BE860064A - Transistor microminiature a effet de champ et a arseniure de gallium et son procede de realisation - Google Patents

Transistor microminiature a effet de champ et a arseniure de gallium et son procede de realisation

Info

Publication number
BE860064A
BE860064A BE182016A BE182016A BE860064A BE 860064 A BE860064 A BE 860064A BE 182016 A BE182016 A BE 182016A BE 182016 A BE182016 A BE 182016A BE 860064 A BE860064 A BE 860064A
Authority
BE
Belgium
Prior art keywords
microminiature
transistor
effect
field
gallium arsenide
Prior art date
Application number
BE182016A
Other languages
English (en)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE860064A publication Critical patent/BE860064A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Ceramic Engineering (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
BE182016A 1976-10-29 1977-10-25 Transistor microminiature a effet de champ et a arseniure de gallium et son procede de realisation BE860064A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/736,731 US4104672A (en) 1976-10-29 1976-10-29 High power gallium arsenide schottky barrier field effect transistor

Publications (1)

Publication Number Publication Date
BE860064A true BE860064A (fr) 1978-02-15

Family

ID=24961079

Family Applications (1)

Application Number Title Priority Date Filing Date
BE182016A BE860064A (fr) 1976-10-29 1977-10-25 Transistor microminiature a effet de champ et a arseniure de gallium et son procede de realisation

Country Status (11)

Country Link
US (1) US4104672A (fr)
JP (1) JPS592384B2 (fr)
BE (1) BE860064A (fr)
CA (1) CA1092254A (fr)
DE (1) DE2748103C3 (fr)
ES (1) ES463648A1 (fr)
FR (1) FR2369689A1 (fr)
GB (1) GB1573775A (fr)
IT (1) IT1091703B (fr)
NL (1) NL7711887A (fr)
SE (1) SE7711676L (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4202003A (en) * 1978-04-21 1980-05-06 Texas Instruments Incorporated MESFET Semiconductor device and method of making
US4201997A (en) * 1978-04-21 1980-05-06 Texas Instruments Incorporated MESFET semiconductor device and method of making
US4202001A (en) * 1978-05-05 1980-05-06 Rca Corporation Semiconductor device having grid for plating contacts
GB1601059A (en) * 1978-05-31 1981-10-21 Secr Defence Fet devices and their fabrication
FR2431768A1 (fr) * 1978-07-20 1980-02-15 Labo Electronique Physique Perfectionnement au procede de fabrication de dispositifs semi-conducteurs par auto-alignement et dispositifs obtenus
US4266333A (en) * 1979-04-27 1981-05-12 Rca Corporation Method of making a Schottky barrier field effect transistor
JPS566476A (en) * 1979-06-28 1981-01-23 Nec Corp Ultrahigh frequency field effect transistor
FR2461358A1 (fr) * 1979-07-06 1981-01-30 Thomson Csf Procede de realisation d'un transistor a effet de champ a grille auto-alignee, et transistor obtenu par ce procede
JPS5696657U (fr) * 1979-12-21 1981-07-31
EP0055324B1 (fr) * 1980-11-17 1990-08-29 Ball Corporation Circuit intégré monolithique à micro-onde avec assemblage d'antenne intégral
US4380022A (en) * 1980-12-09 1983-04-12 The United States Of America As Represented By The Secretary Of The Navy Monolithic fully integrated class B push-pull microwave GaAs MESFET with differential inputs and outputs with reduced Miller effect
CA1200017A (fr) * 1981-12-04 1986-01-28 Ho C. Huang Transistor a effet de champ micro-ondes
JPS58100462A (ja) * 1981-12-10 1983-06-15 Fujitsu Ltd 電界効果形トランジスタ
US4583107A (en) * 1983-08-15 1986-04-15 Westinghouse Electric Corp. Castellated gate field effect transistor
US4495431A (en) * 1983-08-22 1985-01-22 United Technologies Corporation Low reflectivity surface-mounted electrodes on semiconductive saw devices
FR2558647B1 (fr) * 1984-01-23 1986-05-09 Labo Electronique Physique Transistor a effet de champ de type schottky pour applications hyperfrequences et procede de realisation permettant d'obtenir un tel transistor
JPH0682686B2 (ja) * 1987-03-20 1994-10-19 日本ビクター株式会社 電界効果トランジスタ
US4899201A (en) * 1987-08-14 1990-02-06 Regents Of The University Of Minnesota Electronic and optoelectric devices utilizing light hole properties
US4947062A (en) * 1988-05-19 1990-08-07 Adams Russell Electronics Co., Inc. Double balanced mixing
JPH04171734A (ja) * 1990-11-02 1992-06-18 Mitsubishi Electric Corp 半導体装置
JPH04252036A (ja) * 1991-01-10 1992-09-08 Fujitsu Ltd 半導体装置
JP2580966B2 (ja) * 1993-08-05 1997-02-12 日本電気株式会社 半導体装置
US5698870A (en) * 1996-07-22 1997-12-16 The United States Of America As Represented By The Secretary Of The Air Force High electron mobility transistor (HEMT) and pseudomorphic high electron mobility transistor (PHEMT) devices with single layer integrated metal
JP3499103B2 (ja) * 1997-02-21 2004-02-23 三菱電機株式会社 半導体装置
US6127272A (en) * 1998-01-26 2000-10-03 Motorola, Inc. Method of electron beam lithography on very high resistivity substrates
IT1392321B1 (it) * 2008-12-15 2012-02-24 St Microelectronics Srl Sistema sensore/attuatore interamente in materiale organico
US11929408B2 (en) * 2020-05-14 2024-03-12 Macom Technology Solutions Holdings, Inc. Layout techniques and optimization for power transistors

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2120388A1 (de) * 1970-04-28 1971-12-16 Agency Ind Science Techn Verbindungshalbleitervorrichtung
US3737743A (en) * 1971-12-23 1973-06-05 Gen Electric High power microwave field effect transistor
US3855613A (en) * 1973-06-22 1974-12-17 Rca Corp A solid state switch using an improved junction field effect transistor
JPS5631751B2 (fr) * 1973-08-28 1981-07-23
US3969745A (en) * 1974-09-18 1976-07-13 Texas Instruments Incorporated Interconnection in multi element planar structures
US4016643A (en) * 1974-10-29 1977-04-12 Raytheon Company Overlay metallization field effect transistor
US4015278A (en) * 1974-11-26 1977-03-29 Fujitsu Ltd. Field effect semiconductor device
US3988619A (en) * 1974-12-27 1976-10-26 International Business Machines Corporation Random access solid-state image sensor with non-destructive read-out

Also Published As

Publication number Publication date
ES463648A1 (es) 1978-07-16
DE2748103B2 (de) 1980-09-18
JPS592384B2 (ja) 1984-01-18
JPS5356978A (en) 1978-05-23
FR2369689B1 (fr) 1982-04-09
IT1091703B (it) 1985-07-06
DE2748103C3 (de) 1981-05-14
FR2369689A1 (fr) 1978-05-26
CA1092254A (fr) 1980-12-23
US4104672A (en) 1978-08-01
DE2748103A1 (de) 1978-05-11
SE7711676L (sv) 1978-04-30
GB1573775A (en) 1980-08-28
NL7711887A (nl) 1978-05-03

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