CN101985937B - Triaxial claw vacuum pump - Google Patents
Triaxial claw vacuum pump Download PDFInfo
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- CN101985937B CN101985937B CN201010565664A CN201010565664A CN101985937B CN 101985937 B CN101985937 B CN 101985937B CN 201010565664 A CN201010565664 A CN 201010565664A CN 201010565664 A CN201010565664 A CN 201010565664A CN 101985937 B CN101985937 B CN 101985937B
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Abstract
The invention relates to a vacuum pump, in particular to a triaxial claw vacuum pump. The vacuum pump comprises a motor, a main shaft, and a driven shaft, wherein the main shaft is provided with a driving gear; a driven gear meshed with the driving gear is arranged on the driven shaft; claw rotors meshed with each other are arranged on the main shaft and the driven shaft; the claw rotors are separated by a clapboard; and an assembly claw rotor and a driven shaft of the driven gear are arranged on the two sides of the main shaft. Not only the work efficiency and pumping efficiency of the pump are improved, but also the working stability of the pump is enhanced.
Description
Technical field
The present invention relates to a kind of vacuum pump, be specifically related to a kind of three pawl type vacuum pumps.
Background technique
Vacuum pump is one of processing technology key equipments such as semi-conductor industry chips, optical communication components and parts and flat panel display.Obtained using widely as the no oil molecule pump that obtains middle high vacuum, cryopump etc.But; The prime Roughing pump that matches with high vacuum pump in these dry types but is traditional oil seal type vacuum pump mostly; Be to reduce oil pollution, between middle high vacuum pump and Roughing pump, be connected in series usually, but the method can not satisfy the requirement of vacuum environment cleanliness into cold-trap.And that present claw shape dry type vacuum pump is is two-axis, and a main shaft drives a driven shaft, and not only pumping efficiency is low, and dynamic balance performance is poor.
Summary of the invention
To the existing problem of present claw shape dry type vacuum pump, the present invention provides a kind of three pawl type vacuum pumps, and solution claw shape dry type vacuum pump pumping efficiency hangs down the problem with the dynamic balance performance difference.
Three pawl type vacuum pumps of the present invention; Comprise motor, main shaft and driven shaft; Be equipped with driving gear on the main shaft, the driven gear that is meshed with driving gear is assemblied on the driven shaft, and intermeshing claw-type rotor is housed on main shaft and driven shaft; Separate with dividing plate between the claw-type rotor group, main points are that described main shaft both sides are equipped with the driven shaft of an assembling claw-type rotor and driven gear.
The pawl number of described claw-type rotor is two pawls, four paws, six pawls or eight pawls.
The described main shaft and the line of centres of two driven shafts on same cross section are straight line or triangle.
Described claw-type rotor progression is 1 grade～6 grades.
When described claw-type rotor progression is 2 grades～6 grades, separate with dividing plate between the adjacent two-stage.
The beneficial effect of the present invention's outstanding feature and generation compared with prior art is: increased a driven shaft that is used to assemble claw-type rotor and driven gear in main shaft one side; The working efficiency and the pumping efficiency of pump have not only been improved; Also strengthened pump work stability, vibration and noise when having reduced the pump running.
Description of drawings
Fig. 1 is a structural representation of the present invention;
The structural representation that Fig. 2 is triangularly arranged for the rotor cross-section line of centres;
Among the figure: 1 motor, 2 coupling, 3 main shafts, 4 driving gears, 5 right driven gears, 6 right driven shafts, 7 right driven rotors, 8 power rotors, 9 dividing plates, 10 left driven rotors, 11 left driven shafts, 12 left driven gears, 13 relief openings, 14 air-inlet cavitys, 15 exhaust cavitys, 16 motor framves, 17 pump housings, 18 bearing (ball) covers, 19 safety covers, 20 exhaust shaft bearings, 21 Intake shaft bearings, 22 gear-boxes, 23 upper bearing (metal)s, 24 lower bearings.
Embodiment
Below in conjunction with accompanying drawing the present invention is further specified.
