CN102381676A - Quartz micro needle surface nano metal chain and preparation method thereof - Google Patents
Quartz micro needle surface nano metal chain and preparation method thereof Download PDFInfo
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- CN102381676A CN102381676A CN201110330899XA CN201110330899A CN102381676A CN 102381676 A CN102381676 A CN 102381676A CN 201110330899X A CN201110330899X A CN 201110330899XA CN 201110330899 A CN201110330899 A CN 201110330899A CN 102381676 A CN102381676 A CN 102381676A
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- Prior art keywords
- micropin
- quartzy
- nano
- metal
- micro needle
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 26
- 239000002184 metal Substances 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract description 10
- 239000010453 quartz Substances 0.000 title abstract 8
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 239000002245 particle Substances 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001340 alkali metals Chemical class 0.000 claims 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims 1
- 150000001342 alkaline earth metals Chemical class 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052723 transition metal Inorganic materials 0.000 claims 1
- 150000003624 transition metals Chemical class 0.000 claims 1
- 239000010408 film Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910001254 electrum Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- XXOYNJXVWVNOOJ-UHFFFAOYSA-N fenuron Chemical compound CN(C)C(=O)NC1=CC=CC=C1 XXOYNJXVWVNOOJ-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
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Abstract
The invention discloses a quartz micro needle surface nano metal chain and a preparation method thereof. The quartz micro needle surface nano metal chain comprises a quartz micro needle and metal nano chain particles arranged on the surface of a micro needle, wherein basal diameter of the micro needle is 2-200mu m, and the diameters of the nano metal chain particle ranges from 10nm to 1mu m. The preparation method thereof comprises the following steps of: (1) coating a metal film with the thickness of 10nm-1mu m on the surface of a tip of the quartz micro needle with the basal diameter of 2-200mu m; and (2) carrying out heat treatment on the quartz micro needle coated with the metal film under an appropriate atmosphere condition to obtain the quartz micro needle surface nano metal chain. The quartz micro needle surface nano metal chain disclosed by the invention has a novel structure, is simple to prepare and can be applied to the fields such as micro nano optics, biology, sensing, information and the like.
Description
Technical field
The present invention relates to a kind of quartzy micropin nano surface metallic bond and preparation method thereof, belong to material microstructure and preparing technical field thereof.
Background technology
The nano metal chain is under the exciting of light, and the surface plasmon resonance that single nanoparticle produces will produce coupling, even can propagate the surface phasmon that forms propagation along the nano metal chain, realizes the sub-wavelength transmission of light.Therefore will have important use in fields such as micronano optical, biology, sensing, information.Sidewall surfaces at quartzy micropin (Chinese patent ZL 2,007 1 0134575.2) prepares the nano metal chain; Form novel micro-structural; Make light get into quartzy micropin, can excite the metal surface phasmon easily, have important scientific research and using value along silica fibre.The method preparation of photoetching or focused-ion-beam lithography is generally adopted in the preparation of present nano metal chain, but the yardstick of preparation is relatively large.And be technological difficulties in the preparation of quartzy micropin nano surface metallic bond, need seek new technology of preparing and method and obtain quartzy micropin nano surface metallic bond.
Summary of the invention
The purpose of this invention is to provide a kind of quartzy micropin nano surface metallic bond, make this fine structure material can obtain extensive use in fields such as micronano optical, biology, sensing, information.Another object of the present invention provides the preparation method of this fine structure material.
Quartzy micropin nano surface metallic bond of the present invention is made up of quartzy micropin, the metal nano chain particle that is positioned at micropin surface; Micropin bottom surface diameter 2-200 μ m, nano metal chain particle diameter 10nm is to 1 μ m.
The preparation method of quartzy micropin nano surface metallic bond of the present invention may further comprise the steps:
(1) in the bottom surface diameter be the quartzy micro needlepoint end surfaces of 2～200 μ m through chemical plating, or electroplates, or sputter, or apply, or above method combination in any coats the metallic film of one deck 10nm～1 μ m thickness;
(2) the quartzy micropin heat treatment under the temperature that is being higher than melting point metal under air or the inert atmosphere conditions with the clad metal film promptly gets the surperficial nano metal chain of quartzy micropin.
The present invention compared with prior art, its remarkable advantage is: (1) can obtain novel quartzy micropin nano surface metallic bond.(2) with low cost, need not large-scale instrument, simple and reliable process.
Description of drawings
Fig. 1 is the sem photograph of the quartzy micropin nano surface gold chain for preparing of the present invention.
The specific embodiment
Embodiment 1: diameter is the gold of quartzy micro needlepoint end surfaces chemical plating coating one deck 10nm thickness of 10 μ m in the bottom surface, and the quartzy micropin that will coat gold thin film is then heat-treated under 1100 ℃ in air, promptly gets the nanometer gold chain on quartzy micropin surface.
Embodiment 2: diameter is the silver of quartzy micro needlepoint end surfaces coating coating one deck 1 μ m thickness of 200 μ m in the bottom surface, then the quartzy micropin of coated with silver film is heat-treated under 970 ℃ in argon gas, promptly gets the Nano Silver chain on quartzy micropin surface.
Embodiment 3: diameter is the tin of quartzy micro needlepoint end surfaces sputter coating one deck 20nm thickness of 2 μ m in the bottom surface, and the quartzy micropin that will coat tin thin film is then heat-treated under 240 ℃ in air, promptly gets the nanometer tin chain on quartzy micropin surface.
Embodiment 4: diameter is the nickel of quartzy micro needlepoint end surfaces plating coating one deck 100nm thickness of 30 μ m in the bottom surface, and the quartzy micropin that will coat the nickel film is then heat-treated under 1460 ℃ in argon gas, promptly gets the nano nickel chain on quartzy micropin surface.
Embodiment 5: diameter is the electrum of quartzy micro needlepoint end surfaces sputter coating one deck 30nm thickness of 100 μ m in the bottom surface; The quartzy micropin that will coat the electrum film is then heat-treated under 1000 ℃ in helium, promptly gets the nanometer gold silver alloy chain on quartzy micropin surface.
Embodiment 6: diameter is the aluminium of quartzy micro needlepoint end surfaces sputter coating one deck 50nm thickness of 50 μ m in the bottom surface, then the quartzy micropin of metallized aluminum film is heat-treated under 700 ℃ in helium, promptly gets the nano aluminum chain on quartzy micropin surface.
Embodiment 7: diameter is the copper of quartzy micro needlepoint end surfaces chemical plating coating one deck 20nm thickness of 10 μ m in the bottom surface, and the quartzy micropin that will coat the copper film is then heat-treated under 1100 ℃ in argon gas, promptly gets the nanometer brass chain on quartzy micropin surface.
Claims (6)
1. quartzy micropin nano surface metallic bond is characterized in that, said quartzy micropin nano surface metallic bond is made up of quartzy micropin, the metal nano chain particle that is positioned at micropin surface; Micropin bottom surface diameter 2-200 μ m, nano metal chain particle diameter 10nm is to 1 μ m.
2. quartzy micropin nano surface metallic bond according to claim 1 is characterized in that, described metal is alkali metal or alkaline-earth metal or transition metal or other metal, or its alloy.
3. the method for preparing quartzy micropin nano surface metallic bond as claimed in claim 1 is characterized in that this method may further comprise the steps:
(1) diameter is the metallic film of quartzy micro needlepoint end surfaces coating one deck 10nm～1 μ m thickness of 2～200 μ m in the bottom surface;
(2) the quartzy micropin heat treatment under suitable atmospheric condition with the clad metal film promptly gets the surperficial nano metal chain of quartzy micropin.
4. the preparation method of quartzy micropin nano surface metallic bond according to claim 3 is characterized in that the method for coating described in the step (1) is a chemical plating, or electroplates, or sputter, or applies, or above method combination in any.
5. the preparation method of quartzy micropin nano surface metallic bond according to claim 3 is characterized in that the suitable atmospheric condition described in the step (2) is an air, or inert gas atmosphere.
6. the preparation method of quartzy micropin nano surface metallic bond according to claim 3 is characterized in that the heat treatment temperature described in the step (2) is the temperature that is higher than melting point metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110330899.XA CN102381676B (en) | 2011-10-27 | 2011-10-27 | Quartz micro needle surface nano metal chain and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110330899.XA CN102381676B (en) | 2011-10-27 | 2011-10-27 | Quartz micro needle surface nano metal chain and preparation method thereof |
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| Publication Number | Publication Date |
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| CN102381676A true CN102381676A (en) | 2012-03-21 |
| CN102381676B CN102381676B (en) | 2014-10-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110330899.XA Expired - Fee Related CN102381676B (en) | 2011-10-27 | 2011-10-27 | Quartz micro needle surface nano metal chain and preparation method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102849672A (en) * | 2012-09-17 | 2013-01-02 | 无锡英普林纳米科技有限公司 | Surface enhanced Raman micro-structural substrate and preparation method thereof |
| CN106646695A (en) * | 2016-12-14 | 2017-05-10 | 上海电机学院 | Surface plasmon quantum information transmission line |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020122766A1 (en) * | 2000-09-29 | 2002-09-05 | Lieber Charles M. | Direct growth of nanotubes, and their use in nanotweezers |
| CN1434461A (en) * | 2003-03-13 | 2003-08-06 | 东南大学 | Method for preparing probe tip of nano tube |
| US20050133372A1 (en) * | 2001-11-30 | 2005-06-23 | The University Of North Carolina | Method and apparatus for attaching nanostructure-containing material onto a sharp tip of an object and related articles |
| CN101011742A (en) * | 2007-02-08 | 2007-08-08 | 中山大学 | Controlled method of preparing metal nano particle |
| CN101653735A (en) * | 2008-08-21 | 2010-02-24 | 首尔大学校产学协力团 | Catalyst particles on tip |
-
2011
- 2011-10-27 CN CN201110330899.XA patent/CN102381676B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020122766A1 (en) * | 2000-09-29 | 2002-09-05 | Lieber Charles M. | Direct growth of nanotubes, and their use in nanotweezers |
| US20050133372A1 (en) * | 2001-11-30 | 2005-06-23 | The University Of North Carolina | Method and apparatus for attaching nanostructure-containing material onto a sharp tip of an object and related articles |
| CN1434461A (en) * | 2003-03-13 | 2003-08-06 | 东南大学 | Method for preparing probe tip of nano tube |
| CN101011742A (en) * | 2007-02-08 | 2007-08-08 | 中山大学 | Controlled method of preparing metal nano particle |
| CN101653735A (en) * | 2008-08-21 | 2010-02-24 | 首尔大学校产学协力团 | Catalyst particles on tip |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102849672A (en) * | 2012-09-17 | 2013-01-02 | 无锡英普林纳米科技有限公司 | Surface enhanced Raman micro-structural substrate and preparation method thereof |
| CN106646695A (en) * | 2016-12-14 | 2017-05-10 | 上海电机学院 | Surface plasmon quantum information transmission line |
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| Publication number | Publication date |
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| CN102381676B (en) | 2014-10-08 |
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| C14 | Grant of patent or utility model | ||
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| TR01 | Transfer of patent right |
Effective date of registration: 20170724 Address after: 510640 Guangdong City, Tianhe District Province, No. five, road, public education building, unit 371-1, unit 2401 Patentee after: Guangdong Gaohang Intellectual Property Operation Co., Ltd. Address before: 214192 No. three, No. 99, Furong Road, Wuxi, Jiangsu Patentee before: Wuxi Imprint Nano Technology Co., Ltd. |
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| CB03 | Change of inventor or designer information |
Inventor after: Chu Yingjun Inventor before: Chen Yanfeng Inventor before: Ge Haixiong Inventor before: Yuan Changsheng Inventor before: Lu Minghui |
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| CB03 | Change of inventor or designer information | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20171023 Address after: 066000 No. 52, No. 101, Donghua, Qinhuangdao Harbor District, Hebei Patentee after: Chu Yingjun Address before: 510640 Guangdong City, Tianhe District Province, No. five, road, public education building, unit 371-1, unit 2401 Patentee before: Guangdong Gaohang Intellectual Property Operation Co., Ltd. |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141008 Termination date: 20181027 |
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| CF01 | Termination of patent right due to non-payment of annual fee |