CN102380872A - Industrial robot - Google Patents
Industrial robot Download PDFInfo
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- CN102380872A CN102380872A CN2011102063923A CN201110206392A CN102380872A CN 102380872 A CN102380872 A CN 102380872A CN 2011102063923 A CN2011102063923 A CN 2011102063923A CN 201110206392 A CN201110206392 A CN 201110206392A CN 102380872 A CN102380872 A CN 102380872A
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- arm
- cylindrical component
- industrial robot
- base station
- rotating part
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- 230000007246 mechanism Effects 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 description 96
- 239000011521 glass Substances 0.000 description 36
- 230000033001 locomotion Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical group C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 208000004350 Strabismus Diseases 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 210000000088 lip Anatomy 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provided is an industrial robot, which, with a simple structure, is capable of suppressing the positional shift of a carried-in subject to be transferred and properly correcting the inclination of the subject, even though the industrial robot comprises a cylindrical member which such supports a support member supporting an arm that the support member is capable of moving in the up-down direction. The industrial robot (1) comprises a hand (3) for mounting a subject to be transferred; an arm (4) in connection with the hand (3); a support member (6) for supporting the arm (4); a cylindrical member (7) which supports the support member (6) in such a manner that the support member (6) is capable of moving in the up-down direction; a base (8); a rotating member (9) which supports the lower end of the cylindrical member (7) and is capable of rotating relative to the base (8); and a moving mechanism (10) which allows the cylindrical member (7) to move relative to the base (8) in a predetermined direction orthogonal to the up-down direction.
Description
Technical field
The present invention relates to a kind of industrial robot that the carrying object of regulation is carried.
Background technology
At present; The industrial robot of carrying as the glass substrate that LCD is used; The known so-called double arm robot (for example, with reference to patent documentation 1) that a kind of two arms that have two hands supplying the glass substrate installing and each hand in two hands is kept are arranged.The robot of record comprises in the patent documentation 1: the base end side of arm is supported to the supporting member that can rotate; And supporting members supports become the post that can move up at upper and lower.In this robot, arm is made up of the first arm and second arm.In addition, the lower end of post is supported on base station with the mode that can rotate, and this base station is supported on substructure member.Base station can move with respect to substructure member in the horizontal direction linearity.The mode that this robot moves at linearity under the state of prescribed direction with hand makes hand flexible, thus the carrying glass substrate.
In the incorporating sections such as box that supply this glass substrate to take in, taken out of direction inclination or offset sometimes by the glass substrate of the carryings such as robot of record in the patent documentation 1 with respect to glass substrate.Therefore; Proposed a kind of be used for to tilt or the state of offset under be accommodated in the glass substrate of incorporating section inclination, offset revise and with the hand of carrying glass sheet to the job position of regulation to method for position (for example, with reference to patent documentation 2).If record in this patent documentation 2 is applied in the patent documentation 1 robot of record to method for position; Can revise the inclination, the offset that under the state of inclination or offset, are accommodated in the glass substrate of incorporating section, and glass substrate is moved into job position.
For example, in the robot that patent documentation 1 is put down in writing, be located in the inclination of the glass substrate that is accommodated in the incorporating section under the detected situation of sensor of hand; If base station is moved on prescribed direction with respect to substructure member, moved into the inclination of the glass substrate of job position to revise to be taken out of from the incorporating section also, and make post rotate ormal weight with respect to base station; Under this state; Make arm flexible, then, base station is moved in the opposite direction and post is rotated in the opposite direction to take out of glass substrate from the incorporating section; Revise the inclination of glass substrate; Then, glass substrate is moved into job position, then can to the inclination that is accommodated in the glass substrate of incorporating section with heeling condition revise and with carrying glass sheet to job position.In addition, if such carrying glass substrate, then can suppress to be moved into job position glass substrate at base station with respect to the offset on the moving direction of substructure member.Also can after take out of glass substrate, revise the inclination of glass substrate and glass substrate is moved into job position from the incorporating section.
Yet, method for position being come under the inclination to glass substrate, the situation that offset is revised of record in using patent documentation 2, because base station must move with respect to substructure member in the horizontal direction, therefore, the robot maximization that becomes.In addition; For example; Hand along base station with respect to the moving direction linearity of substructure member move under the situation with the carrying glass substrate; Even if can revise the inclination of glass substrate, also be difficult to sometimes suppress glass substrate with base station with respect to the offset on the direction of the moving direction quadrature of substructure member.For example, under the arbitrary situation when taking out of glass substrate in when moving into glass substrate, when hand with base station with respect to the direction of the moving direction quadrature of substructure member on linearity when moving; On the moving direction of this hand; If estimating base station carries glass substrate with respect to the offset on the moving direction of substructure member, then can correction position squint, but owing on hand, glass substrate skew ground is carried; Therefore, can not guarantee correction fully.In addition, carrying during glass substrate when moving into glass substrate under these two kinds of situations, hand along base station with respect to the moving direction linearity of substructure member under the situation about moving, can not revise the offset of glass substrate.On the other hand, at present, also known have a kind of robot that can address these problems (for example, with reference to patent documentation 3).
