CN100580485C - 光学滤波器和光学滤波器的制造方法 - Google Patents

光学滤波器和光学滤波器的制造方法 Download PDF

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Publication number
CN100580485C
CN100580485C CN200580004454A CN200580004454A CN100580485C CN 100580485 C CN100580485 C CN 100580485C CN 200580004454 A CN200580004454 A CN 200580004454A CN 200580004454 A CN200580004454 A CN 200580004454A CN 100580485 C CN100580485 C CN 100580485C
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CN
China
Prior art keywords
mentioned
film
matrix
stress
optical filter
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Expired - Fee Related
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CN200580004454A
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English (en)
Chinese (zh)
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CN1918489A (zh
Inventor
龟田英一
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Daishinku Corp
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Daishinku Corp
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Publication of CN1918489A publication Critical patent/CN1918489A/zh
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Publication of CN100580485C publication Critical patent/CN100580485C/zh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)
CN200580004454A 2004-07-09 2005-06-23 光学滤波器和光学滤波器的制造方法 Expired - Fee Related CN100580485C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004203440 2004-07-09
JP203440/2004 2004-07-09

Publications (2)

Publication Number Publication Date
CN1918489A CN1918489A (zh) 2007-02-21
CN100580485C true CN100580485C (zh) 2010-01-13

Family

ID=35783711

Family Applications (1)

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CN200580004454A Expired - Fee Related CN100580485C (zh) 2004-07-09 2005-06-23 光学滤波器和光学滤波器的制造方法

Country Status (5)

Country Link
JP (1) JP4692486B2 (ja)
KR (1) KR101193096B1 (ja)
CN (1) CN100580485C (ja)
TW (1) TW200606465A (ja)
WO (1) WO2006006363A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2694627A1 (en) * 2007-07-27 2009-02-05 Selex Galileo S.P.A. Preliminary controlled pre-deformation treatment for the production of mirrors
WO2012165579A1 (ja) * 2011-06-03 2012-12-06 Hoya株式会社 プラスチックレンズ
US9651723B2 (en) 2012-10-26 2017-05-16 Kyocera Corporation Optical filter member and imaging device provided with the same
KR101844372B1 (ko) 2014-12-03 2018-04-02 주식회사 엘엠에스 고체 촬상 소자용 광학필터 및 이를 포함하는 고체 촬상 소자
WO2017213047A1 (ja) * 2016-06-08 2017-12-14 Jsr株式会社 光学フィルターおよび光学センサー装置
US20180024276A1 (en) * 2016-07-21 2018-01-25 Corning Incorporated Optical elements with stress-balancing coatings
CN108121023A (zh) * 2017-12-28 2018-06-05 中国科学院长春光学精密机械与物理研究所 一种光学薄膜滤光片的制作方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1461425A (zh) * 2001-02-14 2003-12-10 阿里萨娃欧普提克有限公司 反射型投影屏幕
CN1503007A (zh) * 2002-11-21 2004-06-09 台达电子工业股份有限公司 膜应力平衡镀膜方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58113901A (ja) * 1981-12-26 1983-07-07 Nippon Kogaku Kk <Nikon> 積層型光学構体
JPS58217901A (ja) * 1982-06-14 1983-12-19 Nippon Kogaku Kk <Nikon> 透過型光学部材
JPH02307100A (ja) * 1989-05-23 1990-12-20 Nikon Corp 軟ｘ線用フレネルゾーンプレートの製造方法
JP3034668B2 (ja) * 1991-11-02 2000-04-17 有限会社光伸光学 干渉フィルター
JPH06186418A (ja) * 1992-06-30 1994-07-08 Victor Co Of Japan Ltd ダイクロイックミラーの製造方法
JPH06186403A (ja) * 1992-12-18 1994-07-08 Olympus Optical Co Ltd 多層膜光学部材
JPH0933719A (ja) * 1995-07-21 1997-02-07 Koshin Kogaku:Kk 誘電体多層膜フィルタの製造方法とその製造装置
JP3937823B2 (ja) * 2001-11-29 2007-06-27 株式会社大真空 光線カットフィルタ
JP2004117747A (ja) * 2002-09-25 2004-04-15 Fujitsu Ltd 光装置
JP4513258B2 (ja) * 2002-12-12 2010-07-28 旭硝子株式会社 波長可変フィルタ
JP2005010338A (ja) * 2003-06-18 2005-01-13 Canon Inc 光学素子
JP2005043755A (ja) * 2003-07-24 2005-02-17 Seiko Epson Corp 光学多層膜フィルタ、光学多層膜フィルタの製造方法、光学ローパスフィルタ、及び電子機器装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1461425A (zh) * 2001-02-14 2003-12-10 阿里萨娃欧普提克有限公司 反射型投影屏幕
CN1503007A (zh) * 2002-11-21 2004-06-09 台达电子工业股份有限公司 膜应力平衡镀膜方法

Also Published As

Publication number Publication date
KR20070041666A (ko) 2007-04-19
JPWO2006006363A1 (ja) 2008-04-24
WO2006006363A1 (ja) 2006-01-19
KR101193096B1 (ko) 2012-10-19
CN1918489A (zh) 2007-02-21
TW200606465A (en) 2006-02-16
TWI367350B (ja) 2012-07-01
JP4692486B2 (ja) 2011-06-01

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Granted publication date: 20100113

Termination date: 20190623