CN101558001B - 基板输送机 - Google Patents
基板输送机 Download PDFInfo
- Publication number
- CN101558001B CN101558001B CN2007800456544A CN200780045654A CN101558001B CN 101558001 B CN101558001 B CN 101558001B CN 2007800456544 A CN2007800456544 A CN 2007800456544A CN 200780045654 A CN200780045654 A CN 200780045654A CN 101558001 B CN101558001 B CN 101558001B
- Authority
- CN
- China
- Prior art keywords
- substrate
- basal plate
- horizontal direction
- casing
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Robotics (AREA)
- Specific Conveyance Elements (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP039052/2007 | 2007-02-20 | ||
JP2007039052A JP4840595B2 (ja) | 2007-02-20 | 2007-02-20 | 基板搬送機 |
PCT/JP2007/074560 WO2008102510A1 (fr) | 2007-02-20 | 2007-12-20 | Appareil de transfert de substrat |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101558001A CN101558001A (zh) | 2009-10-14 |
CN101558001B true CN101558001B (zh) | 2012-03-21 |
Family
ID=39709792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800456544A Active CN101558001B (zh) | 2007-02-20 | 2007-12-20 | 基板输送机 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4840595B2 (fr) |
KR (1) | KR101133823B1 (fr) |
CN (1) | CN101558001B (fr) |
TW (1) | TWI343354B (fr) |
WO (1) | WO2008102510A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5218000B2 (ja) * | 2008-12-12 | 2013-06-19 | 株式会社Ihi | 基板保管供給システム |
KR101543681B1 (ko) * | 2009-01-15 | 2015-08-11 | 주성엔지니어링(주) | 기판 처리 시스템 |
CN102009846B (zh) * | 2010-09-30 | 2013-04-03 | 东莞宏威数码机械有限公司 | 锁定式变向传输平台装置 |
CN102001525B (zh) * | 2010-09-30 | 2012-07-04 | 东莞宏威数码机械有限公司 | 锁定式升降平移传输设备 |
JP5741834B2 (ja) * | 2011-05-13 | 2015-07-01 | 株式会社ニコン | 物体の搬出方法、物体の交換方法、物体保持装置、露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 |
CN102897536B (zh) * | 2012-11-02 | 2015-04-15 | 深圳市华星光电技术有限公司 | 用于搬运平板的传输***及其机械装置和搬运方法 |
CN103950716B (zh) * | 2014-05-21 | 2016-07-27 | 芜湖万辰电光源科技有限公司 | 一种玻璃条镀膜载台的输送机构 |
CN109250502B (zh) * | 2018-10-18 | 2020-08-11 | 深圳市华星光电半导体显示技术有限公司 | 基板输送装置 |
CN112110377B (zh) * | 2020-08-27 | 2022-02-18 | 银川威力传动技术股份有限公司 | 在线检测用升降机及在线检测*** |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1550434A (zh) * | 2003-05-09 | 2004-12-01 | �Ϻ���ͨ��ѧ | 集成的大片玻璃操纵*** |
CN1608318A (zh) * | 2001-12-25 | 2005-04-20 | 东京毅力科创株式会社 | 被处理体的搬送装置和具有搬送装置的处理*** |
CN1776884A (zh) * | 2004-11-15 | 2006-05-24 | 大日本网目版制造株式会社 | 基板处理装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4356234B2 (ja) * | 2000-11-30 | 2009-11-04 | 株式会社Ihi | 基板移載装置 |
JP4215426B2 (ja) * | 2001-12-07 | 2009-01-28 | Necエンジニアリング株式会社 | 液晶パネルの搬送移載装置 |
JP2005064431A (ja) * | 2003-08-20 | 2005-03-10 | Shinko Electric Co Ltd | 基板搬送装置及び基板搬送方法 |
JP4904722B2 (ja) * | 2005-06-02 | 2012-03-28 | 株式会社Ihi | 基板搬送装置 |
KR101300853B1 (ko) * | 2005-12-05 | 2013-08-27 | 도쿄엘렉트론가부시키가이샤 | 기판 반송 시스템, 기판 반송 장치 및 기판 처리 장치 |
-
2007
- 2007-02-20 JP JP2007039052A patent/JP4840595B2/ja active Active
- 2007-12-20 KR KR1020097017284A patent/KR101133823B1/ko active IP Right Grant
- 2007-12-20 CN CN2007800456544A patent/CN101558001B/zh active Active
- 2007-12-20 WO PCT/JP2007/074560 patent/WO2008102510A1/fr active Application Filing
-
2008
- 2008-01-04 TW TW97100280A patent/TWI343354B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1608318A (zh) * | 2001-12-25 | 2005-04-20 | 东京毅力科创株式会社 | 被处理体的搬送装置和具有搬送装置的处理*** |
CN1550434A (zh) * | 2003-05-09 | 2004-12-01 | �Ϻ���ͨ��ѧ | 集成的大片玻璃操纵*** |
CN1776884A (zh) * | 2004-11-15 | 2006-05-24 | 大日本网目版制造株式会社 | 基板处理装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2008102510A1 (fr) | 2008-08-28 |
JP2008205160A (ja) | 2008-09-04 |
KR101133823B1 (ko) | 2012-04-06 |
TW200911661A (en) | 2009-03-16 |
JP4840595B2 (ja) | 2011-12-21 |
KR20090114404A (ko) | 2009-11-03 |
CN101558001A (zh) | 2009-10-14 |
TWI343354B (en) | 2011-06-11 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |