13/3354 九、發明說明： : 【發明所屬之技術領域】 ^ 本發明係關於一種基板搬送機，詳言之，係關於適用 .於使用在液晶電視等之玻璃基板之搬送的基板搬送機。 【先前技術】 在例如液晶電視之製造過程中’玻璃基板係經由各種 之步驟而被加工成液晶面板。在玻璃基板之步驟間的移動 係使用被稱為匣盒（cassette)之容器，容器係能夠將複數個 玻璃基板朝上下方向隔著間隔而以水平狀態予以收容者。 v 基板拣1送機係在各步驟中，配置在匣盒與處理裝置之 間，並從匣盒接收玻璃基板，將所接收之玻璃基板交付給 處理裝置。然後，以處理裝置結束玻璃基板之處理時，從 處理裝置接收玻璃基板，再將所接收之玻璃基板交付給匣 盒（參照例如專利文獻1)。 具體而言，日本特開2006-335518號公報所掲示之基 鲁板搬送機（基板搬送裝置）係具有手部、授受用輸送帶 (conveyor)及中間輸送帶。手部係可朝上下方向及水平方向 移動，在其與處理裝置之間施行玻璃基板之授受。授受用 輸送帶及中間輸送帶係在其與£盒之間施行玻璃基板之授 文，玻璃基板係在搬送過程中從手部及輸送帶中之一方移 至另一方。 在上述後方之基板搬送機中。基板搬送機與匣盒之間 隔為一定》該間隔較廣時，由於被接收交付之玻螭基板的 翹曲’目此會有在基板搬送機與£盒之間無法順暢^以輸 319819 5 13,43354 Λ ==行麵基板之授受之虞。㈣是，可移動地設置i :㈣㈣送機’並使用在複數個^與玻縣板之授受 基板移送裝置與各£盒之間隔設定成較 .形，而更有上述疑虞。 ，手邻再：：在上述公報之基板搬送機中，中間輸送帶係愈 設置’且構成複雜。特別是，中間輸送帶由空 【發明内容】 m給官的配管複雜。 :::之目的在於以簡單之構成提供—種可順 灯基板之授受的基板搬送機。 、 為達成上述目的，本發明蓀 n ,, 以將在相互隔開之-側及相反種送機，係用 以搬送並交付至另一方側者， =收之基板予 水平方向移動之方式配置於底Μ，且，係以可朝 述基板時位於前述—側;支持裝置，j二二崎前 上，且具有用於以可朝前述水平方;在别述移動台 基板之支持區域；移動裝置’係為^ :式支持前述 基板，而橫切前述一側之前姓、則M —側授受前述 .+ ,s 則迷支持區域的前端而祐 持區域上之基板朝前述水 心而使别述支 述底座；及手部，係乂 H支桎’係立設在前 使搬送過程之前述基板:述相反側授受前述基板並且 以可朝前述水平方=其舆前述支持裝置之間轉換，而 支持區域而昇降之方式，^ 乂上下方向觀之可橫切前述 係在前述一側具有從:安装至剛述支柱；前述支持區域 有攸則述移動台突出之延伸部。 319819 6 丄:^54 根據本發明之基板搬送機，當與相對向之機器（相對向 ，器側授受基板時，移動台係位於一側，伴隨於此從 矛夕動〇大出之支持區域的延伸部係接近相對向機器。因 此，相對向機器與支持區域之間隔會縮短，而防止2支 區域與相對向機器之間進行授受之基板的輕曲。結果，根 據該基板搬送機，可順暢地在與相對向機器之間進行基板 之授受。 土[Technical Field] The present invention relates to a substrate transfer machine, and more particularly to a substrate transfer machine that is used for transporting on a glass substrate such as a liquid crystal television. [Prior Art] In the manufacturing process of, for example, a liquid crystal television, the glass substrate is processed into a liquid crystal panel through various steps. In the movement between the steps of the glass substrate, a container called a cassette is used, and the container is capable of accommodating a plurality of glass substrates in a horizontal state at intervals in the vertical direction. v The substrate picking and feeding machine is disposed between the cassette and the processing device in each step, receives the glass substrate from the cassette, and delivers the received glass substrate to the processing device. Then, when the processing of the glass substrate is completed by the processing device, the glass substrate is received from the processing device, and the received glass substrate is delivered to the cassette (see, for example, Patent Document 1). Specifically, the base plate conveyor (substrate conveying device) disclosed in Japanese Laid-Open Patent Publication No. 2006-335518 has a hand, a conveyor belt, and an intermediate conveyor. The hand can be moved in the vertical direction and the horizontal direction, and a glass substrate can be transferred between the hand and the processing device. The transfer belt and the intermediate transfer belt are taught by a glass substrate between the transfer belt and the cassette, and the glass substrate is moved from one of the hand and the conveyor belt to the other during the conveyance. In the rear substrate conveyor. The interval between the substrate conveyor and the cassette is constant. When the interval is wide, the warpage of the glass substrate that is received and delivered may not be smooth between the substrate conveyor and the cassette. 319819 5 13 , 43354 Λ == The acceptance of the line substrate. (4) Yes, it is possible to arbitrarily set i : (4) (4) to send the machine' and use the interval between the substrate transfer device and the respective boxes of the plurality of plates and the glass plate to be set to be more complicated. In the substrate transfer machine of the above publication, the intermediate transfer belt is arranged more and more complicated. In particular, the intermediate conveyor belt is empty. [Invention] The piping for the official is complicated. The purpose of ::: is to provide a substrate transporter that can be used to transfer light to a light substrate in a simple configuration. In order to achieve the above object, the present invention is configured to be transported and delivered to the other side in a side-by-side and opposite-side manner, and the substrate is placed in a horizontal direction. At the bottom, and at the front side of the substrate; the support device, on the front side of the second and second, and having a supportable area for the mobile substrate; The device 'is supported by the above-mentioned substrate, and the front end is crossed before the side, and the M-side is subjected to the above-mentioned .