CN202799362U - Atmospheric pressure medium blocking-long and cold plasma jet generating device - Google Patents
Atmospheric pressure medium blocking-long and cold plasma jet generating device Download PDFInfo
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- CN202799362U CN202799362U CN 201220327338 CN201220327338U CN202799362U CN 202799362 U CN202799362 U CN 202799362U CN 201220327338 CN201220327338 CN 201220327338 CN 201220327338 U CN201220327338 U CN 201220327338U CN 202799362 U CN202799362 U CN 202799362U
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Abstract
The utility model discloses an atmospheric pressure medium blocking-long and cold plasma jet generating device, which comprises a cylindrical shell. One end of the cylindrical shell is provided with an air outlet, while the other end of the cylindrical shell is closed. The two sides of the cylindrical shell are symmetrically provided with two air inlets. Two baffle plates positioned corresponding to the two air inlets are arranged in the cylindrical shell. Air is introduced into the cylindrical shell through the baffle plates. A single electrode extends into the cylindrical shell through the closed end of the cylindrical shell. The surface of the single electrode is sheathed with a small quartz glass tube. The air outlet of the cylindrical shell is connected with a movable quartz glass tube and the length of the movable quartz glass tube is not less than 165 centimeters. According to the technical scheme of the utility model, the device can be stably operated under the atmospheric pressure to generate a long plasma jet and is also convenient in advanced treatment and surface treatment. Meanwhile, the temperature of the plasma is kept to be equal to the room temperature or slightly higher than the room temperature. Therefore, the device helps to reduce the cost and can conveniently generate cold plasmas rich in highly active particle jets.
Description
Technical field
The utility model relates to the fluidic device field of plasma, is specially atmosphere medium and stops long shot stream cold plasma generating means.
Background technology
Jet plasma is subject to the Science and engineering field with its special character and more and more pays close attention in recent years.Plasma, atmosphere cold plasma particularly, because its gas temperature is low, electron temperature is high, and contain and have high activity excited state particle, atom and charged particle etc., be widely used in the various fields such as material surface modifying, sterilization, microbiological treatment.In addition, the atmosphere cold plasma technology need not vacuum system, therefore greatly reduces manufacturing and the maintenance cost of vacuum equipment, and can relax the set size to processed workpiece, reduces the restriction of its range of application.Therefore atmosphere cold plasma obtains domestic and international researcher's concern day by day, and all boundless application prospect will be arranged in various fields.
Under the atmospheric pressure, because the working gas puncture voltage is relatively high, the discharging gap distance is very short, be generally millimeter and centimetre magnitude, and because it belongs to interior processing mode, directly limited shape, size and the material of processed article, therefore all be limited by very large in many applications.If using plasma is processed (such as remote plasma) indirectly and since wherein many active components and charged particle life-span very of short duration, just disappear to such an extent as to also do not reach the handled thing surface, cause treatment effeciency very low.In order to address the above problem, people take the atmosphere cold plasma fluidic device, the atmosphere cold plasma jet separates plasma slab with electrode district, it can directly produce cold-plasma jet in extraneous space, it is a kind of nonequilibrium state, class glow plasma generation technique, can under lower temperature, obtain the required active particle of chemical reaction, has special light, heat, sound, physical process and the chemical processes such as electricity, therefore process at material surface, nanometer technology, thin film deposition, etching, the medical apparatus sterilization, ozone generates, chemical synthesis, environmental improvement, fibre modification, new type light source, the fields such as aircraft drag reduction and stealth have a wide range of applications, and are the present in the world study hotspots in plasma application field.And can directly process article, the shape of processed article and size are unrestricted simultaneously.
Yet, atmospheric pressure jet cold plasma still has its limitation: the jet length of (1) atmospheric pressure jet cold plasma is limited, carrying out some degree of depth surface treatment, such as with very dark concave point surperficial the time, it is still higher with the interior gas temperature of specific position (2) atmospheric pressure jet cold plasma that waits that plasma can't extend into concave point, and the gas temperature of most atmospheric pressure jet cold plasmas is also about upper Baidu.Therefore, researching and developing a kind of novel long shot stream cold plasma generating means has very important significance.
The utility model content
The purpose of this utility model provides a kind of atmosphere medium and stops long shot stream cold plasma generating means, to solve traditional atmospheric pressure jet plasma limited length, to process the too high problem of sample surface configuration plasma temperature limited, the exit.
In order to achieve the above object, the technical scheme that adopts of the utility model is:
Atmosphere medium stops long shot stream cold plasma generating means, include cylindrical outer casing, described cylindrical outer casing one end is the gas outlet, the sealing of one end, it is characterized in that: the bilateral symmetry of described cylindrical outer casing is provided with two air inlets, be positioned at cylindrical outer casing and be provided with two baffle plates corresponding with air inlet, gas imports in the cylindrical outer casing by baffle plate, electrode extend in the cylindrical outer casing by the blind end of cylindrical outer casing, described electrode surface is set with little quartz glass tube, and the place, gas outlet of cylindrical outer casing is connected with the removable quartz glass tube that a length is not less than 165 centimetres.Described single electrode is that the ac high-voltage external power source of 32kHz～50 kHz is connected by wire and frequency.
In the utility model, external power source is ac high voltage source.Single electrode adopts metallic copper material, and working gas is argon gas, and air inlet is symmetrical, and baffle plate can play the effect of water conservancy diversion, guarantees that it reaches the flow regime of laminar flow, reduces energy loss, improves the length of jet; The quartz glass tube of electrode surface can prevent effectively that plasma from transforming to arc discharge, effectively reduces discharging current, reduces the plasma jet operate power.The working gas stream that certain flow rate arranged enters from two symmetrical air inlets of cylindrical outer casing both sides, flow into the single electrode place by baffle plate, the place is punctured by high voltage electric field at electrode, form plasma, air-flow makes it form jet, and effectively reducing the plasma jet temperature to room temperature or a little more than room temperature, jet plasma penetrates by the removable quartz ampoule of 165 centimeter length, produces novel air and presses cold plasma long shot stream.
The utility model is steady operation under atmospheric pressure, jet length reaches 165 centimetres (length can change along with the movement of quartz glass tube), and to keep plasma temperature be room temperature or a little more than room temperature, be beneficial to and reduce cost (need not vacuum equipment), can conveniently produce and be rich in high activity particle jet cold plasma.The jet length in exit can also pass through power parameter (voltage, frequency etc.) and charge flow rate changes, therefore, the utility model will improve the plasma application scope greatly, promote plasma each field extensive use, such as plasma etching, material surface modifying, disease treatment etc.This utility model will effectively reduce operating cost, widen the range of application of atmospheric pressure plasma jet.
The utlity model has following advantage:
(1) adopt AC power under atmospheric pressure to form plasma jet, the complicated vacuum equipment when reducing low pressure discharge reduces installation cost.
(2) device simply is convenient to practical application.
(3) jet length reaches 165 centimetres, is convenient to extend into the surface that general jet is difficult to process and processes.
(4) jet length can change along with the movement of removable quartz glass tube, in order to process the sample surfaces of various shapes.
(5) jet length in exit can be passed through power parameter (voltage, frequency etc.) and charge flow rate change.
(5) because using quartz glass tube cover live electrode, form dielectric barrier discharge, the plasma jet temperature of generation is low, is generally room temperature or a little more than room temperature.
(6) can adopt as required the multi-jet spray quartz glass tube, plasma is penetrated simultaneously from a plurality of spouts, Effective Raise cold-plasma jet area.
(7) can as required removable quartz glass tube be changed into the plastic flexible pipe of different materials, the sample surfaces of the various shapes of convenient processing.
(8) can adopt as required different working gass, such as air, to reduce cost.
Description of drawings
Fig. 1 is the utility model structural representation with removable quartz glass tube.
Fig. 2 is the utility model structural representation with the removable quartz glass tube of multi-jet spray.
Fig. 3 is the utility model structural representation with plastic flexible pipe.
Embodiment
As shown in Figure 1, atmosphere medium stops long shot stream cold plasma generating means, include the cylindrical outer casing 1 that polytetrafluoroethylmaterial material is made, the sealing of cylindrical outer casing 1 one ends, two air inlets 2 are symmetrically distributed in the both sides of cylindrical outer casing 1, gas imports in the cylindrical outer casing 1 by baffle plate 3, adopt single electrode 4 structures, single electrode 4 is deep into cylindrical outer casing 1 by cylindrical outer casing 1 blind end, be embedded with little quartz glass tube 5 on electrode 4 surfaces, electrode 4 is that the ac high-voltage external power source 6 of 32kHz～50 kHz is connected by wire and frequency, is that the place, gas outlet of cylindrical outer casing 1 is equipped with the removable quartz glass tube 7 of 165 centimeter length at the plasma spout.
As shown in Figure 2, removable quartz glass tube 7 is replaced with removable multi-jet spray quartz glass tube 8.
As shown in Figure 3, removable quartz glass tube 7 is replaced with plastic flexible pipe 9.
Claims (4)
1. atmosphere medium stops long shot stream cold plasma generating means, include cylindrical outer casing, described cylindrical outer casing one end is the gas outlet, the sealing of one end, it is characterized in that: the bilateral symmetry of described cylindrical outer casing is provided with two air inlets, be positioned at cylindrical outer casing and be provided with two baffle plates corresponding with air inlet, gas imports in the cylindrical outer casing by baffle plate, single electrode extend in the cylindrical outer casing by the blind end of cylindrical outer casing, described single electrode surface is set with little quartz glass tube, and the place, gas outlet of cylindrical outer casing is connected with the removable quartz glass tube that a length is not less than 165 centimetres.
2. atmosphere medium stops long shot stream cold plasma generating means, include cylindrical outer casing, described cylindrical outer casing one end is the gas outlet, the sealing of one end, it is characterized in that: the bilateral symmetry of described cylindrical outer casing is provided with two air inlets, be positioned at cylindrical outer casing and be provided with two baffle plates corresponding with air inlet, gas imports in the cylindrical outer casing by baffle plate, single electrode extend in the cylindrical outer casing by the blind end of cylindrical outer casing, described single electrode surface is set with little quartz glass tube, and the place, gas outlet of cylindrical outer casing is connected with the removable multi-jet spray quartz glass tube that a length is not less than 165 centimetres.
3. atmosphere medium stops long shot stream cold plasma generating means, include cylindrical outer casing, described cylindrical outer casing one end is the gas outlet, the sealing of one end, it is characterized in that: the bilateral symmetry of described cylindrical outer casing is provided with two air inlets, be positioned at cylindrical outer casing and be provided with two baffle plates corresponding with air inlet, gas imports in the cylindrical outer casing by baffle plate, single electrode extend in the cylindrical outer casing by the blind end of cylindrical outer casing, described single electrode surface is set with little quartz glass tube, and the place, gas outlet of cylindrical outer casing is connected with the plastic flexible pipe that a length is not less than 165 centimetres.
According to claim 1 and 2 or 3 described atmosphere mediums stop long shot stream cold plasma generating means, it is characterized in that: described single electrode is that the ac high-voltage external power source of 32kHz～50 kHz is connected by wire and frequency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220327338 CN202799362U (en) | 2012-07-06 | 2012-07-06 | Atmospheric pressure medium blocking-long and cold plasma jet generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220327338 CN202799362U (en) | 2012-07-06 | 2012-07-06 | Atmospheric pressure medium blocking-long and cold plasma jet generating device |
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| CN202799362U true CN202799362U (en) | 2013-03-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220327338 Expired - Fee Related CN202799362U (en) | 2012-07-06 | 2012-07-06 | Atmospheric pressure medium blocking-long and cold plasma jet generating device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103260328A (en) * | 2013-04-10 | 2013-08-21 | 中国科学院等离子体物理研究所 | Atmosphere nonequilibrium state plasma micro-jet sterilization method |
| CN106488639A (en) * | 2016-12-28 | 2017-03-08 | 大连理工大学 | Large scale pulse cold-plasma jet generating device |
| CN106998618A (en) * | 2017-05-27 | 2017-08-01 | 河北大学 | A kind of device and method for producing waveform plasma |
| CN107105566A (en) * | 2017-05-19 | 2017-08-29 | 哈尔滨理工大学 | Pipe ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
| CN108013930A (en) * | 2017-12-25 | 2018-05-11 | 中国科学院合肥物质科学研究院 | A kind of plasma treatment nasopharyngeal carcinoma generating means and conchoscope |
| CN111642052A (en) * | 2020-07-15 | 2020-09-08 | 安徽工业大学 | Flexible slender microplasma jet source and using method |
| CN114554670A (en) * | 2022-02-14 | 2022-05-27 | 西安电子科技大学 | Plasma jet system and control method |
-
2012
- 2012-07-06 CN CN 201220327338 patent/CN202799362U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103260328A (en) * | 2013-04-10 | 2013-08-21 | 中国科学院等离子体物理研究所 | Atmosphere nonequilibrium state plasma micro-jet sterilization method |
| CN106488639A (en) * | 2016-12-28 | 2017-03-08 | 大连理工大学 | Large scale pulse cold-plasma jet generating device |
| CN107105566A (en) * | 2017-05-19 | 2017-08-29 | 哈尔滨理工大学 | Pipe ring type electrode atmospheric pressure surface dielectric barrier discharge jet source device |
| CN106998618A (en) * | 2017-05-27 | 2017-08-01 | 河北大学 | A kind of device and method for producing waveform plasma |
| CN106998618B (en) * | 2017-05-27 | 2019-01-25 | 河北大学 | A kind of device and method generating waveform plasma |
| CN108013930A (en) * | 2017-12-25 | 2018-05-11 | 中国科学院合肥物质科学研究院 | A kind of plasma treatment nasopharyngeal carcinoma generating means and conchoscope |
| CN111642052A (en) * | 2020-07-15 | 2020-09-08 | 安徽工业大学 | Flexible slender microplasma jet source and using method |
| CN114554670A (en) * | 2022-02-14 | 2022-05-27 | 西安电子科技大学 | Plasma jet system and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20180706 |
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| CF01 | Termination of patent right due to non-payment of annual fee |