WO2023216737A1

WO2023216737A1 - Material discharging and sorting device, sorting system and material discharging method

Info

Publication number: WO2023216737A1
Application number: PCT/CN2023/083869
Authority: WO
Inventors: 顾烨; 庄再城; 曹葵康; 薛峰; 徐一华
Original assignee: 苏州天准科技股份有限公司
Priority date: 2022-05-09
Filing date: 2023-03-24
Publication date: 2023-11-16
Also published as: CN114871154B; CN114871154A

Abstract

A material discharging and sorting device (10000), a sorting system, and a material discharging method. The material discharging and sorting device (10000) comprises wafer separating devices (1000) mounted on a material discharging support (6000), a multi-level material receptacle (2000) mounted at each of two output ends of each wafer separating device (1000), a material discharging center-axis conveyor belt line (3000), a tailing receptacle (4000), and top frame plates (5000). The wafer separating devices (1000) are non-contact-suction wafer separating devices, and the multi-level material receptacles (2000) are multi-level staggered material receptacle storage devices.

Description

下料分选设备、分选***和下料方法Blanking and sorting equipment, sorting systems and blanking methods

技术领域Technical field

本发明涉及半导体或光伏硅片检测分选领域，具体涉及一种下料分选设备、分选***和下料方法。The invention relates to the field of semiconductor or photovoltaic silicon wafer detection and sorting, and specifically relates to a blanking and sorting equipment, a sorting system and a blanking method.

背景技术Background technique

太阳能硅片分选机是一种集成自动化、测量、视觉瑕疵检测于一体的自动化检测、分选设备，应用在太阳能硅片生产流程中，如我司申请的专利(公开号CN112605010A)公开的下料分选装置及硅片智能分选机，分选机能够实现对太阳能硅片切片、清洗后的原片进行厚度、TTV、线痕、电阻率、尺寸、脏污、崩边、隐裂等项目的测量和检测，并根据分选菜单，自动将硅片按照质量等级要求分选到不同的盒子内，充分满足硅片使用厂家的质量管控的需求，是生产中不可缺少的一个环节。The solar silicon wafer sorting machine is an automated inspection and sorting equipment that integrates automation, measurement, and visual defect detection. It is used in the solar silicon wafer production process, as disclosed in the patent applied for by our company (publication number CN112605010A) Material sorting device and silicon wafer intelligent sorting machine, the sorting machine can realize the thickness, TTV, line marks, resistivity, size, dirt, edge chipping, cracks, etc. of the solar silicon wafers sliced and cleaned. Measurement and inspection of the project, and automatically sorting silicon wafers into different boxes according to quality grade requirements according to the sorting menu, fully meeting the quality control needs of silicon wafer manufacturers, is an indispensable link in production.

随着碳中和的国家规划出台，属于新能源行业的太阳能行业将持续的发展并扩大光伏发电对整个国家发电量的占比。随着各硅片厂商的对自动上下料自动化要求的提高，使得设备的检测能力需求将要大大提升。With the introduction of the national plan for carbon neutrality, the solar energy industry, which is a new energy industry, will continue to develop and expand the proportion of photovoltaic power generation in the entire country's power generation. As various silicon wafer manufacturers increase their requirements for automatic loading and unloading automation, the demand for equipment detection capabilities will be greatly increased.

因此，在原有设备的基础上，需要在检测、上料、下料分选等各环节进行效率提升，提升设备的产能和检出能力，降低宕机率。Therefore, on the basis of the original equipment, it is necessary to improve the efficiency of testing, loading, unloading and sorting, etc., to increase the production capacity and detection capabilities of the equipment, and to reduce the downtime rate.

