CN100431154C - 半导体集成电路器件及其制造方法 - Google Patents
半导体集成电路器件及其制造方法 Download PDFInfo
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- CN100431154C CN100431154C CNB021198179A CN02119817A CN100431154C CN 100431154 C CN100431154 C CN 100431154C CN B021198179 A CNB021198179 A CN B021198179A CN 02119817 A CN02119817 A CN 02119817A CN 100431154 C CN100431154 C CN 100431154C
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0922—Combination of complementary transistors having a different structure, e.g. stacked CMOS, high-voltage and low-voltage CMOS
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (43)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP93839/01 | 2001-03-28 | ||
JP2001093839 | 2001-03-28 | ||
JP93839/2001 | 2001-03-28 | ||
JP35536/02 | 2002-02-13 | ||
JP2002035536A JP4236848B2 (ja) | 2001-03-28 | 2002-02-13 | 半導体集積回路装置の製造方法 |
JP35536/2002 | 2002-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1449040A CN1449040A (zh) | 2003-10-15 |
CN100431154C true CN100431154C (zh) | 2008-11-05 |
Family
ID=26612424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021198179A Expired - Fee Related CN100431154C (zh) | 2001-03-28 | 2002-03-28 | 半导体集成电路器件及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6844578B2 (zh) |
JP (1) | JP4236848B2 (zh) |
CN (1) | CN100431154C (zh) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
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US6858500B2 (en) * | 2002-01-16 | 2005-02-22 | Fuji Electric Co., Ltd. | Semiconductor device and its manufacturing method |
US7019377B2 (en) * | 2002-12-17 | 2006-03-28 | Micrel, Inc. | Integrated circuit including high voltage devices and low voltage devices |
JP2004214575A (ja) * | 2003-01-09 | 2004-07-29 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP4437388B2 (ja) * | 2003-02-06 | 2010-03-24 | 株式会社リコー | 半導体装置 |
US6861701B2 (en) * | 2003-03-05 | 2005-03-01 | Advanced Analogic Technologies, Inc. | Trench power MOSFET with planarized gate bus |
KR100984359B1 (ko) * | 2003-11-20 | 2010-09-30 | 삼성전자주식회사 | 박막 트랜지스터 표시판 |
US7304354B2 (en) * | 2004-02-17 | 2007-12-04 | Silicon Space Technology Corp. | Buried guard ring and radiation hardened isolation structures and fabrication methods |
DE102004024885B4 (de) * | 2004-05-19 | 2007-09-06 | Infineon Technologies Ag | Halbleiterbauelement und Verfahren zu dessen Herstellung |
US7109552B2 (en) * | 2004-11-01 | 2006-09-19 | Silicon-Based Technology, Corp. | Self-aligned trench DMOS transistor structure and its manufacturing methods |
JP4591827B2 (ja) | 2005-05-24 | 2010-12-01 | エルピーダメモリ株式会社 | リセスチャネル構造を有するセルトランジスタを含む半導体装置およびその製造方法 |
JP4501820B2 (ja) * | 2005-09-07 | 2010-07-14 | 株式会社デンソー | 半導体装置の製造方法 |
US8384150B2 (en) * | 2005-11-29 | 2013-02-26 | Rohm Co., Ltd. | Vertical double diffused MOS transistor with a trench gate structure |
JP5113331B2 (ja) | 2005-12-16 | 2013-01-09 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US20070262395A1 (en) | 2006-05-11 | 2007-11-15 | Gibbons Jasper S | Memory cell access devices and methods of making the same |
US8008144B2 (en) * | 2006-05-11 | 2011-08-30 | Micron Technology, Inc. | Dual work function recessed access device and methods of forming |
US8860174B2 (en) * | 2006-05-11 | 2014-10-14 | Micron Technology, Inc. | Recessed antifuse structures and methods of making the same |
JP2007329239A (ja) * | 2006-06-07 | 2007-12-20 | Sharp Corp | パワーicデバイス及びその製造方法 |
JP2008091434A (ja) * | 2006-09-29 | 2008-04-17 | Oki Electric Ind Co Ltd | Mosトランジスタ集積素子及び製造方法 |
US20090020813A1 (en) * | 2007-07-16 | 2009-01-22 | Steven Howard Voldman | Formation of lateral trench fets (field effect transistors) using steps of ldmos (lateral double-diffused metal oxide semiconductor) technology |
US20100013009A1 (en) * | 2007-12-14 | 2010-01-21 | James Pan | Structure and Method for Forming Trench Gate Transistors with Low Gate Resistance |
JP2009182114A (ja) * | 2008-01-30 | 2009-08-13 | Elpida Memory Inc | 半導体装置およびその製造方法 |
JP2010050374A (ja) | 2008-08-25 | 2010-03-04 | Seiko Instruments Inc | 半導体装置 |
US7824986B2 (en) * | 2008-11-05 | 2010-11-02 | Micron Technology, Inc. | Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions |
US9184097B2 (en) * | 2009-03-12 | 2015-11-10 | System General Corporation | Semiconductor devices and formation methods thereof |
JP5515434B2 (ja) * | 2009-06-03 | 2014-06-11 | ソニー株式会社 | 半導体装置及びその製造方法、固体撮像素子 |
US8338888B2 (en) * | 2009-09-29 | 2012-12-25 | STMicroelectronicis S.r.l. | Process for manufacturing an integrated device with “damascene” field insulation, and integrated device made by such process |
