AU2001258334A1 - Method and device for transporting wafers - Google Patents
Method and device for transporting wafersInfo
- Publication number
- AU2001258334A1 AU2001258334A1 AU2001258334A AU5833401A AU2001258334A1 AU 2001258334 A1 AU2001258334 A1 AU 2001258334A1 AU 2001258334 A AU2001258334 A AU 2001258334A AU 5833401 A AU5833401 A AU 5833401A AU 2001258334 A1 AU2001258334 A1 AU 2001258334A1
- Authority
- AU
- Australia
- Prior art keywords
- transporting wafers
- wafers
- transporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10019945 | 2000-04-20 | ||
| DE10019945 | 2000-04-20 | ||
| DE10031019A DE10031019A1 (en) | 2000-04-20 | 2000-06-26 | Method and device for transporting wafers in connection their production and/or processing uses gas-operated flow-through nozzles to create gas cushions and/or gas jets for moving and/or positioning wafers. |
| DE10031019 | 2000-06-26 | ||
| PCT/EP2001/004245 WO2001082338A1 (en) | 2000-04-20 | 2001-04-12 | Method and device for transporting wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2001258334A1 true AU2001258334A1 (en) | 2001-11-07 |
Family
ID=26005433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2001258334A Abandoned AU2001258334A1 (en) | 2000-04-20 | 2001-04-12 | Method and device for transporting wafers |
Country Status (2)
| Country | Link |
|---|---|
| AU (1) | AU2001258334A1 (en) |
| WO (1) | WO2001082338A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4618292A (en) * | 1977-02-28 | 1986-10-21 | International Business Machines Corporation | Controls for semiconductor wafer orientor |
| JPS58207217A (en) * | 1982-05-28 | 1983-12-02 | Fujitsu Ltd | Object transfer method in vacuum |
| JPS63124763A (en) * | 1986-11-13 | 1988-05-28 | インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション | Article conveyer |
| US6120640A (en) * | 1996-12-19 | 2000-09-19 | Applied Materials, Inc. | Boron carbide parts and coatings in a plasma reactor |
| JP4274601B2 (en) * | 1998-07-08 | 2009-06-10 | 昌之 都田 | Substrate transfer device and operation method thereof |
-
2001
- 2001-04-12 WO PCT/EP2001/004245 patent/WO2001082338A1/en active Application Filing
- 2001-04-12 AU AU2001258334A patent/AU2001258334A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001082338A1 (en) | 2001-11-01 |
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