and as the hole portions such as blind hole of non-through hole.Surface processing device will also carry out surface treatment, for example electroplating processes to the inboard of these hole portions.This is because open-work is the communicating pores that makes the pros and cons conducting of substrate, and blind hole is to make inner distribution be conducting to the non-through hole on top layer, the cause that electroplate distribution to the inboard of hole portion.
Think at present when in these hole portions, having bubble, the inboard that can be created in hole portion because of this bubble not by surface-treated problem (patent documentation 3～5).
No. 3025254 communique of [patent documentation 1] Japanese Patent
No. 3591721 communique of [patent documentation 2] Japanese Patent
[patent documentation 3] spy opens flat 11-350187 communique
[patent documentation 4] spy opens the 2004-111893 communique
[patent documentation 5] spy opens the 2008-309708 communique
In patent documentation 3, the surface that the atomized liquid that uses two-fluid spray nozzle or UW and produce is coated in workpiece is inner with moistening minute aperture, carries out electroplating processes afterwards.In patent documentation 4, on one side with workpiece be immersed in through add negatively charged ion be interfacial agent to make surface tension be in the aqueous solution of 300～600 μ N/cm, remove the bubble in the non-through hole of workpiece through adding UW on one side.In patent documentation 5; Workpiece is immersed in surface tension with respect to workpiece than in the little pre-treatment solution of electroplating processes liquid; Pre-treatment solution because and the contact angle of minute aperture internal surface little and get into easily between the internal surface and bubble of minute aperture, the bubble that is full of the inboard of minute aperture breaks away from from the internal surface of minute aperture.
But, only exist the further miniaturization of diameter through making hole portions such as open-work and blind hole etc. to improve the wettability of workpiece, enter into hole portion the inboard bubble remove more difficult situation.
Summary of the invention
In several technical schemes of the present invention, can improve the surface treatment ability with removing attached to the bubble physics on the workpiece.
The surface processing device of a technical scheme of the present invention is characterised in that to have: guide rail; Transport anchor clamps,, transport and keep workpiece in the carriage direction of above-mentioned guide rail along postponing by above-mentioned guide rail guiding; The surface treatment groove is to carrying out surface treatment by the above-mentioned above-mentioned workpiece that transports the anchor clamps maintenance; The pre-treatment groove is configured in the above-mentioned carriage direction upper reaches one side of above-mentioned surface treatment groove, will transported above-mentioned workpiece that anchor clamps keep and is immersed in the treatment solution and handle by above-mentioned; The vibration assigning unit is given vibration to the above-mentioned anchor clamps that transport that keep being immersed in the above-mentioned workpiece in the above-mentioned treatment solution in above-mentioned pre-treatment groove, above-mentioned workpiece is vibrated in above-mentioned treatment solution.
According to this technical scheme of the present invention, in the pre-treatment groove, give vibration to the anchor clamps that transport that keep being immersed in the workpiece in the treatment solution.So, workpiece vibrates in treatment solution.Its result can be with removing from workpiece attached to the bubble on the workpiece.Comprise attached to the bubble on the workpiece surface attached to the bubble on the workpiece.Therefore, the present invention does not necessarily only limit to workpiece with holes.This be since when bubble attached to the surface of workpiece on the time, the cause of the surface treatment ability deterioration of this part.In addition, under the situation of the hole portion that is formed with perforation or non-perforation on the workpiece, the bubble that is trapped in this hole portion is also discharged from the portion of hole because of the vibration of workpiece.And, even the bubble of from the portion of hole, removing once more attached on the workpiece surface, also can be removed this bubble through the vibration of workpiece from workpiece surface.Like this, owing to can in pre-treatment, bubble be removed from workpiece, so in surface treatment procedure thereafter, also can carry out surface treatment to the internal surface of hole portion.
At this, can be to anchor clamps keep and give vibration at the workpiece that just in treatment solution, is transporting by transporting, but, then give vibration easily to transporting anchor clamps if in treatment solution, be in the workpiece that stops, be preferred in this.Because when workpiece vibrates in treatment solution, the bubble of from the restriction of the wall portion of the surface of workpiece and hole portion, liberating is under buoyancy function and rise, so can make bubble physics discharge from the workpiece.In addition, the vibration assigning unit in being arranged on the pre-treatment groove, also can be arranged in the rear treating groove.
In a technical scheme of the present invention; Can be that the above-mentioned anchor clamps that transport have: by the portion that is directed to of above-mentioned guide rail guiding; Keeping above-mentioned workpiece is the maintaining part of hang; With the above-mentioned linking part that is directed to portion and above-mentioned maintaining part of binding, above-mentioned vibration assigning unit is given vibration to the above-mentioned above-mentioned linking part that transports anchor clamps.
Because the portion of being directed to is fastened on the guide rail, so vibration decay easily.Maintaining part receives baneful influence because of the maintaining condition of vibration workpiece easily.In this, if linking part, then so long as kept the binding function just not have drawback.
In a technical scheme of the present invention; Can above-mentioned guide rail the position of above above-mentioned surface treatment groove and above-mentioned pre-treatment groove, leaving with extend setting from above-mentioned pre-treatment groove abreast towards the direction of above-mentioned surface treatment groove; The above-mentioned above-mentioned linking part that transports anchor clamps comprises the horizontal part that extends towards the free end horizontal direction from the above-mentioned base end part that is directed to portion's one side; With from the above-mentioned free end of above-mentioned horizontal part towards the sagging dip portion of above-mentioned maintaining part, above-mentioned vibration assigning unit is given vibration to above-mentioned dip portion.
