CN101446754A - 光掩模版、制作光掩模版的方法及曝光的方法 - Google Patents
光掩模版、制作光掩模版的方法及曝光的方法 Download PDFInfo
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- CN101446754A CN101446754A CNA2007101710879A CN200710171087A CN101446754A CN 101446754 A CN101446754 A CN 101446754A CN A2007101710879 A CNA2007101710879 A CN A2007101710879A CN 200710171087 A CN200710171087 A CN 200710171087A CN 101446754 A CN101446754 A CN 101446754A
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CNA2007101710879A CN101446754A (zh) | 2007-11-27 | 2007-11-27 | 光掩模版、制作光掩模版的方法及曝光的方法 |
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CNA2007101710879A CN101446754A (zh) | 2007-11-27 | 2007-11-27 | 光掩模版、制作光掩模版的方法及曝光的方法 |
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CN101446754A true CN101446754A (zh) | 2009-06-03 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109799685A (zh) * | 2018-11-30 | 2019-05-24 | 无锡市好达电子有限公司 | 一种声表面波滤波器的前道晶圆光刻方法 |
CN117631442A (zh) * | 2023-11-08 | 2024-03-01 | 广州新锐光掩模科技有限公司 | 光掩模、光掩模制作方法及光刻方法 |
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2007
- 2007-11-27 CN CNA2007101710879A patent/CN101446754A/zh active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109799685A (zh) * | 2018-11-30 | 2019-05-24 | 无锡市好达电子有限公司 | 一种声表面波滤波器的前道晶圆光刻方法 |
CN117631442A (zh) * | 2023-11-08 | 2024-03-01 | 广州新锐光掩模科技有限公司 | 光掩模、光掩模制作方法及光刻方法 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20121129 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20121129 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation Applicant after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation |
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C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20090603 |