+, s, and the front end of the support area is oriented, and the substrate on the holding area is directed toward the water center. The base is attached to the base; and the hand is erected to the front substrate of the transfer process: the opposite side receives the substrate and is switchable between the support device and the support device. In the support area, the method of lifting and lowering can be viewed from the upper side to the side of the line, and the support area is provided with an extension portion of the mobile station. 319819 6 丄:^54 According to the substrate transfer machine of the present invention, when the substrate is transferred to the opposite side, the mobile station is located on one side, and the support area which is enlarged from the spear is accompanied by this. The extension portion is close to the opposite machine. Therefore, the distance between the opposing machine and the support area is shortened, and the light of the substrate between the two areas and the opposite machine is prevented. As a result, according to the substrate conveyer, The substrate is smoothly transferred between the machine and the opposite machine.
此外，該基板搬送機由於將支持裝置僅配置在移 上，故具有簡單之構成。 D .&鲛佺為，則述移動裝置係設置在前述支持裝置。在 佳恕樣之基板搬送機中，由於移動裝置係設置在支 置，因此構成簡單。 > 裝 朝_4= ’前述支料置具有：相互平行地排列且分別 j述水平方向延伸之複數個導管；及形成在前述導管之 上面的壓縮空氣的喷出口。 ►根據較佳態樣之基板搬送機，支持裝置係利用從喷出 二出之壓縮空氣，以非接觸方式支持基板 管Further, since the substrate transfer machine has only the support device disposed on the transfer, it has a simple configuration. D. & A, the mobile device is provided in the aforementioned support device. In the substrate transporter of the Goodwill model, since the mobile device is disposed in a support, the configuration is simple. > Mounting _4 = ' The above-mentioned support material has a plurality of conduits arranged in parallel with each other and respectively extending in the horizontal direction; and a discharge port of compressed air formed on the upper surface of the conduit. ► According to the preferred substrate carrier, the support device supports the substrate tube in a non-contact manner by using compressed air from the discharge
，有用以供給I縮空氣之氣管，但導管係僅配置在移= 上，因此氣管之配管簡單。 D 1佳4 W述移動裝置係包含：沿著前述支持區域朝 道之滑軌道。= 可滑動地安裝在前述主軌 主轨：二：態樣之基板搬送機，移動装置係由 =構成，且能以簡單之構成使基板移動。 為，基板搬送機係具備相互朝上下隔開之2個前 319819 7 U43354 述手部。 *·。。較佳態樣之基板搬送機係即使具有2個手部亦具備簡 “單一構成S方面，由於具有2個手部，因此在另一侧 •授受基板時’利用-方之手部接收基板後，可立即對預先 ，載置之基板於另-方之手部進行交付。結果’根據該基板 搬送機’將大幅縮短基板之搬送時間。 【實施方式】 第1圖係概略顯示適用一實施形態之基板搬送機之液 晶電視（液晶面板）之生產系統之一部分。該生產系統之一 部分係具備：設置在無塵室内且在圖中右側排成一行之複 數個匣盒CS ;及在左側排成一行之複數個處理裝置PM。 基板搬送機係以可行進之方式配置在延伸於度盒GS之行 與處理裝置PM之列之間的底座軌道丨〇上。 更詳細5之，如第2圖至第4圖所示，基板搬送機係 在底座執道ίο具有隔著底座滑件12而配置之底座14。底 _座14係具有四角形之俯視形狀，且在底座14之上面豎立 有支柱16。 在支柱16安裝有昇降滑件18，昇降滑件18係可相對 於支柱16朝上下方向昇降。在昇降滑件18安裝有2個橫 構件（cross member)2〇。橫構件2〇係相互朝上下隔開，且 分別朝與底座軌道1〇正交之水平方向、亦即連結成對之處 理裝置PM與！盒Gs之水平方向（搬送方向）延伸。 從搬送方向觀之，匣盒GS側之橫構件20的端部2〇a 係比底座14之端部更突出。另一方面，處理裝置pM側之 319819 8It is useful to supply the air pipe of the air, but the pipe system is only disposed on the shift =, so the pipe of the air pipe is simple. The D 1 good 4 W mobile device includes: a sliding track along the aforementioned support area toward the track. = Slidably mounted on the main rail: Main board: Two: The substrate conveyor of the aspect, the mobile unit is composed of =, and the substrate can be moved in a simple configuration. In order to make the substrate transfer machine, there are two front parts 319819 7 U43354 which are spaced apart from each other. *·. . In a preferred embodiment, the substrate