针对下料分选机构，传统的分析变向输送需要将流线上的硅片顶起，然后改变其输送方向，使其流入到对应的收纳盒中。然而，上述方式存在的问题是，由于工业生产中的输送时间是较为精确和连续的，而将硅片顶起时可能导致硅片与输送流线分离，此时在短时间内硅片处于悬空状态，而输送流线持续工作，硅片下落时可能存在与后方输送而来的硅片发生碰撞的问题；其次，顶升分流分片的模式，限制了下料流线的效率，如我司上一代机型(相关专利CN214705892U)采用的硅片负压顶升装置，其最大产能限制在8500pcs/h左右，难以突破；而对于料盒结构，如我司上一代机型的专利(CN215390948U)，其料盒为多层结构，但对于一个料盒满了之后，需要手动调整，降低了换盒效率，也是导致产能难以突破的原因之一。For the unloading and sorting mechanism, the traditional analytical direction-changing transportation requires lifting the silicon wafers on the streamline, and then changing its transportation direction so that it flows into the corresponding storage box. However, the problem with the above method is that since the transportation time in industrial production is relatively precise and continuous, lifting the silicon wafer may cause the silicon wafer to be separated from the transportation streamline. At this time, the silicon wafer will be suspended in the air for a short period of time. state, while the conveying streamline continues to work, there may be a problem of collision with the silicon wafers transported from behind when the silicon wafer falls; secondly, the jacking diversion The slicing mode limits the efficiency of the blanking line. For example, the silicon wafer negative pressure lifting device used in our previous generation model (related patent CN214705892U) has a maximum production capacity limited to about 8500pcs/h, which is difficult to break through; Regarding the material box structure, such as our company's patent for the previous generation model (CN215390948U), the material box has a multi-layer structure. However, when a material box is full, it needs to be adjusted manually, which reduces the efficiency of box changing and makes it difficult to break through the production capacity. One of the reasons.

因此，需要研制一款更高效率便于物料拾取和分料的分选机，以期突破现有产能。Therefore, it is necessary to develop a more efficient sorting machine that facilitates material picking and sorting, in order to break through the existing production capacity.

发明内容Contents of the invention

为了克服现有技术的不足，本发明的目的在于提供一种下料分选设备、分选***和下料方法，其能解决上述问题。In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide a material cutting and sorting equipment, a sorting system and a material cutting method, which can solve the above problems.

一种下料分选设备，下料分选设备包括安装于下料机架上的分片装置、安装在分片装置两出料端的多层料盒、下料中轴皮带流线、尾料盒和顶板架；所述下料中轴皮带流线沿着中轴线安装至所述下料机架上，所述顶板架设置在所述下料中轴皮带流线上方；多个分片装置沿着所述下料中轴皮带流线间隔的设置，并且其顶部连接至所述顶板架的顶板下表面上；每个分片装置的左右两端均设置一个多层料盒；其中，所述分片装置采用非接触吸附式分片装置，每个分片装置均集成有吸附模块和皮带驱动模块，在对应物料吸附位将下方的物料非接触吸附拾取并可选的向两侧传输；所述多层料盒采用多层交错式料盒收纳装置，每个料盒收纳装置包括交错驱动的多个料盒组件，相邻的两个料盒组件通过横向交错驱动组件被交错的内外交错移动，并通过竖直驱动组件将下层待接料的料盒组件顶升至顶层处的接料工位；所述尾料盒正对所述下料中轴皮带流线的尾端设置，用于承载杂项硅片或未检测的硅片。 A kind of blanking and sorting equipment. The blanking and sorting equipment includes a slicing device installed on a blanking frame, a multi-layer material box installed on both discharging ends of the slicing device, a blanking central axis belt streamline, and tailing materials. Box and top plate frame; the unloading center axis belt streamline is installed on the unloading frame along the central axis, and the top plate frame is arranged above the unloading center axis belt streamline; multiple slicing devices Belt streamlines are arranged at intervals along the central axis of the unloading, and the top thereof is connected to the lower surface of the top plate of the top plate frame; a multi-layer material box is provided at both left and right ends of each slicing device; wherein, The slicing device adopts a non-contact adsorption slicing device. Each slicing device is integrated with an adsorption module and a belt drive module. At the corresponding material adsorption position, the material below is picked up by non-contact adsorption and optionally transmitted to both sides; The multi-layer material boxes adopt a multi-layer staggered material box storage device. Each material box storage device includes a plurality of material box assemblies that are staggeredly driven. Two adjacent material box assemblies are staggered internally and externally through transverse staggered driving components. Move, and lift the material box assembly of the lower layer to be received by the vertical drive assembly to the material receiving station at the top layer; the tail material box is set directly against the tail end of the unloading center axis belt streamline, with For carrying miscellaneous wafers or untested wafers.

进一步的，述分片装置包括吸附分选主模组、第一吸附支线模组、第二吸附支线模组、第一连接件、第二连接件、第三连接件和控制器；所述吸附分选主模组、第一吸附支线模组、第二吸附支线模组均包括皮带驱动模块和吸附模块；其中，所述第一吸附支线模组和第二吸附支线模组通过所述第一连接件、第二连接件和第三连接件悬吊的布置在所述吸附分选主模组的两个出料端；所述第一连接件和第二连接件相对距离可调的连接至所述第三连接件，以此实现所述第一吸附支线模组至第二吸附支线模组的流线距离可调；设置在所述吸附分选主模组、第一吸附支线模组、第二吸附支线模组上的吸附模块的吸附底面平齐且吸盘间距可调，以适应不同规格的硅片；所述吸附分选主模组、第一吸附支线模组、第二吸附支线模组的吸附模块的吸附底面高于皮带驱动模块的皮带底面布置，所述吸附分选主模组在控制器的控制下向所述第一吸附支线模组或第二吸附支线模组输送硅片，从而使得硅片被非接触的吸附传输至对应料位上。Further, the slicing device includes an adsorption and sorting main module, a first adsorption branch line module, a second adsorption branch line module, a first connector, a second connector, a third connector and a controller; the adsorption The main sorting module, the first adsorption branch line module, and the second adsorption branch line module all include a belt drive module and an adsorption module; wherein the first adsorption branch line module and the second adsorption branch line module pass through the first The connecting piece, the second connecting piece and the third connecting piece are suspended and arranged at the two discharge ends of the main adsorption and sorting module; the relative distance between the first connecting piece and the second connecting piece is adjustable and connected to The third connector is used to realize the adjustable streamline distance from the first adsorption branch line module to the second adsorption branch line module; it is provided on the main adsorption and sorting module, the first adsorption branch line module, The adsorption bottom surface of the adsorption module on the second adsorption branch line module is flush and the distance between the suction cups is adjustable to adapt to silicon wafers of different specifications; the adsorption and sorting main module, the first adsorption branch line module, the second adsorption branch line module The adsorption bottom surface of the adsorption module of the group is arranged higher than the belt bottom surface of the belt drive module. The adsorption and sorting main module transports silicon wafers to the first adsorption branch line module or the second adsorption branch line module under the control of the controller. , so that the silicon wafer is adsorbed and transported to the corresponding material position in a non-contact manner.

进一步的，所述多层料盒包括设置于收纳架上的料盒滑轨组件、料盒组件、交错驱动组件、竖直导轨组件、竖直驱动组件、换料警示按钮和料盒控制器；其中，多个所述料盒滑轨组件水平的且上下平行的设置于所述收纳架上；每个所述料盒滑轨组件上设置一个所述料盒组件，且多个所述料盒组件上下交错布置；交错驱动组件用于驱动上下相邻的两组料盒组件沿着所述料盒滑轨组件交错滑动，以将料盒组件送至接料位或换盒位；除顶层的料盒组件均通过所述竖直导轨组件转接至所述料盒滑轨组件；所述竖直驱动组件驱动连接至所述竖直导轨组件，用于驱动所述竖直导轨组件上下移动以便于达到预设接料高度或退出更换料盒；多个所述换料警示按钮用于提示对应料盒组件是否满料及空盒到位，并用于向所述料盒控制器发出料盒退出或装载信号；所述交错驱动组件、竖直驱动组件和换料警示按钮与所述料盒控制器电讯连接，通过料盒控制器控制驱动实现多个所述料盒组件的到位接料、满料退出和更换。Further, the multi-layer material box includes a material box slide rail assembly, a material box assembly, a staggered drive component, a vertical guide rail assembly, a vertical drive component, a material change warning button and a material box controller arranged on the storage rack; Wherein, a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack. The components are arranged staggered up and down; the staggered driving assembly is used to drive the two groups of adjacent upper and lower material box assemblies to slide staggered along the said material box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position; except for the top layer The material box assemblies are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down. When the preset material receiving height is reached or the material box is exited and the material box is replaced; a plurality of the material changing warning buttons are used to prompt whether the corresponding material box component is full of material and the empty box is in place, and are used to issue a message to the material box controller to exit or load the material box. signal; the interleaved drive component, The vertical drive assembly and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the in-place material receiving, full material withdrawal and replacement of multiple material box components.

进一步的，所述下料中轴皮带流线包括底架组件、皮带架组件、传送带组件、驱动组件和物料位置监测组件；其中，所述皮带架组件架设在所述底架组件上，用以支撑整个流线；所述传送带组件和驱动组件设只在所述皮带架组件上，用以提供皮带的驱动和物料传送；多组所述物料位置监测组件设置在所述皮带架组件处，用于感应对应位置是否来料及空料。Further, the unloading center axis belt streamline includes a base frame assembly, a belt frame assembly, a conveyor belt assembly, a driving assembly and a material position monitoring assembly; wherein, the belt frame assembly is erected on the base frame assembly to Support the entire streamline; the conveyor belt assembly and the driving assembly are provided only on the belt frame assembly to provide belt driving and material transportation; multiple sets of material position monitoring assemblies are provided on the belt frame assembly for Check whether there is incoming material or empty material at the corresponding sensing position.

进一步的，所述尾料盒包括料盒固定座、料盒转接块、料盒垫高块、料盒本体、主垫板、多规格的上垫板和物料感应器；其中，所述料盒本体依次通过料盒垫高块、料盒转接块向尾部倾斜的连接至所述料盒固定座，并通过所述料盒本体固定至机台或机架尾端；开设多向调整槽的主垫板位置可调的连接至所述料盒本体上；多种规格的所述上垫板铺设在所述主垫板上，用于缓冲的接收尾料；所述物料感应器安装至所述料盒本体底部，用于感应料盒本体上是否来料。Further, the tail material box includes a material box fixing seat, a material box transfer block, a material box raising block, a material box body, a main pad, a multi-standard upper pad and a material sensor; wherein, the material The box body is connected to the box fixing seat by tilting toward the rear through the box padding block and the box adapter block, and is fixed to the machine platform or the rear end of the frame through the box body; a multi-directional adjustment slot is provided The position of the main pad is adjustable and connected to the material box body; the upper pads of various specifications are laid on the main pad for buffering the receiving tail materials; the material sensor is installed on The bottom of the material box body is used to sense whether materials are coming from the material box body.

进一步的，所述顶板架包括顶架柱座、顶架支撑框、顶架防护板、外接块和顶板加强梁，所述顶架柱座的底部安装至下料机架上，所述顶架支撑框通过多根所述顶架柱座的顶部连接支撑；在所述顶架支撑框的下表面设置多个所述外接块，用于悬吊的连接所述分片装置；在所述顶架支撑框的中部设置多根顶板加强梁，在所述顶架支撑框的顶部全覆盖的设置所述顶架防护板。Further, the top frame includes a top frame column base, a top frame support frame, a top frame protective plate, an external block and a top plate reinforcing beam. The bottom of the top frame column base is installed on the unloading frame. The top frame The support frame is connected and supported by the tops of a plurality of the top frame column bases; a plurality of the external blocks are provided on the lower surface of the top frame support frame for suspended connection of the slicing devices; on the top A plurality of roof reinforcing beams are provided in the middle of the roof support frame, and the roof protection plate is fully covered on the top of the roof support frame.

本发明还提供了一种智能硅片分选***，分选***包括上料设备、检测设备和采用前述的下料分选设备；在所述上料设备和检测设备之间设置料型检测装置和碎片剔除装置，用于检测硅片型号以及是否发生破碎，并将破碎的硅片剔除，避免破碎硅片流入检测设备。 The invention also provides an intelligent silicon wafer sorting system. The sorting system includes loading equipment, detection equipment and the aforementioned unloading and sorting equipment; a material type detection device is provided between the loading equipment and the detection equipment. And a debris removal device is used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment.

本发明还提供了一种下料方法，下料方法包括：The invention also provides a cutting method, which includes:

主流线输送物料，物料通过下料中轴皮带流线被持续传输；The main line conveys materials, and the materials are continuously transported through the unloading center axis belt streamline;

分片装置分料多层料盒收料，在下料中轴皮带流线上对应物料瑕疵类型的吸附分料位上感应到来料时，该吸附分料位上方对应的分片装置非接触的吸附拾取下方的物料，并输送给对应端的多层料盒内；The slicing device separates and collects materials from multi-layer boxes. When the incoming material is sensed at the adsorption distributing position corresponding to the type of material defect on the unloading axis belt streamline, the corresponding slicing device above the adsorption distributing position performs non-contact adsorption Pick up the material below and transport it to the multi-layer material box at the corresponding end;

尾料接收，对于无对应瑕疵类型储存的杂料或未来记得分析的物料，由所述下料中轴皮带流线输送至尾端设置的尾料盒内。For tail material reception, miscellaneous materials stored without corresponding defect types or materials that need to be analyzed in the future are streamlined and transported to the tail material box set at the tail end by the unloading central axis belt.

进一步的，分片装置分料多层料盒收料包括：Further, the slicing device divides and collects materials from multi-layer boxes including:

S11、上层料盒接料：分片装置将物料传输至两端多层料盒处的接料位，破真空将物料输送给接料位处的空置的上层料盒，直至上层料盒满料；S11. Receiving material from the upper material box: The slicing device transfers the material to the material receiving positions at the multi-layer material boxes at both ends, breaks the vacuum and transports the material to the empty upper material box at the material receiving position until the upper material box is full. ;

S12、上下层料盒横向交互：通过交错驱动组件交错的驱动，满料的上层料盒由上层料盒滑轨组件移至外端，同步的，空盒的下层料盒由下层料盒滑轨组件移至内端接料位的正下方；S12. Horizontal interaction between upper and lower material boxes: Through the staggered driving of the staggered driving components, the full upper material box is moved to the outer end by the upper material box slide rail assembly, and simultaneously, the empty lower material box is moved by the lower material box slide rail. The component is moved to just below the inner end connection position;

S13、下层料盒上移并将上层料盒卸料：由竖直驱动组件驱动下层料盒沿着竖直导轨组件上移至接料位，并将上层料盒内的物料卸料；S13. Move the lower material box upward and unload the upper material box: the vertical drive assembly drives the lower material box to move upward along the vertical guide rail assembly to the material receiving position, and unload the materials in the upper material box;

S14、下层料盒接料：位于接料位处的下层料盒接料直至满料，满料后经由竖直驱动组件驱动下层料盒沿着竖直导轨组件下移至退料位；S14. The lower material box receives material: The lower material box located at the material receiving position receives material until it is full. After it is full, the vertical drive assembly drives the lower material box to move downward along the vertical guide rail assembly to the material withdrawal position;

S15、上下层料盒二次横向交互：通过交错驱动组件交错的驱动，满料的下层料盒沿着下层料盒滑轨组件移至外端，同步的，空盒的上层料盒由上层料盒滑轨组件移至内端接料位；S15. Secondary lateral interaction between the upper and lower material boxes: Through the staggered driving of the staggered drive assembly, the full lower material box moves to the outer end along the lower material box slide rail assembly. Synchronously, the empty upper material box is driven by the upper material box. The box slide rail assembly moves to the inner end material connection position;

S16、下层料盒卸料上层料盒开始接料：将满料的下层料盒卸料，接料位处空置的上层料盒开始接料； S16. The lower material box is unloaded and the upper material box begins to receive material: the full lower material box is unloaded, and the empty upper material box at the material receiving position begins to receive material;

重复步骤S11-S16，实现料盒交互的持续接料卸料。Repeat steps S11-S16 to realize continuous receiving and unloading of materials and boxes.

相比现有技术，本发明的有益效果在于：本申请提供了一种集成有非接触吸附式分片装置、交错式多层料盒和杂项物料收集用尾料盒的下料分选设备，能显著提高分选机的下料分选效率，流线具备长度可调，可以应对不同规格的硅片；吸盘排布间距可控，保证硅片在传输时吸附稳定可靠；料盒交错换盒接料，减少料盒更换时间，相比传统的顶升分料减少了工序流程，提高了作业效率和产能，便于涉及片材产品的硅片、PCB领域推广应用。Compared with the existing technology, the beneficial effects of the present invention are: the present application provides a cutting and sorting equipment integrating a non-contact adsorption slicing device, a staggered multi-layer material box and a tail material box for miscellaneous material collection. It can significantly improve the sorting efficiency of the sorting machine. The streamline length is adjustable and can handle silicon wafers of different specifications. The arrangement spacing of the suction cups is controllable to ensure stable and reliable adsorption of silicon wafers during transportation. The material boxes are staggered and exchanged. Receive materials and reduce the time of changing the material box. Compared with the traditional lifting and distributing materials, it reduces the process flow, improves the operating efficiency and production capacity, and facilitates the promotion and application in the fields of silicon wafers and PCBs involving sheet products.

附图说明Description of the drawings

图1为本发明下料分选设备的示意图；Figure 1 is a schematic diagram of the cutting and sorting equipment of the present invention;

图2和图3为分片装置、多层料盒和下料中轴皮带流线的布置关系图；Figures 2 and 3 are diagrams showing the layout of the slicing device, multi-layer material boxes and the flow lines of the unloading center axis belt;

图4为分片装置的结构示意图；Figure 4 is a schematic structural diagram of the slicing device;

图5-图7为多层料盒的结构示意图；Figures 5-7 are schematic structural diagrams of the multi-layer material box;

图8为下料中轴皮带流线的结构示意图；Figure 8 is a schematic structural diagram of the flow line of the unloading center axis belt;

图9-图12为尾料盒的结构示意图；Figures 9-12 are schematic structural diagrams of the tailing box;

图13和图14为顶板架的示意图；Figures 13 and 14 are schematic diagrams of the top rack;

图15为分选***的示意图；Figure 15 is a schematic diagram of the sorting system;

图16为下料分选设备的下料动作过程示意图；Figure 16 is a schematic diagram of the blanking action process of the blanking and sorting equipment;

图17为下料方法的流程示意图。Figure 17 is a schematic flow chart of the blanking method.

图中：In the picture:

10000、下料分选设备10000, blanking and sorting equipment

1000、分片装置；100、吸附分选主模组；200、第一吸附支线模组；300、第二吸附支线模组；400、第一连接件；500、第二连接件；600、第三连接件；1000. Slicing device; 100. Main adsorption and sorting module; 200. First adsorption branch line module; 300. Second adsorption branch line module; 400. First connector; 500. Second connector; 600. Three connectors;

2000、多层料盒；2101、收纳主立板；2102、收纳底板；2103、外端立板；2014、主防护罩；2015、电机防护罩；2201、料盒滑轨；2202、滑块；2203、料盒垫块；2204、外端缓冲块；2205、滑块位置传感器；2301、料盒转接件；2302、料盒托架；2303、料盒规格调整垫板；2304、料盒导向止挡柱；2305、树脂板；2306、升降顶部限位块；2401、料盒驱动电机；2402、同步带夹；2403、驱动轮；2404、双头传动轮；2405、水平内端传动轮；2406、驱动同步带；2407、传动同步带；2408、带轮防护罩；2501、升降滑轨；2502、升降滑块；2601、升降气缸；2602、升降电磁阀；2603、升降底板；2604、升降底部限位块；2605、料盒到位传感器组件；2700、换料警示按钮；2000, multi-layer material box; 2101, main storage vertical plate; 2102, storage bottom plate; 2103, outer end vertical plate 2014, main protective cover; 2015, motor protective cover; 2201, material box slide rail; 2202, slider; 2203, material box pad; 2204, outer end buffer block; 2205, slider position sensor; 2301, material Box adapter; 2302, box bracket; 2303, box specification adjustment pad; 2304, box guide stop column; 2305, resin plate; 2306, lifting top limit block; 2401, box drive motor; 2402. Timing belt clamp; 2403. Driving wheel; 2404. Double-ended transmission wheel; 2405. Horizontal inner end transmission wheel; 2406. Drive timing belt; 2407. Transmission timing belt; 2408. Pulley protective cover; 2501. Lifting slide rail ; 2502. Lifting slider; 2601. Lifting cylinder; 2602. Lifting solenoid valve; 2603. Lifting bottom plate; 2604. Lifting bottom limit block; 2605. Material box in place sensor assembly; 2700. Material change warning button;

3000、下料中轴皮带流线；3001、流线底柱；3002、底板；3003、流线支撑条；3004、流线连接块；3005、轴承支撑座；3006、端轴组件；3007、传送带轮；3008、传送带；3009、中间轮；3010、驱动带；3011、主动轮；3012、驱动电机；3013、感应传感器；3014、传感器安装板件；3000, blanking axis belt streamline; 3001, streamline bottom column; 3002, bottom plate; 3003, streamline support bar; 3004, streamline connection block; 3005, bearing support seat; 3006, end shaft assembly; 3007, conveyor belt wheel; 3008, conveyor belt; 3009, intermediate wheel; 3010, drive belt; 3011, driving wheel; 3012, drive motor; 3013, induction sensor; 3014, sensor mounting plate;

4000、尾料盒；4001、盒固定座；4002、料盒转接块；4003、料盒垫高块；4004、料盒本体；40041、料盒底板；400411、物料感应口；400412、取料缺口；40042、料盒尾板；40043、料盒侧板；4005、主垫板；40051、多向调整槽；4006、上垫板；4007、物料感应器；4008、小料挡板；4009、辅助挡块；4000, tail material box; 4001, box holder; 4002, material box transfer block; 4003, material box heightening block; 4004, material box body; 40041, material box bottom plate; 400411, material induction port; 400412, material taking Gap; 40042, material box tail plate; 40043, material box side plate; 4005, main backing plate; 40051, multi-directional adjustment slot; 4006, upper backing plate; 4007, material sensor; 4008, small material baffle; 4009, auxiliary block;

5000、顶板架；5001、顶架柱座；5002、顶架支撑框；5003、顶架防护板；5004、外接块；5005、顶板加强梁；5000, roof frame; 5001, roof column base; 5002, roof support frame; 5003, roof protection plate; 5004, external block; 5005, roof reinforcement beam;

6000、下料机架；6000, blanking rack;

7000、下料过渡机构；7000, blanking transition mechanism;

8000、急停机构； 8000, emergency stop mechanism;

9000、蜂鸣器；9000, buzzer;

20000、检测设备；20000, testing equipment;

30000、上料设备；30000, loading equipment;

40000、料型检测装置；40000, material type detection device;

50000、碎片剔除装置。50000, debris removal device.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without any creative work fall within the scope of protection of the present invention.

应当理解，本说明书中所使用的“***”、“装置”、“单元”和/或“模组”是用于区分不同级别的不同组件、元件、部件、部分或装配的一种方法。然而，如果其他词语可实现相同的目的，则可通过其他表达来替换所述词语。It should be understood that the terms "system", "device", "unit" and/or "module" used in this specification are a means of distinguishing different components, elements, parts, portions or assemblies at different levels. However, said words may be replaced by other expressions if they serve the same purpose.

如本说明书和权利要求书中所示，除非上下文明确提示例外情形，“一”、“一个”、“一种”和/或“该”等词并非特指单数，也可包括复数。一般说来，术语“包括”与“包含”仅提示包括已明确标识的步骤和元素，而这些步骤和元素不构成一个排它性的罗列，方法或者设备也可能包含其它的步骤或元素。As shown in this specification and claims, words such as "a", "an", "an" and/or "the" do not specifically refer to the singular and may include the plural unless the context clearly indicates an exception. Generally speaking, the terms "comprising" and "comprising" only imply the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or apparatus may also include other steps or elements.

本说明书中使用了流程图用来说明根据本说明书的实施例的***所执行的操作。应当理解的是，前面或后面操作不一定按照顺序来精确地执行。相反，可以按照倒序或同时处理各个步骤。同时，也可以将其他操作添加到这些过程中，或从这些过程移除某一步或数步操作。 Flowcharts are used in this specification to illustrate operations performed by systems according to embodiments of this specification. It should be understood that preceding or following operations are not necessarily performed in exact order. Instead, the steps can be processed in reverse order or simultaneously. At the same time, you can add other operations to these processes, or remove a step or steps from these processes.

下料分选设备Blanking and sorting equipment

参见图1，下料分选设备10000包括安装于下料机架6000上的分片装置1000、安装在分片装置1000两出料端的多层料盒2000、下料中轴皮带流线3000、尾料盒4000和顶板架5000。Referring to Figure 1, the blanking and sorting equipment 10000 includes a slicing device 1000 installed on the blanking frame 6000, a multi-layer material box 2000 installed on both discharging ends of the slicing device 1000, a blanking center axis belt streamline 3000, 4000 for the tail box and 5000 for the top rack.

布置关系：所述下料中轴皮带流线3000沿着中轴线安装至所述下料机架6000上，所述顶板架5000设置在所述下料中轴皮带流线3000上方；参见图2和图3，多个分片装置1000沿着所述下料中轴皮带流线3000间隔的设置，并且其顶部连接至所述顶板架5000的顶板下表面上；每个分片装置1000的左右两端均设置一个多层料盒2000。所述尾料盒4000正对所述下料中轴皮带流线3000的尾端设置，用于承载杂项硅片或未检测的硅片。Arrangement relationship: the blanking central axis belt streamline 3000 is installed on the blanking frame 6000 along the central axis, and the top plate frame 5000 is arranged above the blanking central axis belt streamline 3000; see Figure 2 As shown in Figure 3, multiple slicing devices 1000 are arranged at intervals along the flow line 3000 of the unloading central axis belt, and their tops are connected to the lower surface of the top plate of the top plate frame 5000; the left and right sides of each slicing device 1000 A multi-layer material box 2000 is provided at both ends. The tail material box 4000 is disposed directly opposite the tail end of the blanking axis belt streamline 3000, and is used to carry miscellaneous silicon wafers or untested silicon wafers.

