CN100587421C - Fourier spectrometer - Google Patents
Fourier spectrometer Download PDFInfo
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- CN100587421C CN100587421C CN200810053217A CN200810053217A CN100587421C CN 100587421 C CN100587421 C CN 100587421C CN 200810053217 A CN200810053217 A CN 200810053217A CN 200810053217 A CN200810053217 A CN 200810053217A CN 100587421 C CN100587421 C CN 100587421C
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- splitter prism
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Abstract
The invention relates to two Fourier spectrographs with the same inventive concept. One Fourier spectrograph comprises a beam splitter prism and an array-type photosensor; the beam splitter prism comprises a first plane and a second plane which form an included angle and are plated with reflecting films; the included angle between two planes is near 90 degrees; an included angle between the secondplane plated with the reflecting film and a light splitting plane is 45 degrees; the beam splitter prism is positioned on a light path of measured parallel light; the second plane plated with the reflecting film is vertical to a light path; the measured parallel light reach the beam splitter prism and are divided into two parts: one part of splitting light permeates into the second plane plated with the reflecting film through the light splitting plane, is reflected by the second plane, then reflected by the light splitting plane and reaches the array-type photosensor; the other part of the splitting light is reflected by the light splitting plane, reaches the first plane plated with the reflecting film, is reflected by the first plane and reaches the array-type photosensor through the light splitting plane. The two Fourier spectrographs have simple conformation, high speed, stability, reliability, high sensitivity and resolution, and need no moving elements.
Description
Technical field
The present invention relates to scientific instrument, especially a kind of spectral instrument.
Background technology
Spectrometer is a kind of important and commonly used scientific instrument, is used for light source and material are carried out accurate analysis.For the performances such as sensitivity for analysis, precision and speed that improve instrument, constantly the someone adopts new technology and device improvements spectrometer.
Patent of invention (the long spectrometer of CCD grating integrated full as designs such as Wang Kemin, patent No. CN01114410.6), patent of invention (the integrated miniature spectrometer of design such as Wen Zhiyu, patent No. CN02119512.9), patent of invention (the online near infrared spectrometer of design such as Yuan Hongfu, application number CN02125852.X), patent of invention (the hand-held spectrometer of the clear design of Liu Mu, application number CN01254633.X), Liu Mu waits the patent of invention (a kind of near infrared spectrometer of 0.7-1.7 micron waveband, application number CN03270366.X) of design clearly.Be grating spectrograph in above-mentioned design, adopt grating and CCD (charge-coupled image sensor) as the performance that improves spectrometer.CCD has advantage fast, but with respect to other photoelectric devices such as photomultipliers, the sensitivity of CCD is much lower, still is apparent not enough when analyzing some material composition.Otherwise fourier spectrometer has highly sensitive characteristics, but needs accurate moving component, complex structure, and measuring speed is slow.
Summary of the invention
Technical matters to be solved by this invention is to overcome above-mentioned the deficiencies in the prior art, realizes that a kind of both tools are high-speed, has high sensitivity again, does not also need moving component, does not need the novel spectrometer of adjusting.
In order to solve the problems of the technologies described above, first kind of technical scheme that the present invention proposes is as follows:
A kind of fourier spectrometer, comprise a beam splitter prism and array photoelectricity multiplier tube, described beam splitter prism is a kind of approximate right angle beam splitter prism, comprise the first and second two plane A and B of being coated with reflectance coating that are mutually angle, this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °, second plane B and angle between the beam-splitting surface that is coated with reflectance coating is 45 °; Described beam splitter prism places on the light path of tested directional light, its second plane B that is coated with reflectance coating is vertical with light path, tested directional light arrives after the described beam splitter prism, separated into two parts, a part sees through the plane B that beam-splitting surface to the second is coated with reflectance coating, by reaching array photoelectricity multiplier tube by the beam-splitting surface reflection again after its reflection, another part light arrives first by the beam-splitting surface reflection and is coated with the plane A of reflectance coating, sees through beam-splitting surface and reach array photoelectricity multiplier tube after its reflection.
Second kind of technical scheme that the present invention proposes is as follows:
A kind of fourier spectrometer, comprise a beam splitter prism and array optical sensing device, described beam splitter prism is a kind of approximate right angle beam splitter prism, comprises the first and second two plane A and B of being coated with reflectance coating that are mutually angle, this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °; Described beam splitter prism places on the light path of tested directional light, its second plane B that is coated with reflectance coating and the angle between the tested directional light light path bearing of trend are greater than 89 ° and less than 90 °, tested directional light arrives after the described beam splitter prism, separated into two parts, a part sees through the plane B that beam-splitting surface to the second is coated with reflectance coating, by reaching the array optical sensing device by the beam-splitting surface reflection again after its reflection, another part light reflects the plane A that arrival first is coated with reflectance coating by beam-splitting surface, sees through beam-splitting surface and reach the array optical sensing device after its reflection.
The present invention improves the design of the inferior interferometer of Mike's ear, with parts of an approximate right angle beam splitter prism, substitute beam splitter and two-face mirror in the inferior interferometer of Mike's ear, plate reflectance coating at two of beam splitter prism adjacent transmission planes, and one of them or two sides are had a mind to make certain degree of tilt.With the array optical sensing device, as CCD or cmos image sensor as optical signal detector spare, as receiving device, it is all different to make each (row) pixel of photosensitive device receive the optical path difference of the light beam that reflects from two reflectings surface, the array optical electrical part is after receiving the interference signal of different optical path differences, by Fourier transform, can realize spectral measurement.This kind design makes the structure of spectrometer simplify greatly, does not need moving component, does not need to adjust, and can realize high-speed high sensitivity spectral analysis.
Description of drawings
Fig. 1 is the light path principle figure of the embodiment of the invention 1.
Fig. 2 is the light path principle figure of the embodiment of the invention 2.
Reference numeral:
1 is that beam splitter prism 2 is the array optical sensing device
Embodiment
Below in conjunction with accompanying drawing the present invention is elaborated.
The embodiment one of fourier spectrometer of the present invention:
As shown in Figure 1, it is a kind of approximate right angle beam splitter prism that the embodiment of the invention one adopts beam splitter prism, comprise that an A and two of the 2nd B are mutually the plane that is coated with reflectance coating of angle, this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °, for example can be 89.5 °, second plane B and angle between the beam-splitting surface that is coated with reflectance coating is 45 °.
Referring to Fig. 1, tested directional light is by beam splitter prism 1 separated into two parts, and a part sees through the plane B that beam-splitting surface arrives beam splitter prism, and plane B is coated with reflectance coating and constitutes catoptron, by reaching array optical sensing device 2 by the beam-splitting surface reflection again after the plane B reflection; Another part light is arrived the plane A of beam splitter prism by the beam-splitting surface reflection, plane A also is coated with reflectance coating and constitutes catoptron, but plane A is not vertical with optical axis as the right angle beam splitter prism with light beam, but certain angle of inclination is arranged, vergence direction as shown in the figure, thereby this part light has different optical path differences in plane A reflection back with plane B beam reflected, arrive array optical sensing device 2 after seeing through beam-splitting surface, two interference lights that plane reflection is returned that array optical sensing device 2 receives, carry out Fourier transform by the photosignal that array photosensitive device 2 is obtained, just can obtain by the frequency spectrum of photometry.
The array optical sensing device can adopt the CCD light sensor of linear array, (image) sensor or CMOS photosensitive (image) sensor that also can adopt the CCD of face battle array photosensitive, as 13V5H of Min Tong company etc., also can adopt other face battle array photosensitive (image) sensor, as array photoelectricity multiplier tube (PMT) etc.
When employing face battle array photosensitive (image) sensor, identical with grating cutting direction (or saying the same cutting reflected light of reception) detected signal of pixel carries out Fourier transform after can superposeing again, can increase substantially the sensitivity of spectrometer and the precision of spectrum amplitude.
The embodiment two of fourier spectrometer of the present invention:
As shown in Figure 2, it is a kind of approximate right angle beam splitter prism that the embodiment of the invention two adopts beam splitter prism, comprises that an A and two of the 2nd B are mutually the plane that is coated with reflectance coating of angle, and this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °, for example can be 89.5 °.