A kind of three pawl type vacuum pumps of example 1. the present invention; Be connected with main shaft 3 through coupling 2 by motor 1, driving gear 4, left driven gear 12 are connected through key with right driven gear 5 and are assemblied in respectively on main shaft 3, left driven shaft 11 and the right driven shaft 6; Three axles are and are arranged in parallel; Middle main shaft 3 is driven by motor 1, and under three synchromesh gears drove, three axles were done reverse each other rotatablely moving.At main shaft 3, all be fixed with the claw-type rotor of 4 grade of two pawl on left driven shaft 11 and the right driven shaft 6, claw-type rotor is separately fixed on three axles through the key connection; At main shaft 3, the shaft shoulder place at left driven shaft 11 and right driven shaft 6 two ends all is equipped with bearing, and upper bearing (metal) 23 is fixed on the exhaust shaft bearing 20; Lower bearing 24 is fixed on the Intake shaft bearing 21, and the supporting effect through bearing support of three axles makes claw-type rotor and the pump housing 17 contactless, maintains the gap of 0.15～1.0mm; Exhaust shaft bearing 20 inner cavitys are exhaust cavity 15, and exhaust cavity 15 communicates with relief opening 13, and exhaust shaft bearing 20 upper-end surfaces are connected with gear-box 22 through bolt; The part that three axles extend to gear-box 22 is equipped with driving gear 4; Left side driven gear 12 and right driven gear 5, gear-box 22 is connected with motor frame 16 through bolt, and motor 1 is through being bolted on the motor frame 16; Exhaust shaft bearing 20 lower end surfaces are connected with the pump housing 17 through bolt; The pump housing 17 inner claw-type rotor groups separate through dividing plate 9, and dividing plate 9 is provided with three axis holes, below the axis hole of right driven shaft 6, opens a pore; Above the axis hole of left driven shaft 11, open a pore, two pores are symmetrically distributed up and down along the straight line that dividing plate 9 upper shaft holes belong to.Intake shaft bearing 21 inner chambeies are air-inlet cavity 14; On the Intake shaft bearing 21 at air-inlet cavity 14 tops, have a suction port; Suction port is connected with air inlet pipeline, and bearing (ball) cover 18 is through being bolted on the Intake shaft bearing 21, and Intake shaft bearing 21 is connected with the pump housing 17 through bolt; Bearing (ball) cover 18 outsides are provided with safety cover 19, and safety cover 19 is through being bolted on the Intake shaft bearing 21.
Working procedure of the present invention is: by motor 1 power source is provided, thereby drives main shaft 3 rotations.Main shaft 3 connects driving gear 4 through key, drives right driven gear 5 and left driven gear 12 rotations.Right driven gear 5 is connected with left driven shaft 11 with right driven shaft 6 respectively with left driven gear 12, drives the rotation of two driven shafts.So just, realized power rotor 8, the synchronous rotation of right driven rotor 7 and left driven rotor 10.Contactless engagement between rotor forms the space of sealing together with pump housing inwall, thus the air-breathing and exhaust of property performance period.
Separate with dividing plate 9 between the rotors at different levels in the pump.The gas of discharging that interacts between rotor and rotor, rotor and the pump housing inwall is discharged through the pore on the dividing plate 9.Under rotor rotation effects at different levels, realize the transport process of gas.Bigger pumping speed and the compression ratio that has improved pump reduced amount of parts, and rate of fault is reduced, and reduced cost.
Example 2. its structures, connection is identical with embodiment 1 with working procedure, and difference is main shaft 3, all is fixed with the claw-type rotor of 6 grades of four paws on left driven shaft 11 and the right driven shaft 6.
Example 3. its working procedure are identical with embodiment 1, and difference is main shaft 3, and left driven shaft 11 is triangularly arranged with right driven shaft 6.
Claims (3)
1. one kind three pawl type vacuum pumps; Be connected with main shaft (3) through coupling (2) by motor (1); Driving gear (4), left driven gear (12) are connected through key with right driven gear (5) and are assemblied in respectively on main shaft (3), left driven shaft (11) and the right driven shaft (6), it is characterized in that three axles are to be arranged in parallel; Middle main shaft (3) is driven by motor (1); In main shaft (3), all be fixed with the claw-type rotor of 4 grade of two pawl on left driven shaft (11) and the right driven shaft (6), claw-type rotor is separately fixed on three axles through the key connection; In main shaft (3); The shaft shoulder place at left side driven shaft (11) and right driven shaft (6) two ends all is equipped with bearing, and upper bearing (metal) (23) is fixed on the exhaust shaft bearing (20), and lower bearing (24) is fixed on the Intake shaft bearing (21); Three axles make the claw-type rotor and the pump housing (17) maintain the gap of 0.15～1.0mm through the support of bearing support; The inner cavity of exhaust shaft bearing (20) is exhaust cavity (15), and exhaust cavity (15) communicates with relief opening (13), and exhaust shaft bearing (20) upper-end surface is connected with gear-box (22) through bolt; The part that three axles extend to gear-box (22) is equipped with driving gear (4); Left side driven gear (12) and right driven gear (5), gear-box (22) is connected with motor frame (16) through bolt, and motor (1) is through being bolted on the motor frame (16); Exhaust shaft bearing (20) lower end surface is connected with the pump housing (17) through bolt; The inner claw-type rotor group of the pump housing (17) separates through dividing plate (9), and dividing plate (9) is provided with three axis holes, opens a pore in the axis hole below of right driven shaft (6); A pore is opened in axis hole top at left driven shaft (11), and two pores are symmetrically distributed up and down along the straight line that dividing plate (9) upper shaft hole belongs to; The inner chamber of Intake shaft bearing (21) is air-inlet cavity (14); On the Intake shaft bearing (21) at air-inlet cavity (14) top, have a suction port; Suction port is connected with air inlet pipeline, and bearing (ball) cover (18) is through being bolted on the Intake shaft bearing (21), and Intake shaft bearing (21) is connected with the pump housing (17) through bolt; Bearing (ball) cover (18) outside is provided with safety cover (19), and safety cover (19) is through being bolted on the Intake shaft bearing (21).
