CN100357704C - 可移动型平面度测量装置 - Google Patents

可移动型平面度测量装置 Download PDF

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Publication number
CN100357704C
CN100357704C CNB2005101161355A CN200510116135A CN100357704C CN 100357704 C CN100357704 C CN 100357704C CN B2005101161355 A CNB2005101161355 A CN B2005101161355A CN 200510116135 A CN200510116135 A CN 200510116135A CN 100357704 C CN100357704 C CN 100357704C
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CN
China
Prior art keywords
flatness
inspection devices
line slideway
flatness inspection
movable
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Expired - Fee Related
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CNB2005101161355A
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English (en)
Chinese (zh)
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CN1779413A (zh
Inventor
矢野克广
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Renesas Electronics Corp
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NEC Corp
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Publication of CN1779413A publication Critical patent/CN1779413A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CNB2005101161355A 2004-10-25 2005-10-25 可移动型平面度测量装置 Expired - Fee Related CN100357704C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004310160A JP4938231B2 (ja) 2004-10-25 2004-10-25 平坦度測定器
JP2004310160 2004-10-25

Publications (2)

Publication Number Publication Date
CN1779413A CN1779413A (zh) 2006-05-31
CN100357704C true CN100357704C (zh) 2007-12-26

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Family Applications (1)

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CNB2005101161355A Expired - Fee Related CN100357704C (zh) 2004-10-25 2005-10-25 可移动型平面度测量装置

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US (1) US7345773B2 (ja)
JP (1) JP4938231B2 (ja)
CN (1) CN100357704C (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI718727B (zh) * 2019-10-25 2021-02-11 黃建德 地板平坦度測量儀器以及其測量方法

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* Cited by examiner, † Cited by third party
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JP4015666B2 (ja) * 2005-04-07 2007-11-28 オリンパスメディカルシステムズ株式会社 被検体内情報取得システム
KR100971494B1 (ko) * 2008-05-23 2010-07-21 포항공과대학교 산학협력단 기계적 가이드를 가지는 면적변화형 정전용량형 센서
BR102012031975B1 (pt) * 2012-12-14 2021-01-05 Embraer S.A. dispositivo para medição de deformações em superfícies
CN103363891A (zh) * 2013-07-22 2013-10-23 苏州市润凯汽车配件制造有限公司 一种新型离合器盖总成压盘平行度检测装置
US9329018B1 (en) * 2015-03-20 2016-05-03 Meridian Equipment, Inc. Flatness inspection spider
KR102537289B1 (ko) * 2016-07-12 2023-05-30 가부시키가이샤 니콘 적층 기판 제조 방법, 적층 기판 제조 장치, 적층 기판 제조 시스템, 및 기판 처리 장치
CN107478163B (zh) * 2017-08-01 2019-11-08 兰州兰石集团有限公司 基于旋转模式的波纹板片质量检测装置
CN109405734B (zh) * 2018-12-14 2023-11-21 中核新科（天津）精密机械制造有限公司 快速高精度平面平行度测量装置及测量方法
CN110186371A (zh) * 2019-07-01 2019-08-30 芜湖力钧轨道装备有限公司 一种平面度超差连续测量装置及其测量方法
US11248898B2 (en) 2019-08-23 2022-02-15 Rj Reynolds Tobacco Company Roll fed material measurement device
CN111895959B (zh) * 2020-08-05 2021-08-24 南阳理工学院 一种基于物联网的平整度检测校正装置
CN213364956U (zh) * 2021-04-09 2021-06-04 台湾积体电路制造股份有限公司 半导体设备的测量工装

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JPH0861949A (ja) * 1994-08-24 1996-03-08 Speedfam Co Ltd 定盤及び研磨パッドの表面形状測定装置
CN2277512Y (zh) * 1996-08-06 1998-04-01 中国科学院西安光学精密机械研究所 三点式平面度检测仪
US5838447A (en) * 1995-07-20 1998-11-17 Ebara Corporation Polishing apparatus including thickness or flatness detector
JP2001091234A (ja) * 1999-09-20 2001-04-06 Sankyu Inc フランジ面の変形量測定装置及び測定方法
JP2003075147A (ja) * 2001-08-31 2003-03-12 Kobe Steel Ltd 平坦度測定方法及びその装置
US6789513B2 (en) * 2002-06-10 2004-09-14 Alireza Ziabazmi Bazmi's six-stroke engine with intake-exhaust valves

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DE3820225C1 (ja) * 1988-06-14 1989-07-13 Hpo Hanseatische Praezisions- Und Orbittechnik Gmbh, 2800 Bremen, De
JP3310748B2 (ja) * 1993-12-27 2002-08-05 東芝セラミックス株式会社 平面形状測定装置及びこの装置を用いた平面形状測定方法
JP3197001B2 (ja) * 1996-02-26 2001-08-13 エーディーイー コーポレーション ウエハ試験および自動較正システム
JPH10160455A (ja) * 1996-11-27 1998-06-19 Sankyu Inc フランジ面変形量測定システム
JP2000111335A (ja) * 1998-10-07 2000-04-18 Hitachi Plant Eng & Constr Co Ltd 配管用開先形状計測装置及びその方法
US6052191A (en) * 1998-10-13 2000-04-18 Northrop Grumman Corporation Coating thickness measurement system and method of measuring a coating thickness
US6791686B1 (en) * 2000-07-26 2004-09-14 Nova Measuring Instruments Ltd. Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof
DE60143948D1 (de) * 2000-09-29 2011-03-10 Strasbaugh Inc Polierkissen mit eingebautem optischem sensor
US6442857B1 (en) * 2000-11-10 2002-09-03 Toto Ltd. Portable surface inspector
US6603589B2 (en) * 2001-11-19 2003-08-05 Tokyo Seimitsu (Israel) Ltd. Circular scanning patterns
JP3790961B2 (ja) * 2001-11-26 2006-06-28 株式会社東北テクノアーチ 表面形状測定装置
US6811466B1 (en) * 2001-12-28 2004-11-02 Applied Materials, Inc. System and method for in-line metal profile measurement
US6798513B2 (en) * 2002-04-11 2004-09-28 Nanophotonics Ab Measuring module
JP4070502B2 (ja) * 2002-05-01 2008-04-02 三菱重工業株式会社 測定装置
JP2003322520A (ja) * 2002-05-07 2003-11-14 Reputorino:Kk 平面研削・研磨装置の定盤の平坦度及び形状測定装置
AU2003302049A1 (en) * 2002-11-20 2004-06-15 Mehrdad Nikoohahad System and method for characterizing three-dimensional structures

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0861949A (ja) * 1994-08-24 1996-03-08 Speedfam Co Ltd 定盤及び研磨パッドの表面形状測定装置
US5838447A (en) * 1995-07-20 1998-11-17 Ebara Corporation Polishing apparatus including thickness or flatness detector
CN2277512Y (zh) * 1996-08-06 1998-04-01 中国科学院西安光学精密机械研究所 三点式平面度检测仪
JP2001091234A (ja) * 1999-09-20 2001-04-06 Sankyu Inc フランジ面の変形量測定装置及び測定方法
JP2003075147A (ja) * 2001-08-31 2003-03-12 Kobe Steel Ltd 平坦度測定方法及びその装置
US6789513B2 (en) * 2002-06-10 2004-09-14 Alireza Ziabazmi Bazmi's six-stroke engine with intake-exhaust valves

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI718727B (zh) * 2019-10-25 2021-02-11 黃建德 地板平坦度測量儀器以及其測量方法

Also Published As

Publication number Publication date
JP4938231B2 (ja) 2012-05-23
US7345773B2 (en) 2008-03-18
US20060085994A1 (en) 2006-04-27
CN1779413A (zh) 2006-05-31
JP2006119106A (ja) 2006-05-11

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Owner name: RENESAS ELECTRONICS CORPORATION

Free format text: FORMER NAME: NEC CORP.

CP01 Change in the name or title of a patent holder

Address after: Kanagawa, Japan

Patentee after: Renesas Electronics Corporation

Address before: Kanagawa, Japan

Patentee before: NEC ELECTRONICS Corp.

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Address after: Tokyo, Japan

Patentee after: Renesas Electronics Corporation

Address before: Kanagawa, Japan

Patentee before: Renesas Electronics Corporation

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20071226

Termination date: 20201025

CF01 Termination of patent right due to non-payment of annual fee