transfer machine has a simple "single configuration S, and has two hands. Therefore, when the substrate is received on the other side", the substrate is received by the hand. The substrate that has been placed in advance can be delivered to the hand of the other hand. As a result, the substrate transfer time is greatly shortened according to the substrate transfer machine. [Embodiment] FIG. 1 is a schematic view showing an embodiment. One part of the production system of the liquid crystal television (liquid crystal panel) of the substrate conveyor. One part of the production system has a plurality of cassettes CS arranged in a clean room and arranged in a row on the right side in the figure; and arranged on the left side a plurality of processing devices PM in a row. The substrate transfer machine is disposed on the base rail 延伸 extending between the row of the BOX GS and the processing device PM in a movable manner. More specifically, as shown in FIG. 2 As shown in Fig. 4, the substrate transfer machine has a base 14 disposed on the base, and has a base 14 disposed between the base sliders 12. The base 14 has a quadrangular shape in a plan view and has a support on the base 14 16. The elevating slider 18 is attached to the strut 16, and the elevating slider 18 is vertically movable up and down with respect to the strut 16. Two cross members 2 are attached to the elevating slider 18. The cross member 2 They are spaced apart from each other, and extend in the horizontal direction orthogonal to the base rail 1〇, that is, in the horizontal direction (transport direction) of the processing device PM and the box Gs that are connected in pairs. The end portion 2〇a of the cross member 20 on the GS side protrudes more than the end portion of the base 14. On the other hand, the processing device pM side is 319819 8
橫構件20的〜A 位置。”鳥係位在與底座U之端部大致相同之 在各h構件2〇安 係可從橫構件20之一端22之根部，連結板22 方向移動。連結极22係:^跨另一端部鳥而朝搬送 底座軌道1。之轴線方:較長。达方向正交之水平方向 '即 持棒24係相互朝5根支持棒24之基端部。支 送方向延伸，身？度方向隔開而平行，並分別朝搬 向之支持棒24的m棒24係排列成梳齒狀。在搬送方 座Μ之長度長度雖係'比橫構件2。之長度短，但比底 支持棒24係從連結板22朝 結板22位於掃墙々 裝置PM延伸，當連 搬送方向觀之端部2〇3侧的昇降位置時，以 支持棒24之前端部係位在盥橫槿侔20夕 另一端部20b大致相同之位置 =構件20之 2。之另-端部_側的授受位置時連:::2位於橫構件 件：之另一端部鳥及底座“之端部突 毒 之刖端部係進入處理裝置PM内。 、 可相互作用而從下方域1個玻璃基板 G，者#降滑件18之昇降及連結板u之水 搬达玻璃基板G。因此，亦將支持棒^及缸心 為手部H。此外，在平面圖中 、° : %The ~A position of the cross member 20. The bird is positioned substantially the same as the end of the base U. The h-member 2 can be moved from the root of one end 22 of the cross member 20 in the direction of the connecting plate 22. The connecting pole 22 is: The axis of the transfer base rail 1 is long: the horizontal direction in which the directions are orthogonal, that is, the holding rods 24 are mutually facing the base end portions of the five support rods 24. The branching direction extends, and the body direction is separated. The m rods 24 that are moved to the support rods 24 are arranged in a comb shape. The length of the transport square is shorter than the length of the cross member 2, but the bottom support rod 24 is shorter. It is located in the sweeping wall device PM from the connecting plate 22 toward the knot plate 22, and when the conveying position of the end portion 2〇3 side of the conveying direction is continuously conveyed, the front end portion of the supporting rod 24 is tied at the 槿侔 槿侔 20 The other end portion 20b is substantially the same position = 2 of the member 20. The other end portion _ side of the receiving position is connected: :: 2 is located at the end of the cross member: the other end of the bird and the base "end of the poison" The ends enter the processing device PM. It is possible to interact with one glass substrate G from the lower field, and the lifting and lowering of the sliding member 18 and the water of the connecting plate u are carried out to the glass substrate G. Therefore, the support rod and the cylinder core will also be the hand H. Also, in the plan view, ° : %
