CA927017A - Apparatus and method for making a dielectrically isolated semiconductor structure - Google Patents

Apparatus and method for making a dielectrically isolated semiconductor structure

Info

Publication number
CA927017A
CA927017A CA117146A CA117146A CA927017A CA 927017 A CA927017 A CA 927017A CA 117146 A CA117146 A CA 117146A CA 117146 A CA117146 A CA 117146A CA 927017 A CA927017 A CA 927017A
Authority
CA
Canada
Prior art keywords
making
semiconductor structure
dielectrically isolated
isolated semiconductor
dielectrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA117146A
Other languages
English (en)
Other versions
CA117146S (en
Inventor
P. Youmans Albert
A. Kirton Lionel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Signetics Corp
Original Assignee
Signetics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Signetics Corp filed Critical Signetics Corp
Priority to CA171,382A priority Critical patent/CA948791A/en
Priority to CA171,383A priority patent/CA948792A/en
Application granted granted Critical
Publication of CA927017A publication Critical patent/CA927017A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Element Separation (AREA)
CA117146A 1970-07-01 1971-06-30 Apparatus and method for making a dielectrically isolated semiconductor structure Expired CA927017A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA171,382A CA948791A (en) 1970-07-01 1973-05-15 Apparatus and method for making a dielectrically isolated semiconductor structure
CA171,383A CA948792A (en) 1970-07-01 1973-05-15 Apparatus and method for making a dielectrically isolated semiconductor structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5161070A 1970-07-01 1970-07-01

Publications (1)

Publication Number Publication Date
CA927017A true CA927017A (en) 1973-05-22

Family

ID=21972343

Family Applications (1)

Application Number Title Priority Date Filing Date
CA117146A Expired CA927017A (en) 1970-07-01 1971-06-30 Apparatus and method for making a dielectrically isolated semiconductor structure

Country Status (7)

Country Link
US (1) US3740900A (de)
JP (2) JPS5227993B1 (de)
CA (1) CA927017A (de)
DE (1) DE2132174A1 (de)
FR (1) FR2098143A5 (de)
GB (1) GB1334583A (de)
NL (1) NL7109087A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112726358A (zh) * 2021-01-27 2021-04-30 刘金月 一种建筑施工用混凝土磨光机

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CN106141910A (zh) * 2016-08-26 2016-11-23 卢明杰 一种具有全方位打磨功能的石材加工平台
CN107738203B (zh) * 2017-10-10 2019-06-28 青岛永丰高新包装制品有限公司 用于塑料编织袋固定的吸附定位装置
KR102010271B1 (ko) * 2017-11-03 2019-10-21 에이엠테크놀로지 주식회사 연마장치
CN108705690B (zh) * 2018-05-29 2020-08-25 新昌县皇骐电子科技有限公司 一种半导体晶圆划片机
CN110549184A (zh) * 2018-05-30 2019-12-10 佛山市三水区琪昌机械设备有限公司 一种用于一次烧瓷砖生坯的抛平机
CN110610879B (zh) * 2019-09-27 2023-11-24 江西兆驰半导体有限公司 一种承载led晶圆片的陶瓷盘自动传送下蜡设备
CN113400186B (zh) * 2021-07-20 2022-02-15 深圳市科源信科技有限公司 一种石英晶振片研磨架
CN113649949A (zh) * 2021-08-24 2021-11-16 上海致领半导体科技发展有限公司 一种用于半导体晶片抛光的多通路真空吸盘部件

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112726358A (zh) * 2021-01-27 2021-04-30 刘金月 一种建筑施工用混凝土磨光机

Also Published As

Publication number Publication date
US3740900A (en) 1973-06-26
JPS5237782A (en) 1977-03-23
GB1334583A (en) 1973-10-24
NL7109087A (de) 1972-01-04
DE2132174A1 (de) 1972-01-05
FR2098143A5 (de) 1972-03-03
JPS5227993B1 (de) 1977-07-23

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