Referring to Fig. 2, tested directional light is by beam splitter prism 1 separated into two parts, a part sees through the plane B that beam-splitting surface arrives beam splitter prism, another part light is arrived the plane A of beam splitter prism by the beam-splitting surface reflection, plane A, B is coated with reflectance coating and constitutes catoptron, but plane A, B is not vertical with optical axis as the right angle beam splitter prism, but certain angle of inclination is arranged, vergence direction as shown in the figure, and the optical path difference of two plane reflections that make array optical sensing device 2 each pixel receive interference light of returning is all inequality, carry out Fourier transform by the photosignal that array photosensitive device 2 is obtained, just can obtain by the frequency spectrum of photometry.
The array optical sensing device can adopt photosensitive (image) sensor of the CCD of face battle array or CMOS photosensitive (image) sensor, as 13V5H of Min Tong company etc., also can adopt other face battle array photosensitive (image) sensor, as array photoelectricity multiplier tube (PMT) etc.
By suitable adjustment, can be so that each picture element of face battle array photosensitive (image) sensor obtain the different maximum interference intensity light of wavelength, thereby present embodiment can improve the wavelength resolution of several magnitudes than embodiment one.
Need to prove, the invention belongs to a kind of component invention, is a kind of invention that has novelty on technology is used, and wherein related grating and photosensitive (image) sensor etc. all belong to prior art and existing various ways and application.Its detail characteristic is not described herein again at this.
In addition, here the detailed explanation that has been center deployment with embodiments of the invention, the imbody of described optimal way or some characteristic, should be understood to this instructions only is to describe the present invention by the mode that provides embodiment, in fact on some details of forming, construct and using, can change to some extent, comprise the combination and the assembly of parts, these distortion and application all should belong in the scope of the present invention.
Claims (2)
1. fourier spectrometer, comprise a beam splitter prism and array photoelectricity multiplier tube, described beam splitter prism is a kind of approximate right angle beam splitter prism, comprise that first (A) and two of second (B) are mutually the plane that is coated with reflectance coating of angle, this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °, second is coated with the plane (B) of reflectance coating and the angle between the beam-splitting surface is 45 °; Described beam splitter prism places on the light path of tested directional light, its second plane (B) that is coated with reflectance coating is vertical with light path, tested directional light arrives after the described beam splitter prism, separated into two parts, a part sees through the plane (B) that beam-splitting surface to the second is coated with reflectance coating, by reaching array photoelectricity multiplier tube by the beam-splitting surface reflection again after its reflection, another part light arrives first by the beam-splitting surface reflection and is coated with the plane (A) of reflectance coating, sees through beam-splitting surface and reach array photoelectricity multiplier tube after its reflection.
2. fourier spectrometer, comprise a beam splitter prism and array photoelectricity multiplier tube, described beam splitter prism is a kind of approximate right angle beam splitter prism, comprise that first (A) and two of second (B) are mutually the plane that is coated with reflectance coating of angle, this angle is the acute angle of approximate right angle, greater than 89 ° and less than 90 °; Described beam splitter prism places on the light path of tested directional light, its second plane (B) that is coated with reflectance coating and the angle between the tested directional light light path bearing of trend are greater than 89 ° and less than 90 °, tested directional light arrives after the described beam splitter prism, separated into two parts, a part sees through the plane (B) that beam-splitting surface to the second is coated with reflectance coating, by reaching array photoelectricity multiplier tube by the beam-splitting surface reflection again after its reflection, another part light reflects the plane (A) that arrival first is coated with reflectance coating by beam-splitting surface, sees through beam-splitting surface and reach array photoelectricity multiplier tube after its reflection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810053217A CN100587421C (en) | 2008-05-23 | 2008-05-23 | Fourier spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810053217A CN100587421C (en) | 2008-05-23 | 2008-05-23 | Fourier spectrometer |
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| Publication Number | Publication Date |
|---|---|
| CN101285707A CN101285707A (en) | 2008-10-15 |
| CN100587421C true CN100587421C (en) | 2010-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810053217A Expired - Fee Related CN100587421C (en) | 2008-05-23 | 2008-05-23 | Fourier spectrometer |
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| CN (1) | CN100587421C (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095498B (en) * | 2010-11-12 | 2012-10-31 | 北京工业大学 | Scanning type high-accuracy Fourier transformation spectroscopy method |
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| CN101285707A (en) | 2008-10-15 |
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