CN101985937A - Triaxial claw vacuum pump - Google Patents
Triaxial claw vacuum pump Download PDFInfo
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- CN101985937A CN101985937A CN 201010565664 CN201010565664A CN101985937A CN 101985937 A CN101985937 A CN 101985937A CN 201010565664 CN201010565664 CN 201010565664 CN 201010565664 A CN201010565664 A CN 201010565664A CN 101985937 A CN101985937 A CN 101985937A
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- claw
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- main shaft
- driven shaft
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Abstract
The invention relates to a vacuum pump, in particular to a triaxial claw vacuum pump. The vacuum pump comprises a motor, a main shaft, and a driven shaft, wherein the main shaft is provided with a driving gear; a driven gear meshed with the driving gear is arranged on the driven shaft; claw rotors meshed with each other are arranged on the main shaft and the driven shaft; the claw rotors are separated by a clapboard; and an assembly claw rotor and a driven shaft of the driven gear are arranged on the two sides of the main shaft. Not only the work efficiency and pumping efficiency of the pump are improved, but also the working stability of the pump is enhanced.
Description
Technical field
The present invention relates to a kind of vacuum pump, be specifically related to a kind of three pawl type vacuum pumps.
Background technique
Vacuum pump is one of processing technology key equipments such as semi-conductor industry chips, optical communication components and parts and flat panel display.Obtained using widely as the no oil molecule pump that obtains middle high vacuum, cryopump etc.But, the prime Roughing pump that matches with high vacuum pump in these dry types but is traditional oil seal type vacuum pump mostly, be to reduce oil pollution, between middle high vacuum pump and Roughing pump, be connected in series usually, but the method can not satisfy the requirement of vacuum environment cleanliness into cold-trap.And that present claw shape dry type vacuum pump is is two-axis, and a main shaft drives a driven shaft, and not only pumping efficiency is low, and dynamic balance performance is poor.
Summary of the invention
At the existing problem of present claw shape dry type vacuum pump, the invention provides a kind of three pawl type vacuum pumps, solution claw shape dry type vacuum pump pumping efficiency hangs down the problem with the dynamic balance performance difference.
Three pawl type vacuum pumps of the present invention, comprise motor, main shaft and driven shaft, be equipped with driving gear on the main shaft, the driven gear that is meshed with driving gear is assemblied on the driven shaft, intermeshing claw-type rotor is housed on main shaft and driven shaft, separate with dividing plate between the claw-type rotor group, main points are that described main shaft both sides are equipped with the driven shaft of an assembling claw-type rotor and driven gear.
The pawl number of described claw-type rotor is two pawls, four paws, six pawls or eight pawls.
The described main shaft and the line of centres of two driven shafts on same cross section are straight line or triangle.
Described claw-type rotor progression is 1 grade～6 grades.
When described claw-type rotor progression is 2 grades～6 grades, separate with dividing plate between the adjacent two-stage.
The beneficial effect of the present invention's outstanding feature and generation compared with prior art is: increased a driven shaft that is used to assemble claw-type rotor and driven gear in main shaft one side, the working efficiency and the pumping efficiency of pump have not only been improved, also strengthened pump work stability, vibration and noise when having reduced the pump running.
Description of drawings
Fig. 1 is a structural representation of the present invention;
The structural representation that Fig. 2 is triangularly arranged for the rotor cross-section line of centres;
Among the figure: 1 motor, 2 coupling, 3 main shafts, 4 driving gears, 5 right driven gears, 6 right driven shafts, 7 right driven rotors, 8 power rotors, 9 dividing plates, 10 left driven rotors, 11 left driven shafts, 12 left driven gears, 13 relief openings, 14 air-inlet cavitys, 15 exhaust cavitys, 16 motor framves, 17 pump housings, 18 bearing (ball) covers, 19 safety covers, 20 exhaust shaft bearings, 21 Intake shaft bearings, 22 gear-boxes, 23 upper bearing (metal)s, 24 lower bearings.
Embodiment
The present invention will be further described below in conjunction with accompanying drawing.
A kind of three pawl type vacuum pumps of example 1. the present invention, be connected with main shaft 3 by coupling 2 by motor 1, driving gear 4, left side driven gear 12 is connected by key with right driven gear 5 and is assemblied in respectively on main shaft 3, left driven shaft 11 and the right driven shaft 6, three axles are and are arranged in parallel, middle main shaft 3 is driven by motor 1, and under three synchromesh gears drove, three axles were done reverse each other rotatablely moving.At main shaft 3, all be fixed with the claw-type rotor of 4 grade of two pawl on left driven shaft 11 and the right driven shaft 6, claw-type rotor is separately fixed on three axles by the key connection; At main shaft 3, the shaft shoulder place at left side driven shaft 11 and right driven shaft 6 two ends all is equipped with bearing, upper bearing (metal) 23 is fixed on the exhaust shaft bearing 20, lower bearing 24 is fixed on the Intake shaft bearing 21, the supporting effect by bearing support of three axles makes claw-type rotor and the pump housing 17 contactless, maintain the gap of 0.15～1.0mm, the cavity of exhaust shaft bearing 20 inside is an exhaust cavity 15, exhaust cavity 15 communicates with relief opening 13, exhaust shaft bearing 20 upper-end surfaces are connected with gear-box 22 by bolt, the part that three axles extend to gear-box 22 is equipped with driving gear 4, left side driven gear 12 and right driven gear 5, gear-box 22 is connected with motor frame 16 by bolt, motor 1 is by being bolted on the motor frame 16, exhaust shaft bearing 20 lower end surfaces are connected with the pump housing 17 by bolt, the claw-type rotor group of the pump housing 17 inside separates by dividing plate 9, dividing plate 9 is provided with three axis holes, below the axis hole of right driven shaft 6, open a pore, open a pore above the axis hole of left driven shaft 11, two pores are symmetrically distributed up and down along the straight line at dividing plate 9 upper shaft hole places.The chamber of Intake shaft bearing 21 inside is an air-inlet cavity 14; on the Intake shaft bearing 21 at air-inlet cavity 14 tops, have a suction port; suction port is connected with air inlet pipeline; bearing (ball) cover 18 is by being bolted on the Intake shaft bearing 21; Intake shaft bearing 21 is connected with the pump housing 17 by bolt; bearing (ball) cover 18 outsides are provided with safety cover 19, and safety cover 19 is by being bolted on the Intake shaft bearing 21.
Working procedure of the present invention is: provide power source by motor 1, thereby drive main shaft 3 rotations.Main shaft 3 connects driving gear 4 by key, drives right driven gear 5 and 12 rotations of left driven gear.Right driven gear 5 is connected with left driven shaft 11 with right driven shaft 6 respectively with left driven gear 12, drives the rotation of two driven shafts.So just, realized power rotor 8, the synchronous rotation of right driven rotor 7 and left driven rotor 10.Contactless engagement between rotor forms the space of sealing together with pump housing inwall, thus the air-breathing and exhaust of property performance period.
Separate with dividing plate 9 between the rotors at different levels in the pump.The gas of discharging that interacts between rotor and rotor, rotor and the pump housing inwall is discharged by the pore on the dividing plate 9.Under rotor rotation effects at different levels, realize the transport process of gas.Bigger pumping speed and the compression ratio that has improved pump reduced amount of parts, and rate of fault is reduced, and reduced cost.
Example 2. its structures, connection is identical with embodiment 1 with working procedure, and difference is main shaft 3, all is fixed with the claw-type rotor of 6 grades of four paws on left driven shaft 11 and the right driven shaft 6.
Example 3. its working procedure are identical with embodiment 1, and difference is main shaft 3, and left driven shaft 11 and right driven shaft 6 are triangularly arranged.
Claims (5)
1. one kind three pawl type vacuum pumps, comprise motor, main shaft and driven shaft, be equipped with driving gear on the main shaft, the driven gear that is meshed with driving gear is assemblied on the driven shaft, intermeshing claw-type rotor is housed on main shaft and driven shaft, separate with dividing plate between the claw-type rotor group, it is characterized in that described main shaft both sides are equipped with the driven shaft of an assembling claw-type rotor and driven gear.
2. a kind of three pawl type vacuum pumps as claimed in claim 1, the pawl number that it is characterized in that described claw-type rotor is two pawls, four paws, six pawls or eight pawls.
3. a kind of three pawl type vacuum pumps as claimed in claim 1 is characterized in that the described main shaft and the line of centres of two driven shafts on same cross section are straight line or triangle.
4. the described a kind of three pawl type vacuum pumps of claim 1 is characterized in that described claw-type rotor progression is 1 grade～6 grades.
