CN103104496A - Vacuum pump water-cooling structure - Google Patents
Vacuum pump water-cooling structure Download PDFInfo
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- CN103104496A CN103104496A CN2011103583569A CN201110358356A CN103104496A CN 103104496 A CN103104496 A CN 103104496A CN 2011103583569 A CN2011103583569 A CN 2011103583569A CN 201110358356 A CN201110358356 A CN 201110358356A CN 103104496 A CN103104496 A CN 103104496A
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Abstract
The invention belongs to the technical field of vacuum pumps and in particular relates to a vacuum pump water-cooling structure. The vacuum pump water-cooling structure comprises an air inlet cavity, a multi-stage cavity and an air outlet cavity which are sequentially connected, wherein water flow channels are formed in the air inlet cavity, the multi-stage cavity and the air outlet cavity; the water flow channels on adjacent cavities are communicated with each other; a water inlets of the water flow channels are formed in the air inlet cavity; and a water return port is formed in the air outlet cavity. The contact area between cooling water and the pump body is greatly improved, so that a cooling effect is enhanced. The water flow channels in the cavity are cast without being processed, water pipes and fixed parts are saved, and the cost is reduced; and meanwhile, an artificial coil is not required, the labor time is reduced, and the efficiency is improved.
Description
Technical field
The invention belongs to the vacuum pump technology field, specifically a kind of water-cooling structure for vacuum pump.
Background technique
Dry vacuum pump is the positive displacement vacuum pump that seals without oils (or liquid) in a kind of pump.Owing to not needing working liquid body in the dry vacuum pump pump chamber, therefore, be applicable to the technique occasion that semicon industry, chemical industry, pharmaceuticals industry and food service industry etc. need the oil-free vacuum environment.
Along with being surging forward of semi-conductor industry, electronics industry, more and more, more and more stricter for the requirement of vacuum environment.Owing to being easy to return oil in vacuum chamber by common oil sealing mechanical pump, vacuum system that diffusion pump forms, the oil molecule in vacuum chamber can deposit on the silicon chip crystal, makes silicon crystal become waste product.So the application of such vacuum system in semi-conductor industry, electronics industry is restricted.On the contrary, do not come lubrication and seal because dry vacuum pump does not need lubricant oil, accomplished to pollute without oil vapor, and insensitive to the dust and the water vapour that contain in pumped gas.So the vacuum system that is comprised of dry vacuum pump is widely used, and played the effect that promotes in the evolution of semi-conductor industry, electronics industry.
Due in semiconductor technology, the gas of use is all often higher temperature.High-temperature gas enters pump body through reaction chamber, discharges finally by the relief opening of pump.Therefore gas has been passed to dried pump with the part heat, due to multi-stage dry pump self also continuous pressurized gas, produces amount of heat simultaneously, and these heats also have a big chunk to be transmitted on the pump housing.Temperature through many-sided heat conduction dried pump self is just higher, makes the component of pump body because high temperature is out of shape, and this life-span and personal security to pump self all threatens.Thereby therefore become problem demanding prompt solution by the cooling safety that reaches protection pump self and user of service to the pump housing.
The content of invention
For the problems referred to above, the object of the present invention is to provide a kind of water-cooling structure for vacuum pump.This water-cooling structure for vacuum pump has greatly increased the area of contact of cooling water and the pump housing, thereby has strengthened cooling effect.
In order to achieve the above object, the present invention is by the following technical solutions:
A kind of water-cooling structure for vacuum pump comprises the air inlet cavity, multistage cavity and the exhaust cavity that are connected successively, is equipped with flow channel on described air inlet cavity, multistage cavity and exhaust cavity, and the flow channel on each adjacent cavity communicates; The water intake of described flow channel is located on the air inlet cavity, and backwater mouth is located on the exhaust cavity.
The bottom of described air inlet cavity is provided with discharge opening.
Described water intake is located at the bottom of air inlet cavity.
Described backwater mouth is located at the top of exhaust cavity.
Described flow channel on each cavity around a week.
Described multistage cavity comprises successively the one-level cavity that is connected, one-level dividing plate, secondary cavity, three grades of cavitys, level Four cavity.
On described one-level cavity, one-level dividing plate, secondary cavity, three grades of cavitys, level Four cavity, the two-port place of flow channel is equipped with groove.
Be provided with the O RunddichtringO in described groove.
Described flow channel and each cavity are integrated casting.
The present invention has advantages of following:
The present invention is cooling with respect to traditional coil pipe, has greatly increased the area of contact of cooling water and the pump housing, thereby has strengthened cooling effect.In cavity, flow channel is completed for casting and be need not processing, has saved water pipe and retaining element, has saved cost, need not simultaneously artificial coil pipe, has reduced working time, increases efficient.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is the left view of Fig. 1;
Fig. 3 is the plan view of Fig. 1;
Fig. 4 is the A-A sectional view of Fig. 3;
Wherein: 1 is the air inlet cavity, and 2 is the one-level cavity, and 3 is the one-level dividing plate, and 4 is the secondary cavity, and 5 is three grades of cavitys, and 6 is the level Four cavity, and 7 are the exhaust cavity, and 8 is discharge opening, and 9 is flow channel, and 10 is water intake, and 11 is backwater mouth.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Fig. 1～4, the present invention includes successively the air inlet cavity 1, multistage cavity and the exhaust cavity 7 that are connected, be equipped with flow channel 9 on air inlet cavity 1, multistage cavity and exhaust cavity 7, flow channel 9 on each cavity around a week, but and S shape around, strengthen film-cooled heat.Flow channel 9 on each adjacent cavity communicates; The water intake 10 of flow channel 9 is located at the bottom of air inlet cavity 1, and backwater mouth 11 is located at the top of exhaust cavity 7.The foot of air inlet cavity 1 is provided with discharge opening 8.
Described multistage cavity comprises successively the one-level cavity 2 that connects, one-level dividing plate 3, secondary cavity 4, three grades of cavitys 5, level Four cavity 6.The two-port place of the flow channel 9 on one-level cavity 2, one-level dividing plate 3, secondary cavity 4, three grades of cavitys 5, level Four cavity 6 is equipped with groove, i.e. seal groove.Be provided with 0 RunddichtringO in described groove and carry out static seal, then compress by the connection between each cavity, effectively seal.
Flow channel 9 in each cavity is integrated casting with each cavity and completes, and need not processing, has saved water pipe and retaining element, has saved cost, need not simultaneously artificial coil pipe, has reduced working time, increases efficient.
Working procedure of the present invention is:
Cooling water enters the interior flow channel 9 of air inlet cavity 1 by the water intake 10 on air inlet cavity 1, realize the cooling of pump body via the flow channel 9 of one-level cavity 2, one-level dividing plate 3, secondary cavity 4, three grades of cavitys 5, level Four cavity 6, exhaust cavity 7 again, the backwater mouth 11 from the exhaust cavity 7 is discharged at last.If with the cooling water emptying in each cavity, discharge from discharge opening 8.
Claims (9)
1. water-cooling structure for vacuum pump, it is characterized in that: comprise the air inlet cavity (1), multistage cavity and the exhaust cavity (7) that are connected successively, be equipped with flow channel (9) on described air inlet cavity (1), multistage cavity and exhaust cavity (7), the flow channel (9) on each adjacent cavity communicates; The water intake (10) of described flow channel (9) is located on air inlet cavity (1), and backwater mouth (11) is located on exhaust cavity (7).
2. by water-cooling structure for vacuum pump claimed in claim 1, it is characterized in that: the bottom of described air inlet cavity (1) is provided with discharge opening (8).
3. by water-cooling structure for vacuum pump claimed in claim 1, it is characterized in that: described water intake (10) is located at the bottom of air inlet cavity (1).
