ATE434192T1 - Dünnfilm-magnetfeldsensor - Google Patents
Dünnfilm-magnetfeldsensorInfo
- Publication number
- ATE434192T1 ATE434192T1 AT01978911T AT01978911T ATE434192T1 AT E434192 T1 ATE434192 T1 AT E434192T1 AT 01978911 T AT01978911 T AT 01978911T AT 01978911 T AT01978911 T AT 01978911T AT E434192 T1 ATE434192 T1 AT E434192T1
- Authority
- AT
- Austria
- Prior art keywords
- magnetic field
- thin
- film
- field sensor
- bridge circuit
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1121—Multilayer
- Y10T428/1129—Super lattice [e.g., giant magneto resistance [GMR] or colossal magneto resistance [CMR], etc.]
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000367822A JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
JP2001316084A JP2003078187A (ja) | 2001-09-05 | 2001-09-05 | 磁界センサ |
JP2001315935A JP4204775B2 (ja) | 2001-10-12 | 2001-10-12 | 薄膜磁界センサ |
PCT/JP2001/009385 WO2002037131A1 (fr) | 2000-10-26 | 2001-10-25 | Capteur de champ magnetique a couche mince |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE434192T1 true ATE434192T1 (de) | 2009-07-15 |
Family
ID=27345351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01978911T ATE434192T1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
Country Status (8)
Country | Link |
---|---|
US (1) | US6642714B2 (de) |
EP (1) | EP1329735B1 (de) |
KR (1) | KR100687513B1 (de) |
CN (1) | CN100403048C (de) |
AT (1) | ATE434192T1 (de) |
DE (1) | DE60139017D1 (de) |
TW (1) | TW550394B (de) |
WO (1) | WO2002037131A1 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG106612A1 (en) * | 2001-05-29 | 2004-10-29 | Sony Electronics Singapore Pte | A force sensing device |
US7292414B1 (en) | 2001-11-09 | 2007-11-06 | Maxtor Corporation | External coil bias for giant magneto-resistive sensor |
JP2004271323A (ja) * | 2003-03-07 | 2004-09-30 | Delta Tooling Co Ltd | 漏洩磁場検出装置 |
US20040189292A1 (en) * | 2003-03-25 | 2004-09-30 | Kautz David R. | Mechanism for and method of biasing magnetic sensor |
JP2004325344A (ja) * | 2003-04-25 | 2004-11-18 | Hirose Cherry Precision Co Ltd | 制御素子と一体化した感磁素子 |
JP2004356338A (ja) * | 2003-05-28 | 2004-12-16 | Res Inst Electric Magnetic Alloys | 薄膜磁気センサ及びその製造方法 |
JP2004363157A (ja) * | 2003-06-02 | 2004-12-24 | Res Inst Electric Magnetic Alloys | 薄膜磁気センサ及びその製造方法 |
FR2876800B1 (fr) * | 2004-10-18 | 2007-03-02 | Commissariat Energie Atomique | Procede et dispositif de mesure de champ magnetique a l'aide d'un capteur magnetoresitif |
US7505233B2 (en) * | 2004-12-15 | 2009-03-17 | International Business Machines Corporation | Magnetic sensor |
US7436184B2 (en) | 2005-03-15 | 2008-10-14 | Pathfinder Energy Services, Inc. | Well logging apparatus for obtaining azimuthally sensitive formation resistivity measurements |
US7414405B2 (en) | 2005-08-02 | 2008-08-19 | Pathfinder Energy Services, Inc. | Measurement tool for obtaining tool face on a rotating drill collar |
WO2007126164A1 (en) * | 2006-04-28 | 2007-11-08 | Microgate, Inc. | Thin film 3 axis fluxgate and the implementation method thereof |
DE102006062750B4 (de) * | 2006-09-15 | 2010-07-08 | Infineon Technologies Ag | Vorrichtung zum Erfassen einer Änderung einer physikalischen Grösse mittels einer Stromleiterstruktur |
GB2446146B (en) | 2007-01-31 | 2009-11-18 | Gm Global Tech Operations Inc | Arrangement of a two stage turbocharger system for an internal combustion engine |
JP5151551B2 (ja) * | 2008-02-27 | 2013-02-27 | 大同特殊鋼株式会社 | 薄膜磁気センサ |
US8519703B2 (en) * | 2008-03-20 | 2013-08-27 | Infineon Technologies Ag | Magnetic sensor device and method of determining resistance values |
US8018226B2 (en) | 2008-04-28 | 2011-09-13 | International Business Machines Corporation | Methods for detecting damage to magnetoresistive sensors |
US8120353B2 (en) * | 2008-04-28 | 2012-02-21 | International Business Machines Corporation | Methods for detecting damage to magnetoresistive sensors |
JP5128416B2 (ja) * | 2008-08-20 | 2013-01-23 | 株式会社東海理化電機製作所 | 磁気センサ装置 |
WO2010035873A1 (ja) * | 2008-09-29 | 2010-04-01 | オムロン株式会社 | 磁界検出素子および信号伝達素子 |
US8283921B2 (en) * | 2008-11-26 | 2012-10-09 | General Electric Company | Magnetoresistance sensors for position and orientation determination |
US8358128B2 (en) * | 2008-11-28 | 2013-01-22 | General Electric Company | Surgical navigation system with magnetoresistance sensors |
US8483800B2 (en) * | 2008-11-29 | 2013-07-09 | General Electric Company | Surgical navigation enabled imaging table environment |
US20100249571A1 (en) * | 2009-03-31 | 2010-09-30 | General Electric Company | Surgical navigation system with wireless magnetoresistance tracking sensors |
JP5392108B2 (ja) * | 2010-01-21 | 2014-01-22 | 大同特殊鋼株式会社 | 薄膜磁気センサ及びその製造方法 |
US9329213B2 (en) | 2011-02-01 | 2016-05-03 | Sirc Co., Ltd. | Power measuring apparatus |
US9207292B2 (en) * | 2011-02-02 | 2015-12-08 | Infineon Technologies Ag | Magnetoresistive device and method for manufacturing the same |
JP5429717B2 (ja) * | 2011-03-07 | 2014-02-26 | 国立大学法人名古屋大学 | 磁気検出装置 |
WO2013121870A1 (ja) * | 2012-02-13 | 2013-08-22 | 株式会社村田製作所 | 磁気センサ装置 |
CN102937705B (zh) * | 2012-11-20 | 2015-07-08 | 重庆大学 | 复合结构的直流磁传感器 |
EP2746795B1 (de) * | 2012-12-20 | 2015-10-07 | Alstom Technology Ltd | Vorrichtung und Verfahren zum Messen des Magnetfeldes im Luftspalt einer Elektromaschine |
CN103383441B (zh) * | 2013-05-10 | 2016-05-11 | 安徽大学 | 一种数字式自旋阀磁场传感器及其制备技术 |
CN103424719B (zh) * | 2013-07-10 | 2015-09-09 | 中北大学 | 一种基于纳米磁颗粒的磁矢量敏感元件及其制造方法 |
CN103901363B (zh) * | 2013-09-10 | 2017-03-15 | 江苏多维科技有限公司 | 一种单芯片z轴线性磁电阻传感器 |
CN107037381A (zh) * | 2015-12-29 | 2017-08-11 | 爱盛科技股份有限公司 | 磁场感测装置及其感测方法 |
JP6583208B2 (ja) * | 2016-10-14 | 2019-10-02 | 株式会社デンソー | 磁気検出素子 |
JP6438930B2 (ja) * | 2016-12-06 | 2018-12-19 | Tdk株式会社 | 磁場検出装置 |
JP2018096895A (ja) | 2016-12-15 | 2018-06-21 | Tdk株式会社 | 磁場検出装置 |
CN106885997B (zh) * | 2017-02-20 | 2019-10-01 | 上海微小卫星工程中心 | 地磁场中进行星载磁强计干扰补偿的方法 |
JP6913617B2 (ja) * | 2017-12-01 | 2021-08-04 | 昭和電工株式会社 | 磁気センサ、計測装置及び磁気センサの製造方法 |
CN110780243A (zh) * | 2019-11-19 | 2020-02-11 | 中国电子科技集团公司第四十九研究所 | 用于水下导航的高灵敏度微型磁传感单元、含有该传感单元的传感器及传感单元的制备方法 |
JP2021103145A (ja) * | 2019-12-25 | 2021-07-15 | 昭和電工株式会社 | 磁気センサ |
JP2023119633A (ja) * | 2022-02-17 | 2023-08-29 | Tdk株式会社 | 磁気センサ |
CN115963437B (zh) * | 2022-12-21 | 2023-10-20 | 南方电网数字电网研究院有限公司 | 多量程磁传感器、磁场测量方法及导体制备方法 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4312473B1 (de) * | 1963-02-13 | 1968-05-27 | ||
JPH06148301A (ja) * | 1992-05-15 | 1994-05-27 | Fujitsu Ltd | 磁気センサ |
US5552949A (en) * | 1993-03-03 | 1996-09-03 | Kabushiki Kaisha Toshiba | Magnetoresistance effect element with improved antiferromagnetic layer |
JP3305445B2 (ja) * | 1993-07-30 | 2002-07-22 | エヌイーシートーキン株式会社 | 回線電流検出用電流検出器 |