5. the described a kind of three pawl type vacuum pumps of claim 4 when it is characterized in that described claw-type rotor progression is 2 grades～6 grades, separate with dividing plate between the adjacent two-stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010565664A CN101985937B (en) | 2010-11-30 | 2010-11-30 | Triaxial claw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010565664A CN101985937B (en) | 2010-11-30 | 2010-11-30 | Triaxial claw vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101985937A true CN101985937A (en) | 2011-03-16 |
| CN101985937B CN101985937B (en) | 2012-10-17 |
Family
ID=43710322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010565664A Active CN101985937B (en) | 2010-11-30 | 2010-11-30 | Triaxial claw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101985937B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102817853A (en) * | 2011-06-09 | 2012-12-12 | 金赞元 | Vacuum self-priming pump |
| CN103104496A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum pump water-cooling structure |
| CN107420306A (en) * | 2017-09-13 | 2017-12-01 | 荣易 | Three axle module dry vacuum pumps |
| CN110080976A (en) * | 2019-06-18 | 2019-08-02 | 河北农业大学 | A kind of butterfly twayblade wheel positive displacement pump |
| EP3795834A1 (en) * | 2019-09-23 | 2021-03-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Transmission structure of motor connection of roots pump |
| US11339783B2 (en) | 2019-09-23 | 2022-05-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Pump housing structure of three-axis multi-stage Roots pump |
| US11441564B2 (en) | 2019-09-23 | 2022-09-13 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Driving structure of three-axis multi-stage roots pump |
| US11608829B2 (en) | 2019-10-10 | 2023-03-21 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Structure of rotor connection of multi-axial multi-stage roots pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB504385A (en) * | 1937-09-29 | 1939-04-25 | Fletcher & Winterbottom Ltd | Improvements in or relating to rotary blowers or compressors |
| EP0953771A1 (en) * | 1998-04-27 | 1999-11-03 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Single-stage and multi-stage roots pump |
| JP2000161269A (en) * | 1998-11-27 | 2000-06-13 | Toyota Autom Loom Works Ltd | Roots pump and pump device |
| GB2417757A (en) * | 2004-09-02 | 2006-03-08 | Boc Group Plc | Vacuum pump with fewer rotors at exhaust stage |
| CN1862020A (en) * | 2005-05-10 | 2006-11-15 | 北京朗禾科技有限公司 | Paw type dry vacuum pump |
-
2010
- 2010-11-30 CN CN201010565664A patent/CN101985937B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB504385A (en) * | 1937-09-29 | 1939-04-25 | Fletcher & Winterbottom Ltd | Improvements in or relating to rotary blowers or compressors |
| EP0953771A1 (en) * | 1998-04-27 | 1999-11-03 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Single-stage and multi-stage roots pump |
| JP2000161269A (en) * | 1998-11-27 | 2000-06-13 | Toyota Autom Loom Works Ltd | Roots pump and pump device |
| GB2417757A (en) * | 2004-09-02 | 2006-03-08 | Boc Group Plc | Vacuum pump with fewer rotors at exhaust stage |
| CN1862020A (en) * | 2005-05-10 | 2006-11-15 | 北京朗禾科技有限公司 | Paw type dry vacuum pump |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102817853A (en) * | 2011-06-09 | 2012-12-12 | 金赞元 | Vacuum self-priming pump |
| CN102817853B (en) * | 2011-06-09 | 2015-01-07 | 金赞元 | Vacuum self-priming pump |
| CN103104496A (en) * | 2011-11-11 | 2013-05-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Vacuum pump water-cooling structure |
| CN107420306A (en) * | 2017-09-13 | 2017-12-01 | 荣易 | Three axle module dry vacuum pumps |
| CN107420306B (en) * | 2017-09-13 | 2019-02-26 | 兑通真空技术(上海)有限公司 | Three axle module dry vacuum pumps |
| CN107420306B8 (en) * | 2017-09-13 | 2021-10-08 | 上海伊莱茨真空技术有限公司 | Three-shaft modularized dry vacuum pump |
| CN110080976A (en) * | 2019-06-18 | 2019-08-02 | 河北农业大学 | A kind of butterfly twayblade wheel positive displacement pump |
| EP3795834A1 (en) * | 2019-09-23 | 2021-03-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Transmission structure of motor connection of roots pump |
| US11320036B2 (en) | 2019-09-23 | 2022-05-03 | Ovg Vacuum Technology (Shanghai) Co., Ltd | Transmission structure of motor connection of roots pump |
| US11339783B2 (en) | 2019-09-23 | 2022-05-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Pump housing structure of three-axis multi-stage Roots pump |
| US11441564B2 (en) | 2019-09-23 | 2022-09-13 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Driving structure of three-axis multi-stage roots pump |
| US11608829B2 (en) | 2019-10-10 | 2023-03-21 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Structure of rotor connection of multi-axial multi-stage roots pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101985937B (en) | 2012-10-17 |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| C53 | Correction of patent for invention or patent application | ||
| CB02 | Change of applicant information |
Address after: 110819 Heping Road, Heping District, Liaoning, Shenyang, Lane No. 11, No. 3 Applicant after: Northeastern University Applicant after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: 110819 Heping Road, Heping District, Liaoning, Shenyang, Lane No. 11, No. 3 Applicant before: Northeastern University Applicant before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |