CN102381676B - Quartz micro needle surface nano metal chain and preparation method thereof - Google Patents
Quartz micro needle surface nano metal chain and preparation method thereof Download PDFInfo
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- CN102381676B CN102381676B CN201110330899.XA CN201110330899A CN102381676B CN 102381676 B CN102381676 B CN 102381676B CN 201110330899 A CN201110330899 A CN 201110330899A CN 102381676 B CN102381676 B CN 102381676B
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- Prior art keywords
- micro needle
- quartz micro
- nano metal
- chain
- metal chain
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 239000010453 quartz Substances 0.000 title claims abstract description 56
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 40
- 239000002184 metal Substances 0.000 title claims abstract description 40
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 239000002245 particle Substances 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 239000011248 coating agent Substances 0.000 claims abstract 2
- 238000000576 coating method Methods 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001340 alkali metals Chemical class 0.000 claims 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims 1
- 150000001342 alkaline earth metals Chemical class 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052723 transition metal Inorganic materials 0.000 claims 1
- 150000003624 transition metals Chemical class 0.000 claims 1
- 239000010408 film Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910001254 electrum Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- XXOYNJXVWVNOOJ-UHFFFAOYSA-N fenuron Chemical compound CN(C)C(=O)NC1=CC=CC=C1 XXOYNJXVWVNOOJ-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
Abstract
The invention discloses a quartz micro needle surface nano metal chain and a preparation method thereof. The quartz micro needle surface nano metal chain comprises a quartz micro needle and metal nano chain particles arranged on the surface of a micro needle, wherein basal diameter of the micro needle is 2-200mu m, and the diameters of the nano metal chain particle ranges from 10nm to 1mu m. The preparation method thereof comprises the following steps of: (1) coating a metal film with the thickness of 10nm-1mu m on the surface of a tip of the quartz micro needle with the basal diameter of 2-200mu m; and (2) carrying out heat treatment on the quartz micro needle coated with the metal film under an appropriate atmosphere condition to obtain the quartz micro needle surface nano metal chain. The quartz micro needle surface nano metal chain disclosed by the invention has a novel structure, is simple to prepare and can be applied to the fields such as micro nano optics, biology, sensing, information and the like.
Description
Technical field
The present invention relates to a kind of quartz micro needle surface nano metal chain and preparation method thereof, belong to material microstructure and preparing technical field thereof.
Background technology
Nano metal chain is under the exciting of light, and the surface plasmon resonance that single nanoparticle produces will produce coupling, even can propagate and form the surface phasmon of propagating along nano metal chain, realizes the sub-wavelength transmission of light.Therefore important application will be there is in fields such as micronano optical, biology, sensing, information.Sidewall surfaces at quartz micro needle (Chinese patent ZL 2,007 1 0134575.2) is prepared nano metal chain, form novel micro-structural, make light enter quartz micro needle along silica fibre, can excite easily metal surface phasmon, there is important scientific research and using value.The preparation of current nano metal chain generally adopts the method preparation of photoetching or focused-ion-beam lithography, but the yardstick of preparation is relatively large.And be technological difficulties in the preparation of quartz micro needle surface nano metal chain, need to seek new technology of preparing and method and obtain quartz micro needle surface nano metal chain.
Summary of the invention
The object of this invention is to provide a kind of quartz micro needle surface nano metal chain, make this fine structure material obtain extensive use in fields such as micronano optical, biology, sensing, information.Another object of the present invention is to provide the preparation method of this fine structure material.
Quartz micro needle surface nano metal chain of the present invention, is made up of quartz micro needle, the metal nano chain particle that is positioned at micropin surface; Micropin bottom surface diameter 2-200 μ m, nano metal chain particle diameter 10nm is to 1 μ m.
The preparation method of quartz micro needle surface nano metal chain of the present invention, comprises the following steps:
(1) the quartz micro needle tip end surface that is 2～200 μ m at bottom surface diameter is passed through chemical plating, or electroplates, or sputter, or applies, or the metallic film of the coated one deck of above method any combination 10nm～1 μ m thickness;
(2) by the quartz micro needle of covered by metallic film under air or inert atmosphere conditions at the temperature higher than melting point metal heat treatment obtain the nano metal chain on quartz micro needle surface.
Compared with prior art, its remarkable advantage is in the present invention: (1) can obtain novel quartz micro needle surface nano metal chain.(2) with low cost, without large-scale instrument, simple and reliable process.
Brief description of the drawings
Fig. 1 is the scanning electron microscope (SEM) photograph of the quartz micro needle nano surface gold chain prepared of the present invention.
Detailed description of the invention
Embodiment 1: be the gold of the coated one deck 10nm thickness of quartz micro needle tip end surface chemical plating of 10 μ m at bottom surface diameter, then the quartz micro needle of coated gold thin film heat-treated in air at 1100 DEG C, obtain the nanometer gold chain on quartz micro needle surface.
Embodiment 2: the quartz micro needle tip end surface that is 200 μ m at bottom surface diameter applies the silver of coated one deck 1 μ m thickness, then the quartz micro needle of coated with silver film is heat-treated in argon gas at 970 DEG C, obtains the Nano Silver chain on quartz micro needle surface.
Embodiment 3: be the tin of the coated one deck 20nm thickness of quartz micro needle tip end surface sputter of 2 μ m at bottom surface diameter, then the quartz micro needle of coated tin thin film heat-treated in air at 240 DEG C, obtain the nanometer tin chain on quartz micro needle surface.
Embodiment 4: the quartz micro needle tip end surface that is 30 μ m at bottom surface diameter is electroplated the nickel of coated one deck 100nm thickness, then the quartz micro needle of coated nickel film is heat-treated at 1460 DEG C in argon gas, obtains the nano nickel chain on quartz micro needle surface.
Embodiment 5: be the electrum of the coated one deck 30nm thickness of quartz micro needle tip end surface sputter of 100 μ m at bottom surface diameter, then the quartz micro needle of coated electrum film is heat-treated in helium at 1000 DEG C, obtain the nanometer gold silver alloy chain on quartz micro needle surface.
Embodiment 6: be the aluminium of the coated one deck 50nm thickness of quartz micro needle tip end surface sputter of 50 μ m at bottom surface diameter, then the quartz micro needle of metallized aluminum film heat-treated in helium at 700 DEG C, obtain the nano aluminum chain on quartz micro needle surface.
Embodiment 7: be the copper of the coated one deck 20nm thickness of quartz micro needle tip end surface chemical plating of 10 μ m at bottom surface diameter, then the quartz micro needle of coated copper film heat-treated in argon gas at 1100 DEG C, obtain the nanometer brass chain on quartz micro needle surface.
Claims (6)
1. quartz micro needle surface nano metal chain, is characterized in that, described quartz micro needle surface nano metal chain is made up of quartz micro needle, the metal nano chain particle that is positioned at micropin surface; The number of nano metal chain is 1, and nano chain particle is along the axial ordered arrangement of quartz micro needle; Micropin bottom surface diameter 2-200 μ m, nano metal chain particle diameter 10nm is to 1 μ m.
2. quartz micro needle surface nano metal chain according to claim 1, is characterized in that, described metal is alkali metal or alkaline-earth metal or transition metal or other metal, or its alloy.
3. the method for preparation quartz micro needle surface nano metal chain as claimed in claim 1, is characterized in that the method comprises the following steps:
(1) at bottom surface diameter be the metallic film of the coated one deck of quartz micro needle tip end surface 10nm～1 μ m thickness of 2～200 μ m;
(2) the heat treatment under suitable atmospheric condition of the quartz micro needle of covered by metallic film obtained to the nano metal chain on described quartz micro needle surface.
4. the preparation method of quartz micro needle surface nano metal chain according to claim 3, is characterized in that the method for coating described in step (1) is chemical plating, or electroplates, or sputter, or applies, or above method any combination.
5. the preparation method of quartz micro needle surface nano metal chain according to claim 3, is characterized in that the suitable atmospheric condition described in step (2) is air, or inert gas atmosphere.
6. the preparation method of quartz micro needle surface nano metal chain according to claim 3, is characterized in that the heat treatment temperature described in step (2) is the temperature higher than melting point metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110330899.XA CN102381676B (en) | 2011-10-27 | 2011-10-27 | Quartz micro needle surface nano metal chain and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110330899.XA CN102381676B (en) | 2011-10-27 | 2011-10-27 | Quartz micro needle surface nano metal chain and preparation method thereof |
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| Publication Number | Publication Date |
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| CN102381676A CN102381676A (en) | 2012-03-21 |
| CN102381676B true CN102381676B (en) | 2014-10-08 |
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| CN201110330899.XA Expired - Fee Related CN102381676B (en) | 2011-10-27 | 2011-10-27 | Quartz micro needle surface nano metal chain and preparation method thereof |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102849672A (en) * | 2012-09-17 | 2013-01-02 | 无锡英普林纳米科技有限公司 | Surface enhanced Raman micro-structural substrate and preparation method thereof |
| CN106646695A (en) * | 2016-12-14 | 2017-05-10 | 上海电机学院 | Surface plasmon quantum information transmission line |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1434461A (en) * | 2003-03-13 | 2003-08-06 | 东南大学 | Method for preparing probe tip of nano tube |
| CN101011742A (en) * | 2007-02-08 | 2007-08-08 | 中山大学 | Controlled method of preparing metal nano particle |
| CN101653735A (en) * | 2008-08-21 | 2010-02-24 | 首尔大学校产学协力团 | Catalyst particles on tip |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2001294876A1 (en) * | 2000-09-29 | 2002-04-08 | President And Fellows Of Harvard College | Direct growth of nanotubes, and their use in nanotweezers |
| US7252749B2 (en) * | 2001-11-30 | 2007-08-07 | The University Of North Carolina At Chapel Hill | Deposition method for nanostructure materials |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1434461A (en) * | 2003-03-13 | 2003-08-06 | 东南大学 | Method for preparing probe tip of nano tube |
| CN101011742A (en) * | 2007-02-08 | 2007-08-08 | 中山大学 | Controlled method of preparing metal nano particle |
| CN101653735A (en) * | 2008-08-21 | 2010-02-24 | 首尔大学校产学协力团 | Catalyst particles on tip |
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| CN102381676A (en) | 2012-03-21 |
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Effective date of registration: 20170724 Address after: 510640 Guangdong City, Tianhe District Province, No. five, road, public education building, unit 371-1, unit 2401 Patentee after: Guangdong Gaohang Intellectual Property Operation Co., Ltd. Address before: 214192 No. three, No. 99, Furong Road, Wuxi, Jiangsu Patentee before: Wuxi Imprint Nano Technology Co., Ltd. |
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| CB03 | Change of inventor or designer information |
Inventor after: Chu Yingjun Inventor before: Chen Yanfeng Inventor before: Ge Haixiong Inventor before: Yuan Changsheng Inventor before: Lu Minghui |
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Effective date of registration: 20171023 Address after: 066000 No. 52, No. 101, Donghua, Qinhuangdao Harbor District, Hebei Patentee after: Chu Yingjun Address before: 510640 Guangdong City, Tianhe District Province, No. five, road, public education building, unit 371-1, unit 2401 Patentee before: Guangdong Gaohang Intellectual Property Operation Co., Ltd. |
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Granted publication date: 20141008 Termination date: 20181027 |
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