CN101630086A - Aligning device - Google Patents
Aligning device Download PDFInfo
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- CN101630086A CN101630086A CN200910164730A CN200910164730A CN101630086A CN 101630086 A CN101630086 A CN 101630086A CN 200910164730 A CN200910164730 A CN 200910164730A CN 200910164730 A CN200910164730 A CN 200910164730A CN 101630086 A CN101630086 A CN 101630086A
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- microscope carrier
- connecting board
- cross
- alignment
- aligning
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
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- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides an aligning device capable of integrally miniaturizing and lightening the device, reducing the load for positioning alignment to the workpiece and reducing the power consumption. The aligning device 30 has four aligning carrier platforms 31 which are separated from each other and four aligning workbench AT supporting panels provided on respective one of corresponding aligning carrier platforms 31; the aligning workbenches AT located in four positions are interlocked through connecting rods 40a, 40b, 41a, and 41b; the panels supported by the aligning workbenches AT are subjected to left rotation movement, right rotation movement, right side parallel movement, left side parallel movement, rear side parallel movement or front side parallel movement in correspondence with a position deviation such that the position deviation of the panel with respect to a light shielding cover becomes zero.
Description
Technical field
The present invention relates to a kind of alignment device.
Background technology
Liquid crystal display panel, surface plates such as plasma panel plate are generally bonding and form by 2 substrates.For example, in liquid crystal display panel, be furnished with the device substrate that thin film transistor (TFT) is formed with rectangular layout and be formed with photomask and the opposing substrate of color filter etc. with extremely narrow septal surface opposite.Then, when two substrates is superimposed, between these two substrates, in the field that encapsulant surrounded of involved light-cured resin, enclose liquid crystal.Then,, two substrates is bonding across light shield by making the sealing material cured to the encapsulant irradiation ultraviolet radiation, make liquid crystal display panel.The existing various alignment devices that use when carrying out the position alignment of light shield and substrate are by motion (for example, the open communique spy of Jap.P. opens 2002-220944).
Generally, this alignment device possesses: placing to enclose has the also microscope carrier of 2 overlapping substrates of liquid crystal; With the X of microscope carrier on the placed side, the travel mechanism that Y direction and sense of rotation move; The shade holding member that keeps light shield in the top position of microscope carrier.Then, make 2 the overlapping substrates that are placed on the microscope carrier face-to-face with the light shield that keeps by the shade holding member.Then, travel mechanism carried out drive controlling so that microscope carrier along X, Y direction and sense of rotation move, and that is to say, 2 overlapping substrates are relatively moved for light shield, to carry out high-precision position alignment.
Yet, because travel mechanism relatively moves 2 substrates (liquid crystal display panel) by moving the microscope carrier that is placed with 2 substrates (liquid crystal display panel) for light shield, and carry out position alignment, so the weight of mobile 2 substrates (liquid crystal display panel) of having to adds the general assembly (TW) of microscope carrier weight.Therefore, travel mechanism requires to have the formation of the high mechanical properties of considering microscope carrier weight, thereby causes the maximization of device and expensive the time, and the power consumption that also can cause being used to driving travel mechanism increases.And, being accompanied by the maximization of display panel in recent years, this more and more becomes problem.
Summary of the invention
The present invention proposes in order to solve above-mentioned problem, and its purpose is, provides and can will install all miniaturization ands, and can reduce the load that workpiece is carried out position alignment, can also reduce the alignment device of power consumption.
In order to achieve the above object, alignment device of the present invention be placed on pedestal above, workpiece is moved to a direction and with perpendicular other directions of a described direction, and it is horizontally rotated, to carry out the position alignment of described workpiece.This alignment device possesses: 2 the 1st movable blocks, it be respectively being located at along the form that a described direction come and go to move, be positioned described pedestal top, form a pair of vertex position on the diagonal line that is in a side in positive square or rectangular 4 summits; 2 the 2nd movable blocks, it be respectively being located at along the form that described other directions come and go to move, and is in a pair of vertex position on the opposing party's the diagonal line in described 4 summits; 2 the 1st drive divisions, it makes corresponding with it in described the 1st movable block 1 to come and go along a described direction and to move respectively; 2 the 2nd drive divisions, it makes corresponding with it in described the 2nd movable block 1 to come and go along described other directions and to move respectively; 2 the 1st rotary tables, its respectively with can horizontally rotate ground supported the time also can along described other directions come and go the form that moves be located at described correspondence the 1st movable block above; 2 the 2nd rotary tables, its respectively with can horizontally rotate ground supported the time also can along a described direction come and go the form that moves be located at described correspondence the 2nd movable block above; 2 the 1st coupling components, it connects described 2 the 1st rotary tables and described 2 the 2nd rotary tables on a described direction; 2 the 2nd coupling components, it connects described 2 the 1st rotary tables and described 2 the 2nd rotary tables on described other directions; 4 alignment work platforms, described workpiece is supported in its cooperation, and is located at respectively on one corresponding with it in described the 1st rotary table and described the 2nd rotary table.
Based on the present invention, can will install all miniaturization ands, and can reduce the load that workpiece is carried out position alignment, can also reduce power consumption.
Description of drawings
Fig. 1 is the synoptic diagram that is used to illustrate the ultraviolet lamp of present embodiment.
Fig. 2 is the summary planimetric map of this ultraviolet lamp.
Fig. 3 is the planimetric map that shows the installment state of alignment device.
Fig. 4 is the front view (FV) that constitutes the aligning microscope carrier of alignment device.
Fig. 5 is the planimetric map of this aligning microscope carrier.
Fig. 6 is the square circuit diagram that is used to illustrate the electric formation of ultraviolet lamp.
Symbol description
The 1-ultraviolet lamp, 2-microscope carrier portion, 3-illumination part, the 5-lamp house, 6-UV-lamp, 7-shade holding member, the 8-light shield, 13-back-up block, 15-ball screw, the 16-elevating bracket, 19-is holding member at interval, the 20-cross-connecting board, 25-joins seat, and 26-joins pin, the 30-alignment device, 31-aims at microscope carrier, the left front aligning microscope carrier of 31a-, the right front aligning microscope carrier of 31b-, the right back aligning microscope carrier of 31c-, the left back aligning microscope carrier of 31d-, 32-pedestal, the 33-ball screw, 34-movable block, 35-swivel plate, the 36-guide member, worktable, 39-secure component are placed in the 37-rotation, 40a-front side X-axis coupling link, 40b-rear side X-axis coupling link, 41a-left side Y-axis coupling link, 41b-right side Y-axis coupling link, 61-control device, 62-camera head, 66-floats and uses solenoid valve, 68-cylinder solenoid valve, 70-absorption solenoid valve, AT-alignment work platform, P-liquid crystal display panel, M1-lift motor, M2-moves motor, SL-lifting cylinder, ST-lifting microscope carrier.
Embodiment
Below, describe with reference to the embodiment of accompanying drawing the light irradiation device (ultraviolet lamp) that has been suitable for alignment device of the present invention.The ultraviolet lamp of present embodiment is a kind of light irradiation device, is used for across the encapsulant irradiation ultraviolet radiation of light shield between the two substrates that is formed at the liquid crystal display panel that is formed by 2 base plate bondings, thereby makes the bonding two substrates of sealing material cured.
As shown in Figure 1, be arranged on ground ultraviolet lamp 1 and possess microscope carrier portion 2 at its downside, side possesses illumination part 3 thereon.Placing liquid crystal display panel (below, the be called panel) P of the workpiece before solidifying as encapsulant in the microscope carrier portion 2, this microscope carrier portion 2 to illumination part 3 guiding that are arranged on the top, carries out position alignment with panel P.
Be provided with the lamp house of being represented by double dot dash line 5 at the illumination part 3 that is arranged in above the microscope carrier portion 2, this lamp house 5 is not fixed by giving illustrated supporting units support.In this lamp house 5, a plurality of UV-lamp 6 are installed with the form of irradiation ultraviolet radiation downwards.
Downside at lamp house 5 is furnished with shade holding member 7 tabular and that have light transmission, and absorption maintains light shield 8 below this shade holding member 7.Some is blocked the encapsulant irradiation that only forms among the panel P on being placed on microscope carrier portion 2 ultraviolet ray of penetrating from UV-lamp 6 by light shield 8.
The framework 11 of the cubic shaped as frame of microscope carrier portion 2 is provided with and is fixed on the ground 12.As shown in Figure 1, in left side that constitutes framework 11 and the inboard of right side frame 11a, 11b, fixedly installing a pair of back-up block 13 in front and back respectively.In this manual, fore-and-aft direction be meant the Y direction of arrow shown in Fig. 2 and with the anti-Y direction of arrow.
Back-up block 13 has sway brace 14 at both ends up and down, and this sway brace 14 inwards stretches out formation.Between a pair of up and down sway brace 14, rotatably be supported with ball screw 15.Downside at following side support arm 14 is set with lift motor M1, drives connecting ball screw 15 on its turning axle.So the ball screw 15 that is provided with on each back-up block 13 is transferred positive and negative rotation based on the positive and reverse return of each lift motor M1.
Inboard at the framework 11 of cubic shaped as frame is provided with the elevating bracket 16 as cubic shaped as frame base.Elevating bracket 16 is formed by the corrosion resistant plate of for example square shape, runs through this a plurality of downside bullports 17 equally spaced being formed with along the vertical direction (Z direction) on this seat on left and right directions (the anti-X direction of arrow and the X direction of arrow) and fore-and-aft direction (the anti-Y direction of arrow and the Y direction of arrow).Stretch out in the left and right side of elevating bracket 16 be formed with before and after a pair of connection tab 18.The a pair of connection tab 18 in the front and back that form on the face of the left and right sides is screwed together in respectively, rotatably is supported on the ball screw 15 on the described back-up block 13 (with reference to Fig. 2).
So by the ball screw 15 on each back-up block 13 of positive and negative rotation, elevating bracket 16 will move up and down.In addition, in the present embodiment, when each lift motor M1 was just changeing, elevating bracket 16 moved up (rising), and during each lift motor M1 counter-rotating, elevating bracket 16 moves down (decline).In the present embodiment, back-up block 13, ball screw 15 and lift motor M1 constitute the 1st lifting unit.
On elevating bracket 16 16a be set with at interval holding member 19 everywhere, client link is fixed with cross-connecting board 20 on this interval holding member 19.So cross-connecting board 20 and elevating bracket 16 move up and down together.Cross-connecting board 20 is the corrosion resistant plate of square shape for example, is arranged in parallel across interval holding member 19 and elevating bracket 16.As shown in Figure 2, the position relative with each the downside bullport 17 that is formed on elevating bracket 16 on cross-connecting board 20 is formed with along the vertical direction the upside bullport 21 that (Z direction) runs through cross-connecting board 20 respectively.
And, as shown in Figure 4, be provided with nozzle bore 22 with uniformly-spaced (spacing of about 300mm) on the cross-connecting board 20.Nozzle bore 22 will spray from the air that the air leading-in conduit below being arranged in cross-connecting board 20 23 is sent here, makes the panel P that is placed on the cross-connecting board 20 float (present embodiment is 0.3mm).Nozzle bore 22 and air leading-in conduit 23 are examples that workpiece that the panel P as workpiece is floated floats mechanism.
In addition, in the present embodiment, elevating bracket 16 (cross-connecting board 20) constitutes, cross-connecting board 20 is moved upward near the lower position (being called aligned position) of the light shield 8 that is located on the illumination part 3, then move to downwards the handing-over seat 25 that is arranged on elevating bracket 16 downsides upper side position (being called position of readiness) near.
The handing-over seat 25 (holder) that is arranged in elevating bracket 16 downsides is supported and fixed on the framework 11.Handing-over seat 25 be the working plate of square shape for example, erects in the above a plurality of handing-over pins 26 are being set, and these handing-over sell 26 respectively through being formed on a pair of upside on elevating bracket 16 and the cross-connecting board 20, corresponding and downside bullport 17,21.Each joins bolt 26 and moves up and down based on elevating bracket 16 (cross-connecting board 20) that 20a haunts above cross-connecting board 20.
In detail, at elevating bracket 16 (cross-connecting board 20) when being in position of readiness, 20a above cross-connecting board 20 is outstanding upward on the top of each handing-over pin 26, and when being in aligned position, extract downwards from the upside bullport 21 of cross-connecting board 20 on the top of each handing-over pin 26 at elevating bracket 16 (cross-connecting board 20).
Be in position of readiness at elevating bracket 16 (cross-connecting board 20), when 20a is outstanding upward above cross-connecting board 20 on the top of each handing-over pin 26, on the top of this handing-over pin 26, place panel 26.Then, elevating bracket 16 (cross-connecting board 20) is moved upward, the submerge upside bullport 21 of cross-connecting board 20 of the top one of each handing-over pin 26, the panel P that is placed on the handing-over pin 26 joins with regard to being placed on the cross-connecting board 20.
Elevating bracket 16 (cross-connecting board 20) is when further being moved upwards up to aligned position, be handed off to panel P on the cross-connecting board 20 be disposed in and be located on the illumination part 3 light shield 8 in opposite directions and adjoining position.
In addition, elevating bracket 16 (cross-connecting board 20) from aligned position when position of readiness moves down, the top one of each handing-over pin 26 is outstanding upward from the upside bullport 21 of cross-connecting board 20 in the way that it moves down, and the top panel P that is placed on cross-connecting board 20 joins with regard to being placed on the handing-over pin 26.Then, the elevating bracket 16 (cross-connecting board 20) that panel P is handed off on the handing-over pin 26 is moved down into position of readiness and stops handing-over action that to wait for next time.
Between elevating bracket 16 and cross-connecting board 20, be provided with alignment device 30.As shown in Figure 3, alignment device 30 has 4 aligning microscope carriers 31.Each is aimed on the top 16a that microscope carrier 31 is fixedly installed on elevating bracket 16.In addition, in Fig. 3, for convenience of explanation, the downside bullport 17 and the interval holding member 19 that are formed on the elevating bracket 16 have been omitted.
4 aligning microscope carriers 31 are with from the equidistant arranged in form of the center of elevating bracket 16 Po.For example, 4 aligning microscope carriers 31 are with the arranged in form of the center Po that surrounds elevating bracket 16, and becoming just tetragonal arranged in form at this tetragonal each vertex position during 31 connections of adjacent aligning microscope carrier.
In addition, specific in this manual when respectively aiming at microscope carrier 31 and describe, for convenience of explanation, the aligning microscope carrier 31 of being located at elevating bracket 16 front left side is called front left side aims at microscope carrier 31a, the aligning microscope carrier 31 of being located at elevating bracket 16 forward right side is called right front aligning microscope carrier 31b.In addition, the aligning microscope carrier 31 of being located at elevating bracket 16 right lateral side is called right back aligning microscope carrier 31c, the aligning microscope carrier 31 of being located at the left rear side of elevating bracket 16 is called left back aligning microscope carrier 31d.
So, right front aligning microscope carrier 31b and left back aligning microscope carrier 31d are arranged in equidistant position on the diagonal line across the center of elevating bracket 16 Po, and left front aligning microscope carrier 31a and right back aligning microscope carrier 31c are arranged in equidistant position on the diagonal line across the center of elevating bracket 16 Po.
As shown in Figure 4, each is aimed at microscope carrier 31 and has pedestal 32 on the top 16a that is packed in elevating bracket 16, is rotatably supporting ball screw 33 on this pedestal 32.The ball screw 33 that rotatably supports relative to pedestal 32 is based on being fixedly installed on the driving of moving motor M2 on the pedestal 32 and positive and negative rotation.
At this, the ball screw 33 that is located on the pedestal 32 of left front aligning microscope carrier 31a arranges that along the X direction of arrow as shown in Figure 3, the mobile motor M2 that is arranged in pedestal 32 left sides makes ball screw 33 positive and negative rotations.The ball screw 33 that is located on the pedestal 32 of right front aligning microscope carrier 31b arranges that along the Y direction of arrow the mobile motor M2 that is arranged in pedestal 32 front sides makes 33 despinings of ball bolt.
The ball screw 33 that is located on the pedestal 32 of right back aligning microscope carrier 31c arranges that along the X direction of arrow the mobile motor M2 that is arranged in pedestal 32 right sides makes ball screw 33 positive and negative rotations.The ball screw 33 that is located on the pedestal 32 of left back aligning microscope carrier 31d arranges that along the Y direction of arrow the mobile motor M2 that is arranged in pedestal 32 rear sides makes ball screw 33 positive and negative rotations.
On the pedestal 32 of aiming at microscope carrier 31,, on this movable block 34, screwing togather ball screw 33 can movable block 34 being arranged in the arranged in form that length direction slides.Movable block 34 based on the rotating of ball screw 33 along ball screw 33 back and forth movements.
In detail, the movable block 34 that is screwed on the ball screw 33 of being located at left front aligning microscope carrier 31a and right back aligning microscope carrier 31c comes and goes mobile at left and right directions (X and the anti-X direction of arrow).In addition, in the present embodiment, the movable block 34 of left front aligning microscope carrier 31a and right back aligning microscope carrier 31c, the anti-X direction of arrow (left direction) in Fig. 3 and the X direction of arrow (right direction) move respectively when mobile motor M2 (ball screw 33) forward rotation, and mobile towards the X direction of arrow (right direction) and the anti-X direction of arrow (left direction) respectively when mobile motor M2 (ball screw 33) reverse rotation.
In addition, the movable block 34 that is screwed on the ball screw 33 of being located at right front aligning microscope carrier 31b and left back aligning microscope carrier 31d comes and goes mobile at fore-and-aft direction (Y and the anti-Y direction of arrow).In addition, in the present embodiment, the movable block 34 of right front aligning microscope carrier 31b and left back aligning microscope carrier 31d, the anti-Y direction of arrow in Fig. 3 (front side to) and the Y direction of arrow (rear direction) move respectively when mobile motor M2 (ball screw 33) forward rotation, and mobile towards the Y direction of arrow (rear direction) and the anti-Y direction of arrow (front side to) respectively when mobile motor M2 (ball screw 33) reverse rotation.
Then, in the present embodiment, each movable block 34 of left front aligning microscope carrier 31a and right back aligning microscope carrier 31c has constituted the 1st movable block, and each movable block 34 of right front aligning microscope carrier 31b and left back aligning microscope carrier 31d has constituted the 2nd movable block.And, in the present embodiment, separately mobile motor M2 and the ball screw 33 of left front aligning microscope carrier 31a and right back aligning microscope carrier 31c have constituted the 1st drive division, and separately mobile motor M2 and the ball screw 33 of right front aligning microscope carrier 31b and left back aligning microscope carrier 31d have constituted the 2nd drive division.
Above the movable block 34, be furnished with swivel plate 35 at each.Swivel plate 35 is the center with the central axis C t as these swivel plate 35 turning axles, and is supported with the form that can rotate in the horizontal direction with respect to movable block 34.
Be set with guide member 36 on swivel plate 35, this guide member 36 is that the center rotates in the horizontal direction with respect to movable block 34 with swivel plate 35 with central axis C t.On guide member 36, be concaved with the cross section and be the guiding groove 36a of U word shape, this guiding groove 36a along and the perpendicular direction of the central axial direction of ball screw 33 extend.
The upside of guide member 36 is furnished with rotation and places worktable 37.It is the sheet metal of square shape for example that worktable 37 is placed in rotation, and the guide rail 38 that fixedly installs in its lower section is entrenched among the guiding groove 36a, so that rotation placement worktable 37 is supported on the guide member 36.Guide rail 38 stretches out formation along guiding groove 36a, is entrenched in slidably among the guiding groove 36a, will rotate and place worktable 37 along guiding groove 36a channeling conduct movably.So rotation is placed worktable 37 when guide member 36 can move along guiding groove 36a, can rotate in the horizontal direction with swivel plate 35 (guide member 36) piece 34 that relatively moves together.
Then, in the present embodiment, the swivel plate separately 35 of left front aligning microscope carrier 31a and right back aligning microscope carrier 31c, guide member 36 and rotation are placed worktable 37 and are constituted the 1st rotary table, and the swivel plate separately 35 of right front aligning microscope carrier 31b and left back aligning microscope carrier 31d, guide member 36 and rotation are placed worktable 37 and constituted the 2nd rotary table.
As shown in Figure 3, Figure 4, place worktable 37 via the secure component 39 that is located on each rotation placement worktable 37, connect fixing by front side or rear side X-axis coupling link 40a, 40b as the 1st coupling component in rotation adjacent on the directions X.In addition, place worktable 37 via the secure component 39 that is located on each rotation placement worktable 37, connect fixing by left side or right side Y- axis coupling link 41a, 41b as the 2nd coupling component in rotation adjacent on the Y direction.Each coupling link 40a, 40b, 41a, 41b are made of for example stainless-steel tube.
In detail, as shown in Figure 3, the rotation of left front aligning microscope carrier 31a is placed the rotation of worktable 37 and right front aligning microscope carrier 31b and is placed worktable 37, connects with front side X-axis coupling link 40a.Under the situation of overlooking, the central axis C x of front side X coupling link 40a is consistent with the central axis of the ball screw 33 of left front aligning microscope carrier 31a.And under the situation of overlooking, when the central axis C x of front side X-axis coupling link 40a is perpendicular with the central axis of the right front ball screw 33 of aiming at microscope carrier 31b, intersect with the right front central axis C t that aims at the swivel plate 35 of microscope carrier 31b.
In addition, the rotation placement worktable 37 and right side Y-axis coupling link 41b connection of worktable 37 and right back aligning microscope carrier 31c placed in the rotation of right front aligning microscope carrier 31b.Under the situation of overlooking, the central axis C y of right side Y-axis coupling link 41b is consistent with the central axis of the ball screw 33 of right front aligning microscope carrier 31b.And under the situation of overlooking, when the central axis C y of right side Y-axis coupling link 41b is perpendicular with the central axis of the right back ball screw 33 of aiming at microscope carrier 31c, intersect with the right back central axis C t that aims at the swivel plate 35 of microscope carrier 31c.
Further, the rotation placement worktable 37 and rear side X-axis coupling link 40b connection of worktable 37 and left back aligning microscope carrier 31d placed in the rotation of right back aligning microscope carrier 31c.Under the situation of overlooking, the central axis C x of rear side X-axis coupling link 40b is consistent with the central axis of the ball screw 33 of right back aligning microscope carrier 31c.And under the situation of overlooking, when the central axis C x of rear side X-axis coupling link 40b is perpendicular with the central axis of the left back ball screw 33 of aiming at microscope carrier 31d, intersect with the left back central axis C t that aims at the swivel plate 35 of microscope carrier 31d.
Moreover the rotation of left back aligning microscope carrier 31d is placed the rotation of worktable 37 and left front aligning microscope carrier 31a and is placed worktable 37 and left side Y-axis coupling link 41a connection.Under the situation of overlooking, the central axis C y of left side Y-axis coupling link 41a is consistent with the central axis of the ball screw 33 of left back aligning microscope carrier 31d.And under the situation of overlooking, when the central axis C y of left side Y-axis coupling link 41a is perpendicular with the central axis of the left front ball screw 33 of aiming at microscope carrier 31a, intersect with the left front central axis C t that aims at the swivel plate 35 of microscope carrier 31a.
In addition,, place on the worktable 37, spool (the Z direction of arrow) of the vertical point of crossing of the central axis C y of central axis C x by front side X-axis coupling link 40a and left side Y-axis coupling link 41a is called reference axis Ck in the rotation of left front aligning microscope carrier 31a at this.
Moreover, place on the worktable 37 in the rotation of right front aligning microscope carrier 31b, spool (the Z direction of arrow) of the vertical point of crossing of the central axis C y of central axis C x by front side X-axis coupling link 40a and right side Y-axis coupling link 41b is called reference axis Ck.
Further, place on the worktable 37, spool (the Z direction of arrow) of the vertical point of crossing of the central axis C x of central axis C y by right side Y-axis coupling link 41b and rear side X-axis coupling link 40b is called reference axis Ck in the rotation of right back aligning microscope carrier 31c.
Moreover, place on the worktable 37 in the rotation of left back aligning microscope carrier 31d, spool (the Z direction of arrow) of the vertical point of crossing of the central axis C y of central axis C x by rear side X-axis coupling link 40b and left side Y-axis coupling link 41a is called reference axis Ck.
At this moment, placing worktable 37 in each rotation of aiming at microscope carrier 31 is under as shown in Figure 3 the state, the mobile motor M2 that respectively aims at microscope carrier 31 is rotated with same rotational speed simultaneously to reverse directions, the movable block 34 of left front and right back aligning microscope carrier 31a, 31c respectively to the X direction of arrow (right direction) and the anti-X direction of arrow (left direction), is moved the movable block 34 of right front and left back aligning microscope carrier 31b, 31d with same speed to the Y direction of arrow (rear direction) and the anti-Y direction of arrow (front side to) respectively simultaneously.
At this moment, the rotation of 4 aligning microscope carriers 31 is placed worktable 37 by coupling link 40a, 40b, 41a, 41b fixed connection, and it can be the central horizontal rotation with the central axis C t of swivel plate 35 that worktable 37 is placed in each rotation.As a result, each rotation of aiming at microscope carrier 31 place worktable 37 forwards, backwards about in direction when moving, on one side to move to separately direction be the counter clockwise direction rotation of center towards Fig. 3 with central axis C t on one side.
That is to say that the rotation of left front aligning microscope carrier 31a is placed worktable 37 and moved to the X direction of arrow on one side, with central axis C t be the counter clockwise direction rotation of middle mind-set Fig. 3 on one side.The rotation of right front aligning microscope carrier 31b is placed worktable 37 and is moved to the Y direction of arrow on one side, with central axis C t be the counter clockwise direction rotation of middle mind-set Fig. 3 on one side.The rotation of right back aligning microscope carrier 31c is placed worktable 37 and is moved to the anti-X direction of arrow on one side, with central axis C t be the counter clockwise direction rotation of middle mind-set Fig. 3 on one side.The rotation of left back aligning microscope carrier 31d is placed worktable 37 and is moved to the anti-Y direction of arrow on one side, with central axis C t be the counter clockwise direction rotation of middle mind-set Fig. 3 on one side.
As a result, each is aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together with this tetragonal central shaft, promptly vertically the axis of the center Po by elevating bracket 16 is the center, horizontally rotates to counter clockwise direction.Below, claim this to move and be the anticlockwise Move Mode.
On the contrary, each mobile motor M2 that aims at microscope carrier 31 is rotated with same rotational speed simultaneously to positive veer, the movable block 34 of left front and right back aligning microscope carrier 31a, 31c respectively to the anti-X direction of arrow (left direction) and the X direction of arrow (right direction), is moved the movable block 34 of right front and left back aligning microscope carrier 31b, 31d with same speed to the anti-Y direction of arrow (front side to) and the Y direction of arrow (rear direction) respectively simultaneously.
As a result, opposite with last time, each is aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together with this tetragonal central shaft, promptly vertically the axis of the center Po by elevating bracket 16 is the center, horizontally rotates to clockwise direction.Below, claim this to move and be the right rotation Move Mode.
Moreover, the mobile motor M2 of left front aligning microscope carrier 31a and right back aligning microscope carrier 31c is rotated with same rotational speed to reverse directions and positive veer respectively, the movable block 34 of left front and right back aligning microscope carrier 31a, 31c is mobile to the X of Fig. 3 direction of arrow (right direction) together.In addition, the movable block 34 of right front and left back aligning microscope carrier 31b, 31d is in halted state.
At this moment, since the rotation of right front and left back aligning microscope carrier 31b, 31d place worktable 37 respectively with respect to movable block 34 (guide member 36) along guiding groove 36a to the left and right direction move, each rotation of aiming at microscope carrier 31 place worktable 37 separately to the right direction (the X direction of arrow) move.As a result, each being aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together moves to the X direction of arrow is parallel.Below, claim this to move and be the parallel Move Mode in right side.
On the contrary, the mobile motor M2 of left front aligning microscope carrier 31a and right back aligning microscope carrier 31c is rotated with same rotational speed to positive veer and reverse directions respectively, the movable block 34 of left front and right back aligning microscope carrier 31a, 31c is mobile to the anti-X direction of arrow (left direction) of Fig. 3 together.In addition, the movable block 34 of right front and left back aligning microscope carrier 31b, 31d is in halted state.
At this moment and since each rotation of aiming at microscope carrier 31 place worktable 37 separately to the left direction (the anti-X direction of arrow) move, each is aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together moves to the anti-X direction of arrow is parallel.Below, claim this to move and be the parallel Move Mode in left side.
Further, the mobile motor M2 of right front aligning microscope carrier 31b and left back aligning microscope carrier 31d is rotated with same rotational speed to reverse directions and positive veer respectively, the movable block 34 of right front and left back aligning microscope carrier 31,31d is mobile to the Y of Fig. 3 direction of arrow (rear direction) together.In addition, the movable block 34 of left front and right back aligning microscope carrier 31a, 31c is in halted state.
At this moment, since the rotation of left front and right back aligning microscope carrier 31a, 31c place worktable 37 respectively with respect to movable block 34 (guide member 36) along guiding groove 36a forwards, backwards direction move, each rotation of aiming at microscope carrier 31 is placed worktable 37 and is moved to rear direction (the Y direction of arrow) separately.As a result, each being aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together moves to the Y direction of arrow is parallel.Below, claim this to move and be the parallel Move Mode of rear side.
On the contrary, the mobile motor M2 that makes right front aligning microscope carrier 31b and left back aligning microscope carrier 31d respectively to positive veer and reverse directions with same rotational speed rotation, the movable block 34 of right front and left back aligning microscope carrier 31b, 31d is moved to the anti-Y direction of arrow of Fig. 3 (front side to) together.In addition, the movable block 34 of left front and right back aligning microscope carrier 31a, 31c is in halted state.
At this moment and since each rotation of aiming at microscope carrier 31 place worktable 37 separately forward side direction (the anti-Y direction of arrow) move, each is aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together moves to the anti-Y direction of arrow is parallel.Below, claim this to move and be the parallel Move Mode in front side.
Each moves motor M2 to come Spin Control by each pattern of such usefulness, each is aimed at square that the central axis C t of the swivel plate 35 of microscope carrier 31 couples together can come and go to horizontal rotatio direction and rotate, and also can come and go along the X direction of arrow, the Y direction of arrow and move.
Place above the worktable 37 in each rotation of aiming at microscope carrier 31, be provided with as the lifting of the 2nd lifting unit cylinder SL.Lifting with cylinder SL with, piston rod SLa is in the time of the top, the central axis of piston rod SLa and the consistent form of described reference axis Ck are packed on the rotation placement worktable 37.On the top of piston rod SLa, connection is fixed with discoideus lifting microscope carrier ST, and lifting moves up and down lifting microscope carrier ST with cylinder SL.
On lifting microscope carrier ST, installing metal right cylinder 44, this right cylinder 44 runs through the through hole 20b that is formed on the cross-connecting board 20.The through hole 20b that is formed on the cross-connecting board 20 is communicated with the large diameter recess 20c that accommodates that expansion is formed at cross-connecting board 20 upper face sides.
On right cylinder 44, installing discoideus alignment work platform AT, alignment work platform AT is contained in and accommodates recess 20c or above cross-connecting board 20 outstanding (present embodiment is 0.3mm) by the driving of lifting with cylinder SL.In addition, the central shaft of alignment work platform AT and right cylinder 44 is consistent with described reference axis Ck.
So, each alignment work platform AT one that aims at microscope carrier 31 from cross-connecting board 20 to accommodate recess 20c outstanding, the panel P that is placed on the cross-connecting board 20 just lifts 0.3mm from cross-connecting board 20 by each alignment work platform AT upward.
Then, under the state that panel P is lifted by each alignment work platform AT, described each rotation is placed worktable 37 1 and is carried out described various Move Modes, the panel P that is lifted by each alignment work platform AT just places worktable 37 with each rotation and carries out anticlockwise and move, right rotation is moved, and the right side is parallel moves, and the left side is parallel moves, rear side is parallel to be moved, and the front side is parallel mobile.
That is to say,, panel P is come and gone at horizontal rotatio direction rotate, can also come and go along the X direction of arrow, the Y direction of arrow and move by each moves motor M2 with each pattern Spin Control.
As shown in Figure 5, above the alignment work platform AT, be formed with a plurality of attractions hole 46, attract hole 46 to be connected with port 47 (with reference to Fig. 4) on being located at these right cylinder 44 sides by the path that is formed on the right cylinder 44 at central portion at each.Above the alignment work platform AT, be formed with adsorption tank 48, it is connected with attracting hole 46 at each.Then, on each alignment work platform AT, placed panel P in, the peristome of adsorption tank 48 is stopped up by panel P, by via the air that attracts hole 46 to attract in the blocked space, panel P is adsorbed on the alignment work platform AT.On the other hand, under the state that panel P is adsorbed on the alignment work platform AT,, panel P is decontroled from alignment work platform AT by from attracting hole 46 to import air to adsorption tank 48.