2. one kind three pawl type vacuum pumps; Be connected with main shaft (3) through coupling (2) by motor (1); Driving gear (4), left driven gear (12) are connected through key with right driven gear (5) and are assemblied in respectively on main shaft (3), left driven shaft (11) and the right driven shaft (6), it is characterized in that three axles are to be arranged in parallel; Middle main shaft (3) is driven by motor (1); In main shaft (3), all be fixed with the claw-type rotor of 6 grades of four paws on left driven shaft (11) and the right driven shaft (6), claw-type rotor is separately fixed on three axles through the key connection; In main shaft (3), the shaft shoulder place at left driven shaft (11) and right driven shaft (6) two ends all is equipped with bearing, and upper bearing (metal) (23) is fixed on the exhaust shaft bearing (20); Lower bearing (24) is fixed on the Intake shaft bearing (21), and three axles make the claw-type rotor and the pump housing (17) maintain the gap of 0.15～1.0mm through the support of bearing support, and the inner cavity of exhaust shaft bearing (20) is exhaust cavity (15); Exhaust cavity (15) communicates with relief opening (13); Exhaust shaft bearing (20) upper-end surface is connected with gear-box (22) through bolt, and the part that three axles extend to gear-box (22) is equipped with driving gear (4), left driven gear (12) and right driven gear (5); Gear-box (22) is connected with motor frame (16) through bolt; Motor (1) is through being bolted on the motor frame (16), and exhaust shaft bearing (20) lower end surface is connected with the pump housing (17) through bolt, and the inner claw-type rotor group of the pump housing (17) separates through dividing plate (9); Dividing plate (9) is provided with three axis holes; A pore is opened in axis hole below at right driven shaft (6), opens a pore in the axis hole top of left driven shaft (11), and two pores are symmetrically distributed up and down along the straight line that dividing plate (9) upper shaft hole belongs to; The inner chamber of Intake shaft bearing (21) is air-inlet cavity (14); On the Intake shaft bearing (21) at air-inlet cavity (14) top, have a suction port; Suction port is connected with air inlet pipeline, and bearing (ball) cover (18) is through being bolted on the Intake shaft bearing (21), and Intake shaft bearing (21) is connected with the pump housing (17) through bolt; Bearing (ball) cover (18) outside is provided with safety cover (19), and safety cover (19) is through being bolted on the Intake shaft bearing (21).
3. one kind three pawl type vacuum pumps; Be connected with main shaft (3) through coupling (2) by motor (1); Driving gear (4), left driven gear (12) are connected through key with right driven gear (5) and are assemblied in respectively on main shaft (3), left driven shaft (11) and the right driven shaft (6), it is characterized in that three axles are triangularly arranged; Middle main shaft (3) is driven by motor (1); In main shaft (3), all be fixed with the claw-type rotor of 4 grade of two pawl on left driven shaft (11) and the right driven shaft (6), claw-type rotor is separately fixed on three axles through the key connection; In main shaft (3); The shaft shoulder place at left side driven shaft (11) and right driven shaft (6) two ends all is equipped with bearing, and upper bearing (metal) (23) is fixed on the exhaust shaft bearing (20), and lower bearing (24) is fixed on the Intake shaft bearing (21); Three axles make the claw-type rotor and the pump housing (17) maintain the gap of 0.15～1.0mm through the support of bearing support; The inner cavity of exhaust shaft bearing (20) is exhaust cavity (15), and exhaust cavity (15) communicates with relief opening (13), and exhaust shaft bearing (20) upper-end surface is connected with gear-box (22) through bolt; The part that three axles extend to gear-box (22) is equipped with driving gear (4); Left side driven gear (12) and right driven gear (5), gear-box (22) is connected with motor frame (16) through bolt, and motor (1) is through being bolted on the motor frame (16); Exhaust shaft bearing (20) lower end surface is connected with the pump housing (17) through bolt; The inner claw-type rotor group of the pump housing (17) separates through dividing plate (9), and dividing plate (9) is provided with three axis holes, opens a pore in the axis hole below of right driven shaft (6); A pore is opened in axis hole top at left driven shaft (11), and two pores are symmetrically distributed up and down along the straight line that dividing plate (9) upper shaft hole belongs to; The inner chamber of Intake shaft bearing (21) is air-inlet cavity (14); On the Intake shaft bearing (21) at air-inlet cavity (14) top, have a suction port; Suction port is connected with air inlet pipeline, and bearing (ball) cover (18) is through being bolted on the Intake shaft bearing (21), and Intake shaft bearing (21) is connected with the pump housing (17) through bolt; Bearing (ball) cover (18) outside is provided with safety cover (19), and safety cover (19) is through being bolted on the Intake shaft bearing (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010565664A CN101985937B (en) | 2010-11-30 | 2010-11-30 | Triaxial claw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010565664A CN101985937B (en) | 2010-11-30 | 2010-11-30 | Triaxial claw vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101985937A CN101985937A (en) | 2011-03-16 |
| CN101985937B true CN101985937B (en) | 2012-10-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010565664A Active CN101985937B (en) | 2010-11-30 | 2010-11-30 | Triaxial claw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101985937B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101072855B1 (en) * | 2011-06-09 | 2011-10-14 | 김찬원 | Vacuum self-priming pump |
| CN103104496A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum pump water-cooling structure |
| CN107420306B8 (en) * | 2017-09-13 | 2021-10-08 | 上海伊莱茨真空技术有限公司 | Three-shaft modularized dry vacuum pump |
| CN110080976A (en) * | 2019-06-18 | 2019-08-02 | 河北农业大学 | A kind of butterfly twayblade wheel positive displacement pump |
| CN110594156B (en) | 2019-09-23 | 2021-05-25 | 兑通真空技术(上海)有限公司 | Driving structure of three-axis multistage roots pump |
| CN110500275B (en) | 2019-09-23 | 2021-03-16 | 兑通真空技术(上海)有限公司 | Pump housing structure of triaxial multistage roots pump |
| CN210629269U (en) | 2019-09-23 | 2020-05-26 | 兑通真空技术(上海)有限公司 | Motor connection transmission structure of roots pump |
| CN110685912A (en) | 2019-10-10 | 2020-01-14 | 兑通真空技术(上海)有限公司 | Structure for connecting multi-shaft multi-stage roots pump rotors |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB504385A (en) * | 1937-09-29 | 1939-04-25 | Fletcher & Winterbottom Ltd | Improvements in or relating to rotary blowers or compressors |
| EP0953771A1 (en) * | 1998-04-27 | 1999-11-03 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Single-stage and multi-stage roots pump |
| GB2417757A (en) * | 2004-09-02 | 2006-03-08 | Boc Group Plc | Vacuum pump with fewer rotors at exhaust stage |
| CN1862020A (en) * | 2005-05-10 | 2006-11-15 | 北京朗禾科技有限公司 | Paw type dry vacuum pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000161269A (en) * | 1998-11-27 | 2000-06-13 | Toyota Autom Loom Works Ltd | Roots pump and pump device |
-
2010
- 2010-11-30 CN CN201010565664A patent/CN101985937B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB504385A (en) * | 1937-09-29 | 1939-04-25 | Fletcher & Winterbottom Ltd | Improvements in or relating to rotary blowers or compressors |
| EP0953771A1 (en) * | 1998-04-27 | 1999-11-03 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Single-stage and multi-stage roots pump |
| GB2417757A (en) * | 2004-09-02 | 2006-03-08 | Boc Group Plc | Vacuum pump with fewer rotors at exhaust stage |
| CN1862020A (en) * | 2005-05-10 | 2006-11-15 | 北京朗禾科技有限公司 | Paw type dry vacuum pump |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2000-161269A 2000.06.13 |
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| Publication number | Publication date |
|---|---|
| CN101985937A (en) | 2011-03-16 |
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Address after: 110819 Heping Road, Heping District, Liaoning, Shenyang, Lane No. 11, No. 3 Applicant after: Northeastern University Applicant after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: 110819 Heping Road, Heping District, Liaoning, Shenyang, Lane No. 11, No. 3 Applicant before: Northeastern University Applicant before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
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