The dip portion that is endowed vibration links to each other with the free end of the horizontal part that extends from the base end part by the portion that is directed to of rail support.Therefore, the main points through the free end that makes socle girder vibrates can make Workpiece vibration effectively in treatment solution.
In an embodiment of the invention, can be that above-mentioned vibration assigning unit comprises the above-mentioned strike portion that transports anchor clamps of hitting.On vibration is given, can consider the whole bag of tricks, but the strike portion of vibration assigning unit can transport anchor clamps and once gives vibration to transporting anchor clamps through hitting at least.Particularly, transport the linking part of anchor clamps through strike, the dip portion in this linking part, what can make the socle girder structure effectively transports the anchor clamps vibration.Because this vibration is delivered on the workpiece, so workpiece is vibrated in treatment solution.
In a technical scheme of the present invention, can be above-mentioned strike portion with the direction of the surface crosswise of above-mentioned workpiece on move and hit the above-mentioned anchor clamps that transport.Preferably, strike portion can with the surperficial orthogonal direction of workpiece on move and hit and transport anchor clamps.Under any situation, because the pressure of treatment solution acts on two surfaces of workpiece, so treatment solution becomes cushioning material and can alleviate transporting the excess impact of anchor clamps.
In a technical scheme of the present invention, can be that above-mentioned vibration assigning unit comprises that the above-mentioned strike of maintenance portion rotates the 1st arm freely around fulcrum, and drive above-mentioned the 1st arm comes and goes rotation between hit position and stand-by station around above-mentioned fulcrum driving part.
Like this, through via the 2nd arm strike portion being rotated, strike portion is come and gone between hit position and stand-by station move from driving part.Because if strike portion is in stand-by station, then strike portion does not produce interference with the path of transporting of transporting anchor clamps, so can transport along transporting the path transporting anchor clamps.If stop rear drive strike portion transporting transporting of anchor clamps, then can hit and transport folder.
In an embodiment of the invention, can be the stopper section that above-mentioned vibration assigning unit also is included in above-mentioned hit position and above-mentioned the 1st arm butt.
Like this, can make strike portion stop at hit position reliably.Through the stopper section is set, even do not exist under the situation of transporting anchor clamps, also can make strike portion stop at the fixed position in hypothesis, security improves.
In an embodiment of the invention; Can be that above-mentioned strike portion comprises the fixed part that is fixed on above-mentioned the 1st arm; With can be slidably supported at sliding part more outstanding than said fixing portion in the said fixing portion and under the mass force effect when a part of butt in above-mentioned the 1st arm and above-mentioned stopper section, above-mentioned sliding part hits the above-mentioned anchor clamps that transport.
Like this, if sliding part because of mass force forwards move midway or the mobile terminal exist and transport anchor clamps, then sliding part can with transport the anchor clamps collision and hit and transport anchor clamps.So, can increase vibration and give power.
In an embodiment of the invention; Can be that above-mentioned vibration assigning unit also has by above-mentioned drive section drives the 2nd arm that moves around above-mentioned fulcrum and above-mentioned the 1st arm one, be longer than always motivating force from above-mentioned driving part from the point of application of above-mentioned the 1st arm that keeps above-mentioned strike portion to the 1st distance of above-mentioned fulcrum and be delivered to force on above-mentioned the 2nd arm to the 2nd distance of above-mentioned fulcrum.
Like this, the translational speed speedup of the strike portion when under the motivating force effect of driving part, driving the 2nd arm can increase the mass force that sliding part is given.Therefore, can increase transporting the surging force that anchor clamps are given through sliding part.
Description of drawings
Fig. 1 is the diagrammatic top view of the related continuous electroplating apparatus of embodiment of the present invention;
Fig. 2 explains off and on to transport anchor clamps to plating tank, in plating tank, transports the accompanying drawing of the action of anchor clamps continuously;
Fig. 3 is that explanation is transported the accompanying drawing of the action of anchor clamps off and in the part of pre-treatment groove;
Fig. 4 is that explanation is transported the accompanying drawing of the action of anchor clamps off and at another part of pre-treatment groove;
Fig. 5 is the signal longitudinal sectional view of plating tank;
Fig. 6 is the schematic isometric of transporting anchor clamps;
Fig. 7 is expression pre-treatment groove and the side-view that vibrates assigning unit;
Fig. 8 is the vertical view that strike portion is in the vibration assigning unit of stand-by station;
Fig. 9 be expression the 1st arm will with the vertical view of the vibration assigning unit of state before the butt of stopper section;
Figure 10 be expression the 1st arm just and the vertical view of the vibration assigning unit of the strike state behind the butt of stopper section.
Description of reference numerals:
10: workpiece, 30: transport anchor clamps, 100: circulation is transported the path, 200: surface treatment groove (plating tank), 201: guide rail (power supply rail); 231～236: guide rail (trapped orbit or fluctuating orbit), 300: be directed to portion, 330: linking part, 331: horizontal part, 332: dip portion; 340: maintaining part, 500: vibration assigning unit, 510: strike portion, 520: the 1 arms; 522: fulcrum, 524: the 2 arms, 530: driving part (cylinder), 540: the stopper section.
Embodiment
Below, preferred implementation of the present invention is elaborated.In addition, below this embodiment of explanation is not to limit the content of the present invention that claims are put down in writing wrongly, is not that limiting as solution of the present invention must be the whole of structure illustrated in this embodiment.
1. the summary of surface processing device
Fig. 1 is the vertical view of surface processing device, for example continuous plating apparatus.Continuous plating apparatus 10 has a workpiece 20 such as retaining circuit substrate respectively a plurality ofly transports the circulation that anchor clamps 30 transport along the for example dextral circulation carriage direction A circulation of Fig. 1 and transports path 100.In addition, in Fig. 1, omitted the diagram that an a part of workpiece 20 and a part are transported anchor clamps 30.
Transport in the path 100 in circulation and to be provided with: plating tank (being the surface treatment groove in the broadest sense) 200, to carrying out surface treatment, for example electroplating processes by a plurality of workpiece 20 that transport each maintenance of anchor clamps 30; Be transported into portion 210; The upper reaches in path 100 are transported in the circulation that is located at plating tank 200, untreated workpiece 20 is transported into a plurality ofly transports anchor clamps 30, and transport portion 220; The downstream in path 100 are transported in the circulation that is located at plating tank 200, and the workpiece 20 after handling is transported from a plurality of anchor clamps 30 that transport.
Circulation is transported path 100 and had: the 1st straight line transports path 110; Transport path 110 the 2nd parallel straight lines with the 1st straight line and transport path 120; A plurality of at least one of transporting anchor clamps 30 are horizontally rotated and be handed off to the 1st swivel arrangement 130 that the 2nd straight line transports an end in path 120, and a plurality of at least one of transporting anchor clamps 30 are horizontally rotated and be handed off to the 2nd swivel arrangement 140 that the 1st straight line transports the other end in path 110 from the other end that the 2nd straight line transports path 120 from the end that the 1st straight line transports path 110.
In this embodiment, plating tank 200 transports path 120 along the 2nd straight line and is provided with, and is transported into portion 210 and transports portion 220 to be located at the 1st straight line and to transport on the path 110.Transport on the path 100 in circulation, and then be provided with the pre-treatment groove group 230 and the rear treating groove group 240 that is configured in downstream one side of plating tank 200 of the upper reaches one side that is configured in plating tank 200.
In pre-treatment groove group 230 and rear treating groove group 240, transport anchor clamps 30 and intermittently transport.For this reason, in pre-treatment groove group 230 and rear treating groove group 240, be provided with and transport and guide two kinds of guide rails that transport anchor clamps 30.A kind of is the trapped orbit 232,234,235,242,243 that is used in same treatment trough, intermittently transporting anchor clamps 30.Another kind is between different treatment troughs, to cross the fluctuating orbit 231,233,236,241 that partition wall transports anchor clamps 30 off and on.
Transport in the path 110,120 at the spray groove 230D of pre-treatment groove group 230 and rear treating groove group 240, the 1st, the 2nd straight line beyond the 240A; Through these two kinds of guide rails with make one or more anchor clamps 30 that transport along the guide rail pusher of Moving Unit distance only, transport anchor clamps 30 and intermittently transported.In addition, for intermittently transporting action, adopt Fig. 3 and Fig. 4 after narrate.
Among spray groove 230D in pre-treatment groove group 230 and rear treating groove group 240, the 240A, transport anchor clamps 30 and intermittently transported through the 1st, the 2nd swivel arrangement 130,140.For this reason, the 1st swivel arrangement 130 has by two swing-around trajectories, 131,132, the 2 swivel arrangements 140 of one driven in rotation and has by two swing-around trajectories 141,142 of one driven in rotation.
For example; In the 1st swivel arrangement 130; Be supported on the swing-around trajectory that is positioned at the circulation carriage direction upper reaches one side in two swing-around trajectories 131,132 will transport anchor clamps 30; Another swing-around trajectory that is positioned at circulation carriage direction downstream one side is empty state, intermittently drives two swing-around trajectories 131,132 Rotate 180 ° one by one integratedly.The 2nd swivel arrangement 140 also is same.By through the rotation of the 1st, the 2nd swivel arrangement 130,140 transport workpiece 20 that anchor clamps 30 keep in spray groove 230D or spray groove 240A by spray Cleaning for High Capacity.At this moment, owing to need not in spray groove 230D, 240A, to accommodate the liquid that makes workpiece 20 dipping, so, can not transport to produce and hinder to the level of workpiece 20 even exist the next door also can be lower.
As shown in Figure 1, each that is located at two swing-around trajectories 131,132,141,142 on the 1st, the 2nd swivel arrangement 130,140 respectively be configured to closed position be configured in the 1st, the 2nd straight line respectively and transport that each corresponding guide rail is a straight line in four guide rails 234,235,242,243 at two ends in path 110,120.
The position of in plating tank 200, above plating tank 200, leaving is provided with the vertical view of Fig. 1 the power supply rail (being guide rail in a broad sense) 201 that extends setting with the length direction of plating tank 200 abreast.The a plurality of anchor clamps 30 that transport that supported by power supply rail 201 are configured in the plating tank 200 interior workpiece 20 that also keep respectively.And, be provided with along power supply rail 201 and make a plurality of continuous conveyers 400 that anchor clamps 30 transport along power supply rail 201 continuously that transport.In addition, for transporting action continuously, adopt Fig. 2 to narrate afterwards.
Circulation is transported path 100 and is also had anchor clamps in the scope that is transported into portion 210 in the portion that transports 220 that transports path 110 from the 1st straight line and return and transport path 150.Anchor clamps return and transport path 150 and for example have two annular link chains 151,152.Anchor clamps return and transport the anchor clamps 30 that transport that path 150 has dummy status and return the function that is transported to the portion of being transported into 210 from transporting portion 220, and make dummy status transport the function of anchor clamps 30 in the upper reaches that are transported into portion 210 one side standby.
2. transporting the intermittence of anchor clamps transports and transports continuously
Fig. 2 has represented that the transporting continuously of anchor clamps 30 of transporting in the plating tank 200 intermittently of transporting anchor clamps 30 between action and pickling tank 230E and the plating tank 200 transport action.Three of having represented to be supported by fluctuating orbit 236 of Fig. 2 transport that the anchor clamps 30 that transport ahead shown in the dotted line just have been handed off to the state behind the position shown in the solid line on the power supply rail 201 from fluctuating orbit 236 in the anchor clamps 30.
In Fig. 2, fluctuating orbit 236 can go up and down along lifting shaft 252 through the driving of lift motor 250.This fluctuating orbit 236 has can support four length of transporting anchor clamps 30, and it is supported in the driving of reality to be that two or three transport anchor clamps 30.Therefore, as vacant space, at least one transports the space of anchor clamps 30 to have support.
Before fluctuating orbit 236 rises from the state of Fig. 2, be among the spray groove 230D one and transport anchor clamps 30 (not shown among Fig. 2) and carry out feed motion with the mode that supports by fluctuating orbit 236.Like this, having carried three fluctuating orbits 236 that transport anchor clamps 30 rises.Dispose top pusher 260 in hoisting position.This top pusher 260 has three feedings and decides journey piece 264 on bar 262.Bar 262 can forward-reverse through the feed screw 268 that is driven by feeding motor 266.
On the other hand, transport on each of anchor clamps 30 at three that support by fluctuating orbit 236 and be fixed with the 1st driving chip 320.When fluctuating orbit 236 rose, three the 1st driving chips 320 were configured in three the place aheads that journey piece 264 is decided in feeding of top pusher 260.When after when bar 262 is advanced, decide journey piece 264 with three feedings of bar 262 progressive and promote three the 1st 320, three of driving chips and transport anchor clamps 30 unit distance of only advancing.The anchor clamps 30 that transport like this, ahead move from the top of the last direction plating tank 200 of pickling tank 230E.
Afterwards, fluctuating orbit 236 descends.So, ahead the anchor clamps 30 that transport are configured in shown in dotted line among Fig. 2 in the plating tank 200.In order to cross the next door 237 between the different treatment troughs, use fluctuating orbit 236 and top pusher 260, transport anchor clamps 30 and intermittently transported.
The anchor clamps 30 (shown in the dotted line) that transport ahead that are supported on the fluctuating orbit 236 join to power supply rail 201 from fluctuating orbit 236 through bottom pusher 270.Bottom pusher 270 has the feeding of being supported by bar 272 and decides journey piece 274.On the other hand, transport anchor clamps 30 and have the 2nd driving chip 321 that can decide journey piece 274 butts with feeding, the 2nd driving chip 321 that transports anchor clamps 30 ahead that is supported on the fluctuating orbit 236 is configured in the place ahead that journey piece 274 is decided in feeding.When after when bar 272 is advanced, decide journey piece 274 with bar 272 progressive feedings and promote the 2nd driving chip 321, transport anchor clamps 30 along the arrow A direction unit distance of only advancing.The anchor clamps 30 that transport like this, ahead move from the top of the last direction plating tank 200 of pickling tank 230E.Join to power supply rail 201 from fluctuating orbit 236.
At this moment, by only being separated clearance G ground configuration at the workpiece 20 that transports on the anchor clamps 30 of going ahead of the rest in transit continuously on the power supply rail 201 by the workpiece 20 that anchor clamps 30 support of transporting of the propulsive back of bar 272 row with being supported on lower velocity through the sequential control of bar 272.Clearance G is narrow more good more, but need prevent to go ahead of the rest and back workpiece 20 interference each other of going, and sets 10mm or the size about it for as value.Clearance G is big if this is, then electrolysis concentrates on the two ends of workpiece 20, and the electroplating thickness thickening at workpiece 20 two ends as so-called dog bone can not be guaranteed the cause of inner evenness.
Below, with reference to Fig. 3 and Fig. 4 to pre-treatment groove group 230 discontinuous transport anchor clamps 30 action describe.In Fig. 3 and Fig. 4; Action is same with transporting the intermittence among Fig. 2; Only transporting action the intermittence in same groove adopts bottom pusher 280,284,286 and trapped orbit 232,234,235 to implement; Transport under the situation of action the intermittence that surpasses next door 237 being included between the different grooves, adopt top pusher 282 and fluctuating orbit 233 to implement intermittently to transport action.In addition; Fig. 4 representes as the figure after will launching from cold water washing trough 230C to pickling tank 230E; But transport the intermittence in the spray groove 230D is to replace trapped orbit and adopt the swing-around trajectory 131 or the swing-around trajectory 132 that horizontally rotate to implement, swing-around trajectory 131 (132) with transport at trapped orbit 234, the intermittence between 235 before and after it through 284,286 enforcements of bottom pusher.And, having omitted explanation for transporting action the intermittence in the rear treating groove group 240, but, be to adopt swing-around trajectory 141,142 with above-mentioned same, trapped orbit 242,243 and not shown bottom pusher are implemented.
3. plating tank
Fig. 5 is the schematic sectional view of plating tank 200.Plating tank 200 has the framework 202 of upper opening.In framework 202, dispose to subtend two anode cassette 203, in anode cassette 203, contain anode ball 203A as running stores.Between two anode cassette 203, dispose two row blast tubes 204.List with file in each of two row blast tubes 204 and to be fixed with a plurality of nozzle 204A, can be with electroplate liquid towards the ejection of the two sides of workpiece 20.The lower end of two row blast tubes 204 is separately fixed on the distribution piping 205.
In the both sides of workpiece 20, the guide member that transports and guide workpiece 20 can be set, and block workpiece 20 upper and lower end parts block parts.And then, the height location that can adjust guide member matchingly and block parts with the total length of workpiece 20.Owing to block parts the upper and lower end parts of workpiece 20 is blocked, concentrate on lower end and the electroplating thickness thickening of workpiece 20 so can prevent electric field.
4. transport anchor clamps
Keep workpiece 20 to transport anchor clamps 30 as shown in Figure 6, have the portion of being directed to 300, linking part 330, and maintaining part 340.Being directed to portion 300 is the parts by power supply rail 201 guiding.Maintaining part 340 is to keep workpiece 20 to be the part of hang.Linking part 330 is the parts that link portion that is directed to 300 and maintaining part 340.
At this, as shown in Figure 6 to the power supply rail 201 that the portion of being directed to 300 leads, the longitudinal section be have upper surface 201A, lower surface 201B, plating tank 200 1 sides the 1st side 201C and with the rectangular section of the 2nd side 201D of the 1st side 201C subtend.In addition, the shape of power supply rail 201 is consistent with the shape of the guide rail that beyond plating tank 200, intermittently transports anchor clamps 30 (trapped orbit 232,234,235,242,243, fluctuating orbit 231,233,236,241 or swing-around trajectory 131,132,141,142).
Being directed to portion 300 has: the portion that is powered 301 that contacts with the upper surface 201A of power supply rail 201; With the 1st side 201C of power supply rail 201 roll contact at least one, two the 1st rollers 302 for example; With the 2nd side 201D of power supply rail 201 roll contact at least one, three the 2nd rollers 303 for example, and with the band tooth piece 420 of continuous conveyer 400 mesh by engaging piece 304.And then can also be provided with the lower surface 201B of power supply rail 201 roll contact at least one, two the 3rd rollers 305 for example.Like this, having the portion that is directed to 300 of the portion that is powered 301 that contacts with the upper surface 201A of power supply rail 201 because of deadweight is led by power supply rail 201 through the two sides 201C of clamping power supply rail 201, the 1st, the 2nd roller 302,303 of 201D ground rolling contact.And then, through the 3rd roller 305 that rolls and contact with the lower surface 201B of power supply rail 201 is set, can limit and transport moving up and down of anchor clamps 30.Because swing-around trajectory 131,132,141,142 be identical shaped with power supply rail 201 also, so, transport anchor clamps 30 and also can perhaps not change on the above-below direction in the horizontal direction even remain in the spinning movement on this swing-around trajectory will transporting anchor clamps 30.
Owing to self be provided with in the portion that is directed to 300 by power supply rail 201 guiding with band tooth piece 420 engagements of conveyer 400 continuously make transport force act in the portion of being directed to 300 by engaging piece 304, on power supply rail 201, transport swimmingly so be directed to portion 300.Be directed in the portion 300 at this, as shown in Figure 6 be provided with the 1st, the 2nd above-mentioned driving chip 320,321 and the impression transport anchor clamps 30 to be detected (the 2nd detected portion) 322 that has or not.
The linking part 330 that transports anchor clamps 30 is as shown in Figure 6, and the portion that is directed to that is separated from each other configuration 300 is linked together with maintaining part 340.In this embodiment, transport anchor clamps 30 and have shape shown in Figure 6, and have linking part 330, so as shown in Figure 5, the power supply rail 201 that the portion that is directed to 300 that transports anchor clamps 30 is led becomes the position of leaving from the top of plating tank 200.The dust that is produced when so, sliding on power supply rail 201 in the portion of being directed to 300 can not drop in the plating tank 200.In this embodiment, linking part 330 have from the base end part of the portion's of being directed to 300 1 sides towards the horizontally extending horizontal part 331 of free end and from the free end of horizontal part 331 towards the sagging dip portion 332 of maintaining part 340.
The horizontal part of linking part 330 was put in shown in Figure 1 returning and is transported on two chains 151,152 in path 150 in 331 years, transported anchor clamps 30 and transported path 150 and return and transport along returning.
A plurality of, three clamping sections 341 for example that maintaining part 340 is as shown in Figure 6 to have that top with workpiece 20 clamps.For the workpiece 20 that can keep amplitude broad,, movable clamping section can be set in the both sides of three clamping sections 341 as standard facility or as option.Movable clamping section can be slided mobile with the width of workpiece 20 matchingly.
The pre-treatment groove with the vibration assigning unit
5.1. pre-treatment groove
As stated, the pre-treatment groove group 230 of this embodiment has degreasing tank 230A from the upper reaches one side of plating tank 200, hot water washing trough 230B, cold water washing trough 230C, spray groove 230D, and pickling tank 230E.Wherein, be that workpiece 20 is immersed in the pre-treatment groove of handling in the treatment solution at the pre-treatment groove that is configured to illustrated down vibration assigning unit 500, be the groove 230A except spray groove 230D, 230B, 230C, at least one of 230E.If vibration assigning unit 500 is set in some therein grooves, then preferably use groove, the for example degreasing tank 230A of the treatment solution that contains interfacial agent.Below, 203A describes as the pre-treatment groove, but other pre-treatment groove 230B beyond the degreasing tank 230A, and it also is same being provided with under the situation of vibration assigning unit 500 among the 230C, 230E some.Vibration assigning unit 500 also can be arranged on except pre-treatment among the aftertreatment 240B that uses treatment solution.
5.2. the effect of vibration assigning unit
Fig. 7 has represented to give vibration, the vibration assigning unit 500 that workpiece 20 is vibrated to the anchor clamps 30 that transport that keep among the pre-treatment groove 230A being immersed in the workpiece 20 in the treatment solution in treatment solution 290.As shown in Figure 7, be transported among the pre-treatment groove 270A transport anchor clamps 30 on guide rail shown in Figure 1 (fluctuating orbit or trapped orbit) 231 or 232, for example stop in by the vibration assigning unit 500 give vibration.So, workpiece 20 vibrates in treatment solution 290.
When workpiece 20 is vibrated in treatment solution 290, remove attached to the lip-deep bubble of workpiece 20 physics from the workpiece 20.Under the situation that is formed with open-work (communicating pores) or blind hole hole portions such as (non-through holes) on the workpiece 20, the relative position and the vibrational period that are trapped in the hole portion of bubble and workpiece 20 in this hole portion change accordingly.This is that bubble has been endowed the raising force that buoyancy produces owing to vibrate with respect to the hole portion and workpiece 20 one of workpiece 20.Like this, owing to the bubble of from the restriction of the wall portion of hole portion, liberating rises under buoyancy function, so bubble physics in the portion of hole is discharged.From the hole portion of workpiece 20 discharge and once more attached to the lip-deep bubble of workpiece 20 also because the vibration of workpiece 20 and from the surface of workpiece 20 physics remove.Interfacial agent in the treatment solution 290 can make treatment solution contact with the surface and the hole portion of workpiece 20 easily, promotes the effect of removing of above-mentioned bubble.
Like this; Owing to can in pre-treatment groove 230A, surface and the hole portion from workpiece 20 remove bubble; So in the electroplating work procedure (surface treatment procedure) in plating tank 200 thereafter, can also carry out electroplating processes (surface treatment) to the surface of workpiece 20 and the internal surface of hole portion.Like this, can prevent to produce and do not have galvanized unfavorable condition in the part on the surface of workpiece 20 and hole portion.In addition, can be to anchor clamps 30 keep and the workpiece that in treatment solution 290, transporting is given vibration by transporting, but, then give vibration easily to transporting anchor clamps 30 if in treatment solution 290, be in the workpiece 20 that stops, choosing is arranged in this.And then if the flexural rigidity of workpiece 20 is low, workpiece 20 is endowed vibration in transporting in treatment solution 290, and the hydraulic pressure that then acts on along with transporting on the workpiece 20 increases, and might produce distortion such as workpiece 20 warpages.This means preferably to make and be in workpiece 20 vibrations that stop in the treatment solution 290.
5.3. give the position of vibration to transporting parts
Below, vibration assigning unit 500 is described transporting the position of giving vibration on the anchor clamps 30.As stated, transport anchor clamps 30 and comprise: by the portion that is directed to 300 of guide rail (fluctuating orbit or trapped orbit) 231 or 232 guiding, keeping workpiece 20 is the maintaining part 340 of hang, and the linking part 330 that links portion that is directed to 300 and maintaining part 340.In this embodiment, 500 pairs of assigning unit of vibration are transported the linking part 330 of anchor clamps 30 and are given vibration.Because being directed to portion 300 is fastened on guide rail (trapped orbit) 231 or 232, so vibration decay easily.Maintaining part 340 receives baneful influence because of the maintaining condition of vibration workpiece 20 easily.In this, if linking part 330, then so long as kept the binding function just not have drawback.
At this, in this embodiment, like Fig. 1 and shown in Figure 7, setting is extended abreast with the carriage direction that transports anchor clamps 30 in the position that guide rail (fluctuating orbit or trapped orbit) 231 or 232 leaves above the past treatment trough 230A.For this reason, the linking part 300 that transports anchor clamps 30 as stated, have the horizontal part 331 that extends towards the free end horizontal direction from the base end part of the portion's of being directed to 300 1 sides and from the free end of horizontal part 331 towards the sagging dip portion 332 of maintaining part 340.In this case, vibration assigning unit 500 is as shown in Figure 7 can give vibration to dip portion 332.
At this, the dip portion 332 that is endowed vibration is as shown in Figure 7, and the free end of the horizontal part 331 that extends with base end part from the portion that is directed to 300 that supported by guide rail (fluctuating orbit or trapped orbit) 231 or 231 links to each other.For this reason, through the main points that the free end that makes socle girder vibrates, can in treatment trough 290, make workpiece 20 vibrations effectively.
In addition, as stated, the position relation as treatment trough and guide rail has that kind shown in the above-mentioned patent documentation 1, guide rail is configured in the top of treatment trough.The present invention can be applicable to the arrangement of patent documentation 1.In this case, transport anchor clamps and also comprise the portion that is directed to above-mentioned said function, maintaining part, and linking part, but linking part does not in this case have horizontal part 331 and is only formed by dip portion 332.Therefore, vibration assigning unit 500 can be given vibration to the linking part (dip portion) that transports anchor clamps.
5.4. mode is given in the vibration of vibration assigning unit
The vibration assigning unit 500 of this embodiment is as shown in Figure 7, can comprise the strike portion 510 that transports anchor clamps 30 of hitting.On vibration is given, can consider the whole bag of tricks, but the strike portion 510 of vibration assigning unit 500 can transport anchor clamps 30 and once gives vibration to transporting anchor clamps 30 through hitting at least.Particularly, transport the linking part 330 of anchor clamps 30 through strike, the dip portion 332 in this linking part, what can make the socle girder structure effectively transports anchor clamps 30 vibrations.Because this vibration is delivered on the workpiece 20, so workpiece 20 is vibrated in treatment solution 290.
At this, strike portion 510 can be as shown in Figure 7 to the direction B of the surface crosswise of workpiece 20, preferably the surperficial orthogonal direction B with workpiece 20 moves and hits and transport anchor clamps 30.So, because the pressure of treatment solution 290 acts on two surfaces of workpiece 20, so treatment solution 290 becomes cushioning material and can alleviate transporting the excess impact of anchor clamps 30.Therefore, transport anchor clamps 30 even hit, the major part of its hitting power also can be born by treatment solution 290, has prevented to transport the breakage of anchor clamps 30.In other words, preferably not with the surperficial parallel direction of workpiece 20 on hit.This is owing to can not expect that treatment solution 290 is as cushioning material performance function in this case.Wherein because vibrating effect is big, do not negate yet with the surperficial parallel direction of workpiece 20 on hit.
5.5. the type of drive of vibration assigning unit
Fig. 8～Figure 10 is the vertical view of vibration assigning unit 500, respectively the different states of expression vibration assigning unit 500.Fig. 8 has represented the stand-by station of strike portion 510, and Fig. 9 and Figure 10 have represented the state that strike portion 510 moves towards hit position from stand-by station.
Like Fig. 8～shown in Figure 10; Vibration assigning unit 500 can have the 1st arm 520 that keeps strike portion 510 to rotate freely around fulcrum 522, and drives the 1st arm 520 comes and goes rotation between stand-by station and hit position around fulcrum 522 driving part, for example cylinder 530.Like this, via the 1st arm 520 strike portion 510 is rotated through driving part 530, can make strike portion 510 hit that the seat in the plane is put and stand-by station between come and go and move.Because if strike portion 510 is in stand-by station, then strike portion 510 does not produce with the carriage direction A that transports anchor clamps 30 (transporting path 100) and disturbs, so can transport along carriage direction A (transporting path 100) transporting anchor clamps 30.If stop rear drive strike portion 510 transporting transporting of anchor clamps 30, then can hit and transport anchor clamps 30.
At this, vibration assigning unit 500 can also be included in the stopper section 540 of hit position and the 1st arm butt.Like this, like Fig. 9 and shown in Figure 10, the carriage direction A that strike portion 510 is stopped at reliably transport anchor clamps 30 intersects with strike portion 510, orthogonal hit position for example.Stopper section 540 can contact with the 1st arm 520 and strike portion 510 is stopped.Through stopper section 510 is set, even do not exist under the situation of transporting anchor clamps 30, also can make strike portion 510 stop at the position of regulation in hypothesis, security improves.
The strike portion 510 that is kept by the 2nd arm 520 that rotates through cylinder 530 moves along rotary motion trace RT1 shown in Figure 8.For like Fig. 9 and shown in Figure 10ly strike portion 510 is stopped in the for example orthogonal position of carriage direction A that transports anchor clamps 30 and strike portion 510 and be provided with stopper section 540.So, strike portion 510 is as shown in Figure 7, can be to the direction B of the surface crosswise of workpiece 20, preferably the surperficial orthogonal direction with workpiece 20 moves and hits and transport anchor clamps 30.
At this, stopper section 540 is not limited in the function that strike portion is stopped, and also can be used for giving mass force to the part of strike portion 510.For this reason; Strike portion 510 is like Fig. 8～shown in Figure 10; Can comprise be fixed on the fixed part 512 on the 1st arm 520 and can be slidably supported on the fixed part 512 and the 1st arm 520 with stopper section 540 butts the sliding part 514 more outstanding under the mass force effect when stopping than fixed part 512.In this case, sliding part 514 hits and transports anchor clamps 30.
Be in Fig. 8 of stand-by station and represent that sliding part 514 is in going-back position among Fig. 9 of the state before strike portion 510 will soon be stopped by stopper section 540 in strike portion 510.When strike portion 510 was stopped by stopper section 510, fixed part 512 also stopped, but shown in figure 10, and sliding part 514 forwards moves under the effect of mass force.Strike portion 510 moves to the position of Fig. 8 from the position of Figure 10, when the 1st arm 520 stopped to move, sliding part 514 returned to original position shown in Figure 8 under the effect of mass force.
At this, can form flange part 512A at the front end of the fixed part 512 of axle shape.Form the band stepped hole on the sliding part 514 of the tubular that can insert on the other hand, at the fixed part 512 of axle shape.The flange part 512A that sliding part 514 forwards is projected into fixed part 512 engages with the step surface of band stepped hole.If sliding part 514 forwards move in position from Fig. 9 Figure 10 the position midway or the mobile terminal exist and to transport anchor clamps 30, then sliding part 514 can with transport anchor clamps 30 collisions and hit and transport anchor clamps 30.So, can increase vibration and give power.
The transmitter 550 of the existence that detects strike portion 510 can be set at stand-by station shown in Figure 8 in addition.This transmitter 550 can detect through the variation of for example light or capability value non-contactly, but also can be contact.Can be in the driving sequence of strike portion 510 with the combination of actions that detects strike portion 510 by transmitter 550.
In this embodiment; Also can be that vibration assigning unit 500 shown in figure 10 also has by driving part 530 and drives and around the 2nd arm 524 that fulcrum 522 and the 1st arm 520 one move, make the motivating force of being longer than from the point of application of above-mentioned the 1st arm of maintenance strike portion 510 to the 1st distance L 1 of above-mentioned fulcrum always from driving part 530 be delivered to force on the 2nd arm 524 to the 2nd distance L 2 of fulcrum 522.
So, the translational speed speedup of the strike portion 510 when under the motivating force effect of driving part 530, driving the 2nd arm 524 can increase the mass force that sliding part 514 is given.Therefore, can increase transporting the surging force that anchor clamps 30 are given through sliding part 514.
At this, like Fig. 9 and shown in Figure 10, the 2nd arm 524 moves along the rotary motion trace RT2 around fulcrum 522.Therefore, support and rotate freely by fulcrum 532 with the rear end of cylinder barrel 531, drive and the bar 533 of advance and retreat links to each other with the 2nd arm 524 via fulcrum 534 by cylinder 532 as the cylinder 530 of driving part.
In addition, as stated this embodiment is specified, but those skilled in the art can understand the more changeable shape that can carry out not breaking away from the entity additional matter of the present invention and effect easily.Therefore, this variation also all within the scope of the present invention.For example, in specification sheets or accompanying drawing, can the term of once together putting down in writing with the different terms of broad sense or synonym more be replaced as its different term everywhere at specification sheets or accompanying drawing at least.And whole combinations of this embodiment and variation are also contained in the scope of the present invention.
Claims (9)
1. surface processing device is characterized in that having:
Guide rail;
Transport anchor clamps,, transport and keep workpiece in the carriage direction of above-mentioned guide rail along postponing by above-mentioned guide rail guiding;
The surface treatment groove is to carrying out surface treatment by the above-mentioned above-mentioned workpiece that transports the anchor clamps maintenance;
The pre-treatment groove is configured in the above-mentioned carriage direction upper reaches one side of above-mentioned surface treatment groove, will transported above-mentioned workpiece that anchor clamps keep and is immersed in the treatment solution and handle by above-mentioned;
The vibration assigning unit is given vibration to the above-mentioned anchor clamps that transport that keep being immersed in the above-mentioned workpiece in the above-mentioned treatment solution in above-mentioned pre-treatment groove, above-mentioned workpiece is vibrated in above-mentioned treatment solution.
2. surface processing device as claimed in claim 1 is characterized in that,
The above-mentioned anchor clamps that transport have: by the portion that is directed to of above-mentioned guide rail guiding, to keep above-mentioned workpiece be the maintaining part of hang and link the above-mentioned linking part that is directed to portion and above-mentioned maintaining part,
Above-mentioned vibration assigning unit is given vibration to the above-mentioned above-mentioned linking part that transports anchor clamps.
3. surface processing device as claimed in claim 1 is characterized in that,
Above-mentioned guide rail is in the position of above above-mentioned surface treatment groove and above-mentioned pre-treatment groove, leaving and extend setting from above-mentioned pre-treatment groove abreast towards the direction of above-mentioned surface treatment groove,
The above-mentioned above-mentioned linking part that transports anchor clamps comprise the horizontal part that extends towards the free end horizontal direction from the above-mentioned base end part that is directed to portion's one side and from the above-mentioned free end of above-mentioned horizontal part towards the sagging dip portion of above-mentioned maintaining part,
Above-mentioned vibration assigning unit is given vibration to above-mentioned dip portion.
4. surface processing device as claimed in claim 1 is characterized in that,
Above-mentioned vibration assigning unit comprises the above-mentioned strike portion that transports anchor clamps of hitting.
5. surface processing device as claimed in claim 4 is characterized in that,
Above-mentioned strike portion with the direction of the surface crosswise of above-mentioned workpiece on move and hit the above-mentioned anchor clamps that transport.
6. like claim 4 or 5 described surface processing devices, it is characterized in that,
Above-mentioned vibration assigning unit comprises that the above-mentioned strike of maintenance portion rotates the 1st arm freely around fulcrum, and drives above-mentioned the 1st arm comes and goes rotation between hit position and stand-by station around above-mentioned fulcrum driving part.
7. surface processing device as claimed in claim 6 is characterized in that,
Above-mentioned vibration assigning unit also is included in the stopper section of above-mentioned hit position and above-mentioned the 1st arm butt.
8. surface processing device as claimed in claim 7 is characterized in that,
Above-mentioned strike portion comprises the fixed part that is fixed on above-mentioned the 1st arm; With can be slidably supported at sliding part more outstanding than said fixing portion in the said fixing portion and under the mass force effect when a part of butt in above-mentioned the 1st arm and above-mentioned stopper section
Above-mentioned sliding part hits the above-mentioned anchor clamps that transport.
9. surface processing device as claimed in claim 8 is characterized in that,
Above-mentioned vibration assigning unit also has by above-mentioned drive section drives the 2nd arm that moves around above-mentioned fulcrum and above-mentioned the 1st arm one,
Be longer than always motivating force from above-mentioned driving part from the point of application of above-mentioned the 1st arm that keeps above-mentioned strike portion to the 1st distance of above-mentioned fulcrum and be delivered to force on above-mentioned the 2nd arm to the 2nd distance of above-mentioned fulcrum.
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| CN201610071850.XA CN105442027A (en) | 2010-09-17 | 2011-06-30 | Surface treatment device |
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| JP2010-209743 | 2010-09-17 | ||
| JP2010209743A JP5602553B2 (en) | 2010-09-17 | 2010-09-17 | Surface treatment equipment |
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| CN2011101815222A Pending CN102409387A (en) | 2010-09-17 | 2011-06-30 | Surface Processing Device |
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| CN109804108A (en) * | 2016-09-29 | 2019-05-24 | Almex Pe 株式会社 | Work holding fixture.In and surface processing device |
| CN109804108B (en) * | 2016-09-29 | 2021-07-23 | Almex Pe 株式会社 | Workpiece holding jig and surface treatment device |
| CN113056576A (en) * | 2018-11-20 | 2021-06-29 | Almex科技株式会社 | Jig conveying member, and surface treatment device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101295249B1 (en) | 2013-08-12 |
| KR20120030308A (en) | 2012-03-28 |
| CN105442027A (en) | 2016-03-30 |
| JP5602553B2 (en) | 2014-10-08 |
| JP2012062555A (en) | 2012-03-29 |
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Application publication date: 20120411 |