Patent documentation 1: No. 3973048 communique of Japanese Patent Laid
Patent documentation 2: Japanese Patent Laid is opened the 2003-117862 communique
Patent documentation 3: Japanese Patent Laid is opened the 2004-196438 communique
Yet; The structure of record in patent documentation 3 be applied directly to as the robot of record in the patent documentation 1 such, have the supporting members supports one-tenth that arm is supported can be produced following problem under the situation in the robot of the post that upper and lower moves up.Promptly; The structure of record is applied directly under the situation of the robot with post that supporting member is supported in patent documentation 3; Need between arm and supporting member, configuration be equivalent to the first arm pedestal part of record in the patent documentation 3 and the structure of first translation arms; But be under the situation of double arm robot for example, need two structures that are equivalent to the first arm pedestal part and first translation arms, thereby make robot construction become complicated in robot.In addition; Disposing between arm and the supporting member under the situation of the structure that is equivalent to the first arm pedestal part and first translation arms; Need prevent to be equivalent to first translation arms the structure linearity the interference of arm and post when moving, therefore, may limit the amount of movement of the structure that is equivalent to first translation arms.Therefore, when the structure of record was applied directly to the robot with post that supporting member is supported in patent documentation 3, the situation according to the inclination of glass substrate may be difficult to revise rightly this inclination.
Summary of the invention
Therefore; Comprising that the supporting members supports that arm is supported is become can be under the situation of the cylindrical component that upper and lower moves up even if technical problem of the present invention is to provide a kind of, the offset of the carrying object that also can suppress to move into better simply structure also can be revised the industrial robot of the inclination of this carrying object rightly.
For solving the problems of the technologies described above, the characteristic of industrial robot of the present invention is to comprise: hand, this hand supply the installing of carrying object; Arm, this arm supply hand to link; Supporting member, this supporting member supports arm; Cylindrical component, this cylindrical component becomes can move up at upper and lower with supporting members supports; Base station; Rotating member, this rotating member supports and can rotate with respect to base station the lower end of cylindrical component; And travel mechanism, this travel mechanism make cylindrical component with respect to base station with the prescribed direction of above-below direction quadrature on relatively move.
Industrial robot of the present invention comprises travel mechanism, this travel mechanism make cylindrical component with respect to base station with the prescribed direction of above-below direction quadrature on relatively move.Therefore, if when detecting the inclination of carrying object, cylindrical component is relatively moved with respect to base station and rotating member is rotated with respect to base station, the offset of the carrying object that then can suppress to move into also can be revised the inclination of this carrying object.That is, even do not comprise the mechanism that is used to make base station to move in the horizontal direction, the offset of the carrying object that also can suppress to move into also can be revised the inclination of this carrying object.
In addition, in the present invention,, therefore, for example,, also need not to dispose two travel mechanisms even if industrial robot is a double arm robot because travel mechanism makes cylindrical component relatively move with respect to base station.Therefore, can simplify the structure of industrial robot.In addition, in the present invention, at the supporting member upper support arm is arranged, travel mechanism makes the cylindrical component that supporting member is supported relatively move with respect to base station, and therefore, when cylindrical component relatively moved with respect to base station, cylindrical component and arm can not interfered.Therefore, can guarantee the amount of movement of cylindrical component, the inclination of the carrying object of moving into if any is bigger, also can revise the inclination of carrying object rightly.
Like this; In the present invention; Even industrial robot comprise can will support to arm supporting members supports become can be under the situation of the cylindrical component that upper and lower moves up, the offset of the carrying object that also can move into better simply OILS STRUCTURE DEPRESSION also can be revised the inclination of this carrying object rightly.In addition, in the present invention, do not tilt but cause under the situation of offset, can revise this offset through utilizing travel mechanism that cylindrical component is moved with respect to base station at the carrying object.In addition, in invention, cylindrical component is moved with respect to base station, can revise step-up error, the assembly error of industrial robot through utilizing travel mechanism.
In the present invention, for example, rotating member forms the elongate block of extending from base station towards cylindrical component, and comprises: remain in first rotating part on the base station with the mode that can rotate; And the second fixing rotating part of lower end that supplies cylindrical component, travel mechanism is disposed between first rotating part and second rotating part, second rotating part can with respect to the first rotating part linearity relatively move.
In this case, comparatively it is desirable to, supporting member comprises the arm support of the elongate block that begins to extend with rotating member almost parallel ground from cylindrical component, and the base end side of arm support is disposed at the cylindrical component side, and arm is supported on the front of arm support.If constitute like this, then can travel mechanism be disposed at the downside of the center of gravity of the structure that constitutes by second rotating part, cylindrical component, supporting member, arm and hand etc.So, can suppress the excessive external force of travel mechanism's effect.
In addition, in this case, comparatively it is desirable to, when above-below direction was observed, travel mechanism had been disposed between the cardinal extremity of cylindrical component and arm on the long side direction of arm support.If constitute like this, then can travel mechanism be disposed between the cardinal extremity of the cylindrical component that becomes the dead angle easily and arm.Therefore, also can make the industrial robot miniaturization even if comprise under the situation of travel mechanism at industrial robot.
In the present invention, travel mechanism is also configurable between the lower end and rotating member of cylindrical component.
In the present invention, travel mechanism for example comprises: motor; The screw member that links with the output shaft of motor; Nut member with negative thread portion that the outer screw section with screw member screws togather; And straight line guiding piece.
In the present invention, industrial robot also can comprise horizontal mobile mechanism, this horizontal mobile mechanism make base station with the prescribed direction of above-below direction quadrature on move.
As stated; At industrial machine philtrum of the present invention; Even if comprise can will support to arm supporting members supports become can be under the situation of the cylindrical component that upper and lower moves up, the offset of the carrying object that also can move into better simply OILS STRUCTURE DEPRESSION also can be revised the inclination of this carrying object rightly.
Description of drawings
Fig. 1 is the vertical view of the industrial robot of embodiment of the present invention.
Fig. 2 is the side view from the E-E direction indication industrial robot of Fig. 1.
Fig. 3 is the front view from the F-F direction indication industrial robot of Fig. 1.
Fig. 4 is used for the vertical view that the structure to travel mechanism shown in Figure 2 and periphery thereof describes.
Fig. 5 is used for the figure that the structure of travel mechanism and periphery thereof described from the G-G direction of Fig. 4.
Fig. 6 is the enlarged drawing of the H portion of Fig. 4.
Fig. 7 is used for the figure that travel mechanism described from the J-J direction of Fig. 6.
Fig. 8 is used for vertical view that substrate shown in Figure 1 is described with the action of the industrial robot of heeling condition when accommodating.
Fig. 9 is used for the figure that the configuration to the travel mechanism of another embodiment of the present invention describes, and Fig. 9 (A) is a vertical view, and Fig. 9 (B) is a side view.
Figure 10 is used for the figure that the configuration to the travel mechanism of another embodiment of the present invention describes, and Figure 10 (A) is a vertical view, and Figure 10 (B) is a side view.
Figure 11 is used for the vertical view that the configuration to the travel mechanism of another embodiment of the present invention describes.
Figure 12 is used for the vertical view that the structure to the rotating member of another embodiment of the present invention describes.
Figure 13 is the vertical view of the industrial robot of another embodiment of the present invention.
Figure 14 is the side view of the industrial robot of another embodiment of the present invention.
(symbol description)
1 robot (industrial robot)
2 substrates (glass substrate, carrying object)
3 hands (hand)
4 arms
6 supporting members
7 cylindrical components
8 base stations
9 rotating members
10 travel mechanisms
16 arm supports
20 first rotating parts
21 second rotating parts
25 motor
26 ball screws (screw member)
27 nut members
28 straight line guiding pieces
The specific embodiment
Below, with reference to accompanying drawing embodiment of the present invention is described.
(schematic configuration of industrial robot)
Fig. 1 is the vertical view of the industrial robot 1 of embodiment of the present invention.Fig. 2 is the side view from the E-E direction indication industrial robot 1 of Fig. 1.Fig. 3 is the front view from the F-F direction indication industrial robot 1 of Fig. 1.In following explanation, three orthogonal directions are made as directions X, Y direction and Z direction respectively.In this embodiment, the Z direction is consistent with above-below direction.In addition, in following explanation, directions X is made as fore-and-aft direction, the Y direction is made as left and right directions.
The industrial robot 1 of this embodiment (below, be called " robot 1 ".) be used for to the carrying object be the glass substrate 2 used of LCD (below, be called " substrate 2 ".) carrying of carrying uses articulated robot.Like Fig. 1～shown in Figure 3, robot 1 comprises: two hands 3 of substrate 2 installings; Two arms 4 that each hand 3 in front and two hands 3 links; And the main part 5 that two arms 4 are supported.Main part 5 comprises: supporting member 6, and the base end side of 6 pairs of two arms 4 of this supporting member supports; Cylindrical component 7, this cylindrical component 7 is supported to supporting member 6 can move up at upper and lower; Base station 8, this base station 8 constitutes the end portion of main part 5; Rotating member 9, the lower end of 9 pairs of cylindrical components 7 of this rotating member support and can rotate with respect to base station 8; And travel mechanism 10, this travel mechanism 10 makes cylindrical component 7 relatively move in the horizontal direction with respect to base station 8.
In this embodiment, the state of skew abreast on fore-and-aft direction and/or left and right directions of the substrate 2 the when offset of substrate 2 is meant substrate 2 with respect to the reference position that is disposed at regulation with correct posture.In addition, the center zero (with reference to Fig. 1) the when inclination of substrate 2 is meant the center zero of substrate 2 when tilting with the reference position that is disposed at regulation with correct posture is consistent, but is the state of centroclinal predetermined angular with center zero.
The base end side of hand 3 links with the front of the mode that can rotate and arm 4.Identical with the industrial robot of record in the above-mentioned patent documentation 2; Sensor (not shown) is installed on this hand 3; This sensor is used for the inclination of the substrate 2 of the reception position that is accommodated in regulation (particularly, being the inclination of taking out of direction of substrate 2 with respect to substrates such as fore-and-aft direction 2) is detected.Identical with the industrial robot of record in the above-mentioned patent documentation 2, on supporting member 6, be equipped with and be used for the edge sensor that the end face to substrate 2 detects.In addition, be used for sensor that the inclination to substrate 2 detects except being installed on robot 1, also can be installed on the reception position of substrate 2 sometimes.
Supporting member 6 comprises: the lifting unit 15 that constitutes the base end side part of supporting member 6; And two arm supports 16 that two arms 4 are supported respectively.Lifting unit 15 remains in cylindrical component 7 with the mode that can move up and down.Arm support 16 form with the direction of the moving direction quadrature of hand 3 bulk as the elongated flat of long side direction.The cardinal extremity of two arm supports 16 is fixed in lifting unit 15.Maintain the base end side of second arm 14 with the mode that can rotate in the front of arm support 16.In this embodiment, two hands 3, two arms 4 and two arm supports 16 are configured on above-below direction overlapping.That is, the robot 1 of this embodiment is a double arm robot.
Rotating member 9 forms the bulk of the elongated flat of 7 extensions from base station 8 towards cylindrical component.As shown in Figure 1, this rotating member 9 is configured to and arm support 16 almost parallels.That is, rotating member 9 extends with arm support 16 almost parallel ground.In this embodiment, the long side direction of rotating member 9 is with respect to the long side direction slight inclination of arm support 16.Particularly, the long side direction of rotating member 9 is with respect to the long side direction slight inclination of arm support 16, so that the distance between arm support 16 and the rotating member 9 is along with diminishing towards base station 8 from cylindrical component 7.Therefore, in this embodiment, the radius of turn of the robot 1 of rotation under the state that arm 4 shrinks is diminished.
In addition, rotating member 9 comprises: remain in first rotating part 20 on the base station 8 with the mode that can rotate; And the base end side binding of the front of fixing second rotating part, 21, the first rotating parts 20 in the lower end that supplies cylindrical component 7 and second rotating part 21.In addition, the base end side of first rotating part 20 and base station 8 link, and are fixed with the lower end of the first post portion 17 in the front of second rotating part 21.Second rotating part 21 can relatively move in the direction parallel with the long side direction of arm support 16 direction of the moving direction quadrature of hand 3 (that is, with) with respect to first rotating part 20 with going up linearity.First rotating part 20 and second rotating part 21 form hollow form.
As shown in Figure 2, travel mechanism 10 is disposed between first rotating part 20 and second rotating part 21.That is, travel mechanism 10 is disposed at the linking part of first rotating part 20 and second rotating part 21.Below, the structure of travel mechanism 10 and periphery thereof is described.
As stated, the second post portion 18 can move up at upper and lower with respect to the first post portion 17, and in addition, lifting unit 15 can move up at upper and lower with respect to the second post portion 18.That is, robot 1 comprises the elevating mechanism (not shown) that the second post portion 18 and lifting unit 15 are gone up and down.In addition, rotating member 9 can rotate with respect to base station 8.That is, robot 1 comprises the rotating mechanism (not shown) that rotating member 9 is rotated.
(structure of travel mechanism and periphery thereof)
Fig. 4 is used for the vertical view that the structure to travel mechanism shown in Figure 2 10 and periphery thereof describes.Fig. 5 is used for the figure that the structure of travel mechanism 10 and periphery thereof described from the G-G direction of Fig. 4.Fig. 6 is the enlarged drawing of the H portion of Fig. 4.Fig. 7 is used for the figure that travel mechanism 10 described from the J-J direction of Fig. 6.
