ATE547385T1 - Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas - Google Patents
Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglasInfo
- Publication number
- ATE547385T1 ATE547385T1 AT09757375T AT09757375T ATE547385T1 AT E547385 T1 ATE547385 T1 AT E547385T1 AT 09757375 T AT09757375 T AT 09757375T AT 09757375 T AT09757375 T AT 09757375T AT E547385 T1 ATE547385 T1 AT E547385T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- inner layer
- heat shield
- vitrifying
- producing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008026890A DE102008026890B3 (de) | 2008-06-05 | 2008-06-05 | Verfahren und Vorrichtung zur Herstellung eines Tiegels aus Quarzglas |
PCT/EP2009/055451 WO2009146992A1 (en) | 2008-06-05 | 2009-05-06 | Method and apparatus for producing a crucible of quartz glass |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE547385T1 true ATE547385T1 (de) | 2012-03-15 |
Family
ID=40586175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT09757375T ATE547385T1 (de) | 2008-06-05 | 2009-05-06 | Verfahren und vorrichtung zur herstellung eines tiegels aus quarzglas |
Country Status (10)
Country | Link |
---|---|
US (1) | US8789391B2 (de) |
EP (1) | EP2300380B1 (de) |
JP (1) | JP5456770B2 (de) |
KR (1) | KR101595403B1 (de) |
CN (1) | CN102046543B (de) |
AT (1) | ATE547385T1 (de) |
DE (1) | DE102008026890B3 (de) |
ES (1) | ES2383450T3 (de) |
TW (1) | TWI468351B (de) |
WO (1) | WO2009146992A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005289776A (ja) * | 2004-04-05 | 2005-10-20 | Canon Inc | 結晶製造方法および結晶製造装置 |
US8272234B2 (en) * | 2008-12-19 | 2012-09-25 | Heraeus Shin-Etsu America, Inc. | Silica crucible with pure and bubble free inner crucible layer and method of making the same |
JP4951040B2 (ja) * | 2009-08-05 | 2012-06-13 | 信越石英株式会社 | シリカ容器及びその製造方法 |
US9003832B2 (en) * | 2009-11-20 | 2015-04-14 | Heraeus Shin-Etsu America, Inc. | Method of making a silica crucible in a controlled atmosphere |
FR2954764B1 (fr) * | 2009-12-30 | 2011-12-30 | Saint Gobain Quartz Sas | Creuset en silice |
JP5605903B2 (ja) * | 2010-12-02 | 2014-10-15 | 株式会社Sumco | シリカガラスルツボ製造装置 |
US9221709B2 (en) * | 2011-03-31 | 2015-12-29 | Raytheon Company | Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same |
CN102363319A (zh) * | 2011-06-30 | 2012-02-29 | 德清县建明坩埚厂 | 一种用于坩埚成型机的下模 |
DE102011113130B3 (de) * | 2011-09-14 | 2013-01-24 | Heraeus Quarzglas Gmbh & Co. Kg | Solarstrahlungsempfänger mit einem Eintrittsfenster aus Quarzglas |
JP7141844B2 (ja) * | 2018-04-06 | 2022-09-26 | 信越石英株式会社 | 石英ガラスるつぼの製造方法 |
WO2021084682A1 (ja) * | 2019-10-31 | 2021-05-06 | ユアサ化成株式会社 | ガラスセルの製造装置及び製造方法 |
JP2023520407A (ja) * | 2020-03-30 | 2023-05-17 | コーニング インコーポレイテッド | ガラス溶融システムにおいて欠陥を低減するための装置及び方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6168327A (ja) * | 1984-09-11 | 1986-04-08 | Toshiba Corp | 六フツ化ウランガスの回収装置 |
JP2830987B2 (ja) * | 1994-07-19 | 1998-12-02 | 信越石英株式会社 | 石英ガラスルツボ及びその製造方法 |
DE19541372A1 (de) * | 1994-11-15 | 1996-05-23 | Gen Electric | Tiegel aus geschmolzenem Quarz sowie Verfahren zu dessen Herstellung |
JP4398527B2 (ja) * | 1998-05-25 | 2010-01-13 | 信越石英株式会社 | シリコン単結晶引き上げ用石英ガラスるつぼ |
JP4548682B2 (ja) * | 1999-04-06 | 2010-09-22 | 株式会社ワコム製作所 | 石英ガラスるつぼの製造方法 |
EP1094039B1 (de) * | 1999-04-06 | 2015-04-29 | Wacom Manufacturing Co., Ltd. | Verfahren zur herstellung eines quartzglastiegels |
JP3765368B2 (ja) * | 1999-06-01 | 2006-04-12 | 東芝セラミックス株式会社 | 石英ガラスルツボおよびその製造方法 |
US6502422B1 (en) * | 2000-10-27 | 2003-01-07 | General Electric Company | Method for quartz crucible fabrication |
JP4279015B2 (ja) | 2002-03-19 | 2009-06-17 | コバレントマテリアル株式会社 | 石英ガラスルツボ及び石英ガラスルツボの製造方法 |
DE10324440A1 (de) * | 2003-05-28 | 2004-12-16 | Wacker-Chemie Gmbh | Verfahren zur Herstellung eines innenseitig verglasten SiO2-Tiegels |
JP5080764B2 (ja) * | 2005-08-08 | 2012-11-21 | 信越石英株式会社 | 石英ガラス坩堝の製造方法 |
-
2008
- 2008-06-05 DE DE102008026890A patent/DE102008026890B3/de not_active Expired - Fee Related
-
2009
- 2009-01-09 US US12/319,592 patent/US8789391B2/en not_active Expired - Fee Related
- 2009-05-06 WO PCT/EP2009/055451 patent/WO2009146992A1/en active Application Filing
- 2009-05-06 ES ES09757375T patent/ES2383450T3/es active Active
- 2009-05-06 JP JP2011512054A patent/JP5456770B2/ja active Active
- 2009-05-06 EP EP09757375A patent/EP2300380B1/de not_active Not-in-force
- 2009-05-06 CN CN200980121185.9A patent/CN102046543B/zh active Active
- 2009-05-06 AT AT09757375T patent/ATE547385T1/de active
- 2009-05-06 KR KR1020107027334A patent/KR101595403B1/ko active IP Right Grant
- 2009-05-08 TW TW98115224A patent/TWI468351B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE102008026890B3 (de) | 2009-06-04 |
JP2011521882A (ja) | 2011-07-28 |
TW200951084A (en) | 2009-12-16 |
TWI468351B (zh) | 2015-01-11 |
EP2300380B1 (de) | 2012-02-29 |
WO2009146992A1 (en) | 2009-12-10 |
CN102046543B (zh) | 2013-10-16 |
KR20110031909A (ko) | 2011-03-29 |
US8789391B2 (en) | 2014-07-29 |
KR101595403B1 (ko) | 2016-02-18 |
ES2383450T3 (es) | 2012-06-21 |
CN102046543A (zh) | 2011-05-04 |
US20090277223A1 (en) | 2009-11-12 |
JP5456770B2 (ja) | 2014-04-02 |
EP2300380A1 (de) | 2011-03-30 |
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