4. by water-cooling structure for vacuum pump claimed in claim 1, it is characterized in that: described backwater mouth (11) is located at the top of exhaust cavity (7).
5. by water-cooling structure for vacuum pump claimed in claim 1, it is characterized in that: described flow channel (9) on each cavity around a week.
6. by water-cooling structure for vacuum pump claimed in claim 1, it is characterized in that: described multistage cavity comprises one-level cavity (2), one-level dividing plate (3), secondary cavity (4), three grades of cavitys (5), the level Four cavity (6) that is connected successively.
7. by water-cooling structure for vacuum pump claimed in claim 6, it is characterized in that: the two-port place of described one-level cavity (2), one-level dividing plate (3), secondary cavity (4), three grades of cavitys (5), the upper flow channel (9) of level Four cavity (6) is equipped with groove.
8. by water-cooling structure for vacuum pump claimed in claim 7, it is characterized in that: be provided with the O RunddichtringO in described groove.
9. by water-cooling structure for vacuum pump claimed in claim 1, it is characterized in that: described flow channel (9) is integrated casting with each cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103583569A CN103104496A (en) | 2011-11-11 | 2011-11-11 | Vacuum pump water-cooling structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103583569A CN103104496A (en) | 2011-11-11 | 2011-11-11 | Vacuum pump water-cooling structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103104496A true CN103104496A (en) | 2013-05-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103583569A Pending CN103104496A (en) | 2011-11-11 | 2011-11-11 | Vacuum pump water-cooling structure |
Country Status (1)
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| CN (1) | CN103104496A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4789314A (en) * | 1986-12-18 | 1988-12-06 | Unozawa-Gumi Iron Works, Ltd. | Multi-section roots vacuum pump of reverse flow cooling type with internal flow division arrangement |
| US4995796A (en) * | 1988-09-05 | 1991-02-26 | Unozawa - Gumi Iron Works, Ltd. | Multi-section roots vacuum pump of reverse flow cooling type |
| JP2001020884A (en) * | 1999-07-05 | 2001-01-23 | Unozawa Gumi Iron Works Ltd | Rotary type multistage vacuum pump having gas passage having outer wall formed by coolers |
| CN2503232Y (en) * | 2001-07-13 | 2002-07-31 | 王连智 | High-pressure-resistant multi-stage claw-type rotor vacuum pump |
| CN101382137A (en) * | 2007-09-07 | 2009-03-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Multi-stage roots dry vacuum pump discharging directly into atmosphere |
| CN101985937A (en) * | 2010-11-30 | 2011-03-16 | 东北大学 | Triaxial claw vacuum pump |
| CN202326256U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Water-cooling structure for vacuum pump |
-
2011
- 2011-11-11 CN CN2011103583569A patent/CN103104496A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4789314A (en) * | 1986-12-18 | 1988-12-06 | Unozawa-Gumi Iron Works, Ltd. | Multi-section roots vacuum pump of reverse flow cooling type with internal flow division arrangement |
| US4995796A (en) * | 1988-09-05 | 1991-02-26 | Unozawa - Gumi Iron Works, Ltd. | Multi-section roots vacuum pump of reverse flow cooling type |
| JP2001020884A (en) * | 1999-07-05 | 2001-01-23 | Unozawa Gumi Iron Works Ltd | Rotary type multistage vacuum pump having gas passage having outer wall formed by coolers |
| CN2503232Y (en) * | 2001-07-13 | 2002-07-31 | 王连智 | High-pressure-resistant multi-stage claw-type rotor vacuum pump |
| CN101382137A (en) * | 2007-09-07 | 2009-03-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Multi-stage roots dry vacuum pump discharging directly into atmosphere |
| CN101985937A (en) * | 2010-11-30 | 2011-03-16 | 东北大学 | Triaxial claw vacuum pump |
| CN202326256U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Water-cooling structure for vacuum pump |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130515 |