As shown in Figure 5, be shaped as the step-like of twice warpage during the observing from the side of second rotating part 21, comprise fixed part 21a that the lower end that supplies the first post portion 17 is fixing and the linking part 21b that links with first rotating part 20.Fixed part 21a and linking part 21b almost parallel ground configuration each other, and linking part 21b is disposed at the upside of fixed part 21a.In addition, the front of the linking part 21b and first rotating part 20 is overlapping on above-below direction.Particularly, linking part 21b is disposed at the upside of the front of first rotating part 20.In addition, fixed part 21 is configured in the height roughly the same with the height of first rotating part 20.
As shown in Figure 4, when above-below direction was observed, travel mechanism 10 was between the front and cylindrical component 7 of the arm support 16 that the base end side that is disposed on the long side direction of arm support 16 arm 4 supports.That is, when above-below direction was observed, travel mechanism 10 was between cardinal extremity that is disposed at arm 4 on the long side direction of arm support 16 and cylindrical component 7.In addition, travel mechanism 10 comprises: as the rotary-type motor 25 of drive source; The ball screw 26 that links with the output shaft of motor 25 as screw member; Nut member 27 with negative thread portion that the outer screw section with ball screw 26 screws togather; And straight line guiding piece 28.
As shown in Figure 5, motor 25 is disposed at the inside of the linking part 21b of second rotating part 21.In addition, motor 25 is fixed in the inside of linking part 21b.Reductor 29 is installed on the output shaft of motor 25.On the output shaft of reductor 29, ball screw 26 is installed through connector 30.That is, ball screw 26 links with the output shaft of motor 25 through reductor 29 and connector 30.In addition, ball screw 26 bearing 31 that is fixed in second rotating part 21 is supported to and can rotates.As shown in Figure 5, nut member 27 is fixed on the support 32, and is disposed at the inside of linking part 21b.Support 32 is fixed in the upper surface of the front of first rotating part 20.
The guide body 34 that straight line guiding piece 28 comprises guide rail 33 and engages with guide rail 33 and slide along guide rail 33.As shown in Figure 7, guide rail 33 is fixed in the upper surface of the front of first rotating part 20.Guide body 34 is fixed in the lower surface of the linking part 21b of second rotating part 21.As shown in Figure 6, when above-below direction was observed, straight line guiding piece 28 was disposed at the both sides of motor 25, ball screw 26 and nut member 27 etc.
In travel mechanism 10, when motor 25 starts, ball screw 26 rotations, shown in the double dot dash line of Fig. 4, second rotating part 21 moves on the long side direction of arm support 16 with respect to first rotating part 20.
(the summary action of industrial robot)
Fig. 8 is used for vertical view that substrate shown in Figure 12 is described with the action of the industrial robot 1 of heeling condition when accommodating.
In the robot 1 that as above constitutes, the second post portion 18 moves up and down with respect to the first post portion 17, and supporting member 16 moves up and down with hand 3 and arm 4 etc. with respect to the second post portion 18.In addition, arm 4 is flexible with respect to main part 5.Particularly, arm 4 stretches so that hand 3 is moving under the state of prescribed direction linearity.In addition, rotating member 9 rotates with respect to base station 8.Through these motion combination, robot 1 is taken in substrate 2 from substrate 2 reception position is carried towards the job position that substrate 2 is carried out the regulation operation.
Here, in this embodiment, robot 1 at first, make hand 3 flexible, and the inclination of taking out of direction with respect to substrate 2 detects to substrate 2 to utilize the sensor of being located at hand 3 when taking out of the substrate 2 that is accommodated in reception position.If the action of the tilt detection through this substrate 2 does not detect the inclination (perhaps substrate 2 is tilted in below the setting) of substrate 2, it is flexible that then robot 1 makes hand 3 once more, substrate 2 is taken out of and the substrate of taking out of 2 moved into the job position of regulation from reception position.At this moment, the state of the robot 1 when reception position installing substrate 2 is in the state shown in the double dot dash line of Fig. 8.That is, at this moment, hand 3 and substrate 2 take out of the direction almost parallel.
On the other hand; When inclination that the tilt detection motion detection through substrate 2 goes out substrate 2 (when the inclination of perhaps detected substrate 2 surpasses setting); For suppress substrate 2 with substrate 2 take out of the roughly offset on the direction of quadrature of direction, and the inclination of substrate 2 is revised, robot 1 makes rotating member 9 rotate ormal weights with respect to base station 8; And motor 25 is started, so that second rotating part 21 moves on the long side direction of arm support 16 with respect to first rotating part 20.That is, cylindrical component 7 is moved on the long side direction of arm support 16 with respect to base station 8.Then, robot 1 makes hand 3 flexible so that substrate 2 is taken out of from reception position.At this moment, the state of the robot 1 when reception position installing substrate 2 is in the state shown in the solid line of Fig. 8.That is, at this moment, hand 3 tilts with respect to the inclination same degree ground of taking out of direction and substrate 2 of substrate 2.In addition, robot 1 starts motor 25 after taking out of substrate 2, so that second rotating part, 21 courts move with just now the opposite direction of moving direction, and makes rotating member 9 courts and the direction of just now direction of rotation rotate ormal weight.Then, it is flexible so that substrate 2 is moved into job position that robot 1 makes hand 3.
Like this, in this embodiment, make rotating member 9 rotate ormal weights with respect to base station 8 according to the inclination of substrate 2; And under the state that second rotating part 21 is moved with respect to first rotating part 20, take out of substrate 2 from reception position, then; Make rotating member 9 rotate ormal weight in the opposite direction; And after second rotating part 21 is moved in the opposite direction, substrate 2 is moved into job position, therefore; With the direction of taking out of the direction quadrature of substrate 2 on the repressed state of offset under when substrate 2 moved into job position, the inclination that is accommodated in the substrate 2 of reception position has been revised.Go out in tilt detection motion detection under the situation of inclination of substrate 2, rotating member 9 is rotated with respect to base station 8, in addition, second rotating part 21 is rotated with respect to first rotating part 20 and make arm 4 flexible through substrate 2.
(the main effect of this embodiment)
As stated, the robot 1 of this embodiment comprises travel mechanism 10, this travel mechanism 10 make cylindrical component 7 with respect to base station 8 with the direction of the moving direction quadrature of hand 3 on relatively move.Therefore, when detecting the inclination of substrate 2, as if cylindrical component 7 being relatively moved with respect to base station 8 and rotating member 9 being rotated with respect to base station 8, the offset of the substrate 2 that then can suppress to move into also can be revised the inclination of this substrate 2.That is, even do not comprise the mechanism that is used to make base station 8 to move in the horizontal direction, the offset of the substrate 2 that also can suppress to move into also can be revised the inclination of this substrate 2.
In addition, in this embodiment,, therefore,, also need not to dispose two travel mechanisms 10 even if robot 1 is a double arm robot because travel mechanism 10 makes cylindrical component 7 relatively move with respect to base station 8.Therefore, can simplify the structure of robot 1.In addition, in this embodiment, arm 4 is arranged at supporting member 6 upper supports; Travel mechanism 10 makes the cylindrical component 7 that supporting member 6 is supported relatively move with respect to base station 8; Therefore, when cylindrical component 7 relatively moved with respect to base station 8, cylindrical component 7 can not interfered with arm 4.Therefore, in this embodiment, can guarantee the amount of movement of cylindrical component 7, and the inclination of the substrate of moving into if any 2 is bigger, also can revises the inclination of substrate 2 rightly.
Like this; In this embodiment; Even robot 1 comprise can will support to arm 4 supporting member 6 be supported to can be under the situation of the cylindrical component 7 that upper and lower moves up, the offset of the substrate 2 that also can will move into better simply OILS STRUCTURE DEPRESSION also can be revised the inclination of this substrate 2 rightly.In addition, in this embodiment, substrate 2 do not tilt but with the direction of taking out of the direction quadrature of substrate 2 on cause under the situation of offset, can revise this offset through cylindrical component 7 is moved with respect to base station 8.In addition, in this embodiment, cylindrical component 7 is moved with respect to base station 8, can revise step-up error, the assembly error of robot 1 through utilizing travel mechanism 10.Therefore, can easily carry out setting, the assembling of robot 1.
In this embodiment, travel mechanism 10 is disposed between first rotating part 20 and second rotating part 21.In addition, the base end side of the arm support 16 that extends from cylindrical component 7 beginnings and rotating member 9 almost parallel ground is disposed at cylindrical component 7 sides, and arm 4 is supported on the front of arm support 16.Therefore, can travel mechanism 10 be disposed at the downside of the center of gravity of the structure that constitutes by second rotating part 21, cylindrical component 7, supporting member 6, arm 4 and hand 3 etc.So, can suppress the excessive external force of straight line guiding piece 28 effects.
In this embodiment, when above-below direction was observed, travel mechanism 10 was between the cardinal extremity that is disposed at cylindrical component 7 and arm 4 on the long side direction of arm support 16.Therefore, can between the cardinal extremity of cylindrical component that becomes the dead angle easily 7 and arm 4, dispose the base end side of first rotating part 20 and the linking part 21b of second rotating part 21 along the vertical direction overlappingly, and can dispose travel mechanism 10.Therefore, the linking part 21b of the base end side of first rotating part 20 and second rotating part 21 is configured on above-below direction overlapping, in addition, even between first rotating part 20 and second rotating part 21, dispose travel mechanism 10, also can make robot 1 miniaturization.
(other embodiments)
Above-mentioned embodiment is an example of preferred implementation of the present invention, but is not limited thereto, and can carry out various distortion in the scope of the inventive concept not changing.
In the above-described embodiment, motor 25 is fixed in the inside of the linking part 21b of second rotating part 21, and nut member 27 is fixed in first rotating part 20 through support 32.In addition, for example shown in Figure 9, also can motor 25 be arranged in the internal fixation of the front of first rotating part 20, in the internal fixation of second rotating part 21 nut member 27 is arranged.
In the above-described embodiment, travel mechanism 10 is disposed between first rotating part 20 and second rotating part 21.In addition, for example shown in Figure 10, between the also configurable lower end of travel mechanism 10 (i.e. the lower end of the first post portion 17) and the rotating member 9 in cylindrical component 7.That is, travel mechanism 10 is also configurable in the linking part of cylindrical component 7 with rotating member 9.In this case, need not to constitute rotating member 9 by first rotating part 20 and second rotating part, 21 these two members, rotating member 9 is shown in figure 10 to be made up of a member.In addition, in this case, for example, motor 25 is fixed in the inside of rotating member 9, and nut member 27 is fixed in the lower end of the first post portion 17.In addition, for example, guide rail 33 is fixed in the front upper surface of rotating member 9, and guide body 34 is fixed in the lower end of the first post portion 17.
In the above-described embodiment, the long side direction of rotating member 9 is with respect to the long side direction slight inclination of arm support 16, and second rotating part 21 relatively moves on the long side direction of arm support 16 with respect to first rotating part 20 linearity.In addition, for example shown in Figure 11, also can be configured to make second rotating part 21 to relatively move with the long side direction (direction of arrow V) of the rotating member 9 of the long side direction slight inclination of arm support 16 travel mechanism 10 with respect to first rotating part, 20 courts.In addition; Also can be configured to make second rotating part 21 to relatively move towards the direction beyond the long side direction of rotating member 9 and with the inconsistent direction of the moving direction of hand 3 direction of the moving direction inclination predetermined angular of hand 3 (for example, with respect to) travel mechanism 10 with respect to first rotating part 20.
In the above-described embodiment, the long side direction of rotating member 9 is with respect to the long side direction slight inclination of arm support 16.In addition, for example shown in Figure 12, when above-below direction was observed, first rotating part 20 of rotating member 9 formed the roughly rectangle of the direction parallel with the long side direction of arm support 16 as long side direction.In this case, the shape when above-below direction is observed of second rotating part 21 for example is the step-like of twice warpage, and linking part 21b is disposed at the upside of the front of first rotating part 20.Also can the rotating member 9 whole long side direction modes parallel form rotating member 9 with the long side direction of arm support 16.
In the above-described embodiment, main part 5 can not move in the horizontal direction, but main part 5 also can form and can move in the horizontal direction.That is, like Figure 13, shown in Figure 14, robot 1 also can comprise: base station 8 is supported to (for example left and right directions) upward mobile substructure member 40 in the horizontal direction; And the horizontal mobile mechanism that base station 8 is moved with respect to substructure member 40 in the horizontal direction.
In the above-described embodiment, supporting member 6 comprises arm support 16, and the base end side of arm 4 is supported on the front of arm support 16.In addition, for example, supporting member 6 is made up of lifting unit 15, makes the base end side of arm 4 be supported on lifting unit 15.In addition, in the above-described embodiment, travel mechanism 10 comprises rotary-type motor 25, ball screw 26 and nut member 27, but travel mechanism 10 also can be a linear motor.
In the above-described embodiment, the second post portion 18 can move up at upper and lower with respect to the first post portion 17.In addition, for example, also can be in the fixing second post portion 18 of the assigned position of the first post portion 17.In this case, the lifting unit 15 that only remains in the second post portion 18 moves up at upper and lower.In addition, in the above-described embodiment, cylindrical component 7 comprises the first post portion 17 and the second post portion 18, but cylindrical component 7 also can be made up of a post portion.In this case, lifting unit 15 is can remain in this post portion in the mode that upper and lower moves up.
In the above-described embodiment, arm 4 is made up of first arm 13 and second arm, 14 these two arms, but arm 4 also can be made up of the arm more than three.In addition, in the above-described embodiment, robot 1 is the so-called double arm robot that comprises two hands 3 and two arms 4 etc., but robot 1 also can be the single armed humanoid robot that comprises a hand 3 and an arm 4 etc.In addition, in the above-described embodiment, be substrate 2, but also can be the wafer etc. beyond the substrate 2 by the carrying object of robot 1 carrying by the carrying object of robot 1 carrying.
Claims (8)
1. an industrial robot is characterized in that, comprising:
Hand, this hand supply the installing of carrying object;
Arm, this arm supply said hand to link;
Supporting member, this supporting member supports said arm;
Cylindrical component, this cylindrical component becomes can move up at upper and lower with said supporting members supports;
Base station;
Rotating member, this rotating member support the lower end of said cylindrical component and can rotate with respect to said base station; And
Travel mechanism, this travel mechanism make said cylindrical component with respect to said base station with the prescribed direction of above-below direction quadrature on relatively move.