US5475304A (en) * | 1993-10-01 | 1995-12-12 | The United States Of America As Represented By The Secretary Of The Navy | Magnetoresistive linear displacement sensor, angular displacement sensor, and variable resistor using a moving domain wall |
US5422621A (en) * | 1993-10-29 | 1995-06-06 | International Business Machines Corporation | Oriented granular giant magnetoresistance sensor |
JPH0875835A (ja) * | 1994-09-09 | 1996-03-22 | Mitsumi Electric Co Ltd | 磁気インピーダンス素子および磁気検出回路 |
US5561368A (en) * | 1994-11-04 | 1996-10-01 | International Business Machines Corporation | Bridge circuit magnetic field sensor having spin valve magnetoresistive elements formed on common substrate |
JPH0933257A (ja) * | 1995-07-21 | 1997-02-07 | Tokin Corp | 磁気方位センサ |
JP3461999B2 (ja) * | 1996-03-28 | 2003-10-27 | 株式会社東芝 | 磁気抵抗効果素子 |
DE19614460A1 (de) * | 1996-04-12 | 1997-10-16 | Bosch Gmbh Robert | Verfahren zur Herstellung eines GMR-Brückensensors sowie GMR-Brückensensor |
US6184680B1 (en) * | 1997-03-28 | 2001-02-06 | Tdk Corporation | Magnetic field sensor with components formed on a flexible substrate |
JPH1124599A (ja) * | 1997-07-07 | 1999-01-29 | Toshiba Corp | 投射型液晶表示装置 |
EP0899798A3 (de) * | 1997-08-28 | 2000-01-12 | Alps Electric Co., Ltd. | Magnetoimpedanz-Element und Magnetkopf, Dünnfilmmagnetkopf, Azimuthfühler und Autokompensator unter Verwendung dieses Elements |
JP3640230B2 (ja) * | 1997-09-04 | 2005-04-20 | 財団法人電気磁気材料研究所 | 薄膜磁界センサ |
JP4047955B2 (ja) * | 1997-10-01 | 2008-02-13 | ミネベア株式会社 | 磁気インピーダンスセンサ |
US6232775B1 (en) * | 1997-12-26 | 2001-05-15 | Alps Electric Co., Ltd | Magneto-impedance element, and azimuth sensor, autocanceler and magnetic head using the same |
JP3466470B2 (ja) * | 1998-03-18 | 2003-11-10 | 財団法人電気磁気材料研究所 | 薄膜磁気抵抗素子 |
JP3456409B2 (ja) * | 1998-03-23 | 2003-10-14 | Tdk株式会社 | 薄膜磁気ヘッドの製造方法 |
JP2000055997A (ja) * | 1998-08-05 | 2000-02-25 | Tdk Corp | 磁気センサ装置および電流センサ装置 |
US6472868B1 (en) * | 1998-08-05 | 2002-10-29 | Minebea Co., Ltd. | Magnetic impedance element having at least two thin film-magnetic cores |
EP1046048A1 (de) * | 1998-08-14 | 2000-10-25 | Koninklijke Philips Electronics N.V. | Magnetfeldfühler mit einem spin-tunnel-sperrschichtelement |
EP0989411A3 (de) * | 1998-09-25 | 2004-10-06 | Alps Electric Co., Ltd. | Magnetoimpedanzeffekt-Element |
-
2001
- 2001-10-25 KR KR1020027008326A patent/KR100687513B1/ko not_active IP Right Cessation
- 2001-10-25 CN CNB018032648A patent/CN100403048C/zh not_active Expired - Fee Related
- 2001-10-25 TW TW090126413A patent/TW550394B/zh active
- 2001-10-25 WO PCT/JP2001/009385 patent/WO2002037131A1/ja active Application Filing
- 2001-10-25 EP EP01978911A patent/EP1329735B1/de not_active Expired - Lifetime
- 2001-10-25 DE DE60139017T patent/DE60139017D1/de not_active Expired - Lifetime
- 2001-10-25 AT AT01978911T patent/ATE434192T1/de not_active IP Right Cessation
-
2002
- 2002-08-22 US US10/225,794 patent/US6642714B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN100403048C (zh) | 2008-07-16 |
CN1394284A (zh) | 2003-01-29 |
US6642714B2 (en) | 2003-11-04 |
EP1329735B1 (de) | 2009-06-17 |
KR100687513B1 (ko) | 2007-02-27 |
DE60139017D1 (de) | 2009-07-30 |
US20030042902A1 (en) | 2003-03-06 |
WO2002037131A1 (fr) | 2002-05-10 |
EP1329735A1 (de) | 2003-07-23 |
KR20020089317A (ko) | 2002-11-29 |
EP1329735A4 (de) | 2005-05-11 |
TW550394B (en) | 2003-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |