CH519839A - Verfahren zur Herstellung von elektrischen Dünnschichtkreisen mit Kondensatoren - Google Patents
Verfahren zur Herstellung von elektrischen Dünnschichtkreisen mit KondensatorenInfo
- Publication number
- CH519839A CH519839A CH1602167A CH1602167A CH519839A CH 519839 A CH519839 A CH 519839A CH 1602167 A CH1602167 A CH 1602167A CH 1602167 A CH1602167 A CH 1602167A CH 519839 A CH519839 A CH 519839A
- Authority
- CH
- Switzerland
- Prior art keywords
- electrodes
- dielectric
- combined
- iro
- tracks
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 230000001771 impaired effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD11931666 | 1966-08-17 | ||
| DD12107066 | 1966-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH519839A true CH519839A (de) | 1972-02-29 |
Family
ID=25747116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1602167A CH519839A (de) | 1966-08-17 | 1967-11-16 | Verfahren zur Herstellung von elektrischen Dünnschichtkreisen mit Kondensatoren |
Country Status (1)
| Country | Link |
|---|---|
| CH (1) | CH519839A (de) |
-
1967
- 1967-11-16 CH CH1602167A patent/CH519839A/de unknown
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PLZ | Patent of addition ceased |