CN101183642A - 一种p-GaN低阻欧姆接触的制备方法 - Google Patents
一种p-GaN低阻欧姆接触的制备方法 Download PDFInfo
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- CN101183642A CN101183642A CNA2007100099553A CN200710009955A CN101183642A CN 101183642 A CN101183642 A CN 101183642A CN A2007100099553 A CNA2007100099553 A CN A2007100099553A CN 200710009955 A CN200710009955 A CN 200710009955A CN 101183642 A CN101183642 A CN 101183642A
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名称 | 面电荷密度(cm-2) | 比接触电阻(Ω.cm2) |
p-GaN | 1.32e+13 | 2.87e-2 |
p-InGaN/p-GaN | 5.87e+13 | 7.04e-4 |
p-InGaN/p-AlGaN | 7.96e+13 | 7.27e-5 |
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CNB2007100099553A CN100514558C (zh) | 2007-12-10 | 2007-12-10 | 一种p-GaN低阻欧姆接触的制备方法 |
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CNB2007100099553A CN100514558C (zh) | 2007-12-10 | 2007-12-10 | 一种p-GaN低阻欧姆接触的制备方法 |
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CN101183642A true CN101183642A (zh) | 2008-05-21 |
CN100514558C CN100514558C (zh) | 2009-07-15 |
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Cited By (16)
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CN101831628A (zh) * | 2010-04-21 | 2010-09-15 | 中国科学院半导体研究所 | 一种生长高质量富In组分InGaN薄膜材料的方法 |
CN102185053A (zh) * | 2011-04-02 | 2011-09-14 | 映瑞光电科技(上海)有限公司 | 发光二极管及其制造方法 |
CN102227008A (zh) * | 2011-05-18 | 2011-10-26 | 湘能华磊光电股份有限公司 | LED芯片的P型GaN层的制备方法 |
CN102468381A (zh) * | 2010-11-23 | 2012-05-23 | 孙智江 | 一种形成p型重掺杂的方法 |
CN103077964A (zh) * | 2013-01-18 | 2013-05-01 | 中国科学院半导体研究所 | 改进p-GaN薄膜欧姆接触的材料结构及其制备方法 |
WO2014169719A1 (zh) * | 2013-04-19 | 2014-10-23 | 厦门市三安光电科技有限公司 | 一种led外延结构及其制备方法 |
CN105406358A (zh) * | 2015-11-25 | 2016-03-16 | 武汉电信器件有限公司 | 一种GaN基激光器制备方法和结构 |
CN107482095A (zh) * | 2017-09-23 | 2017-12-15 | 湘能华磊光电股份有限公司 | 一种led外延生长方法 |
CN108878606A (zh) * | 2018-06-22 | 2018-11-23 | 西安电子科技大学 | 基于超晶格结构和δ掺杂的高效发光二极管及制备方法 |
WO2018223968A1 (zh) * | 2017-06-07 | 2018-12-13 | 西安电子科技大学 | 欧姆接触区方块电阻的修正方法 |
CN110061104A (zh) * | 2019-02-28 | 2019-07-26 | 华灿光电(苏州)有限公司 | 氮化镓基发光二极管外延片的制造方法 |
CN112331752A (zh) * | 2020-12-03 | 2021-02-05 | 至芯半导体(杭州)有限公司 | 一种具有低电阻率p型层的深紫外led外延制造方法 |
CN112701160A (zh) * | 2020-12-09 | 2021-04-23 | 华灿光电(浙江)有限公司 | 氮化镓基高电子迁移率晶体管外延片及其制备方法 |
CN113421917A (zh) * | 2021-03-09 | 2021-09-21 | 广西飓芯科技有限责任公司 | 一种降低p型III-V族半导体材料与接触电极的比接触电阻率的方法 |
CN114944443A (zh) * | 2022-07-26 | 2022-08-26 | 江西兆驰半导体有限公司 | 一种欧姆接触层、发光二极管外延片及其制备方法 |
CN115775853A (zh) * | 2023-02-10 | 2023-03-10 | 江西兆驰半导体有限公司 | 一种发光二极管外延片及其制备方法、发光二极管 |
Families Citing this family (1)
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---|---|---|---|---|
CN102185054A (zh) * | 2011-04-02 | 2011-09-14 | 映瑞光电科技(上海)有限公司 | 发光二极管及其制造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3794876B2 (ja) * | 1998-09-09 | 2006-07-12 | 松下電器産業株式会社 | 半導体装置の製造方法 |
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2007
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Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101831628A (zh) * | 2010-04-21 | 2010-09-15 | 中国科学院半导体研究所 | 一种生长高质量富In组分InGaN薄膜材料的方法 |
CN101831628B (zh) * | 2010-04-21 | 2011-10-05 | 中国科学院半导体研究所 | 一种生长高质量富In组分InGaN薄膜材料的方法 |
CN102468381A (zh) * | 2010-11-23 | 2012-05-23 | 孙智江 | 一种形成p型重掺杂的方法 |
CN102185053A (zh) * | 2011-04-02 | 2011-09-14 | 映瑞光电科技(上海)有限公司 | 发光二极管及其制造方法 |
CN102227008A (zh) * | 2011-05-18 | 2011-10-26 | 湘能华磊光电股份有限公司 | LED芯片的P型GaN层的制备方法 |
CN103077964A (zh) * | 2013-01-18 | 2013-05-01 | 中国科学院半导体研究所 | 改进p-GaN薄膜欧姆接触的材料结构及其制备方法 |
WO2014169719A1 (zh) * | 2013-04-19 | 2014-10-23 | 厦门市三安光电科技有限公司 | 一种led外延结构及其制备方法 |
CN105406358A (zh) * | 2015-11-25 | 2016-03-16 | 武汉电信器件有限公司 | 一种GaN基激光器制备方法和结构 |
WO2018223968A1 (zh) * | 2017-06-07 | 2018-12-13 | 西安电子科技大学 | 欧姆接触区方块电阻的修正方法 |
CN107482095A (zh) * | 2017-09-23 | 2017-12-15 | 湘能华磊光电股份有限公司 | 一种led外延生长方法 |
CN108878606A (zh) * | 2018-06-22 | 2018-11-23 | 西安电子科技大学 | 基于超晶格结构和δ掺杂的高效发光二极管及制备方法 |
CN110061104A (zh) * | 2019-02-28 | 2019-07-26 | 华灿光电(苏州)有限公司 | 氮化镓基发光二极管外延片的制造方法 |
CN110061104B (zh) * | 2019-02-28 | 2020-08-14 | 华灿光电(苏州)有限公司 | 氮化镓基发光二极管外延片的制造方法 |
CN112331752A (zh) * | 2020-12-03 | 2021-02-05 | 至芯半导体(杭州)有限公司 | 一种具有低电阻率p型层的深紫外led外延制造方法 |
CN112701160A (zh) * | 2020-12-09 | 2021-04-23 | 华灿光电(浙江)有限公司 | 氮化镓基高电子迁移率晶体管外延片及其制备方法 |
CN112701160B (zh) * | 2020-12-09 | 2022-08-09 | 华灿光电(浙江)有限公司 | 氮化镓基高电子迁移率晶体管外延片及其制备方法 |
CN113421917A (zh) * | 2021-03-09 | 2021-09-21 | 广西飓芯科技有限责任公司 | 一种降低p型III-V族半导体材料与接触电极的比接触电阻率的方法 |
CN114944443A (zh) * | 2022-07-26 | 2022-08-26 | 江西兆驰半导体有限公司 | 一种欧姆接触层、发光二极管外延片及其制备方法 |
CN114944443B (zh) * | 2022-07-26 | 2022-10-21 | 江西兆驰半导体有限公司 | 一种欧姆接触层、发光二极管外延片及其制备方法 |
CN115775853A (zh) * | 2023-02-10 | 2023-03-10 | 江西兆驰半导体有限公司 | 一种发光二极管外延片及其制备方法、发光二极管 |
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