As shown in Figure 4, place between the worktable 37, around lifting usefulness cylinder SL, with equal angular for example 3 the lifting guide members 50 that are interval with at lifting microscope carrier ST and rotation.Lifting guide member 50 has columnar guide barrel 50a and runs through the leading axle 50b of guide barrel 50a.The lower end of guide barrel 50a is fixed on rotation and places on the worktable 37, and upside is by back up pad 51 support fixation.The upper end of leading axle 50b be packed in lifting microscope carrier ST below, downside is applied among the guide barrel 50a slidably.
Below lifting microscope carrier ST, to be fixed with for example 3 stop pin 52 round lifting with the form of cylinder SL, the threaded portion 52a that is formed on its top runs through back up pad 51 with form moving up and down, and is outstanding downwards below back up pad 51.The top that is formed on the threaded portion 52a on the stop pin 52 for example 2 nuts 53 that are being spirally connected, when lifting microscope carrier ST moves up, nut 53 and back up pad 51 cards and, restriction lifting microscope carrier ST makes it to move up and surpasses predetermined distance (present embodiment is 0.3mm).
Then, based on square circuit diagram shown in Figure 6, the electric formation of the ultraviolet lamp 1 that constitutes with above-mentioned form is described.
In Fig. 6, control device 61 is made of the microcomputer that possesses CPU, ROM, RAM etc.Control device 61 (CPU) is carried out according to the program among the ROM of being recorded in and is used for the boot process of guide panel P between position of readiness and aligned position, and is used for carrying out for this light shield 8 in the face of the panel P of light shield 8 the position alignment processing etc. of position alignment.
The image document of the alignment mark that control device 61 is taken based on camera head 62, calculation panel P whether with respect to light shield 8 in the X direction of arrow, position deviation has taken place on the Y direction of arrow and the horizontal rotatio direction.
Moreover control device 61 is connected cylinder with on the valve-driving circuit 67, and this cylinder is connected cylinder with on the solenoid valve 68 with valve-driving circuit 67.Cylinder with solenoid valve 68 is, be used for and be supplied to lifting cylinder SL by the air that not shown air feed unit is supplied with, or from the solenoid valve of this lifting with cylinder SL attraction air, it is responded from the control signal of control device 61 and carries out change action by cylinder with valve-driving circuit 67 drivings.In detail, when control device 61 output was used to make the control signal that alignment work platform AT is moved upward, cylinder moved up alignment work platform AT to lifting with cylinder SL air supply with solenoid valve 68.On the contrary, when control device 61 output was used to make the control signal that alignment work platform AT moves downwards, cylinder moved down alignment work platform AT from lifting with cylinder SL suction air with solenoid valve 68.
Further, control device 61 is connected absorption with on the valve-driving circuit 69, and this absorption is connected absorption with on the solenoid valve 70 with valve-driving circuit 69.Absorption is to be used for responding from the switching signal of control device 61 and carrying out switch motion by absorption with valve-driving circuit 69 drivings from being located at the solenoid valve of port 47 (attracting hole 46) the attraction air on the right cylinder 44 with solenoid valve 70.
Moreover control device 61 is connected on the lamp drive circuit 71, and this lamp drive circuit 71 is connected on the UV-lamp 6.Control device 61 is by the control of lighting a lamp of 71 pairs of UV-lamp 6 of lamp drive circuit.
Then, the effect that is arranged at the alignment device 30 in the UV-device that constitutes is in the above described manner described.
At this moment, as shown in Figure 1, elevating bracket 16 (cross-connecting board 20) is in the position of readiness with handing-over seat 25 adjacency.So the top 20a above cross-connecting board 20 that is located at each the handing-over pin 26 on the handing-over seat 25 is outstanding upward.Under this state, use forked mechanical hand that panel P is placed on the top of the handing-over pin 26 that 20a gives prominence to above cross-connecting board 20.
After panel P was placed on the top of handing-over pin 26, control device 61 just changeed lift motor M1 by lift motor driving circuit 64, and elevating bracket 16 (cross-connecting board 20) is moved upward to aligned position.In the way that moves up, each handing-over pin 26 1 submerges in cross-connecting board 20, is placed on panel P on the handing-over pin 26 and is just joined and be positioned on the cross-connecting board 20.
Elevating bracket 16 (cross-connecting board 20) is when being moved upward to aligned position, and control device 61 stops lift motor M1 by lift motor driving circuit 64.
Next, control device 61 floats with solenoid valve 66 by floating to start with valve-driving circuit 65, from being formed at the nozzle bore 22 ejection air on the cross-connecting board 20, makes panel P float 0.3mm from cross-connecting board 20.Then, control device 61 starts cylinder with solenoid valve 68 by cylinder with valve-driving circuit 67, with cylinder SL air supply, makes bar SLa elongation to each lifting, makes each alignment work platform AT from cross-connecting board 20 0.3mm that moves up.
In this simultaneously, control device 61 starts absorption with solenoid valve 70 by absorption with valve-driving circuit 69, attracts air by the attraction hole 46 from each alignment work platform AT, so that panel P is adsorbed on the alignment work platform AT.Thus, the panel P that floats is placed and is fixed on each alignment work platform AT.
Then, carry out alignment actions.At first, control device 61 makes camera head 62 actions, and obtains the image document of the alignment mark of being taken by camera head 62.Control device 61 is according to the image document of the alignment mark of obtaining, calculation panel P whether with respect to light shield 8 in the X direction of arrow, position deviation has taken place on the Y direction of arrow and the horizontal rotatio direction.
Then, when position deviation is calculated, control device 61 generates mobile control signal according to position deviation, this signal is used for, move or parallel the moving in front side makes this position deviation become zero for anticlockwise is moved, right rotation is moved by panel P is carried out, parallelly move on the right side, parallelly move in the left side, rear side is parallel, move and movable block 34 come and gone on the X direction of arrow or the Y direction of arrow.The mobile control signal that control device 61 will generate exports mobile driving circuit 63 to, each is moved motor M2 carry out suitable drive controlling, and panel P is become zero with respect to the position deviation of light shield 8.
Panel P is eliminated with respect to the position deviation one of light shield 8, and control device 61 just floats with solenoid valve 66 by floating with valve-driving circuit 65 switchings, stops from being formed on the nozzle bore 22 ejection air on the cross-connecting board 20.Then, control device 61 switches cylinder with solenoid valve 68 by cylinder with valve-driving circuit 67, with cylinder SL suction air, bar SLa is shunk from each lifting, each alignment work platform AT is housed in accommodates in the recess 20c.
As a result, panel P only is placed on the top 20a of cross-connecting board 20 by deadweight, enters stationary state, aims at and finishes.
Aim at one and finish, control device 61 is just lighted UV-lamp 6 by lamp drive circuit 71, across light shield 8 encapsulant irradiation ultraviolet radiation of (between substrate) in being formed on panel P, makes the sealing material cured make panel P (two substrates) bonding.
When irradiation ultraviolet radiation, panel P (two substrates) rises because of the ultraviolet ray temperature, and each substrate that constitutes panel P can be expanded a little.At this moment, because panel P (two substrates) only is placed on the top 20a of cross-connecting board 20 by deadweight, so two substrates can carry out identical expansion, the stress that causes owing to the difference of expanding can not take place.
Encapsulant solidifies, during bonding the finishing of panel P (two substrates), after control device 61 extinguishes UV-lamp 6 by lamp drive circuit 71, by lift motor driving circuit 64 lift motor M1 is changeed anyway at a high speed, make elevating bracket 16 (cross-connecting board 20) high speed drop to each handing-over pin 26 from cross-connecting board 20 outstanding positions (for example before the 3mm) before.
When elevating bracket 16 (cross-connecting board 20) drops to each handing-over pin 26 distance from the outstanding 3mm of also having of cross-connecting board 20, after control device 61 temporarily stops the rotation of lift motor M1 by lift motor driving circuit 64, lift motor M1 is changeed anyway with low speed, make elevating bracket 16 (cross-connecting board 20) with low speed about 5mm that descends.
Thus, in the way that this low speed descends, the top of each handing-over pin 26 is outstanding upward from the upside bullport 21 of cross-connecting board 20, and the top panel P that is placed on cross-connecting board 20 is placed on the handing-over pin 26 and joins.
Then, panel P one is handed off on the handing-over pin 26, after control device 61 just temporarily stops the rotation of lift motor M1 by lift motor driving circuit 64, make lift motor M1 to change anyway at a high speed, stop handing-over action that to wait for next time after making elevating bracket 16 (cross-connecting board 20) drop to position of readiness at a high speed.
Below, the effect of the embodiment that will constitute with above-mentioned form is described below.
(1) alignment device 30 is made of 4 aligning microscope carriers 31 separated from each other, comes support panel P by the alignment work platform AT that is located at respectively on the aligning microscope carrier 31 separated from each other.Then, make the alignment work platform AT interlock that is positioned at 4 places, make panel P carry out anticlockwise and move corresponding to position deviation by coupling link 40a, 40b, 41a, 41b, right rotation is moved, and the right side is parallel moves, and the left side is parallel moves, rear side is parallel to be moved, and perhaps the front side is parallel moves.So, can be with the position deviation vanishing of panel P with respect to light shield 8.
(2) aim at 4 places of the alignment work platform AT support panel P of microscope carrier 31 with each.And, make it interlock so that panel P moves by coupling link 40a, 40b, 41a, 41b.
So, with support panel P following all, the aligning microscope carrier of movable panel P is compared for position alignment, can make equipment miniaturization, can reduce cost thereupon.And, compare significantly lightweight with aligning microscope carrier in the past, can reduce the power consumption that is used to drive travel mechanism.
And, owing to coupling link 40a, 40b, 41a, 41b are made of pipe, can further realize lightweight, and further reduce the power consumption that is used to drive travel mechanism.
(3) owing to only just the panel P that is placed on the handing-over pin 26 can be handover on the cross-connecting board 20 by the elevating bracket 16 that moves up, and only just the panel P that is placed on the cross-connecting board 20 can be handover on the handing-over pin 26 by moving down elevating bracket 16, so after panel P is aimed at light shield 8, can carry out the operation of irradiation ultraviolet radiation, the bonding processing of panel continuously.
At this moment, each alignment work platform AT is moved up, under the state that panel P is separated from cross-connecting board 20, aim at.So when aiming at, cross-connecting board 20 and panel P can not rub.
In addition, above-mentioned embodiment also can change in the following way.
In the above-described embodiment, between elevating bracket 16 and cross-connecting board 20, be provided with alignment device 30, the alignment work platform AT that respectively aims at microscope carrier 31 is haunted with respect to the top 20a of cross-connecting board 20.Also can omit cross-connecting board 20 and implement this mode.In this case, need directly panel P to be placed on the alignment work platform AT that respectively aims at microscope carrier 31.
In the above-described embodiment, the microscope carrier 31 of respectively aiming at of alignment device 30 is placed on the elevating bracket 16 to be just tetragonal form, yet also it can be placed as rectangle.
In the above-described embodiment, in order to make alignment device 30 lightweight more, with front side X-axis and rear side X-axis coupling link 40a, 40b, left side Y-axis and right side Y- axis coupling link 41a, 41b form tubulose, yet also can adopt bar-shaped bar.
In the above-described embodiment, alignment device 30 is placed on the elevating bracket 16, makes the panel P that is placed on the alignment device 30 rise to the aligned position relative with light shield 8.Light shield 8 is descended and relative and implement this mode with panel P on being placed on alignment device 30.
In the above-described embodiment, alignment device 30 is embodied as ultraviolet lamp 1.Also this can be applied to the device of 2 substrates of light irradiation device, bonding liquid crystal display panel beyond the ultraviolet ray, the manufacturing installation of other surface plates is on the alignment device of semiconductor device.
Claims (8)
1, a kind of alignment device, its be placed on pedestal above, workpiece is moved to a direction and with perpendicular other directions of a described direction, and it is horizontally rotated, to carry out the position alignment of described workpiece, it is characterized in that possessing:
2 the 1st movable blocks, it be respectively being located at along the form that a described direction come and go to move, be positioned described pedestal top, form a pair of vertex position on the diagonal line that is in a side in positive square or rectangular 4 summits;
2 the 2nd movable blocks, it be respectively being located at along the form that described other directions come and go to move, and is in a pair of vertex position on the opposing party's the diagonal line in described 4 summits;
2 the 1st drive divisions, it makes corresponding with it in described the 1st movable block 1 to come and go along a described direction and to move respectively;
2 the 2nd drive divisions, it makes corresponding with it in described the 2nd movable block 1 to come and go along described other directions and to move respectively;
2 the 1st rotary tables, its respectively with can horizontally rotate ground supported the time also can along described other directions come and go the form that moves be located at described correspondence the 1st movable block above;
2 the 2nd rotary tables, its respectively with can horizontally rotate ground supported the time also can along a described direction come and go the form that moves be located at described correspondence the 2nd movable block above;
2 the 1st coupling components, it connects described 2 the 1st rotary tables and described 2 the 2nd rotary tables on a described direction;
2 the 2nd coupling components, it connects described 2 the 1st rotary tables and described 2 the 2nd rotary tables on described other directions;
4 alignment work platforms, described workpiece is supported in its cooperation, and is located at respectively on one corresponding with it in described the 1st rotary table and described the 2nd rotary table.
2, according to the alignment device of claim 1 record, it is characterized in that:
Each described the 1st coupling component and the 2nd coupling component are pipe.
3, according to the alignment device of claim 1 or 2 records, it is characterized in that:
Described pedestal comes and goes at above-below direction by the 1st lifting unit and moves.
4, according to the alignment device of claim 3 record, it is characterized in that:
Further possess 4 the 2nd lifting units, it is arranged on 1 corresponding with it in described the 1st rotary table and described the 2nd rotary table, and direction is round mobile up and down to make the alignment work platform corresponding with it.
5, according to the alignment device of claim 3 record, it is characterized in that:
Cross-connecting board is arranged abreast across the interval holding member in position above described pedestal,
Described cross-connecting board has the recess of accommodating, and this is accommodated recess and is arranged with on described cross-connecting board, with described alignment work platform can above described cross-connecting board, outstanding form accommodating,
Lower position at described pedestal is furnished with holder, described holder has a plurality of handing-over pins, this handing-over pin be arranged in described holder above, run through described pedestal and described cross-connecting board based on starting of described the 1st lifting unit, can above described cross-connecting board, haunt.
6, according to the alignment device of claim 5 record, it is characterized in that:
Further possess 4 the 2nd lifting units, it is arranged on 1 corresponding with it in described the 1st rotary table and described the 2nd rotary table separately, and direction is round mobile up and down to make the alignment work platform corresponding with it.
7, according to the alignment device of claim 6 record, it is characterized in that:
Make the workpiece that described workpiece floats float arrangement of mechanism on described cross-connecting board.
8, according to the alignment device of claim 1 or 2 records, it is characterized in that:
Possess and to select the pattern that horizontally rotates and the parallel Move Mode carried out, horizontally rotate in the pattern described, for described the 1st rotary table and described the 2nd rotary table are horizontally rotated, described 2 the 1st drive divisions and described 2 the 2nd drive divisions are all driven, in described parallel Move Mode, described the 1st rotary table and described the 2nd rotary table are parallel to be moved in order to make, and described 2 the 1st drive divisions or described 2 the 2nd drive divisions are driven.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008186249 | 2008-07-17 | ||
| JP2008186249A JP4629129B2 (en) | 2008-07-17 | 2008-07-17 | Alignment device |
| JP2008-186249 | 2008-07-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101630086A true CN101630086A (en) | 2010-01-20 |
| CN101630086B CN101630086B (en) | 2011-07-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101647304A Expired - Fee Related CN101630086B (en) | 2008-07-17 | 2009-07-16 | Aligning device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4629129B2 (en) |
| KR (1) | KR101113317B1 (en) |
| CN (1) | CN101630086B (en) |
| TW (1) | TWI376288B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014089876A1 (en) * | 2012-12-14 | 2014-06-19 | 深圳市华星光电技术有限公司 | Shielding device, sealant curing machine, and sealant curing method |
| CN105081858A (en) * | 2015-09-06 | 2015-11-25 | 京东方科技集团股份有限公司 | Location correction device |
| WO2016074173A1 (en) * | 2014-11-10 | 2016-05-19 | 上海理想万里晖薄膜设备有限公司 | Substrate calibration method and device |
| CN107146768A (en) * | 2017-06-16 | 2017-09-08 | 英特尔产品（成都）有限公司 | Device and alignment device for laying article |
| CN108550327A (en) * | 2018-03-07 | 2018-09-18 | 深圳市中科智诚科技有限公司 | A kind of LED display for replacing function with LED lamp tube |
| CN110187530A (en) * | 2019-05-27 | 2019-08-30 | 武汉中导光电设备有限公司 | A kind of liquid crystal display panel dynamic adjusting device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102664159B (en) * | 2012-03-31 | 2014-09-24 | 华中科技大学 | Multi-chip alignment method and device thereof |
| KR101363083B1 (en) * | 2012-11-22 | 2014-02-14 | (주)유시스템 | Apparatus for aligning plate |
| KR102298055B1 (en) * | 2020-04-01 | 2021-09-03 | 유한책임회사 세봉 | Substrate aligning device |
| CN114908329B (en) * | 2021-02-08 | 2024-03-08 | 台湾积体电路制造股份有限公司 | Correction method and semiconductor manufacturing apparatus |
| KR20230149054A (en) | 2022-04-19 | 2023-10-26 | 삼성에스디에스 주식회사 | Method and apparatus for generating a pattern of log data |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004160640A (en) * | 2003-07-28 | 2004-06-10 | Thk Co Ltd | Moving table device |
| JP2005310989A (en) * | 2004-04-20 | 2005-11-04 | Hitachi High-Tech Electronics Engineering Co Ltd | Method and device for delivering substrate and photomask |
| JP2006237485A (en) * | 2005-02-28 | 2006-09-07 | Yaskawa Electric Corp | Alignment device |
| JP4616812B2 (en) * | 2006-08-30 | 2011-01-19 | 株式会社日立ハイテクノロジーズ | Positioning device, stage and inspection or processing device |
| JP5061569B2 (en) * | 2006-10-12 | 2012-10-31 | 株式会社安川電機 | Alignment stage |
-
2008
- 2008-07-17 JP JP2008186249A patent/JP4629129B2/en active Active
-
2009
- 2009-07-09 TW TW098123175A patent/TWI376288B/en active
- 2009-07-15 KR KR1020090064407A patent/KR101113317B1/en active IP Right Grant
- 2009-07-16 CN CN2009101647304A patent/CN101630086B/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014089876A1 (en) * | 2012-12-14 | 2014-06-19 | 深圳市华星光电技术有限公司 | Shielding device, sealant curing machine, and sealant curing method |
| WO2016074173A1 (en) * | 2014-11-10 | 2016-05-19 | 上海理想万里晖薄膜设备有限公司 | Substrate calibration method and device |
| CN105081858A (en) * | 2015-09-06 | 2015-11-25 | 京东方科技集团股份有限公司 | Location correction device |
| CN107146768A (en) * | 2017-06-16 | 2017-09-08 | 英特尔产品（成都）有限公司 | Device and alignment device for laying article |
| CN108550327A (en) * | 2018-03-07 | 2018-09-18 | 深圳市中科智诚科技有限公司 | A kind of LED display for replacing function with LED lamp tube |
| CN108550327B (en) * | 2018-03-07 | 2020-07-31 | 上海纬而视科技股份有限公司 | L ED display screen with L ED lamp tube replacement function |
| CN110187530A (en) * | 2019-05-27 | 2019-08-30 | 武汉中导光电设备有限公司 | A kind of liquid crystal display panel dynamic adjusting device |
| CN110187530B (en) * | 2019-05-27 | 2021-09-03 | 武汉中导光电设备有限公司 | Dynamic adjusting device for liquid crystal display panel |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101113317B1 (en) | 2012-03-13 |
| KR20100009491A (en) | 2010-01-27 |
| TW201004737A (en) | 2010-02-01 |
| CN101630086B (en) | 2011-07-27 |
| JP4629129B2 (en) | 2011-02-09 |
| TWI376288B (en) | 2012-11-11 |
| JP2010027793A (en) | 2010-02-04 |
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