CN113056576A - Jig conveying member, and surface treatment device and method - Google Patents
Jig conveying member, and surface treatment device and method Download PDFInfo
- Publication number
- CN113056576A CN113056576A CN201980075887.1A CN201980075887A CN113056576A CN 113056576 A CN113056576 A CN 113056576A CN 201980075887 A CN201980075887 A CN 201980075887A CN 113056576 A CN113056576 A CN 113056576A
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- Prior art keywords
- jig
- holding
- workpiece
- transport member
- surface treatment
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- 238000004381 surface treatment Methods 0.000 title claims description 30
- 238000000034 method Methods 0.000 title claims description 11
- 230000008878 coupling Effects 0.000 claims abstract description 32
- 238000010168 coupling process Methods 0.000 claims abstract description 32
- 238000005859 coupling reaction Methods 0.000 claims abstract description 32
- 239000007788 liquid Substances 0.000 claims description 11
- 230000003028 elevating effect Effects 0.000 claims description 9
- 238000007747 plating Methods 0.000 description 9
- 238000007772 electroless plating Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 238000010923 batch production Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
- C23C18/163—Supporting devices for articles to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1664—Process features with additional means during the plating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
- C25D17/08—Supporting racks, i.e. not for suspending
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/422—Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor
Abstract
The jig transport member (100) comprises: a jig holding section (110) to which a workpiece holding jig (10) for holding a workpiece (W) by hanging is detachably attached; a support part (120) for supporting the clamp holding part; and a connecting part (130) for connecting the clamp holding part (110) and the supporting part (120). The coupling section (130) is configured such that when an external force is applied, the coupling between the jig holding section (110) and the support section (120) is released, and when the external force is released, the jig holding section (110) and the support section (120) are coupled, and when the coupling is performed, one of a plurality of coupling positions having different relative angles between the jig holding section (110) and the support section (120) in a plan view can be selected.
Description
Technical Field
The present invention relates to a jig conveying member for conveying a workpiece holding jig used for surface treatment such as electroless plating, and a surface treatment apparatus and method.
Background
For example, electroless plating has the following advantages: unlike electroplating, since current does not flow through the plating bath, the workpiece to be plated can be not only a conductor but also a nonconductor such as plastic or ceramic.
Patent document 1 discloses the following: in a plating tank containing an electroless plating solution, a plurality of workpieces are vertically arranged in a vertical manner with a gap through which the electroless plating solution can flow, or the workpieces are suspended on a rack, and batch processing is performed (claims 1, 3, and fig. 4).
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open No. 2006 and 93651
Disclosure of Invention
Problems to be solved by the invention
If bubbles are present in the plating solution and adhere to the workpiece, plating failure occurs in the region where the bubbles are present. In particular, the workpiece may have a through-hole or a bottomed hole. This is because, if the workpiece is a circuit board, a through hole for conducting both surfaces of the substrate, or a contact hole or a via hole for conducting the upper and lower conductive layers to each other are provided. Bubbles tend to stay in the holes, and plating failure tends to occur.
The invention aims to provide a clamp conveying component, a surface treatment device and a surface treatment method, which can reduce poor treatment caused by bubbles attached to a workpiece.
Means for solving the problems
(1) One aspect of the present invention relates to a jig transport member including:
a clamp holding part, which is detachably provided with a workpiece holding clamp for holding a workpiece in a hanging manner;
a support portion for supporting the jig holding portion; and
a connecting portion for connecting the jig holding portion and the supporting portion,
the coupling portion is configured to release the coupling between the jig holding portion and the support portion when an external force is applied thereto, to couple the jig holding portion and the support portion when the external force is released, and to be capable of selecting one of a plurality of coupling positions having different relative angles between the jig holding portion and the support portion when viewed in a plan view.
According to one aspect of the present invention, since the connection between the jig holding portion and the support portion is released when the external force is applied, the relative angle between the jig holding portion and the support portion in a plan view can be changed. Thereafter, when the external force is released, the jig holding portion and the support portion are coupled. Thus, one of a plurality of coupling positions having different relative angles between the jig holding portion and the support portion in a plan view is selected. The workpiece is attached to the workpiece holding jig held by the jig holding portion. Thus, by changing the relative angle between the jig holding portion and the support portion in a plan view, the orientation of the main surface of the workpiece can be changed with respect to the support portion. When the workpiece is immersed in the treatment liquid in the treatment tank by the jig transport member, the support portion of the jig transport member is reciprocated in the 1 st direction. Thus, air bubbles adhering to the workpiece are removed. In this case, by appropriately setting the orientation of the main surface of the workpiece with respect to the direction of the reciprocating oscillation, bubbles can be effectively removed.
(2) In one aspect (1) of the present invention, the coupling portion may include a plurality of engaging portions and at least one engaged portion, and the engagement between any one of the plurality of engaging portions and the at least one engaged portion is released by the jig holding portion and the support portion being relatively moved by the application of the external force, and the at least one engaged portion may be engaged with any one of the plurality of engaging portions by the release of the external force. In this way, the connection and disconnection between the jig holding portion and the support portion are facilitated, and the position after rotation is fixed by engaging at least one engaged portion with any of the plurality of engaging portions.
(3) In one aspect (2) of the present invention, the engaging portion may be a hole or a recess into which the at least one engaged portion is fitted. Thus, the structure of the coupling portion is simplified, and the coupling and decoupling of the jig holding portion and the support portion are facilitated.
(4) In one embodiment (2) or (3) of the present invention, the following may be used:
the above-mentioned clip holding portion includes a guided portion,
the support portion includes a guide portion that guides the guided portion so as to be capable of moving up and down,
the connecting part includes:
a movable portion that moves together with the guided portion; and
a fixed part disposed on the guide part opposite to the movable part,
the plurality of engaging portions are provided on one of the movable portion and the fixed portion,
the at least one engaged portion is provided on the other of the movable portion and the fixed portion. In this way, by relatively moving up and down the jig holding portion and the support portion, the connection and disconnection between the jig holding portion and the support portion can be easily performed.
(5) Another aspect of the present invention relates to a surface treatment apparatus including:
a jig transport member to which a workpiece holding jig for holding a workpiece suspended is detachably attached;
a treatment tank for treating the surfaces of the plurality of workpieces held by the workpiece holding jig with a treatment liquid; and
a loader unit for attaching the work holding jig carried in from the outside to the jig transport member and loading the jig transport member to the processing bath,
the jig transport member according to any one of aspects (1) to (4) of the present invention is a jig transport member including the jig holding portion, the support portion, and the coupling portion,
the treatment tank includes a swing portion for swinging the jig transport member in a 1 st direction to and fro,
the loader section includes:
a lifting unit configured to lift and lower the jig holding unit of the jig conveying member; and
and a rotating part which rotates the raised jig holding part in a horizontal plane.
(6) In another mode (5) of the present invention,
the rotating portion may rotate the jig holding portion so that the surfaces of the plurality of workpieces held by the jig holding portion are not parallel to the 1 st direction.
(7) Another aspect of the present invention relates to a surface treatment method for performing surface treatment on a plurality of workpieces by using a surface treatment apparatus, the surface treatment apparatus including:
a jig transport member to which a workpiece holding jig for holding the workpiece suspended is detachably attached;
a treatment tank for treating the surfaces of the plurality of workpieces held by the workpiece holding jig with a treatment liquid; and
a loader unit for attaching the work holding jig carried in from the outside to the jig transport member and loading the jig transport member to the processing bath,
the jig transport member according to any one of aspects (1) to (4) of the present invention is a jig transport member including the jig holding portion, the support portion, and the coupling portion,
the loader unit includes:
a step of raising the jig holding portion of the jig conveying member;
rotating the raised jig holding part in a horizontal plane; and
and then, lowering the jig holding portion.
(8) In still another aspect (7) of the present invention,
the treatment tank includes a swing portion for reciprocating the jig transport member in a 1 st direction,
the rotating step may rotate the jig holding portion so that the surfaces of the plurality of workpieces held by the jig holding portion are not parallel to the 1 st direction.
According to the aspects (5) and (7) of the present invention, the connection between the jig holding portion and the support portion is released by raising the jig holding portion by the raising and lowering portion in the loader portion. The relative angle between the jig holding portion and the support portion in a plan view can be changed by rotating the raised jig holding portion in the horizontal plane by the rotating portion in the loader portion. Thereafter, the jig holding portion is lowered by the raising and lowering portion in the loader portion, whereby the jig holding portion and the support portion are coupled. Thus, one of a plurality of coupling positions having different relative angles between the jig holding portion and the support portion in a plan view is selected. In a processing tank using the work holding jig, the support portion of the work holding jig is oscillated back and forth in the 1 st direction to remove air bubbles adhering to the work. In this case, by appropriately setting the orientation of the main surface of the workpiece with respect to the direction of the reciprocating oscillation, bubbles can be effectively removed.
According to the aspects (6) and (8) of the present invention, a large amount of the hydraulic pressure of the treatment liquid acts on the surface of the workpiece by the oscillation. Thus, the air bubbles staying on the surface, bottomed holes, or through holes of the workpiece can be efficiently removed from the workpiece by the hydraulic pressure.
Drawings
Fig. 1 is a sectional view of a surface treatment apparatus according to an embodiment of the present invention.
In fig. 2, fig. 2(a) and 2(B) are schematic plan views of the surface treatment device.
Fig. 3 is a view showing a workpiece holding jig used in the surface treatment apparatus of fig. 1.
Fig. 4 is a plan view of a fixing portion provided in a coupling portion of the jig conveying member.
Fig. 5 is a diagram showing a state in which the jig holding section is lowered in the loader/unloader section (loader section, unloader section).
Fig. 6 is a diagram showing a state in which the jig holding portion is raised in the loader/unloader portion (loader portion, unloader portion).
Fig. 7 is a plan view of the jig conveying member disposed in the loader/unloader section (loader section, unloader section).
Fig. 8 is a view showing a state where the jig holding portion is rotated by 45 ° from the position of fig. 7.
Fig. 9 is a view showing a state where the jig holding portion is rotated by 90 ° from the position of fig. 7.
Detailed Description
In the disclosure that follows, numerous different implementations or embodiments are provided for implementing different features of the claimed subject matter. Of course, these are merely examples and are not intended to be limiting. Further, in the present disclosure, reference numbers and/or letters are sometimes repeated in various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, when the 1 st element and the 2 nd element are described as being "connected" or "coupled", the description includes an embodiment in which the 1 st element and the 2 nd element are directly connected or coupled to each other, and also includes an embodiment in which the 1 st element and the 2 nd element are indirectly connected or coupled to each other with 1 or more other elements interposed therebetween. In addition, when a 1 st element is described as "moving" relative to a 2 nd element, such description includes relative movement of at least one of the 1 st element and the 2 nd element relative to movement of the other.
Fig. 1 is a sectional view of a surface treatment apparatus 1. Fig. 1 shows a jig conveying member 100 that conveys a workpiece holding jig 10, and a processing tank 200 that processes the surface of at least one, for example, a plurality of workpieces W held by the workpiece holding jig 10 with a processing liquid Q in the processing tank 200. As shown in FIGS. 2A and B, the surface treatment apparatus 1 may have at least one, for example, a plurality of treatment tanks 200-1 to 200-n (n is a plurality of treatment tanks). The plurality of treatment tanks 200-1 to 200-n may include a pretreatment tank and/or a post-treatment tank, which are required before and after the surface treatment, in addition to a surface treatment tank for plating treatment or the like. In the treatment tank 200, the workpiece W can be surface-treated by immersing the workpiece W in a treatment liquid Q such as a plating liquid.
