ATE519136T1 - Laser-oberflächenbehandlung - Google Patents

Laser-oberflächenbehandlung

Info

Publication number
ATE519136T1
ATE519136T1 AT06006249T AT06006249T ATE519136T1 AT E519136 T1 ATE519136 T1 AT E519136T1 AT 06006249 T AT06006249 T AT 06006249T AT 06006249 T AT06006249 T AT 06006249T AT E519136 T1 ATE519136 T1 AT E519136T1
Authority
AT
Austria
Prior art keywords
optical material
metal film
surface treatment
laser surface
laser
Prior art date
Application number
AT06006249T
Other languages
English (en)
Inventor
Kenichiro Tanaka
Masayuki Fujita
Original Assignee
Panasonic Elec Works Co Ltd
Inst Laser Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Elec Works Co Ltd, Inst Laser Technology filed Critical Panasonic Elec Works Co Ltd
Application granted granted Critical
Publication of ATE519136T1 publication Critical patent/ATE519136T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/483—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Surface Treatment Of Optical Elements (AREA)
AT06006249T 2005-03-28 2006-03-27 Laser-oberflächenbehandlung ATE519136T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005093145A JP4791745B2 (ja) 2005-03-28 2005-03-28 光学媒質の光入出射部処理方法

Publications (1)

Publication Number Publication Date
ATE519136T1 true ATE519136T1 (de) 2011-08-15

Family

ID=36616874

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06006249T ATE519136T1 (de) 2005-03-28 2006-03-27 Laser-oberflächenbehandlung

Country Status (7)

Country Link
US (1) US8026459B2 (de)
EP (1) EP1707994B1 (de)
JP (1) JP4791745B2 (de)
KR (1) KR100774436B1 (de)
CN (1) CN100381838C (de)
AT (1) ATE519136T1 (de)
TW (1) TWI289209B (de)

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US10629434B2 (en) * 2015-04-08 2020-04-21 The Trustees Of Columbia University In The City Of New York Laser irradiation induced surface planarization of polycrystalline silicon films
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US10806635B2 (en) 2016-03-15 2020-10-20 The Procter & Gamble Company Methods and apparatuses for separating and positioning discrete articles
CN109496172A (zh) * 2016-07-27 2019-03-19 古河电气工业株式会社 激光处理方法、接合方法、铜部件、多层印刷布线基板的制造方法及多层印刷布线基板
WO2018090010A1 (en) * 2016-11-14 2018-05-17 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Antirefctive surface structures on optical elements
JPWO2019082314A1 (ja) * 2017-10-25 2020-11-19 株式会社ニコン 加工装置、加工システム、及び、移動体の製造方法
CN108680976B (zh) * 2018-07-25 2021-11-09 浙江夜光明光电科技股份有限公司 一种双色反光热贴膜的制作方法
DE102018221189A1 (de) * 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element
EP3956258A1 (de) * 2019-04-15 2022-02-23 Facebook Technologies, LLC. Substratmodifikation durch femtosekundenlaser zur erzielung einer variablen ätztiefe beim trockenätzen
US20220369455A1 (en) * 2019-07-22 2022-11-17 Technische Hochschule Aschaffenburg Electrical connection pad with enhanced solderability and corresponding method for laser treating an electrical connection pad
JP6822699B1 (ja) * 2019-09-24 2021-01-27 フェニックス電機株式会社 レーザー照射装置、およびそれを用いた表面荒らし処理方法
CN111185678B (zh) * 2020-02-07 2021-07-27 吉林大学 一种在透明材料表面和内部制备镂空结构的方法
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Also Published As

Publication number Publication date
CN1841097A (zh) 2006-10-04
EP1707994A1 (de) 2006-10-04
JP2006276282A (ja) 2006-10-12
US20060213880A1 (en) 2006-09-28
CN100381838C (zh) 2008-04-16
KR100774436B1 (ko) 2007-11-08
EP1707994B1 (de) 2011-08-03
TWI289209B (en) 2007-11-01
JP4791745B2 (ja) 2011-10-12
US8026459B2 (en) 2011-09-27
KR20060104938A (ko) 2006-10-09
TW200634329A (en) 2006-10-01

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