CN105338723B - A kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving - Google Patents
A kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving Download PDFInfo
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- CN105338723B CN105338723B CN201510645834.2A CN201510645834A CN105338723B CN 105338723 B CN105338723 B CN 105338723B CN 201510645834 A CN201510645834 A CN 201510645834A CN 105338723 B CN105338723 B CN 105338723B
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- support plate
- quartz ampoule
- power supply
- source driving
- frequency source
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M5/00—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases
- H02M5/40—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc
- H02M5/42—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters
- H02M5/44—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac
- H02M5/453—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal
- H02M5/458—Conversion of ac power input into ac power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into dc by static converters using discharge tubes or semiconductor devices to convert the intermediate dc into ac using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving,Including high voltage power supply,Ground electrode,Support,Air inlet pipe,Multiple discharge tubes and high-field electrode,High voltage power supply includes drive circuit,Accessory power supply and the rectification circuit being sequentially connected electrically,Inverter circuit and transformer,Drive circuit electrically connects with inverter circuit,Accessory power supply is to drive circuitry,Support includes hollow cylinder,The first support plate that interval is tightly connected in cylinder and with cylinder successively,Second support plate,3rd support plate,Air inlet pipe passes through the 3rd support plate,Second support plate,Discharge tube includes the outer quartz ampoule of concentric-ring pattern and interior quartz ampoule,One end of outer quartz ampoule passes through the first support plate,Air inlet pipe connects with outer quartz ampoule,One end of interior quartz ampoule passes through the second support plate,High-field electrode includes pole plate,The multiple copper rods being connected with pole plate,Pole plate is connected with the output end of transformer,Copper rod is passed through in the insertion of the 3rd support plate in quartz ampoule.Discharging efficiency of the present invention is high, stably, uniformly.
Description
Technical field
The present invention relates to the DBD plasmas of plasma discharging teclmiques, more particularly to a kind of driving of high voltagehigh frequency source to put
Electric installation.
Background technology
Dielectric barrier discharge (Dielectric Barrier Discharge, DBD) is that will have dielectric insertion electric discharge
Space, a kind of nonequilibrium state gas discharge of plasma is produced by applying enough alternating voltages.Due to being in air
Pressure produces plasma, eliminates the vacuum cavity device of costliness, greatly reduces the cost of equipment, so being led in industry
Domain has broad application prospects.Meanwhile in DBD region of discharges, substantial amounts of active material can be produced, as high energy electron, ion,
Free radical and excited state molecule etc., these advantages make its three industrial wastes purification, environment deodorization, material surface processing with it is modified,
The applications such as ozone generation are above expected to realize higher efficiency.
The type of drive of DBD plasmas has a lot, high direct voltage can be used to drive, and can also use exchange driving.
And the frequency of alternating current can also have a great impact to the effect of electric discharge.Early stage, exchange driving was using fixed low frequency（50-60Hz）
Variable voltage or fixed intermediate frequency（400-600Hz）Variable voltage power supply.Such power supply low cost, so still have use so far,
But its discharging efficiency is relatively low.With the fast development of semi-conductor industry especially semiconductor switch device, medium-high frequency（Several K are arrived
Hundreds of K）The realization of frequency conversion electric discharge device becomes no longer very difficult, and can realize relatively high power so that high-frequency and high-voltage drives
Dynamic DBD plasmas industrially have the possibility of large-scale application.
Application for low temperature plasma, corona discharge and direct current glow discharge are widely used in traditional handicraft.This
Kind means technology is relatively easy, and cost is relatively low.But corona discharge discharge capacity is low, caused active particle is less, and energy is low, institute
With in processing gas, sewage and the production application such as ozone efficiency it is low.And corona discharge only occurs in needle point, can not produce
The raw uniform plasma of large area, thus gradually can not meet industrial large area, high-power, efficient production needs
Ask.And there is also defect for traditional direct current glow discharge.For example in Plasma heat teratment technology, produced using dc source
It is slower and unreliable to suppress arc discharge speed during raw glow discharge；And need to add current-limiting resistance when discharging, but current limliting is electric
Resistance can waste substantial amounts of electric energy and bring serious heating problem.In addition, it can often be produced in the aperture of workpiece, gap, trench portions
Raw hollow cathode effect, cause workpiece surface temperature and its uneven, it is difficult to obtain uniform plasma covering.
In terms of used power supply, corona discharge is driven using HVDC in early days, produced around needle point during electric discharge
Give birth to plasma and with " whistling " sound.When continuing to raise voltage, electric discharge translates into glow discharge.When continue raise voltage
When, discharge space may be breakdown, very strong spark discharge occurs and with larger " whip " sound.During spark discharge, great Liang electricity
Intensively moment flows to ground electrode to lotus from high-field electrode, and discharge channel is thin and strong（Discharge channel diameter is less than 1mm）, put
Electrode is uneven.Such case can bring damage to sparking electrode, improve the expense of equipment operation and maintenance, be unfavorable for growing
The work of time stabilization.So also to accurately control discharge voltage in traditional handicraft, and various modes are taken to prevent spark
The generation of electric discharge.
In order to overcome the shortcomings of that dc source drives, early stage also drives plasma using low-frequency ac high-tension electricity
Device.It is thousands of to up to ten thousand that 220V, 50Hz industrial-frequency alternating current directly by step-up transformer are boosted to same frequency by this power supply
The high-tension electricity of volt.The shortcomings that this type of drive is simple in construction, but notable is that transformer is chronically at continuous working condition,
Volume is big, requires high to step-up transformer, and power is bigger, and electrode breakdown voltage is higher, and the insulating properties of winding require height, therefore
Technique for coiling etc. is more difficult, and cost is also higher；Secondly, this power supply is power frequency supply, and follow-up research shows that voltage is quick
Rising edge can bring higher discharging efficiency, so this low-frequency Alternating current discharges efficiency far is less than high-frequency friendship
Stream electricity.
Pulse direct current glow discharge technique is developed again in the late nineteen eighties, due to using the pulse power, having faster
Rising edge, its positive effect is better than Traditional DC and low-frequency ac power, and because dutycycle is low, saves very much electric energy.
But it is unfavorable for handling nonconducting matrix or film, on the other hand, the low-frequency d pulse power is for arc discharge and sky
The inhibition of the heart-yin polar effect is nor very good.Although improve pulse frequency and the effective over-current over-voltage protection of design
Circuit is beneficial to improve this situation, and improves the rising edge speed of the pulse power（Nanosecond rank）Can substantially improve etc. from
The flash-over characteristic of daughter, but this is technically difficult to realize.Even now, it is also difficult to accomplish to improve the pulse power simultaneously
Frequency and rising edge speed.
The content of the invention
Instant invention overcomes the deficiencies in the prior art, there is provided a kind of DBD plasma discharges dress of high voltagehigh frequency source driving
Put.
To reach above-mentioned purpose, the technical solution adopted by the present invention is：A kind of DBD plasmas of high voltagehigh frequency source driving
Electric discharge device, including high voltage power supply, ground electrode, air inlet pipe, multiple discharge tubes and the height of support and installation on the bracket
Piezoelectricity pole, the high voltage power supply include drive circuit, accessory power supply and the rectification circuit being sequentially connected electrically, inverter circuit and change
Depressor, the drive circuit electrically connect with the inverter circuit, and the accessory power supply gives the drive circuitry, the support
Including hollow cylinder, the first support plate for being located in the cylinder and being tightly connected with cylinder, the second support plate, the 3rd are spaced successively
Support plate, the air inlet pipe is through the 3rd support plate, the second support plate, the outer quartz ampoule of the discharge tube including concentric-ring pattern and interior
Quartz ampoule, one end of the outer quartz ampoule pass through first support plate, and the air inlet pipe connects with the outer quartz ampoule, described interior
One end of quartz ampoule passes through second support plate, multiple copper rods that the high-field electrode includes pole plate, is connected with the pole plate, institute
The output end that pole plate is stated with the transformer is connected, and the copper rod is inserted in the interior quartz ampoule through the 3rd support plate.
In a preferred embodiment of the present invention, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving is further
It is E class inverter circuits including the inverter circuit.
In a preferred embodiment of the present invention, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving is further
Output voltage including the accessory power supply is 15V.
In a preferred embodiment of the present invention, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving is further
Magnetic core including the transformer is UY30 ferrite high frequency magnetic cores.
In a preferred embodiment of the present invention, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving is further
It is 1 including the ratio between the number of primary turns and secondary winding turns：40-1:50.
In a preferred embodiment of the present invention, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving is further
Including multiple discharge tube circular arrays.
In a preferred embodiment of the present invention, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving is further
Inwall including the outer quartz ampoule and the gap between the outer wall of interior quartz ampoule are 1-2mm.
The invention has the advantages that：
（1）Dielectric barrier discharge is have selected on discharge mode（DBD）Technology, with respect to glow discharge, DBD discharge capacity
Greatly, discharging efficiency is higher, and can produce the uniform plasma of large area, is advantageous to answering for industrial high-power large area
With.
（2）There is medium to insert discharge space, can effectively suppress spark discharge so that discharge voltage can be in larger model
Interior regulation is enclosed, and is effectively protected sparking electrode, makes electric discharge device can be with long-time steady operation.
（3）Using high voltagehigh frequency exchange driving in driving power, can both ensure the generation efficiency of plasma with
Even property, but it is simpler than nanosecond pulse voltage process, relatively easily realize, be advantageous to industrially reduce production cost.
（4）Power supply uses entirely autonomous development, can be with electric discharge device matched well.
（5）Power supply architecture is simple and reliable, produces waveform stabilization, and cost is relatively low, and component is using industrial high-power height
Resistance to voltage device, the design of each device leave 3-5 times of allowance so that power work is stable, is not susceptible to puncture, burns
Quality problems.
（6）Whole system uses modular design, installation, simple to operate, and be advantageous to the later stage maintenance, repair,
The work such as test, cleaning, replacing, cater to the demand of large-scale industrial application.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the schematic block circuit diagram of the high voltage power supply of the preferred embodiments of the present invention；
Fig. 2 is the circuit diagram of the high voltage power supply of the preferred embodiments of the present invention；
Fig. 3 is the voltage of the high voltage power supply of the preferred embodiments of the present invention, current waveform figure；
Fig. 4 is the rack-mount structural representation of multiple discharge tubes of the preferred embodiments of the present invention；
Fig. 5 is the sectional view of the preferred embodiments of the present invention；
Fig. 6 is the schematic cross-section that the discharge tube of the preferred embodiments of the present invention and copper rod are connected；
Fig. 7 is the discharge effect figure of the preferred embodiments of the present invention.
Embodiment
Presently in connection with drawings and examples, the present invention is further detailed explanation, and these accompanying drawings are simplified signal
Figure, only illustrate the basic structure of the present invention in a schematic way, therefore it only shows the composition relevant with the present invention.
As shown in Fig. 1, Fig. 4-Fig. 6, a kind of DBD plasma discharge apparatus of high voltagehigh frequency source driving, including high-tension electricity
Source, ground electrode 2, support and rack-mount air inlet pipe 4, multiple discharge tubes 6 and high-field electrode, high voltage power supply include driving
Dynamic circuit 10, accessory power supply 12 and the rectification circuit 14 being sequentially connected electrically, inverter circuit 16 and transformer 18, drive circuit 10
Electrically connected with inverter circuit 16, accessory power supply 12 is powered to drive circuit 10, and support includes hollow cylinder 20, interval is set successively
The first support plate 22, the second support plate 24, the 3rd support plate 26 being tightly connected in the cylinder 20 and with cylinder 20, air inlet pipe 4 is through the
Three support plates 26, the second support plate 24, discharge tube 6 include the outer quartz ampoule 28 and interior quartz ampoule 30 of concentric-ring pattern, outer quartz ampoule 28
One end passes through the first support plate 22, and air inlet pipe 4 connects with outer quartz ampoule 28, and one end of interior quartz ampoule 30 passes through the second support plate 24, high
Multiple copper rods 34 that piezoelectricity pole includes pole plate 32, is connected with pole plate 32, pole plate 32 are connected with the output end of transformer 18, copper rod
34 insert in interior quartz ampoule 30 through the 3rd support plate 26.
As shown in Fig. 2 220V, 50Hz single phase ac city are electrically accessed in rectification circuit 14, rectification circuit 14 passes through first
AC signal waveform is changed into the sinusoidal signal of only half period by bridge rectifier diode D1, be now direct current signal still
Magnitude of voltage fluctuation is larger, then removes the HFS in waveform by filter capacitor C4 to reduce the fluctuation of signal, finally by
The stable direct current signal of voltage-regulator diode D2 outputs, output voltage 0-60V is adjustable, the maximum 12A of output current, peak power output
720W, larger electric current can be provided and larger voltge surge can be born during work, meet the needs of subsequent conditioning circuit.Accessory power supply
12 principle is similar with rectification circuit 14, but need not export very big power, therefore, the present invention preferably accessory power supply 12
Output voltage be 15V, for drive circuit 10 and other active devices power supply.Preferably inverter circuit 16 of the invention is E
Class inverter circuit, the switching device of inverter circuit 14 select rated voltage 1000V, rated current 60A single tube IGBT, and direct current is defeated
Enter and charged by inductance L1 to follow-up inductance, capacitance network, and when IGBT is turned on, L, C network are by IGBT by unnecessary electricity
It can discharge, by charge and discharge so repeatedly, then alternating voltage can be produced on electric capacity C3 and be used for driving load.Driving electricity
Using the EXB841 integrated drive chips of Japanese fuji company, it is excellent that the chip has that isolation strength is high, reaction speed is fast etc. on road 10
Point, and overcurrent protection can be implemented to IGBT, can be fast by square-wave signal caused by the chip and the cooperation of its expanded circuit
Speed efficiently controls IGBT conducting with turning off to realize the charge and discharge of inverter circuit 16, and generation amplitude maximum is about 800V, frequency
The alternating current that rate is about 25KHz.
The magnetic core of preferably transformer 18 of the invention is UY30 ferrite high frequency magnetic cores, and its relative permeability is 2000-2600,
The length of magnetic path is 300-360mm, and magnetic core net sectional area is 650-750mm2, cut-off frequency 90-110K, the bone of transformer 18
Frame is made up of polytetrafluoroethylene (PTFE) manual processing, and the ratio between number of primary turns and secondary winding turns are 1：40-1:50.It is further excellent
The relative permeability for selecting transformer 18 is 2300, and length of magnetic path 330.8mm, magnetic core net sectional area is 691.9mm2, cut-off
Frequency is 100K, number of primary turns 10, secondary winding turns 450（Every layer 90 circle, totally 5 layers）.Because voltage is higher, need
Good insulation measures are taken, are insulated between every layer of coil using the golden finger adhesive tape winding of high pressure resistant high temperature, the golden finger
Adhesive tape is Kapton Tape, and thickness in monolayer is only 0.1mm, pressure-resistant up to several kilovolts.In addition, the position for easy disruptive discharge
The measure for applying ceramic glue insulation can be taken.
Finally, by the secondary coil output voltage amplitude 0-30kV of transformer 18 is adjustable, frequency is 25KHz high-voltage alternating
Electricity.In addition, being mounted with heat abstractor in such as inverter circuit 16 also on the device easily to generate heat, ensure that device working stability can
Lean on, the heat abstractor is powered by accessory power supply 12.High voltage power supply uses modular design so that power supply installation, operation, surveys
Examination, maintenance are all very convenient.Voltage, the current wave measured when being high voltage power supply driving plasma discharge apparatus as shown in Figure 3
1. shape figure, wherein voltage oscillogram are shown 2. current waveform figure is shown by curve by curve.
Around upper copper wire and it is grounded in the outside of outer quartz ampoule 28, as ground electrode 2.Preferably multiple discharge tubes 6 of the invention are in
Annular array.The both ends open of outer quartz ampoule 28, interior quartz ampoule 30 are located at one end closing in outer quartz ampoule 28, extend outer stone
Another end opening outside English pipe 28.The outer junction sealed set of 28 and first support plate of quartz ampoule 22, interior quartz ampoule 30 and second
The junction sealed set of plate 24, the support plate 26 of air inlet pipe 4 and the 3rd, the equal sealed set in the junction of the second support plate 24, so ensures to give up
Gas enters in outer quartz ampoule 28 along air inlet pipe 6.Gap between the inwall of outer quartz ampoule 28 and the outer wall of interior quartz ampoule 30 is 1-
2mm, the gap are exactly the reaction zone for producing plasma discharge.In use, pending waste gas be passed through by air inlet pipe 4 it is each
The reaction zone of discharge tube 6, produce and plasma and react under the driving of High Level AC Voltage, discharge effect as shown in fig. 7,
Discharging efficiency is high and discharge stability, uniformly, and the clean gas after treating is discharged from the end of outer quartz ampoule 28.
The desirable embodiment according to the present invention is enlightenment above, and by above-mentioned description, related personnel completely can be with
Without departing from the scope of the technological thought of the present invention', various changes and amendments are carried out.The technical scope of this invention
The content being not limited on specification, it is necessary to determine the technical scope according to the scope of the claims.
Claims (5)
- A kind of 1. DBD plasma discharge apparatus of high voltagehigh frequency source driving, it is characterised in that：Including high voltage power supply, ground electrode, Air inlet pipe, multiple discharge tubes and the high-field electrode of support and installation on the bracket, the high voltage power supply include driving electricity Road, accessory power supply and the rectification circuit being sequentially connected electrically, inverter circuit and transformer, the drive circuit and inversion electricity Road electrically connects, and the accessory power supply gives the drive circuitry, and the inverter circuit is E class inverter circuits, the inversion electricity The switching device on road selects rated voltage 1000V, rated current 60A single tube IGBT, the magnetic conductivity of the magnetic core of the transformer For 2000-2600, length of magnetic path 300-360mm, magnetic core net sectional area be 650-750mm2, cut-off frequency 90-110K, The ratio between the number of primary turns of the transformer and secondary winding turns are 1：40-1:50, the support include hollow cylinder, The first support plate, the second support plate, the 3rd support plate that interval is tightly connected in the cylinder and with cylinder successively, the air inlet pipe Through the 3rd support plate, the second support plate, the discharge tube includes the outer quartz ampoule of concentric-ring pattern and interior quartz ampoule, the outer stone One end of English pipe passes through first support plate, and the air inlet pipe is connected with the outer quartz ampoule, and one end of the interior quartz ampoule is worn Cross second support plate, multiple copper rods that the high-field electrode includes pole plate, is connected with the pole plate, the pole plate and the change The output end of depressor is connected, and the copper rod is inserted in the interior quartz ampoule through the 3rd support plate.
- A kind of 2. DBD plasma discharge apparatus of high voltagehigh frequency source driving according to claim 1, it is characterised in that： The output voltage of the accessory power supply is 15V.
- A kind of 3. DBD plasma discharge apparatus of high voltagehigh frequency source driving according to claim 1, it is characterised in that： The magnetic core of the transformer is UY30 ferrite high frequency magnetic cores.
- A kind of 4. DBD plasma discharge apparatus of high voltagehigh frequency source driving according to claim 1, it is characterised in that： Multiple discharge tube circular arrays.
- A kind of 5. DBD plasma discharge apparatus of high voltagehigh frequency source driving according to claim 1, it is characterised in that： Gap between the inwall of the outer quartz ampoule and the outer wall of interior quartz ampoule is 1-2mm.
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| CN107040158A (en) * | 2017-04-21 | 2017-08-11 | 哈尔滨工业大学深圳研究生院 | A kind of series parallel resonance inverter circuit structure |
| CN107395043A (en) * | 2017-08-22 | 2017-11-24 | 哈尔滨工业大学深圳研究生院 | A kind of series parallel resonance inverter circuit for thering is second harmonic to suppress branch road |
| CN109831104A (en) * | 2019-03-22 | 2019-05-31 | 江苏亚威变压器有限公司 | A kind of low shelf depreciation type three-phase high-voltage silicon rectifying equipment of flashover |
| CN110536531A (en) * | 2019-08-20 | 2019-12-03 | 南京工业大学 | A kind of portable rechargeable-type plasma comb |
| CN113993263B (en) * | 2021-11-15 | 2024-03-22 | 安徽工业大学 | Atmospheric pressure plasma generator, preparation method and plasma generating device |
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| JP5681943B2 (en) * | 2010-08-30 | 2015-03-11 | 株式会社ダイヘン | High frequency power supply |
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Inventor after: Wu Xuemei Inventor after: Hu Yibo Inventor after: Jin Chenggang Inventor after: Zhuge Lanjian Inventor after: Tian Run Inventor after: Mou Zhiyu Inventor before: Hu Yibo Inventor before: Jin Chenggang Inventor before: Tian Run Inventor before: Mou Zhiyu Inventor before: Zhuge Lanjian Inventor before: Wu Xuemei |