CN101303255A - Integrated Fourier spectrometer - Google Patents
Integrated Fourier spectrometer Download PDFInfo
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- CN101303255A CN101303255A CNA2008100533528A CN200810053352A CN101303255A CN 101303255 A CN101303255 A CN 101303255A CN A2008100533528 A CNA2008100533528 A CN A2008100533528A CN 200810053352 A CN200810053352 A CN 200810053352A CN 101303255 A CN101303255 A CN 101303255A
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Abstract
The present invention belongs to the field of spectrum instrument technology and provides an integrated Fourier spectrograph including a beam-splitting prism and an array type photo sensor. The beam-splitting prism is an approximate right angle beam-splitting prism, including a first plane and a second plane neighboring with each other, the beam-splitting plane bisects an included angle of approximate but non right angle formed between the two planes, the difference of the included angle and the right angle is less than 1 DEG, the first plane (A) and the second plane (B) are all ladder-shaped reflection grating surface, and the measured parallel light are divided into two parts after arriving the beam-splitting prism, one part arrives the second plane (B) permeating the beam-splitting surface and arrives the array type photosensor through the beam-splitting surface after being reflected by the second plane (B), the other part arrives the first plane (A) after being reflected by the beam-splitting surface and arrives the array type photosensor after being reflected by the first plane (A) through the beam-splitting surface. The spectrograph of the present invention has very simple construction, high speed, reliable stabilization, high sensitivity and high resolution, also the spectrograph does not need motion component.
Description
Technical field
The present invention relates to scientific instrument, especially a kind of spectral instrument.
Background technology
Spectrometer is a kind of important and commonly used scientific instrument, is used for light source and material are carried out accurate analysis.For the performances such as sensitivity for analysis, precision and speed that improve instrument, constantly the someone adopts new technology and device improvements spectrometer.
Patent of invention (the long spectrometer of CCD grating integrated full as designs such as Wang Kemin, patent No. CN01114410.6), patent of invention (the integrated miniature spectrometer of design such as Wen Zhiyu, patent No. CN02119512.9), patent of invention (the online near infrared spectrometer of design such as Yuan Hongfu, application number CN02125852.X), patent of invention (the hand-held spectrometer of the clear design of Liu Mu, application number CN01254633.X), Liu Mu waits the patent of invention (a kind of near infrared spectrometer of 0.7-1.7 micron waveband, application number CN03270366.X) of design clearly.Be grating spectrograph in above-mentioned design, adopt grating and CCD (charge-coupled image sensor) as the performance that improves spectrometer.CCD has advantage fast, but with respect to other photoelectric devices such as photomultipliers, the sensitivity of CCD is much lower, still is apparent not enough when analyzing some material composition.Otherwise fourier spectrometer has highly sensitive characteristics, but needs accurate moving component, complex structure, and measuring speed is slow.
Summary of the invention
Technical matters to be solved by this invention is to overcome above-mentioned the deficiencies in the prior art, realizes that a kind of both tools are high-speed, has high sensitivity again, does not also need moving component, does not need the novel spectrometer of adjusting.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
Integrated Fourier spectrometer, comprise a beam splitter prism and array optical sensing device, described beam splitter prism is a kind of approximate right angle beam splitter prism, comprise the first and second two adjacent planes, beam-splitting surface is divided formed approximate right angle between these two planes equally and the angle of on-right angle, the difference at this angle and right angle is less than 1 °, tested directional light arrives after the described beam splitter prism, separated into two parts, a part arrives second plane (B) after seeing through beam-splitting surface, by reaching the array optical sensing device by the beam-splitting surface reflection again behind this plane reflection, another part light arrives first plane (A) by beam-splitting surface reflection back, sees through beam-splitting surface and reach the array optical sensing device behind this plane reflection.
Above-mentioned fourier spectrometer, array optical sensing device wherein can or be micro channel array photomultiplier PMT for area array CCD, face array CMOS image sensor.When the angle of two planes of reflection is acute angle, states the array optical sensing device and can also adopt line array CCD.
The present invention improves the design of the inferior interferometer of Mike's ear, parts with an approximate right angle beam splitter prism, substitute beam splitter and two-face mirror in the inferior interferometer of Mike's ear, plate reflectance coating at two of beam splitter prism adjacent transmission planes, and one of them or two sides are had a mind to make certain degree of tilt.This beam splitter prism is that the plane of symmetry is symmetrical structure with the beam-splitting surface.
The present invention is with the array optical sensing device, as CCD or cmos image sensor as optical signal detector spare, as receiving device, it is all different to make each (row) pixel of photosensitive device receive the optical path difference of the light beam that reflects from two reflectings surface, the array optical electrical part is after receiving the interference signal of different optical path differences, by Fourier transform, can realize spectral measurement.This kind design makes the structure of spectrometer simplify greatly, is the symmetrical structure of the plane of symmetry because beam splitter prism adopts with the beam-splitting surface, thereby is easy to realize the beam splitter prism normalized production.Spectrometer of the present invention does not need moving component, does not need to adjust, and can realize high-speed high sensitivity spectral analysis.
Description of drawings
Fig. 1 is the light path principle figure of the embodiment of the invention 1.
Fig. 2 is the light path principle figure of the embodiment of the invention 2.
Reference numeral:
1 is that beam splitter prism 2 is the array optical sensing device
Embodiment
Below in conjunction with accompanying drawing the present invention is elaborated.
The embodiment one of fourier spectrometer of the present invention:
As shown in Figure 1, it is a kind of approximate right angle beam splitter prism that the embodiment of the invention one adopts beam splitter prism, comprise that an A and two of the 2nd B are mutually the plane that is coated with reflectance coating of angle, this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °, for example get 90.5 °, and beam-splitting surface is divided this angle equally.
Referring to Fig. 1, tested directional light is by beam splitter prism 1 separated into two parts, and a part sees through the plane B that beam-splitting surface arrives beam splitter prism, and plane B is coated with reflectance coating and constitutes catoptron, by reaching array optical sensing device 2 by the beam-splitting surface reflection again after the plane B reflection; Another part light is arrived the plane A of beam splitter prism by the beam-splitting surface reflection, plane A also is coated with reflectance coating and constitutes catoptron, but plane A, B is not vertical with optical axis as the right angle beam splitter prism with light beam, but certain angle of inclination is arranged, vergence direction as shown in the figure, thereby this part light has different optical path differences in plane A reflection back with plane B beam reflected, arrive array optical sensing device 2 after seeing through beam-splitting surface, two interference lights that plane reflection is returned that array optical sensing device 2 receives, carry out Fourier transform by the photosignal that array photosensitive device 2 is obtained, just can obtain by the frequency spectrum of photometry.
The array optical sensing device can adopt the CCD light sensor of linear array, (image) sensor or CMOS photosensitive (image) sensor that also can adopt the CCD of face battle array photosensitive, as 13V5H of Min Tong company etc., also can adopt other face battle array photosensitive (image) sensor, as array photoelectricity multiplier tube (PMT) etc.
When employing face battle array photosensitive (image) sensor, identical with grating cutting direction (or saying the same cutting reflected light of reception) detected signal of pixel carries out Fourier transform after can superposeing again, can increase substantially the sensitivity of spectrometer and the precision of spectrum amplitude.
The embodiment two of fourier spectrometer of the present invention:
As shown in Figure 2, it is a kind of approximate right angle beam splitter prism that the embodiment of the invention two adopts beam splitter prism, comprise that an A and two of the 2nd B are mutually the plane that is coated with reflectance coating of angle, this angle is the acute angle of approximate right angle, greater than 90 ° and less than 91 °, for example get 90.5 °, and beam-splitting surface is divided this angle equally.
Referring to Fig. 2, tested directional light is by beam splitter prism 1 separated into two parts, a part sees through the plane B that beam-splitting surface arrives beam splitter prism, another part light is arrived the plane A of beam splitter prism by the beam-splitting surface reflection, plane A, B is coated with reflectance coating and constitutes catoptron, but plane A, B is not vertical with optical axis as the right angle beam splitter prism, but certain angle of inclination is arranged, vergence direction as shown in the figure, and the optical path difference of two plane reflections that make array optical sensing device 2 each pixel receive interference light of returning is all inequality, carry out Fourier transform by the photosignal that array photosensitive device 2 is obtained, just can obtain by the frequency spectrum of photometry.
The array optical sensing device can adopt photosensitive (image) sensor of the CCD of face battle array or CMOS photosensitive (image) sensor, as 13V5H of Min Tong company etc., also can adopt other face battle array photosensitive (image) sensor, as array photoelectricity multiplier tube (PMT) etc.
When employing face battle array photosensitive (image) sensor, identical with grating cutting direction (or saying the same cutting reflected light of reception) detected signal of pixel carries out Fourier transform after can superposeing again, can increase substantially the sensitivity of spectrometer and the precision of spectrum amplitude.
Need to prove, the invention belongs to a kind of component invention, is a kind of invention that has novelty on technology is used, and wherein related grating and photosensitive (image) sensor etc. all belong to prior art and existing various ways and application.Its detail characteristic is not described herein again at this.
In addition, here the detailed explanation that has been center deployment with embodiments of the invention, the imbody of described optimal way or some characteristic, should be understood to this instructions only is to describe the present invention by the mode that provides embodiment, in fact on some details of forming, construct and using, can change to some extent, comprise the combination and the assembly of parts, these distortion and application all should belong in the scope of the present invention.
Claims (5)
1. integrated Fourier spectrometer, comprise a beam splitter prism and array optical sensing device, described beam splitter prism is a kind of approximate right angle beam splitter prism, comprise the first and second two adjacent planes, beam-splitting surface is divided formed approximate right angle between these two planes equally and the angle of on-right angle, the difference at this angle and right angle is less than 1 °, tested directional light arrives after the described beam splitter prism, separated into two parts, a part arrives second plane (B) after seeing through beam-splitting surface, by reaching the array optical sensing device by the beam-splitting surface reflection again behind this plane reflection, another part light arrives first plane (A) by beam-splitting surface reflection back, sees through beam-splitting surface and reach the array optical sensing device behind this plane reflection.
2. according to the described fourier spectrometer of claim 1, it is characterized in that described array optical sensing device is an area array CCD.
3. according to claim 1 or 2 described fourier spectrometers, it is characterized in that described array optical sensing device is the face array CMOS image sensor.
4. according to any described fourier spectrometer of claim 1, it is characterized in that described array optical sensing device is micro channel array photomultiplier PMT.
5. according to the described fourier spectrometer of claim 1, it is characterized in that described angle is an acute angle, described array optical sensing device is a line array CCD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100533528A CN101303255A (en) | 2008-05-30 | 2008-05-30 | Integrated Fourier spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100533528A CN101303255A (en) | 2008-05-30 | 2008-05-30 | Integrated Fourier spectrometer |
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| Publication Number | Publication Date |
|---|---|
| CN101303255A true CN101303255A (en) | 2008-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100533528A Pending CN101303255A (en) | 2008-05-30 | 2008-05-30 | Integrated Fourier spectrometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620829A (en) * | 2012-04-12 | 2012-08-01 | 重庆大学 | Fourier transform infrared spectrometer based on programmable MEMS (micro-electro-mechanical system) micromirror and single-point detector |
| CN103119407A (en) * | 2010-07-02 | 2013-05-22 | A·A·斯托加诺夫 | Static fourier spectrometer |
-
2008
- 2008-05-30 CN CNA2008100533528A patent/CN101303255A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103119407A (en) * | 2010-07-02 | 2013-05-22 | A·A·斯托加诺夫 | Static fourier spectrometer |
| CN102620829A (en) * | 2012-04-12 | 2012-08-01 | 重庆大学 | Fourier transform infrared spectrometer based on programmable MEMS (micro-electro-mechanical system) micromirror and single-point detector |
| CN102620829B (en) * | 2012-04-12 | 2014-10-15 | 重庆大学 | Fourier transform infrared spectrometer based on programmable MEMS (micro-electro-mechanical system) micromirror and single-point detector |
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Open date: 20081112 |