CN102046840A - 处理装置及处理方法 - Google Patents
处理装置及处理方法 Download PDFInfo
- Publication number
- CN102046840A CN102046840A CN2009801190528A CN200980119052A CN102046840A CN 102046840 A CN102046840 A CN 102046840A CN 2009801190528 A CN2009801190528 A CN 2009801190528A CN 200980119052 A CN200980119052 A CN 200980119052A CN 102046840 A CN102046840 A CN 102046840A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- treatment chamber
- conveying roller
- load locking
- locking room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title claims abstract description 63
- 238000003672 processing method Methods 0.000 title abstract 2
- 238000012546 transfer Methods 0.000 claims abstract description 71
- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 31
- 230000008569 process Effects 0.000 claims abstract description 15
- 238000011282 treatment Methods 0.000 claims description 298
- 230000008093 supporting effect Effects 0.000 claims description 124
- 230000008676 import Effects 0.000 claims description 74
- 230000000284 resting effect Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000002452 interceptive effect Effects 0.000 claims 2
- 230000003028 elevating effect Effects 0.000 description 22
- 230000009471 action Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000013022 venting Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000012467 final product Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000167854 Bourreria succulenta Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
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- 235000019693 cherries Nutrition 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
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- 230000007306 turnover Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008078764A JP5330721B2 (ja) | 2007-10-23 | 2008-03-25 | 処理装置および処理方法 |
JP2008-078764 | 2008-03-25 | ||
PCT/JP2009/055818 WO2009119580A1 (ja) | 2008-03-25 | 2009-03-24 | 処理装置および処理方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210207818.1A Division CN102751158B (zh) | 2008-03-25 | 2009-03-24 | 处理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102046840A true CN102046840A (zh) | 2011-05-04 |
CN102046840B CN102046840B (zh) | 2012-08-01 |
Family
ID=41114878
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210207818.1A Expired - Fee Related CN102751158B (zh) | 2008-03-25 | 2009-03-24 | 处理装置 |
CN2009801190528A Expired - Fee Related CN102046840B (zh) | 2008-03-25 | 2009-03-24 | 处理装置及处理方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210207818.1A Expired - Fee Related CN102751158B (zh) | 2008-03-25 | 2009-03-24 | 处理装置 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2261391B1 (zh) |
KR (1) | KR101669685B1 (zh) |
CN (2) | CN102751158B (zh) |
WO (1) | WO2009119580A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8672603B2 (en) | 2009-12-10 | 2014-03-18 | Orbotech LT Solar, LLC. | Auto-sequencing inline processing apparatus |
US8998552B2 (en) | 2007-10-23 | 2015-04-07 | Orbotech LT Solar, LLC. | Processing apparatus and processing method |
TWI595586B (zh) * | 2012-09-10 | 2017-08-11 | 應用材料股份有限公司 | 基板傳輸裝置及移動基板之方法 |
CN115478256A (zh) * | 2021-06-15 | 2022-12-16 | 佳能特机株式会社 | 输送装置以及成膜装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011155156A (ja) * | 2010-01-27 | 2011-08-11 | Muratec Automation Co Ltd | 物品搬送装置 |
US8459276B2 (en) | 2011-05-24 | 2013-06-11 | Orbotech LT Solar, LLC. | Broken wafer recovery system |
JP5765815B2 (ja) * | 2012-01-12 | 2015-08-19 | 大成建設株式会社 | 搬送システム |
CN104620370B (zh) * | 2012-09-10 | 2018-09-28 | 应用材料公司 | 基板处理***及处理基板的方法 |
CN104555514B (zh) * | 2014-12-31 | 2018-05-15 | 东莞市科立电子设备有限公司 | 一种轨道可调式双工位多功能在线式分板机 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2938160B2 (ja) * | 1990-07-20 | 1999-08-23 | 東京エレクトロン株式会社 | 真空処理装置 |
US5795399A (en) * | 1994-06-30 | 1998-08-18 | Kabushiki Kaisha Toshiba | Semiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction product |
JP3165348B2 (ja) * | 1995-05-18 | 2001-05-14 | ワイエイシイ株式会社 | プラズマ処理装置およびその運転方法 |
JP4204128B2 (ja) | 1999-01-18 | 2009-01-07 | 東京応化工業株式会社 | 基板搬送装置及び基板搬送方法 |
US6558509B2 (en) * | 1999-11-30 | 2003-05-06 | Applied Materials, Inc. | Dual wafer load lock |
JP2002203885A (ja) * | 2000-12-27 | 2002-07-19 | Anelva Corp | インターバック型基板処理装置 |
JP2002270880A (ja) | 2001-03-14 | 2002-09-20 | Shin Etsu Handotai Co Ltd | 太陽電池モジュール及びその製造方法 |
US20030003767A1 (en) * | 2001-06-29 | 2003-01-02 | Plasmion Corporation | High throughput hybrid deposition system and method using the same |
JP4517595B2 (ja) * | 2003-06-26 | 2010-08-04 | 東京エレクトロン株式会社 | 被処理体の搬送方法 |
JP2006100722A (ja) * | 2004-09-30 | 2006-04-13 | Tokyo Electron Ltd | 基板処理システム |
-
2009
- 2009-03-24 CN CN201210207818.1A patent/CN102751158B/zh not_active Expired - Fee Related
- 2009-03-24 WO PCT/JP2009/055818 patent/WO2009119580A1/ja active Application Filing
- 2009-03-24 EP EP09725876.8A patent/EP2261391B1/en not_active Not-in-force
- 2009-03-24 CN CN2009801190528A patent/CN102046840B/zh not_active Expired - Fee Related
- 2009-03-24 KR KR1020107023727A patent/KR101669685B1/ko active IP Right Grant
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8998552B2 (en) | 2007-10-23 | 2015-04-07 | Orbotech LT Solar, LLC. | Processing apparatus and processing method |
US8672603B2 (en) | 2009-12-10 | 2014-03-18 | Orbotech LT Solar, LLC. | Auto-sequencing inline processing apparatus |
TWI595586B (zh) * | 2012-09-10 | 2017-08-11 | 應用材料股份有限公司 | 基板傳輸裝置及移動基板之方法 |
CN115478256A (zh) * | 2021-06-15 | 2022-12-16 | 佳能特机株式会社 | 输送装置以及成膜装置 |
CN115478256B (zh) * | 2021-06-15 | 2023-12-15 | 佳能特机株式会社 | 输送装置以及成膜装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102751158B (zh) | 2015-05-20 |
WO2009119580A1 (ja) | 2009-10-01 |
KR101669685B1 (ko) | 2016-10-27 |
CN102751158A (zh) | 2012-10-24 |
EP2261391B1 (en) | 2017-11-15 |
EP2261391A4 (en) | 2013-01-23 |
CN102046840B (zh) | 2012-08-01 |
KR20100134062A (ko) | 2010-12-22 |
EP2261391A1 (en) | 2010-12-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220629 Address after: Israel Masao City Patentee after: ORBOTECH Ltd. Address before: California, USA Patentee before: Orbotech LT Solar, LLC |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220908 Address after: California, USA Patentee after: Orbotech LT Solar LLC Address before: Israel Masao City Patentee before: ORBOTECH Ltd. Effective date of registration: 20220908 Address after: California, USA Patentee after: KLA-TENCOR Corp. Address before: California, USA Patentee before: Orbotech LT Solar LLC |
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TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120801 |
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CF01 | Termination of patent right due to non-payment of annual fee |