之冰络,.^ ^ 只線表不玻璃基板G 、’，但亦穿透玻璃基板G而描繪其下之構成。 再者，在底座Μ上配置有固定台、％。固定台％係位 319819 9 1343354 於支柱16之前方，固定台26及手部H係位在相對於支杈 16之相同側。以搬送方向觀之，固定台％之頂板^之 長度係比底座14之長度長，匣盒GS側之頂板26a的端部 •係從底座14之端部突出。然而，頂板26a之突出長度係比 .橫構件20之突出長度更短。 > ★在固疋台26之頂板26a上，配置有2根台轨道28， 忒等D軌道28係橫跨頂板26a之大致全長分別朝搬送方向 瞻I伸且相互朝底座軌道1〇之軸線方向分隔開。在台轨道 、上FWI 。滑件30配置有移動台32，移動台32係可朝 搬送方向移動。 私動σ 32係、具有四角形之底板34，以搬送方向觀之， Sr二，度係比底座“之長度短。當移動台32位於處 端料位在：之移轉位置時，處理裝置心側之底板34的 ^係位在與頂板26a之端部大略 32位於移轉位晉拄庙人^ ^田矛夕勤〇 fc執道28之中、’丑^則之底板34的端部係位在台 θ但伴隨移動台2在搬送方向之移動，越過 底座14之端部而移動。 砂切题0 在移動台32之底板34的端 有例如各6個支m“ 隔者預定之間隔賢立 向延伸，並支撐支持裝置s。 宁刀别朝上下方 ^持裝置3係例如空氣浮上式的 V官（due⑽。導# 38 置具有6根 送方向延伸。各導总、 田幵而平行，並分別朝搬 r谷導官38係由2個支擋 管38之個數係對庫 支撐構件％所支撐’導 應在底板34之各端的支擇構件36之數 319819 10 1343354 H管38之横剖面形狀係呈中空之長方形，且 38之上面係平坦。續耸墓其L工〆 水平之基準面。° 糸以同-面定位在 .端，ίΐΓΓ38之例如其下面，連接有氣管(未圖示)之前 ，乱g之根部係連接在送風裝置40。送風裝置4〇係與 過慮裝置42排列配置在底座14上。， ' 在，導管38之上面，遍及全域地形成有複數個喷出口 ，出口 44係排列在導管％之長度方向。當使送 風裝置4G動作時，由過濾裝置42所淨化之&縮空氣係經 由軋官供給至導管38内，壓縮空氣係從各喷出口 44朝大 致上方喷出。藉由該喷出之壓縮空氣，即能以非接觸之方 式將玻璃基板G支持在導管38上。亦即，導管％之上面 係被規定為㈣接狀^支持玻縣板g的支持區域。 再者，移動台32係且有A + u ^ ^ , . '、 上之玻璃基板G朝 “方向移動之移動裝置（手段）τ，移動袭置τ係具有2 :主軌道46。主軌道46係分別經由支架支持在6組支撐 ，件36中兩側的2組支撐構件36，各主軌道則朝搬送 =向延伸。主軌道46之長度係比移動台32之底板^的長 二略長。ϋ盒GS侧之主軌道46的端部係與隸34之端 。山卜致，處理裝fPM之主軌道46的端部係從底板“之 鸲部略突出。 在主軌道46上配置有比主執道46短之副軌道48。副 道4 8係沿著主執道4 6延伸，且可相對於主轨 迗方向移動。 319819 11 吸如t副執道48上安裳有可朝搬送方向移動之吸盤50。 0係可吸著在玻璃基板G之背面，在維持吸著於玻 :基板G之狀態下’可移動於副執道48之兩端部間。 ‘在^各導管38之長度係比移動台K之底板Μ的長 -二’從搬送方向觀之’處理裝置pM側之導管％的端部 势^板34之端部的位置大致—致。因此，匡盒仍側之導 的端礼越過底板34之端部朝匿盒⑺側突出，隨 鲁而^動。32朝匣盒GS側移動，可越過橫構件20之端部 :出。換言之，由導管38之上面㈣定之支持區域係具 =移動台32更㈣盒仍側突出之延伸部，該延伸部係 4動口 32之移動’可越過橫構件2〇之端部而突出。 関於田執道48之可動範圍，處理裝置pM㈣之副軌道 之端4並不會越過主軌道46之端部而突出。另一方面， 盒⑵側之職道48的端部係伴隨副軌道48之移動， 可越過主軌道46之端部而突出’且亦可越過支持裝置S 鲁之導管38的端部而突出。 吸盤5〇之可動範圍係相對於副軌道48遍及其大致全 二口此，吸盤50係藉由吸盤5〇本身、副執道48及移動 ° 32产之移動的組合，從搬送方向觀之，可越過ϋ盒GS側 之導官38的端部及橫構件20之端部而突出。 以下，針對上述基板搬送機之動作（使用方法），以將 坡=基板G從處理裝置ΡΜ搬送至昆盒⑵之情形為例加 以說明。 . 基板搬送機係移動於底座轨道10上，而被定位在欲搬 319819 12 1343354 送玻璃基板G之匣盒Gs與處理裝置PM之間。之後，如 第5圖及第6圖所示’比支持裝置s之導管38位於更上 方的手部Η係移動至處理裝置應側之接收位置。藉此， 手部Η、即支持棒24即進入處理裝£ pM m。然後，藉由 使昇降滑件18上昇，而將破璃基板G載置在支持棒上。 亦即，基板搬运機之手部H係在處理裝置pM内接收玻璃 基板G。 接收玻璃基板〇後，手部Η係如先前之第2圖至第4 圖所不’移動至Et Gs側之昇降位置。然後，昇降滑 18係如第7圖所示，使手部H下降至比支持裝置$之 區域更位於下方為止’當支持棒24横切支持區域時掊 棒24上之玻璃基板G即移動至支持區域上。亦即殖 基板G從手部Η轉移至支持裝置s。 再者，在轉移時，移動台32、副執道48及吸盤5〇 分別位在相對於固定台26、主執道46及副軌道4 = 處理裝置PM侧之位置（轉移位置），手部H之連結 = 會與導㈣或副執道48碰撞。此外，由平面觀 ： 持棒24係位在導管38彼此之間隙或導管38與副執 之間隙，支持棒24係可_由從1方、η Α 道48The ice network, . ^ ^ only the surface of the glass substrate G, ', but also penetrates the glass substrate G and depicts the structure below. Furthermore, a fixed table and % are arranged on the base. Fixed station % base position 319819 9 1343354 In front of the strut 16, the fixed table 26 and the hand H are positioned on the same side with respect to the support 16. In the direction of the transport, the length of the top plate of the fixed table is longer than the length of the base 14, and the end of the top plate 26a on the side of the cassette GS protrudes from the end of the base 14. However, the protruding length of the top plate 26a is shorter than the protruding length of the cross member 20. > ★ Two table rails 28 are disposed on the top plate 26a of the fixing table 26, and the D-tracks 28 such as 忒 are extended across the entire length of the top plate 26a toward the conveying direction and toward the axis of the base rail 1 The directions are separated. On the track, on the FWI. The slider 30 is provided with a moving table 32, and the moving table 32 is movable in the conveying direction. The private movement σ 32 system has a square bottom plate 34, which is viewed in the direction of transport. The Sr is two degrees shorter than the length of the base. When the mobile station 32 is at the transfer position of the ground end, the processing device core The side of the bottom plate 34 is located at the end of the top plate 26a, and is located at the end of the floor plate 34 of the 拄 矛 〇 〇 ^ ^ ^ ^ ^ ^ 、 At the stage θ, the movement of the mobile station 2 in the transport direction moves over the end of the base 14. The sand cutting problem 0 is, for example, six branches at the end of the bottom plate 34 of the mobile station 32. Extends vertically and supports the support device s. Ning knife does not face up and down ^ holding device 3 series, such as air floating type V official (due (10). Guide # 38 set has 6 directions of extension. Each guide, the field is parallel, and respectively moved to the valley guide 38 The number of the support members 36 supported by the library support member % is supported by the number of the two support pipes 38. The number of the support members 36 at each end of the bottom plate 34 is 319819 10 1343354. The cross-sectional shape of the tube 38 is hollow and rectangular. And the top of the 38 is flat. Continue to hang the tomb of the horizontal plane of the L work. ° 糸 同 同 同 同 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位The air supply device 40 is connected to the air supply device 40. The air supply device 4 and the filter device 42 are arranged side by side on the base 14. ' On the upper surface of the duct 38, a plurality of discharge ports are formed over the entire area, and the outlets 44 are arranged in the catheter. In the longitudinal direction, when the air blowing device 4G is operated, the air that is purified by the filtering device 42 is supplied into the duct 38 through the rolling mill, and the compressed air is discharged from the respective discharge ports 44 upward. Compressed air, in a non-contact manner The glass substrate G is supported on the catheter 38. That is, the upper portion of the catheter is defined as a support region for supporting the glass plate g. Further, the mobile station 32 is provided with A + u ^ ^ , . ', the upper glass substrate G moves in the "moving device (means) τ, the moving attack τ system has 2: the main rail 46. The main rail 46 is supported by the brackets in the six groups of supports, respectively, on both sides of the member 36 The two sets of support members 36 each extend toward the transport=direction. The length of the main track 46 is slightly longer than the length of the bottom plate of the mobile station 32. The end of the main track 46 on the side of the cassette GS is 34. In the end, the end of the main rail 46 of the processing fPM is slightly protruded from the bottom portion of the bottom plate. The sub-track 48 which is shorter than the main road 46 is disposed on the main rail 46. It extends along the main roadway 4 6 and can move relative to the main rail 。. 319819 11 Suction t 副 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 48 319 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳 裳The back side is movable between the two ends of the sub-way 48 while maintaining the sorption of the glass: substrate G. 'The length of each conduit 38 is The length of the bottom plate 移动 of the moving table K is viewed from the direction of the transporting device. The position of the end portion of the end plate 34 of the conduit on the processing device pM side is substantially the same. Therefore, the end of the side of the cassette is still The end of the slab over the bottom plate 34 protrudes toward the concealed box (7) side, and moves with the shackle. 32 moves toward the side of the cassette GS, and can pass over the end of the cross member 20: in other words, the support area is defined by the upper surface of the duct 38 (four) The system is more than the extension of the movable portion 32, and the movement of the extension portion 4 of the movable portion 32 can protrude beyond the end of the horizontal member 2〇. The movable range of the field road 48 is processed. The end 4 of the sub-track of pM (four) does not protrude beyond the end of the main rail 46. On the other hand, the end portion of the service path 48 on the side of the casing (2) can be protruded beyond the end portion of the main rail 46 with the movement of the sub-track 48, and can also protrude beyond the end portion of the duct 38 of the supporting device S. The movable range of the suction cup 5 is substantially the same as the sub-track 48, and the suction cup 50 is viewed from the transport direction by the combination of the suction cup 5〇 itself, the auxiliary road 48, and the movement of the movement 32. It can protrude beyond the end of the guide 38 of the cassette GS side and the end of the cross member 20. Hereinafter, a description will be given of an example in which the operation of the substrate transfer machine (the method of use) is carried out by transferring the slope=substrate G from the processing apparatus ΡΜ to the casket (2). The substrate transfer machine is moved on the base rail 10 and positioned between the cassette Gs to which the glass substrate G is to be moved 319819 12 1343354 and the processing apparatus PM. Thereafter, as shown in Figs. 5 and 6, the hand Η which is located above the conduit 38 of the support device s moves to the receiving position on the side of the processing device. Thereby, the hand Η, that is, the support rod 24, enters the processing package. Then, the glass substrate G is placed on the support rod by raising the lift slider 18. That is, the hand H of the substrate transporter receives the glass substrate G in the processing apparatus pM. After receiving the glass substrate ,, the hand Η is moved to the lifting position of the Et Gs side as in the previous FIGS. 2 to 4 . Then, as shown in FIG. 7, the lifting and lowering 18 system lowers the hand H to be lower than the area of the support device $. 'When the support bar 24 crosses the support region, the glass substrate G on the crowbar 24 moves to Support area. That is, the substrate G is transferred from the hand to the support device s. Further, at the time of the transfer, the mobile station 32, the sub-way 48, and the suction cup 5 are respectively positioned at the position (transfer position) with respect to the fixed table 26, the main road 46, and the sub-track 4 = the processing device PM side, the hand H's link = will collide with the guide (4) or the deputy road 48. Further, from the plan view: the holding rod 24 is positioned in the gap between the ducts 38 or the gap between the duct 38 and the sub-holding, and the supporting rod 24 can be made from one side, η Α 48
4〜上方進人料間隙而橫W 在轉移時，從導管38之喷出口44 礼，被轉移至支縣置s之玻縣板G係藉 ^ :接觸方式被支持。另一方面，吸盤5〇係相對於:3以 玻璃基板6，從下方吸著於其處料置雨側之；^夕之 319819 13 1343354 將玻璃基板G轉移至支持裝置5後，如第8圖及第9 圖所示，移動台32係移動至岐台26上之最靠㈣盒⑺ ?側之位置，支持裝置S之導管38的端部係配置在匣盒QS .之附近。此外，隨著移動台32之移動，破璃基板係盘 •支持區域-同移動至£盒叫則’玻璃基板g之端部亦配 置在匣盒GS之附近。 之後，如第10圖及第丨丨圖所示，副執道48係移動至 •主執道46上之最靠近更盒GS側之位置。隨著副執道料 之移動，玻璃基板G係一面相對於支持區域相對地移動， 面朝匣盒GS側移動，然後玻璃基板G之一部分越過支 持區域之端部（前端）而進入匣盒GS内。 在匣盒GS内，配置有用以授受玻璃基板〇之匣盒用 基板支持裝置60，匣盒用基板支持裝置6〇係支持進入匣 盒GS内之玻璃基板G的一部分。匣盒用基板支持裝置 係由例如空氣浮上裝置所構成。 馨接著，如第12圖及第13圖所示，吸盤5〇係移動至副 執道判上之最靠近匣盒GS側之位置。隨著吸盤％之移 動，玻璃基板G係一面相對於支持區域進一步相對地移 動，一面朝匣盒GS側移動，最後玻璃基板G整體進入匣 左G S内並由S盒用基板支持裝置6 0所支持。然後，藉 由使匣i GS稍微上昇，吸盤50即從玻璃基板g脱離，而 將玻璃基板G交付至匣盒GS。 以上係說明將玻璃基板G從處理裝置PM側搬送至g 盒GS側之情形。將收容在匣盒Gs内之玻璃基板g予以 319819 14 1343354 .4 接收並搬送，並交付給處理裝置PM時，使上述順序朝反 方向進行即可。 根據上述基板搬送機，在其與匣盒GS之間授受玻璃 基板G時，移動台32係位在匣盒仍側，伴隨於此，比移 動台32更突出之支持區域的延伸部係接近匣盒gs。因 此’匣盒GS與支持區域的間隔會縮短，而防止在支持區 域與E盒GS之間被接收交付之玻璃基板G的魅曲。结果， 根據該基板搬送機，可順暢地在其魅盒Gs之間進^ 璃基板G之授受。 :者’在上述基板搬送機中，支持裝置s僅配 果，該基板㈣卿具㈣單之構成。特別 二在該基板搬送機中，用以將壓縮空氣供 之氣管的配管係簡單的。 等g 本發明並非限定在上述承 變形。 Λ鈀形癌，可進行各種之 置，實施形態中，支持裝置$雖為空氣浮上穿 亦可為稭由超音波以非接觸方美' 超音波浮上裝置。或者，*姓壯 符破璃基板G之 構成之滾輪列。滾輪列係由可為由複數個滾輪 支持破璃基板G，且由童f妾觸於破璃基板G之背面而 亦可使滾輪成為可旋轉I固=來規定支持區域。此時， 丁。 使滾輪列兼作為移動裝置 在一實施形態令，基板搬 之2個手部，但手 ，〃有相互地上下隔開 于。P Η亦可僅為！個。 319819 15 1343354 然而，若具有21 固手部H，利用-方之手部Η從處理 裝置ΡΜ側接收玻璃基板G後’亦可將預先載置於另— 之手部Η的玻璃基板G交付給處理裝置⑽。亦即，以户 理裝置ΡΜ處理玻璃基板G期間，可㈣盒gs接收接^ 要處理之玻璃基板G，iU㈣破縣板G預先載置於 Η。藉此，縮減玻璃基板G之搬送時間，使液晶電視之二 產性提升。 此外’即使具有2個手部η，由於支持裝置s僅配置 在移動台32上，因此氣管等之構成不會變得複雜。 最後，本發明之基板搬送機亦可適用在t聚電視等之 生產系統，當然亦可適用在玻璃基板G以外之基板。亦即， 基板搬送機相互授受基板之對向機器並未限定在處理裝 或厘·盒。 【圖式簡單說明】 第1圖係液晶面板之生產系統之一部分的概略圖。 第2圖係從處理裝置側觀看適用於第]圖之系統的— 實施形態之基板搬送機的側面圖。 第3圖係從上方觀看第2圖之基板搬送機的平面圖。 第4圖係以第2圖之IV-IV線將，一部分切開之正面圖。 第5圖係從上方觀看第2圖之基板搬送機在其與處理 裝置之間授受玻璃基板時之狀態的平面圖。 第6圖係將第5圖之狀態的基板搬送機局部切開之正 面圖。 第7圖係在第2圖之基板搬送機中，以沿著底座軌道 319819 16 ^43354 之方向觀看玻螭基板從手部轉移至支持裝置後之狀態的平 面圖。 