The surface treatment apparatus 1A shown in FIG. 2(A) has a loader/unloader section 210 at one end in the longitudinal direction where the treatment tanks 200-1 to 200-n are connected. In fig. 2(a), the workpiece holding jig 10 carried in from the outside is attached to the jig transport member 100 in the loader/unloader section 210. The loader/unloader section 210 loads the jig conveying member 100, to which the workpiece holding jig 10 is attached, to the processing bath 200. For example, the jig conveying member 100 is first conveyed to the processing bath 200-1, and then intermittently conveyed in sequence from the processing baths 200-1 to 200-n, while batch-processing the plurality of workpieces W in the respective processing baths 200-1 to 200-n. After the process is completed, the workpiece holding jig 10 is detached from the jig conveying member 100 in the loader/unloader section 210.
The surface treatment apparatus 1B shown in FIG. 2(B) has a loader unit 220 at one end in the longitudinal direction where the treatment tanks 200-1 to 200-n are connected, and an unloader unit 230 at the other end in the longitudinal direction. In fig. 2(B), the workpiece holding jig 10 carried in from the outside is attached to the jig transport member 100 in the loader unit 220. The loader unit 220 loads the jig transport member 100, to which the workpiece holding jig 10 is attached, into the processing bath 200. For example, the jig conveying means 100 intermittently conveys the workpieces W sequentially from the processing tanks 200-1 to 200-n, and batch-processes the workpieces W in the respective processing tanks 200-1 to 200-n. After the process is completed, the work holding jig 10 is detached from the jig conveying member 100 in the unloader section 230.
Here, the external force applying device 250 is disposed in the loader/unloader section 210 shown in fig. 2(a) and the loader section 220 and the unloader section 230 shown in fig. 2 (B). The external force applying device 250 will be described after the description of the workpiece holding jig 10 and the jig conveying member 100.
First, the work holding jig 10 will be explained. The work holding jig 10 may be, for example, a jig disclosed in PCT/JP2017/034924 of the present applicant. To briefly explain the work holding jig 10, as shown in fig. 1 and 2, the work holding jig 10 includes a housing 11. An upper clamper 12 is fixed to the upper portion of the frame 11 and supports the upper ends of a plurality of, for example, 20 works W so as to hang down the works W. In the case where the work W is thin and bends only when hanging down, a lower clamp 13 is further provided as shown in fig. 1 and 2. The lower holder 13 is preferably supported to be movable up and down with respect to the frame 11. Thus, the workpiece W is given a downward tension by the weight of the lower clamp 13, and the workpiece W is not bent. The housing 11 includes: an arm 14 extending upward; and a hook 15 provided at an upper portion of the arm 14. The work holding jig 10 shown in fig. 1 and 2 is merely an example, and various other work holding jigs may be used as long as the work W can be held in a suspended manner.
As shown in fig. 3, the workpiece holding jig 10 may be a batch processing jig in which a plurality of workpieces W are arranged in parallel without being bent. As a result, even when the workpieces W are thin, an appropriate gap through which the electroless plating solution can flow can be secured between the adjacent workpieces W when the plurality of workpieces W held by the workpiece holding jig 10 are immersed in the plating bath. This enables electroless plating to be performed while maintaining the plating quality, and batch processing of a plurality of workpieces W can be performed.
Next, the clip conveying member 100 will be described. As shown in fig. 1, the jig transport member 100 has: a jig holding section 110 to which a workpiece holding jig 10 for holding a plurality of workpieces W suspended thereon is detachably attached; a support portion 120 that supports the jig holding portion 110; and a coupling portion 130 coupling the jig holding portion 110 and the support portion 120. The coupling portion 130 is configured such that coupling between the jig holding portion 110 and the support portion 120 is released when external force is applied, the jig holding portion 110 and the support portion 120 are coupled when external force is released, and one of a plurality of coupling positions having different relative angles between the jig holding portion 110 and the support portion 120 in a plan view can be selected when coupling.
The jig holding portion 110 of the jig transport member 100 includes an overhang support portion 111, and the overhang support portion 111 detachably suspends and supports the hook 15 of the workpiece holding jig 10. The suspension support portion 111 includes a positioning portion 111A for positioning the hook 15. The hook 15 of the work holding jig 10 is guided by the positioning portion 111A and supported by the overhang supporting portion 111 as shown in fig. 3, whereby the work holding jig 10 is overhung-supported. The jig holding portion 110 further includes a guided portion extending upward from the overhang support portion 111, for example, a vertical shaft portion 112 having a circular cross section. The vertical shaft portion 112 can have an upper limit stopper 113.
The support portion 120 of the jig conveying member 100 includes a guide portion 121, and the guide portion 121 includes, for example, a circular hole 121A for guiding the vertical shaft portion 112 as a guided portion so as to be able to move up and down. The support portion 120 further has: a locked portion 122 connected to the guide portion 121; and a to-be-conveyed unit 123 coupled to the to-be-conveyed unit 122. The engaged portions 122 of the jig conveying member 100 are engaged by engaging portions 240 arranged at respective positions (the processing tanks 200-1 to 200-n, the loader/unloader portion 210, the loader portion 220, and the unloader portion 230) where the jig conveying member 100 stops in the surface treatment apparatuses 1A and 1B shown in fig. 2(a) and (B). This makes it possible to stop and support the jig transport member 100, to which the workpiece holding jig 10 is attached, at each position. The jig conveying member 100 is intermittently conveyed by engaging the conveyed portion 123 with a conveying portion, not shown. In this way, the jig conveying member 100 to which the workpiece holding jig 10 is attached can be intermittently conveyed to each position.
The coupling portion 130 of the clip conveying member 100 includes: a movable portion 131 fixed to an upper portion of the vertical shaft portion 112 and moving together with the vertical shaft portion 112; and a fixed portion 132 disposed on the guide portion 121 so as to face the movable portion 131. Note that the fixing portion 132 may be integrated with the guide portion 121. As shown in fig. 4, one of the movable portion 131 and the fixed portion 132, for example, the fixed portion 132 is provided with a plurality of engaging portions, for example, holes 132A or recesses. At least one, for example, a plurality of pins 131A as engaged portions are provided on the other of the movable portion 131 and the fixed portion 132, for example, the movable portion 131.
Fig. 5 is a diagram illustrating an external force applying device 250 disposed in the loader/unloader section 210 (the loader section 220, the unloader section 230). The external force applying device 250 includes: an elevating unit 260 for elevating the jig holding unit 110; and a rotating part 270 that rotates the raised jig holding part 110 in a horizontal plane. In the embodiment shown in fig. 5, the rotation portion 270 rotates the elevating portion 260, but the present invention is not limited thereto.
As shown in fig. 6, the elevating unit 260 may include: a lift drive unit 261; a lifting shaft 262 lifted by a lifting driving part 261; and a push rod 263 fixed to the elevating shaft 262. The push rod 263 is moved in the direction of arrow a from the lowered position shown in fig. 5 by the elevation driving unit 261, and is set to the raised position shown in fig. 6. At the raised position shown in fig. 6, the push rod 263 pushes up the suspension support portion 111 of the clip holding portion 110. In the jig conveying member 100, the supporting portion 120 is locked by the locking portion 240, and the jig holding portion 110 moves upward with respect to the supporting portion 120. The upward movement is stopped by the stopper 113 of the jig holding portion 110 abutting against the lower surface of the guide portion 121.
As shown in fig. 6, when an external force is applied to stop at the raised position, the connection between the coupling portion 130 that couples the jig holding portion 110 and the support portion 120 is released. This is because the movable portion 131 fixed to the vertical shaft portion 112 of the jig holding portion 110 is separated from the fixed portion 132 of the guide portion 121 disposed in the support portion 120, and the engagement between the pin 131A and the hole 132A is released.
In the raised position shown in fig. 6, the rotating portion 270 rotates. Thereby, the elevating unit 260 mounted on the rotating unit 270 rotates. The jig holding portion 110 supported by the elevating portion 260 rotates in the arrow B direction about the axis of the vertical shaft portion 112 inserted in the hole 121A of the guide portion 121. Thus, the jig holding portion 110 rotates relative to the support portion 120 in a plan view.
Thereafter, the push rod 263 is lowered from the raised position of fig. 6 to the lowered position of fig. 5 by the raising and lowering unit 260. Thereby, the movable portion 131 fixed to the vertical shaft portion 112 of the jig holding portion 110 is lowered, and the pin 131A is engaged with the opposing hole 132A among the plurality of holes 132A of the fixed portion 132 after rotation. In this way, one of a plurality of coupling positions having different relative angles between the jig holding portion 110 and the supporting portion 120 in a plan view is selected.
The jig transport members 100 having been subjected to the above-described operations by the loader/unloader section 210 or the loader section 220 are sequentially moved to the processing tanks 200-1 to 200-n, and after the processing is completed, are moved to the loader/unloader section 210 or the unloader section 230. In the loader/unloader section 210 or the unloader section 230, the jig conveying member 100 is restored to the initial state by the above-described lifting operation and rotating operation.
Fig. 7 to 9 are plan views showing the state of the workpiece holding jig 10 or the workpiece W disposed in the processing bath 200. Fig. 7 shows an initial state in which the clip holding portion 110 of the clip conveying member 100 is not rotated. Fig. 8 shows a state in which the jig holding portion 110 of the jig transport member 100 is rotated by 45 ° from the position of fig. 7. Fig. 9 shows a state where the clip holding portion 110 of the clip conveying member 100 is rotated by 90 ° from the position of fig. 7.
Here, the processing bath 200 includes a swing portion that reciprocally swings the jig transport member 100 in the 1 st direction. The mechanism of the swing portion is omitted, but the jig transport member 100 is swung back and forth using, for example, an eccentric cam mechanism or the like. If the reciprocating direction is parallel to the Y-axis direction in fig. 7, the jig holding portion 110 of the jig transport member 100 does not need to be rotated. However, if the reciprocating direction is parallel to the X-axis direction in fig. 7, the jig holding portion 110 of the jig conveying member 100 needs to be rotated. This is because the main surface of the workpiece W is parallel to the reciprocating swing direction X (1 st direction), and the effect of removing bubbles generated by the swing is small.
Therefore, for example, as shown in fig. 8 or 9, the jig holding portion 110 of the jig conveying member 100 is rotated so that the main surface of the workpiece W is set so as not to be parallel to the reciprocating swing direction X (1 st direction). The rotation angle of the jig holding portion 110 may be set to various angles as shown in fig. 8 or 9, for example. If the angle is set so that the main surface of the workpiece W is not parallel to the reciprocating oscillation direction X (1 st direction), a large amount of the hydraulic pressure of the treatment liquid Q is applied to the main surface of the workpiece W by oscillation. This enables air bubbles staying on the surface, bottomed holes, or through holes of the workpiece W to be efficiently removed from the workpiece W by the hydraulic pressure.
Description of the symbols
1. 1A, 1B … surface treatment device, 10 … workpiece holding jig, 100 … jig conveying member, 110 … jig holding portion, 111 … suspension support portion, 112 … guided portion (vertical shaft portion), 113 … stopper, 120 … support portion, 121 … guide portion, 121A … hole, 130 … linking portion, 131 … movable portion, 131A … engaged portion (pin), 132 … fixing portion, 132a … engaging portion (hole), 200-1 to 200-n … treatment tank, 210 … loader/unloader portion, 220 … loader portion, 230 … unloader portion, 240 … locking portion, 250 … external force applying device, 260 … elevating portion, 263 … pusher, 270 … rotating portion, Q … treatment liquid, W … workpiece.
Claims (8)
1. A jig conveying member characterized by having:
a clamp holding part for detachably holding a workpiece holding clamp for holding a workpiece in a hanging manner;
a support portion that supports the jig holding portion; and
a coupling portion that couples the jig holding portion and the support portion,
the coupling portion may be configured such that the coupling between the jig holding portion and the support portion is released when an external force is applied, the jig holding portion and the support portion are coupled when the external force is released, and one of a plurality of coupling positions at which relative angles between the jig holding portion and the support portion are different in a plan view can be selected when the coupling is performed.
2. The jig conveying member according to claim 1, wherein the coupling portion includes a plurality of engaging portions and at least one engaged portion, and wherein engagement between any one of the plurality of engaging portions and the at least one engaged portion is released by the jig holding portion and the support portion being relatively moved by application of the external force, and the at least one engaged portion is engaged with any one of the plurality of engaging portions by release of the external force.
3. The clip feed member of claim 2 wherein the engaging portion is a hole or recess into which the at least one engaged portion is inserted.
4. The jig transport member according to claim 2 or 3,
the jig holding portion includes a guided portion,
the support portion includes a guide portion that guides the guided portion so as to be movable up and down,
the joint portion includes:
a movable portion that moves together with the guided portion; and
a fixed portion disposed on the guide portion so as to face the movable portion,
the plurality of engaging portions are provided on one of the movable portion and the fixed portion,
the at least one engaged portion is provided on the other of the movable portion and the fixed portion.
5. A surface treatment device, characterized by comprising:
a jig transport member to which a workpiece holding jig for holding a workpiece suspended is detachably attached;
a treatment tank for treating the surfaces of the plurality of workpieces held by the workpiece holding jig with a treatment liquid; and
a loader unit that mounts the work holding jig carried in from the outside to the jig transport member and loads the jig transport member to the processing bath,
the jig transport member according to any one of claims 1 to 4, comprising the jig holding portion, the support portion, and the coupling portion,
the treatment tank includes a swing portion that reciprocally swings the jig transport member in a 1 st direction,
the loader section includes:
an elevating section that elevates the jig holding section of the jig conveying member; and
and a rotating part which rotates the lifted jig holding part in a horizontal plane.
6. The surface treatment apparatus according to claim 5, wherein the rotating portion rotates the jig holding portion so that the surfaces of the plurality of workpieces held by the jig holding portion are not parallel to the 1 st direction.
7. A surface treatment method for performing surface treatment on a plurality of workpieces by using a surface treatment apparatus, the surface treatment apparatus comprising:
a jig transport member to which a workpiece holding jig for holding the workpiece suspended is detachably attached;
a treatment tank for treating the surfaces of the plurality of workpieces held by the workpiece holding jig with a treatment liquid; and
a loader unit that mounts the work holding jig carried in from the outside to the jig transport member and loads the jig transport member to the processing bath,
the jig transport member according to any one of claims 1 to 4, comprising the jig holding portion, the support portion, and the coupling portion,
the surface treatment method is characterized in that,
the loader unit includes the following steps:
a step of raising the jig holding portion of the jig conveying member;
rotating the raised jig holding part in a horizontal plane; and
and then, lowering the jig holding portion.
8. The surface treatment method according to claim 7, wherein the treatment bath includes a swing portion that reciprocally swings the jig transport member in a 1 st direction,
the rotating step rotates the jig holding portion so that the surfaces of the plurality of workpieces held by the jig holding portion are not parallel to the 1 st direction.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018217662 | 2018-11-20 | ||
| JP2018-217662 | 2018-11-20 | ||
| PCT/JP2019/044512 WO2020105524A1 (en) | 2018-11-20 | 2019-11-13 | Jig conveyance member and surface treatment apparatus and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113056576A true CN113056576A (en) | 2021-06-29 |
Family
ID=70773587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980075887.1A Pending CN113056576A (en) | 2018-11-20 | 2019-11-13 | Jig conveying member, and surface treatment device and method |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP6909524B2 (en) |
| KR (1) | KR20210092219A (en) |
| CN (1) | CN113056576A (en) |
| PH (1) | PH12021551141A1 (en) |
| TW (1) | TWI725629B (en) |
| WO (1) | WO2020105524A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251693B (en) * | 2020-09-08 | 2023-09-01 | 徐州瑞马智能技术有限公司 | Perpendicular blowing type hot galvanizing device for foundation bolt with only part of length being plated |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010007155A (en) * | 2008-06-30 | 2010-01-14 | Kida Seiko Kk | Plating apparatus |
| KR20120030308A (en) * | 2010-09-17 | 2012-03-28 | 아루멕쿠스 피이 가부시키가이샤 | Surface treatment device |
| JP2013011009A (en) * | 2011-06-30 | 2013-01-17 | Almex Pe Inc | Surface treatment system and workpiece holding tool |
| CN104532331A (en) * | 2011-06-30 | 2015-04-22 | Almexpe株式会社 | Surface treatment system and workpiece-holding jig |
| JP2016029219A (en) * | 2015-10-29 | 2016-03-03 | アルメックスＰｅ株式会社 | Surface treatment apparatus |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5420424Y2 (en) * | 1974-05-30 | 1979-07-24 | ||
| JPH046223Y2 (en) * | 1986-02-19 | 1992-02-20 | ||
| JP2006093651A (en) | 2004-08-26 | 2006-04-06 | Ngk Spark Plug Co Ltd | Manufacturing method of wiring board and non-electrolytic plating device for wiring board manufacture |
| JP5569713B2 (en) * | 2009-05-29 | 2014-08-13 | 日立化成株式会社 | Electroless copper plating apparatus for thickening, electroless copper plating method for thickening, and manufacturing method of multilayer printed wiring board |
| CN203049036U (en) * | 2013-01-18 | 2013-07-10 | 瑞华高科技电子工业园(厦门)有限公司 | Copper plating fixture for circuit boards |
| TWM464817U (en) * | 2013-07-03 | 2013-11-01 | Ampoc Far East Co Ltd | Circuit board clamping device with flipping mechanism |
| JP6793967B2 (en) * | 2016-09-29 | 2020-12-02 | 株式会社アルメックステクノロジーズ | Work holding jig and how to attach the work to the work holding jig |
-
2019
- 2019-11-13 JP JP2020558320A patent/JP6909524B2/en active Active
- 2019-11-13 CN CN201980075887.1A patent/CN113056576A/en active Pending
- 2019-11-13 KR KR1020217015823A patent/KR20210092219A/en unknown
- 2019-11-13 WO PCT/JP2019/044512 patent/WO2020105524A1/en active Application Filing
- 2019-11-19 TW TW108141873A patent/TWI725629B/en active
-
2021
- 2021-05-18 PH PH12021551141A patent/PH12021551141A1/en unknown
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010007155A (en) * | 2008-06-30 | 2010-01-14 | Kida Seiko Kk | Plating apparatus |
| KR20120030308A (en) * | 2010-09-17 | 2012-03-28 | 아루멕쿠스 피이 가부시키가이샤 | Surface treatment device |
| CN102409387A (en) * | 2010-09-17 | 2012-04-11 | Almexpe株式会社 | Surface Processing Device |
| CN105442027A (en) * | 2010-09-17 | 2016-03-30 | Almexpe株式会社 | Surface treatment device |
| JP2013011009A (en) * | 2011-06-30 | 2013-01-17 | Almex Pe Inc | Surface treatment system and workpiece holding tool |
| CN104532331A (en) * | 2011-06-30 | 2015-04-22 | Almexpe株式会社 | Surface treatment system and workpiece-holding jig |
| CN104651910A (en) * | 2011-06-30 | 2015-05-27 | Almexpe株式会社 | Surface treatment device and workpiece-holding jig |
| CN107893255A (en) * | 2011-06-30 | 2018-04-10 | Almex Pe 株式会社 | Surface processing device and work holding fixture.In |
| JP2016029219A (en) * | 2015-10-29 | 2016-03-03 | アルメックスＰｅ株式会社 | Surface treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020105524A1 (en) | 2020-05-28 |
| TW202037546A (en) | 2020-10-16 |
| KR20210092219A (en) | 2021-07-23 |
| TWI725629B (en) | 2021-04-21 |
| PH12021551141A1 (en) | 2021-10-25 |
| JP6909524B2 (en) | 2021-07-28 |
| JPWO2020105524A1 (en) | 2021-03-18 |
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