CA937026A - Process for removing hydrogenated silanes from chlorosilanes - Google Patents
Process for removing hydrogenated silanes from chlorosilanesInfo
- Publication number
- CA937026A CA937026A CA094157A CA94157A CA937026A CA 937026 A CA937026 A CA 937026A CA 094157 A CA094157 A CA 094157A CA 94157 A CA94157 A CA 94157A CA 937026 A CA937026 A CA 937026A
- Authority
- CA
- Canada
- Prior art keywords
- chlorosilanes
- hydrogenated silanes
- removing hydrogenated
- silanes
- hydrogenated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1948911A DE1948911C3 (de) | 1969-09-27 | 1969-09-27 | Verfahren zur Entfernung von Hydrogensilanen aus Chlorsilanen |
Publications (1)
Publication Number | Publication Date |
---|---|
CA937026A true CA937026A (en) | 1973-11-20 |
Family
ID=5746694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA094157A Expired CA937026A (en) | 1969-09-27 | 1970-09-25 | Process for removing hydrogenated silanes from chlorosilanes |
Country Status (14)
Country | Link |
---|---|
US (1) | US3790459A (fi) |
JP (1) | JPS4943199B1 (fi) |
AT (1) | AT303070B (fi) |
BE (1) | BE756657A (fi) |
CA (1) | CA937026A (fi) |
CH (1) | CH540197A (fi) |
DE (1) | DE1948911C3 (fi) |
DK (1) | DK131619C (fi) |
FI (1) | FI50407C (fi) |
FR (1) | FR2062686A5 (fi) |
GB (1) | GB1298738A (fi) |
NL (1) | NL167658C (fi) |
NO (1) | NO130903C (fi) |
SE (1) | SE361297B (fi) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3502367A1 (de) * | 1985-01-25 | 1986-07-31 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zum entfernen von wasserstoff aus in siliziumtetrachlorid oder germaniumtetrachlorid geloesten wasserstoffhaltigen verbindungen |
JPS6440301U (fi) * | 1987-08-29 | 1989-03-10 | ||
DE3805282A1 (de) * | 1988-02-19 | 1989-08-31 | Wacker Chemitronic | Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen |
JP2867696B2 (ja) * | 1990-11-29 | 1999-03-08 | 信越化学工業株式会社 | 四塩化ケイ素の精製方法 |
DE19616556A1 (de) * | 1996-04-25 | 1997-10-30 | Wacker Chemie Gmbh | Verfahren zur Stabilisierung von hydridischen Silanen |
-
0
- BE BE756657D patent/BE756657A/xx not_active IP Right Cessation
-
1969
- 1969-09-27 DE DE1948911A patent/DE1948911C3/de not_active Expired
-
1970
- 1970-09-22 CH CH1403070A patent/CH540197A/de not_active IP Right Cessation
- 1970-09-25 DK DK489970A patent/DK131619C/da active
- 1970-09-25 AT AT867470A patent/AT303070B/de not_active IP Right Cessation
- 1970-09-25 NO NO3659/70A patent/NO130903C/no unknown
- 1970-09-25 GB GB45905/70A patent/GB1298738A/en not_active Expired
- 1970-09-25 CA CA094157A patent/CA937026A/en not_active Expired
- 1970-09-25 SE SE13088/70A patent/SE361297B/xx unknown
- 1970-09-25 FR FR7034881A patent/FR2062686A5/fr not_active Expired
- 1970-09-25 FI FI702623A patent/FI50407C/fi active
- 1970-09-25 NL NL7014170A patent/NL167658C/xx not_active IP Right Cessation
- 1970-09-28 US US00076253A patent/US3790459A/en not_active Expired - Lifetime
- 1970-09-28 JP JP45084935A patent/JPS4943199B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
NO130903C (fi) | 1975-03-05 |
NO130903B (fi) | 1974-11-25 |
DE1948911C3 (de) | 1985-12-05 |
US3790459A (en) | 1974-02-05 |
AT303070B (de) | 1972-11-10 |
SE361297B (fi) | 1973-10-29 |
GB1298738A (en) | 1972-12-06 |
CH540197A (de) | 1973-08-15 |
DE1948911A1 (de) | 1971-04-15 |
BE756657A (fr) | 1971-03-01 |
FR2062686A5 (fi) | 1971-06-25 |
NL167658C (nl) | 1982-01-18 |
DE1948911B2 (de) | 1978-06-01 |
JPS4943199B1 (fi) | 1974-11-19 |
NL7014170A (fi) | 1971-03-30 |
DK131619C (da) | 1976-01-12 |
FI50407C (fi) | 1976-03-10 |
NL167658B (nl) | 1981-08-17 |
DK131619B (da) | 1975-08-11 |
FI50407B (fi) | 1975-12-01 |
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