第8圖係在第2圖之基板搬送機中，從上方觀看移動 台移動至E盒側之狀態的平面圖。 第9圖係將第8圖之狀態的基板搬送機局部切開之正 面圖。 第10圖係在第2圖之基板搬送機中，從上方觀看副執 道移動至匣盒側之狀態的平面圖。 第11圖係將第10圖之狀態的基板搬送機局部切開之 正面圖。 第12圖係從上方觀看第2圖之基板搬送機在其與匿各 之間授受玻璃基板時之狀態的平面圖。 第13圖係將第12圖之狀態的基板搬送機局部切開之 正面圖。 【主要元件符號說明】 10 底座軌道 12 底座滑件 14 底座 16 支柱 18 昇降滑件 20 橫構件 20a 端部 20b 另一端部 22 連結板 24 支持棒 26 固定台 26a 頂板 28 台執道 30 台滑件 32 移動台 34 底板 36 支撐構件 38 導管 319819 17 1343354 40 送風裝置 42 過濾裝置 44 喷出口 46 主軌道 48 副軌道 50 吸盤 60 匣盒用基板支持裝置 GS 匣盒 Η 手部 PM 處理裝置 S 支持裝置 T 移動裝置 18 3198194~ The upper part enters the gap of the material and the horizontal W is transferred from the discharge port 44 of the pipe 38 to the G-line of the glass plate of the branch of the county. The contact mode is supported. On the other hand, the suction cup 5 is attached to the rain side of the glass substrate 6 with respect to 3: from the lower side; 319819 13 1343354, which is transferred to the support device 5, as shown in the eighth As shown in Fig. 9 and Fig. 9, the mobile station 32 is moved to the position on the most (four) box (7) side of the platform 26, and the end of the duct 38 of the support device S is disposed in the vicinity of the cassette QS. Further, as the mobile station 32 moves, the glass substrate tray/support area-moving to the box is the end of the glass substrate g, which is also disposed near the cassette GS. Thereafter, as shown in Fig. 10 and the figure, the sub-way 48 is moved to the position on the main road 46 which is closest to the side of the further cassette GS. As the auxiliary substrate moves, the glass substrate G moves relative to the support region and moves toward the cassette GS side, and then one of the glass substrates G passes over the end (front end) of the support region to enter the cassette GS. Inside. In the cassette GS, a cassette supporting device 60 for receiving a glass substrate is disposed, and the cassette supporting device 6 supports a part of the glass substrate G which enters the cassette GS. The substrate supporting device for the cassette is constituted by, for example, an air floating device. Xin, as shown in Figures 12 and 13, the suction cup 5 is moved to the position closest to the side of the cassette GS. As the suction cup % moves, the glass substrate G moves relative to the support region and moves toward the cassette GS side. Finally, the entire glass substrate G enters the left GS and is supported by the S-box substrate support device 60. Supported. Then, by slightly raising the 匣i GS, the chuck 50 is detached from the glass substrate g, and the glass substrate G is delivered to the cassette GS. The above describes the case where the glass substrate G is transferred from the processing apparatus PM side to the g-box GS side. When the glass substrate g accommodated in the cassette Gs is received and transported to 319819 14 1343354 .4 and delivered to the processing apparatus PM, the above sequence may be reversed. According to the above-described substrate transfer machine, when the glass substrate G is transferred between the cassette and the cassette GS, the mobile unit 32 is positioned on the side of the cassette, and accordingly, the extension of the support area which is more prominent than the movement 32 is close to the cassette. Box gs. Therefore, the interval between the cassette GS and the support area is shortened, and the embossing of the glass substrate G received and delivered between the support area and the E-box GS is prevented. As a result, according to the substrate transfer machine, the substrate G can be smoothly transferred between the charm boxes Gs. In the above-described substrate transfer machine, the support device s is only provided with a configuration, and the substrate (four) is a single device. In particular, in the substrate transfer machine, the piping for supplying compressed air to the air pipe is simple. The present invention is not limited to the above-described deformation. Palladium-shaped carcinoma can be used in various ways. In the embodiment, the support device $ is air-floating or can be used as a non-contact Fangmei' ultrasonic floating device. Or, the name of the wheel is the roller column of the glass substrate G. The roller row is defined by a plurality of rollers supporting the glass substrate G, and the roller is made to be rotatable and fixed by the child. At this time, Ding. The roller row is also used as a moving device. In one embodiment, the substrate is moved by two hands, but the hands and the fingers are spaced apart from each other. P Η can also be just! One. 319819 15 1343354 However, if there is a 21-handed part H, the glass substrate G is received from the side of the processing apparatus by the hand of the side, and the glass substrate G previously placed on the other hand can be delivered to the glass substrate G. Processing device (10). That is, during the processing of the glass substrate G by the user equipment, the (4) box gs receives the glass substrate G to be processed, and the iU (4) broken county plate G is pre-loaded on the crucible. Thereby, the transport time of the glass substrate G is reduced, and the productivity of the liquid crystal television is improved. Further, even if there are two hand portions η, since the supporting device s is disposed only on the moving table 32, the configuration of the air pipe or the like does not become complicated. Finally, the substrate transfer machine of the present invention can also be applied to a production system such as a t-poly TV, and can of course be applied to a substrate other than the glass substrate G. That is, the opposing machine for transferring the substrate to each other by the substrate transfer machine is not limited to the processing device or the PCT box. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a part of a production system of a liquid crystal panel. Fig. 2 is a side view of the substrate transfer machine of the embodiment, which is applied to the system of Fig. 1 from the processing apparatus side. Fig. 3 is a plan view of the substrate transfer machine of Fig. 2 as seen from above. Fig. 4 is a front view of a portion cut away from line IV-IV of Fig. 2; Fig. 5 is a plan view showing a state in which the substrate conveyer of Fig. 2 receives and receives a glass substrate between the substrate and the processing apparatus as viewed from above. Fig. 6 is a front elevational view showing a portion of the substrate transfer machine in the state of Fig. 5. Fig. 7 is a plan view showing a state in which the glass substrate is transferred from the hand to the supporting device in the direction of the base rail 319819 16 ^ 43354 in the substrate transfer machine of Fig. 2. Fig. 8 is a plan view showing a state in which the moving table moves to the E-box side from the upper side in the substrate transfer machine of Fig. 2; Fig. 9 is a front elevational view showing a portion of the substrate transfer machine in the state of Fig. 8. Fig. 10 is a plan view showing a state in which the sub-lane moves to the cassette side from the upper side in the substrate transfer machine of Fig. 2; Fig. 11 is a front elevational view showing the substrate transfer machine in the state of Fig. 10 partially cut away. Fig. 12 is a plan view showing a state in which the substrate conveyer of Fig. 2 receives and receives a glass substrate between the substrate and the substrate. Fig. 13 is a front elevational view showing the substrate transfer machine in the state of Fig. 12 partially cut away. [Main component symbol description] 10 Base rail 12 Base slider 14 Base 16 Pillar 18 Lifting slider 20 Cross member 20a End 20b Other end 22 Connecting plate 24 Support rod 26 Fixing table 26a Top plate 28 Table Road 30 slides 32 Mobile station 34 Base plate 36 Support member 38 Catheter 319819 17 1343354 40 Air supply unit 42 Filter unit 44 Ejection port 46 Main rail 48 Sub-track 50 Suction cup 60 Substrate support unit GS 匣 Box Η Hand PM processing unit S Support unit T Mobile device 18 319819