US8941176B2 (en) * | 2009-09-29 | 2015-01-27 | Stmicroelectronics S.R.L. | Integrated device with raised locos insulation regions and process for manufacturing such device |
KR20110084106A (ko) * | 2010-01-15 | 2011-07-21 | 인터실 아메리카스 인코포레이티드 | 매설 금속 구조를 사용하여 상호연결된 수직 고위측 pmos 및 수직 저위측 nmos를 구비하는 단일체형 출력 스테이지 |
JP6008377B2 (ja) * | 2010-03-03 | 2016-10-19 | ルネサスエレクトロニクス株式会社 | Pチャネル型パワーmosfet |
JP5738094B2 (ja) | 2010-09-14 | 2015-06-17 | セイコーインスツル株式会社 | 半導体装置の製造方法 |
US8482029B2 (en) * | 2011-05-27 | 2013-07-09 | Infineon Technologies Austria Ag | Semiconductor device and integrated circuit including the semiconductor device |
US8643097B2 (en) | 2011-08-09 | 2014-02-04 | United Microelectronics Corporation | Trench-gate metal oxide semiconductor device and fabricating method thereof |
US20130071994A1 (en) * | 2011-09-20 | 2013-03-21 | Alpha And Omega Semiconductor Incorporated | Method of integrating high voltage devices |
US9214457B2 (en) | 2011-09-20 | 2015-12-15 | Alpha & Omega Semiconductor Incorporated | Method of integrating high voltage devices |
US20130069157A1 (en) * | 2011-09-20 | 2013-03-21 | Alpha And Omega Semiconductor Incorporated | Semiconductor chip integrating high and low voltage devices |
JP5882046B2 (ja) * | 2011-12-21 | 2016-03-09 | エスアイアイ・セミコンダクタ株式会社 | 半導体集積回路装置の製造方法 |
JP5811829B2 (ja) | 2011-12-22 | 2015-11-11 | 住友電気工業株式会社 | 半導体装置の製造方法 |
JP2012182483A (ja) * | 2012-05-11 | 2012-09-20 | Renesas Electronics Corp | 半導体装置の製造方法 |
CN103515324B (zh) * | 2012-06-30 | 2016-10-26 | 万国半导体股份有限公司 | 集成高压器件的方法 |
US9064713B2 (en) * | 2012-09-06 | 2015-06-23 | Infineon Technologies Austria Ag | Voltage regulator using N-type substrate |
US20140110777A1 (en) * | 2012-10-18 | 2014-04-24 | United Microelectronics Corp. | Trench gate metal oxide semiconductor field effect transistor and fabricating method thereof |
WO2015174197A1 (ja) | 2014-05-14 | 2015-11-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
CN106796917B (zh) | 2015-03-17 | 2019-10-01 | 富士电机株式会社 | 半导体装置及半导体装置的制造方法 |
WO2017110547A1 (ja) * | 2015-12-21 | 2017-06-29 | シャープ株式会社 | 半導体装置及びその製造方法 |
DE102016103714B4 (de) * | 2016-03-02 | 2021-09-30 | Infineon Technologies Ag | Leistungshalbleiterpackages und Multiphasengleichrichter mit einem Leistungshalbleiterpackage |
US10038058B2 (en) | 2016-05-07 | 2018-07-31 | Silicon Space Technology Corporation | FinFET device structure and method for forming same |
CN117413366A (zh) | 2021-05-26 | 2024-01-16 | 国立研究开发法人产业技术综合研究所 | 半导体装置及其制造方法 |
CN115130422B (zh) * | 2022-05-24 | 2023-10-17 | 清华大学 | 标准单元的自动构建方法及装置、终端和存储介质 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1182500A (zh) * | 1995-04-21 | 1998-05-20 | 西门子公司 | 固定值存储器单元装置及其制造方法 |
US5854500A (en) * | 1995-09-26 | 1998-12-29 | Siemens Aktiengesellschaft | DRAM cell array with dynamic gain memory cells |
CN1214540A (zh) * | 1997-10-15 | 1999-04-21 | 世界先进积体电路股份有限公司 | 具有p+多晶硅栅极的金属氧化物半导体晶体管的制作方法 |
Family Cites Families (4)
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US4890144A (en) * | 1987-09-14 | 1989-12-26 | Motorola, Inc. | Integrated circuit trench cell |
US5285093A (en) * | 1992-10-05 | 1994-02-08 | Motorola, Inc. | Semiconductor memory cell having a trench structure |
US5554870A (en) * | 1994-02-04 | 1996-09-10 | Motorola, Inc. | Integrated circuit having both vertical and horizontal devices and process for making the same |
US5698893A (en) * | 1995-01-03 | 1997-12-16 | Motorola, Inc. | Static-random-access memory cell with trench transistor and enhanced stability |
-
2002
- 2002-02-13 JP JP2002035536A patent/JP4236848B2/ja not_active Expired - Fee Related
- 2002-03-27 US US10/108,538 patent/US6844578B2/en not_active Expired - Lifetime
- 2002-03-28 CN CNB021198179A patent/CN100431154C/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1182500A (zh) * | 1995-04-21 | 1998-05-20 | 西门子公司 | 固定值存储器单元装置及其制造方法 |
US5854500A (en) * | 1995-09-26 | 1998-12-29 | Siemens Aktiengesellschaft | DRAM cell array with dynamic gain memory cells |
CN1214540A (zh) * | 1997-10-15 | 1999-04-21 | 世界先进积体电路股份有限公司 | 具有p+多晶硅栅极的金属氧化物半导体晶体管的制作方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4236848B2 (ja) | 2009-03-11 |
US6844578B2 (en) | 2005-01-18 |
CN1449040A (zh) | 2003-10-15 |
JP2002359294A (ja) | 2002-12-13 |
US20020158277A1 (en) | 2002-10-31 |
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Effective date of registration: 20160311 Address after: Chiba County, Japan Patentee after: SEIKO INSTR INC Address before: Chiba County, Japan Patentee before: Seiko Instruments Inc. |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Patentee before: SEIKO INSTR INC |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081105 Termination date: 20200328 |