CN112788827B - Gas discharge method for enhancing plasma intensity - Google Patents
Gas discharge method for enhancing plasma intensity Download PDFInfo
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- CN112788827B CN112788827B CN201911083591.2A CN201911083591A CN112788827B CN 112788827 B CN112788827 B CN 112788827B CN 201911083591 A CN201911083591 A CN 201911083591A CN 112788827 B CN112788827 B CN 112788827B
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000002708 enhancing effect Effects 0.000 title claims abstract description 13
- 239000002131 composite material Substances 0.000 claims abstract description 16
- 230000005284 excitation Effects 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims abstract description 10
- 238000010168 coupling process Methods 0.000 claims abstract description 10
- 238000005859 coupling reaction Methods 0.000 claims abstract description 10
- 230000002452 interceptive effect Effects 0.000 claims abstract description 10
- 230000009977 dual effect Effects 0.000 claims abstract description 9
- 239000004020 conductor Substances 0.000 claims description 6
- 239000003989 dielectric material Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 abstract description 39
- 239000002245 particle Substances 0.000 abstract description 9
- 230000009471 action Effects 0.000 abstract description 4
- 230000005684 electric field Effects 0.000 description 14
- 230000000694 effects Effects 0.000 description 5
- 230000003993 interaction Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 2
- 238000003889 chemical engineering Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
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Abstract
The embodiment of the invention provides a gas discharge method for enhancing plasma intensity, and belongs to the technical field of plasmas. The method is implemented based on a composite electrode discharge device, the method comprising: providing drive energy to a low voltage electrode and a second high voltage electrode of the device by a first high voltage drive power supply system of a dual power supply drive system to generate a radial discharge between the low voltage electrode and the second high voltage electrode; and providing drive energy to the low voltage electrode and the first high voltage electrode of the device by a second high voltage drive power supply system of the dual power supply drive system to generate an axial discharge between the low voltage electrode and the first high voltage electrode; under the coupling excitation action of axial discharge and radial discharge, the charged particles with different movement directions generated by the two discharge modes are strengthened to collide, so that high-density plasma is excited and generated in an interactive discharge area where the axial discharge and the radial discharge are generated simultaneously.
Description
Technical Field
The invention relates to the technical field of plasmas, in particular to a gas discharge method for enhancing plasma intensity.
Background
Atmospheric pressure gas discharge is one method of generating low temperature plasma, and the process mainly comprises the step of generating a series of low temperature plasmas with high energy by driving the gas discharge through an external electric field. The low-temperature plasma has high reactivity and has good application prospect in the fields of fine chemical engineering, materials, environmental protection and the like. The existing method for enhancing the strength and energy of the gas discharge plasma is mostly based on the technical approach of electrode modification, the process complexity is improved, and the durable wear resistance of the modified electrode is still to be studied. Therefore, in order to further improve the application effect of low-temperature plasma in these fields, a strategy for improving the generation efficiency and reactivity of plasma in the gas discharge process is urgently needed.
Disclosure of Invention
The embodiment of the invention aims to provide a gas discharge method for enhancing plasma intensity, which is characterized in that an external driving power supply system is reasonably arranged in a connection mode with a high-voltage electrode and a high-voltage electrode to respectively generate axial discharge and radial discharge with a discharge interaction area, so that high-density plasma is excited and generated in the interaction discharge area which simultaneously generates the axial discharge and the radial discharge.
In order to achieve the above object, an embodiment of the present invention provides a gas discharge method of enhancing plasma intensity, the method being implemented based on a composite electrode discharge device having an outer cylinder, the device comprising: the low-voltage electrode is circumferentially attached to the outer surface of the outer cylinder; the first high-voltage electrode is adhered to the outer surface of the outer cylinder in a surrounding manner, is positioned at one side of the low-voltage electrode and is parallel to the low-voltage electrode; a second high voltage electrode located on an axis of the device, the method comprising: providing drive energy for the low voltage electrode and the second high voltage electrode by a first high voltage drive power supply system of a dual power supply drive system to generate a radial discharge between the low voltage electrode and the second high voltage electrode; and providing drive energy for the low voltage electrode and the first high voltage electrode by a second high voltage drive power supply system of the dual power drive system to generate a first axial discharge between the low voltage electrode and the first high voltage electrode; the first axial discharge and the radial discharge are subjected to coupling excitation, and high-density plasma is excited in a first interactive discharge area for simultaneously generating the axial discharge and the radial discharge.
Optionally, the first high-voltage driving power supply system and the second high-voltage driving power supply system form a dual-power supply driving system, the first high-voltage driving power supply system is electrically connected with the low-voltage electrode and the second high-voltage electrode respectively, and the second high-voltage driving power supply system is electrically connected with the low-voltage electrode and the first high-voltage electrode respectively.
Optionally, the composite electrode discharging device further includes a third high-voltage electrode, which is attached around the outer surface of the outer cylinder, is located at the other side of the low-voltage electrode and is parallel to the low-voltage electrode, and the second high-voltage driving power supply system is electrically connected with the third high-voltage electrode.
Optionally, the method further comprises: and providing driving energy for the low-voltage electrode and the third high-voltage electrode by the second high-voltage driving power supply system to generate a second axial discharge between the low-voltage electrode and the third high-voltage electrode, wherein the second axial discharge and the radial discharge generate coupling excitation, and high-density plasma is excited and generated in a second interactive discharge area which simultaneously generates the axial discharge and the radial discharge.
Optionally, the first high voltage electrode and the third high voltage electrode are respectively spaced from the low voltage electrode at the same distance.
Optionally, the first high-voltage electrode and the third high-voltage electrode are flatly attached to the outer surface of the outer cylinder, and the edges of the electrodes are flat.
Optionally, the second high-voltage electrode includes: an inner cylinder parallel and coaxial with the outer cylinder; and the conductor medium is filled in the inner layer cylinder, and the first high-voltage driving power supply system is electrically connected with the conductor medium.
Optionally, the inner cylinder and the outer cylinder are composed of an insulating medium material.
Optionally, the composite electrode discharge device further comprises a fixing member for fixing the outer cylinder and the second high-voltage electrode.
Optionally, the fixing member is made of an insulating dielectric material.
According to the technical scheme, the double-power-supply driving system is used for driving the composite electrode with the special structure to realize the composite of axial discharge and radial discharge, so that high-density plasma is excited and generated in an interactive discharge area where the axial discharge and the radial discharge are generated simultaneously.
Additional features and advantages of embodiments of the invention will be set forth in the detailed description which follows.
Drawings
The accompanying drawings are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain, without limitation, the embodiments of the invention. In the drawings:
fig. 1 is a schematic diagram of a composite electrode discharge device on which a gas discharge method for enhancing plasma intensity is based according to an embodiment of the present invention.
Description of the reference numerals
1. First high-voltage driving power supply system of high-voltage electrode 3 of fixing part 2
4. High-voltage electrode 5 high-voltage electrode 6 discharge gap
7. Axial electric field 8 radial electric field 9 second high-voltage driving power supply system
10. Inner-layer cylinder and outer-layer cylinder of high-voltage electrode 11
Detailed Description
The following describes the detailed implementation of the embodiments of the present invention with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
Example 1
Fig. 1 is a schematic view of a composite electrode discharge apparatus based on which a gas discharge method for enhancing plasma intensity is provided according to an embodiment of the present invention, the composite electrode discharge apparatus having an outer cylinder, the apparatus comprising: a low-voltage electrode 4 which is adhered around the outer surface of the outer cylinder; the high-voltage electrode 5 is adhered to the outer surface of the outer cylinder in a surrounding manner, is positioned at one side of the high-voltage electrode 4 and is parallel to the high-voltage electrode 4; the high voltage electrode 10 is located on the axis of the device.
The gas discharge method for enhancing the plasma intensity provided by the embodiment of the invention comprises the following steps: providing driving energy to the low voltage electrode 4 and the second high voltage electrode 10 by a first high voltage driving power supply system 3 of a dual power supply driving system to generate a radial discharge between the low voltage electrode 4 and the high voltage electrode 10; and driving energy is provided to the low voltage electrode 4 and the high voltage electrode 5 by a second high voltage driving power supply system 9 of the dual power supply driving system to generate an axial discharge between the low voltage electrode 4 and the high voltage electrode 5; the axial discharge and the radial discharge are subjected to coupling excitation, and high-density plasma is excited in an interactive discharge area where the axial discharge and the radial discharge are generated simultaneously.
Specifically, the high-voltage electrode 4 and the high-voltage electrode 5 are parallel and are respectively attached to the outer surface of the outer cylinder at a certain distance, after the driving energy is obtained by the high-voltage electrode 4 and the high-voltage electrode 5, an axial electric field 7 parallel to the axis of the outer cylinder of the device is formed between the two electrodes in the cylinder, and axial discharge excitation is generated to generate plasma. It will be appreciated that the plasma generated between the electrodes will also extend beyond the boundary of the axial electric field 7, forming an axial discharge region extending beyond the axial electric field.
The high-voltage electrode 10 is located on the axis of the device and is vertical to the high-voltage electrode 4 in space, after the high-voltage electrode 10 and the high-voltage electrode 4 obtain driving energy, an electric field in the radial direction is formed between the two electrodes in the cylinder, and radial discharge excitation is generated to generate plasma.
The axial discharge area and the radial discharge area are provided with overlapping areas in space, namely interaction discharge areas, and charged particles with different movement directions generated by the two discharge modes collide under the coupling excitation action of the axial discharge and the radial discharge, so that more high-energy active particles are induced to be generated, the active particle duty ratio in the interaction discharge area is increased, the plasma energy and the activity in the plasma interaction area are improved, and high-density and high-activity plasma is obtained.
The gas discharge method is implemented based on a composite electrode discharge device, wherein the outer surface of an outer cylinder of the composite electrode discharge device is respectively and circumferentially coated with a low-voltage electrode and a high-voltage electrode which is positioned on one side of the low-voltage electrode and is parallel to the low-voltage electrode, so that axial discharge is generated between the low-voltage electrode and the high-voltage electrode after driving energy is obtained by the low-voltage electrode and the high-voltage electrode; the axial line of the device comprises another high-voltage electrode, radial discharge is generated between the low-voltage electrode and the high-voltage electrode after driving energy is obtained, and charged particles with different movement directions generated by the two discharge modes collide under the coupling excitation action of the axial discharge and the radial discharge, so that high-density plasma is generated in an interactive discharge area for simultaneously generating the axial discharge and the radial discharge.
Example two
Based on the method for enhancing plasma intensity of the gas discharge according to the above embodiment, another embodiment of the present invention further provides a method for enhancing plasma intensity of a gas discharge, which has all the features of the above embodiment, and the method according to the embodiment of the present invention is further implemented based on a dual power driving system, including: the first high-voltage driving power supply system 3 is electrically connected with the high-voltage electrode 4 and the high-voltage electrode 10 respectively and is used for providing driving energy for the high-voltage electrode 4 and the high-voltage electrode 10; and a second high voltage driving power supply system 9 electrically connected to the high voltage electrode 4 and the high voltage electrode 5, respectively, for providing driving energy to the high voltage electrode 4 and the high voltage electrode 5.
The first high-voltage driving power supply system 3 and the second high-voltage driving power supply system 9 both output alternating current, and the two power supply systems are independent of each other and do not affect each other in working.
The high voltage electrode 10 may comprise an inner cylinder, parallel and coaxial with the outer cylinder; and a conductor medium filled in the inner cylinder, and the first high-voltage driving power supply system 3 is electrically connected with the conductor medium so as to provide driving energy for the high-voltage electrode 10.
Wherein the inner and outer cylinders 11 are of insulating dielectric material.
The apparatus further comprises: the high-voltage electrode 2 is adhered around the outer surface of the outer cylinder, is positioned on the other side of the low-voltage electrode 4 and is parallel to the low-voltage electrode 4. After the low-voltage electrode 4, the high-voltage electrode 2 and the high-voltage electrode 10 respectively obtain driving energy, axial discharge generated between the low-voltage electrode 4 and the high-voltage electrode 2 and radial discharge generated between the low-voltage electrode 4 and the high-voltage electrode 10 generate coupling excitation, and high-density plasma is excited in an interactive discharge area which simultaneously generates axial discharge and radial discharge.
Similar to the principle that the axial discharge phenomenon occurs between the low-voltage electrode 4 and the high-voltage electrode 5 in the previous embodiment, the low-voltage electrode 4 and the high-voltage electrode 2 are parallel and spaced at a certain distance, and after the low-voltage electrode 4 and the high-voltage electrode 2 obtain driving energy, an axial electric field 7 parallel to the axis of the outer cylinder of the device is formed between the two electrodes in the cylinder, and axial discharge occurs to generate plasma. It will be appreciated that in the discharge gap 6 between the outer cylinder and the high voltage electrode, the plasma generated between the two electrodes will also extend beyond the boundary of the axial electric field 7, forming an axial discharge region extending beyond the axial electric field.
The second high voltage driving power supply system 9 is also electrically connected to the high voltage electrode 2 for providing driving energy to the high voltage electrode 2. It will be appreciated that the ac power output by the second high voltage driving power supply system 9 provides driving energy for both the high voltage electrode 2 and the high voltage electrode 5, so that the axial electric fields formed by the high voltage electrode 2 and the high voltage electrode 4 and the high voltage electrode 5 and the high voltage electrode 4 are opposite in direction.
The axial electric field formed by the high-voltage electrode 2, the high-voltage electrode 5 and the high-voltage electrode 4 and the interactive electric field formed by the high-voltage electrode 10 and the high-voltage electrode 4 generate overlapping action on charged particles in a plasma in-situ excitation area, so that effective collision among the particles can be enhanced.
To ensure that an axial discharge is simultaneously generated, the spacing between the high-voltage electrode 2 and the high-voltage electrode 4 is the same as the spacing between the high-voltage electrode 5 and the high-voltage electrode 4. In addition, the high-voltage electrode 5 and the high-voltage electrode 2 are flatly attached to the outer surface of the outer cylinder, and the edges of the electrodes are flat.
The composite electrode discharge device further comprises a fixing piece 1 for fixing the outer layer cylinder and the high-voltage electrode, wherein the fixing piece 1 is made of an insulating medium material.
The embodiment utilizes a dual-power driving system to drive gas discharge to enhance the strength and reactivity of low-temperature plasma, and combines a composite electrode combination mode with a special structure with the dual-power driving system to provide driving energy, so that the gas forms coupling interactive electric field distribution generated by the combination of axial discharge and radial discharge in the discharge process, wherein the low-voltage electrode and the high-voltage electrode generate axial discharge between the low-voltage electrode and the high-voltage electrode after obtaining the driving energy provided by one power supply in the dual-power driving system; and the other high-voltage electrode on the axis of the low-voltage electrode and the device generates radial discharge between the low-voltage electrode and the other high-voltage electrode after obtaining the driving energy provided by the other power supply in the dual-power supply driving system, and under the coupling excitation effect of axial discharge and radial discharge, the charged particles with different movement directions generated by the two discharge modes are strengthened to collide, the ionization degree of gas molecules in a plasma excitation area is improved, the energy and the duty ratio of active particles are increased, and the purposes of improving the reactivity and the strength of the plasma are further achieved, so that a technical approach is provided for improving the application effect of low-temperature plasma.
The foregoing details of the optional implementation of the embodiment of the present invention have been described in detail with reference to the accompanying drawings, but the embodiment of the present invention is not limited to the specific details of the foregoing implementation, and various simple modifications may be made to the technical solution of the embodiment of the present invention within the scope of the technical concept of the embodiment of the present invention, and these simple modifications all fall within the protection scope of the embodiment of the present invention.
In addition, the specific features described in the above embodiments may be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, various possible combinations of embodiments of the present invention are not described in detail.
Those skilled in the art will appreciate that all or part of the steps in implementing the methods of the embodiments described above may be implemented by a program stored in a storage medium, including instructions for causing a single-chip microcomputer, chip or processor (processor) to perform all or part of the steps of the methods described in the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In addition, any combination of various embodiments of the present invention may be performed, so long as the concept of the embodiments of the present invention is not violated, and the disclosure of the embodiments of the present invention should also be considered.
Claims (9)
1. A method of enhancing plasma intensity of a gas discharge, the method being practiced based on a composite electrode discharge apparatus having an outer cylinder, the apparatus comprising:
a low-voltage electrode (4) which is adhered around the outer surface of the outer cylinder;
the first high-voltage electrode (5) is circumferentially attached to the outer surface of the outer cylinder, is positioned on one side of the low-voltage electrode (4) and is parallel to the low-voltage electrode (4);
a second high voltage electrode (10) located on the axis of the device,
the method comprises the following steps:
-providing driving energy for the low voltage electrode (4) and the second high voltage electrode (10) by a first high voltage driving power supply system (3) of a dual power supply driving system to generate a radial discharge between the low voltage electrode (4) and the second high voltage electrode (10); and
-providing driving energy for the low voltage electrode (4) and the first high voltage electrode (5) by a second high voltage driving power supply system (9) of the dual power supply driving system to generate a first axial discharge between the low voltage electrode (4) and the first high voltage electrode (5);
the first axial discharge and the radial discharge are subjected to coupling excitation, and high-density plasma is excited in a first interactive discharge area for simultaneously generating the axial discharge and the radial discharge;
the composite electrode discharge device also comprises a third high-voltage electrode (2) which is adhered to the outer surface of the outer cylinder in a surrounding manner, is positioned at the other side of the low-voltage electrode (4) and is parallel to the low-voltage electrode (4),
wherein the second high-voltage driving power supply system (9) is electrically connected with the third high-voltage electrode (2).
2. Method according to claim 1, characterized in that the first high voltage driving power supply system (3) is electrically connected to the low voltage electrode (4) and the second high voltage electrode (10), respectively, and the second high voltage driving power supply system (9) is electrically connected to the low voltage electrode (4) and the first high voltage electrode (5), respectively.
3. The method according to claim 1, wherein the method further comprises:
driving energy is provided to the low voltage electrode (4) and the third high voltage electrode (2) by the second high voltage driving power supply system (9) to generate a second axial discharge between the low voltage electrode (4) and the third high voltage electrode (2),
wherein said second axial discharge and said radial discharge are coupled to each other to generate a high density plasma in a second alternating discharge zone where said axial discharge and said radial discharge are simultaneously generated.
4. Method according to claim 1, characterized in that the first high voltage electrode (5) and the third high voltage electrode (2) are each at the same pitch as the voltage electrode (4).
5. The method according to claim 1, characterized in that the first high voltage electrode (5) and the third high voltage electrode (2) are spread flat on the outer surface of the outer cylinder and the electrode edges are flat.
6. The method of claim 1, wherein the step of determining the position of the substrate comprises,
the second high voltage electrode (10) comprises:
an inner cylinder parallel and coaxial with the outer cylinder;
and a conductor medium filled in the inner cylinder, wherein the first high-voltage driving power supply system (3) is electrically connected with the conductor medium.
7. The method of claim 6, wherein the inner cylinder and the outer cylinder are comprised of an insulating dielectric material.
8. The method according to claim 1, wherein the composite electrode discharge device further comprises a fixture for fixing the outer cylinder and the second high voltage electrode (10).
9. The method of claim 8, wherein the fixture is comprised of an insulating dielectric material.
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| US4423355A (en) * | 1980-03-26 | 1983-12-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Ion generating apparatus |
| CN1187686A (en) * | 1996-11-01 | 1998-07-15 | 松下电器产业株式会社 | High frequency discharge energy supply means and high frequency electrodeless discharge lamp device |
| CN101330794A (en) * | 2008-05-09 | 2008-12-24 | 西安交通大学 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
| CN204168591U (en) * | 2014-09-22 | 2015-02-18 | 南京和乃安健康科技有限公司 | A kind of air forces down isothermal plasma generation device |
| CN105607275A (en) * | 2016-03-13 | 2016-05-25 | 南京理工大学 | Method and apparatus for generation of radial polarized cosine Gaussian Shell Model (GSM) light beam |
| CN107172797A (en) * | 2017-07-10 | 2017-09-15 | 哈尔滨理工大学 | Needle tubing ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
-
2019
- 2019-11-07 CN CN201911083591.2A patent/CN112788827B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4423355A (en) * | 1980-03-26 | 1983-12-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Ion generating apparatus |
| CN1187686A (en) * | 1996-11-01 | 1998-07-15 | 松下电器产业株式会社 | High frequency discharge energy supply means and high frequency electrodeless discharge lamp device |
| CN101330794A (en) * | 2008-05-09 | 2008-12-24 | 西安交通大学 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
| CN204168591U (en) * | 2014-09-22 | 2015-02-18 | 南京和乃安健康科技有限公司 | A kind of air forces down isothermal plasma generation device |
| CN105607275A (en) * | 2016-03-13 | 2016-05-25 | 南京理工大学 | Method and apparatus for generation of radial polarized cosine Gaussian Shell Model (GSM) light beam |
| CN107172797A (en) * | 2017-07-10 | 2017-09-15 | 哈尔滨理工大学 | Needle tubing ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
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