2. industrial robot as claimed in claim 1 is characterized in that,
Said rotating member forms the elongate block of extending towards said cylindrical component from said base station, and comprises: remain in first rotating part on the said base station with the mode that can rotate; And the second fixing rotating part of lower end that supplies said cylindrical component,
Said travel mechanism is disposed between said first rotating part and said second rotating part,
Said second rotating part can with respect to the said first rotating part linearity relatively move.
3. industrial robot as claimed in claim 2 is characterized in that,
Said supporting member comprises the arm support of the elongate block that begins to extend with said rotating member almost parallel ground from said cylindrical component,
The base end side of said arm support is disposed at said cylindrical component side,
Said arm is supported on the front of said arm support.
4. industrial robot as claimed in claim 3 is characterized in that,
When above-below direction was observed, said travel mechanism had been disposed between the cardinal extremity of said cylindrical component and said arm on the long side direction of said arm support.
5. industrial robot as claimed in claim 1 is characterized in that,
Said travel mechanism is disposed between the lower end and said rotating member of said cylindrical component.
6. like each described industrial robot in the claim 1 to 5, it is characterized in that,
Said travel mechanism comprises: motor; The screw member that links with the output shaft of said motor; Nut member with negative thread portion that the outer screw section with said screw member screws togather; And straight line guiding piece.
7. like each described industrial robot in the claim 1 to 5, it is characterized in that,
Said industrial robot comprises horizontal mobile mechanism, this horizontal mobile mechanism make said base station with the prescribed direction of above-below direction quadrature on move.
8. industrial robot as claimed in claim 6 is characterized in that,
Said industrial robot comprises horizontal mobile mechanism, this horizontal mobile mechanism make said base station with the prescribed direction of above-below direction quadrature on move.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010161235A JP5578973B2 (en) | 2010-07-16 | 2010-07-16 | Industrial robot |
| JP2010-161235 | 2010-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102380872A true CN102380872A (en) | 2012-03-21 |
| CN102380872B CN102380872B (en) | 2015-07-15 |
Family
ID=45613453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110206392.3A Expired - Fee Related CN102380872B (en) | 2010-07-16 | 2011-07-13 | Industrial robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5578973B2 (en) |
| KR (1) | KR101606223B1 (en) |
| CN (1) | CN102380872B (en) |
| TW (1) | TWI546172B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104924301A (en) * | 2014-03-19 | 2015-09-23 | 株式会社安川电机 | Carrying system and motion correcting method for carrying robot |
| CN108161895A (en) * | 2016-12-07 | 2018-06-15 | 日本电产三协（浙江）有限公司 | Industrial robot |
| CN110249420A (en) * | 2017-01-31 | 2019-09-17 | 川崎重工业株式会社 | Substrate grasping hand and substrate transfer apparatus |
| CN110666838A (en) * | 2018-07-03 | 2020-01-10 | 日本电产三协株式会社 | Industrial robot |
| CN111194253A (en) * | 2017-10-13 | 2020-05-22 | 日本电产三协株式会社 | Industrial robot |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5990359B2 (en) * | 2012-10-04 | 2016-09-14 | 平田機工株式会社 | Loading / unloading robot |
| TW201507829A (en) * | 2013-08-23 | 2015-03-01 | Chiuan Yan Technology Co Ltd | Elevation pick and delivery device |
| JP7503950B2 (en) * | 2020-07-17 | 2024-06-21 | ニデックインスツルメンツ株式会社 | Industrial Robots |
| JP2022083199A (en) * | 2020-11-24 | 2022-06-03 | 日本電産サンキョー株式会社 | Industrial robot |
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| CN108161895A (en) * | 2016-12-07 | 2018-06-15 | 日本电产三协（浙江）有限公司 | Industrial robot |
| CN110249420A (en) * | 2017-01-31 | 2019-09-17 | 川崎重工业株式会社 | Substrate grasping hand and substrate transfer apparatus |
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| CN110666838A (en) * | 2018-07-03 | 2020-01-10 | 日本电产三协株式会社 | Industrial robot |
| CN110666838B (en) * | 2018-07-03 | 2022-12-16 | 日本电产三协株式会社 | Industrial robot |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102380872B (en) | 2015-07-15 |
| JP2012020382A (en) | 2012-02-02 |
| KR101606223B1 (en) | 2016-03-24 |
| TWI546172B (en) | 2016-08-21 |
| JP5578973B2 (en) | 2014-08-27 |
| TW201208835A (en) | 2012-03-01 |
| KR20120008466A (en) | 2012-01-30 |
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