其中，参见图4，分片装置1000采用非接触吸附式分片装置，每个分片装置1000均集成有吸附模块和皮带驱动模块，在对应物料吸附位将下方的物料非接触吸附拾取并可选的向两侧传输。Among them, referring to Figure 4, the slicing device 1000 adopts a non-contact adsorption type slicing device. Each slicing device 1000 is integrated with an adsorption module and a belt drive module. The material below is picked up by non-contact adsorption at the corresponding material adsorption position and can be Selected to transmit to both sides.

具体的，分片装置1000包括吸附分选主模组100、第一吸附支线模组200、第二吸附支线模组300、第一连接件400、第二连接件500、第三连接件600和控制器；所述吸附分选主模组100、第一吸附支线模组200、第二吸附支线模组300均包括皮带驱动模块和吸附模块。Specifically, the slicing device 1000 includes an adsorption and sorting main module 100, a first adsorption branch line module 200, a second adsorption branch line module 300, a first connector 400, a second connector 500, a third connector 600 and Controller; the main adsorption and sorting module 100, the first adsorption branch line module 200, and the second adsorption branch line module 300 all include a belt drive module and an adsorption module.

进一步的，所述第一吸附支线模组200和第二吸附支线模组300通过所述第一连接件400、第二连接件500和第三连接件600悬吊的布置在所述吸附分选主模组100的两个出料端；所述第一连接件400和第二连接件500相对距离可调的连接至所述第三连接件600，以此实现所述第一吸附支线模组200至第二吸附支线模组300的流线距离可调；设置在所述吸附分选主模组100、第一吸附支线模组200、第二吸附支线模组300上的吸附模块的吸附底面平齐且吸盘间距可调，以适应不同规格的硅片。Further, the first adsorption branch line module 200 and the second adsorption branch line module 300 are arranged in the adsorption sorting station and are suspended through the first connector 400, the second connector 500 and the third connector 600. The two discharging ends of the main module 100; the first connecting piece 400 and the second connecting piece 500 are connected to the third connecting piece 600 with an adjustable relative distance, thereby realizing the first adsorption branch line module The streamline distance from 200 to the second adsorption branch line module 300 is adjustable; the adsorption bottom surface of the adsorption module provided on the main adsorption and sorting module 100, the first adsorption branch line module 200, and the second adsorption branch line module 300 flush and suck The disc spacing is adjustable to accommodate silicon wafers of different specifications.

进一步的，所述吸附分选主模组100、第一吸附支线模组200、第二吸附支线模组300的吸附模块的吸附底面高于皮带驱动模块的皮带底面布置，所述吸附分选主模组100在控制器的控制下向所述第一吸附支线模组200或第二吸附支线模组300输送硅片，从而使得硅片被非接触的吸附传输至对应料位上。Furthermore, the adsorption bottom surfaces of the adsorption modules of the main adsorption and sorting module 100, the first adsorption branch line module 200, and the second adsorption branch line module 300 are arranged higher than the belt bottom surface of the belt drive module. The module 100 transports silicon wafers to the first adsorption branch line module 200 or the second adsorption branch line module 300 under the control of the controller, so that the silicon wafers are adsorbed and transported to the corresponding material level in a non-contact manner.

其中，参见图5-图7，多层料盒2000采用多层交错式料盒收纳装置，每个料盒收纳装置包括交错驱动的多个料盒组件，相邻的两个料盒组件通过横向交错驱动组件被交错的内外交错移动，并通过竖直驱动组件将下层待接料的料盒组件顶升至顶层处的接料工位。具体的，多层料盒2000包括设置于收纳架上的料盒滑轨组件、料盒组件、交错驱动组件、竖直导轨组件、竖直驱动组件、换料警示按钮和料盒控制器。Among them, referring to Figures 5-7, the multi-layer material box 2000 adopts a multi-layer staggered material box storage device. Each material box storage device includes a plurality of staggered driven material box assemblies. Two adjacent material box assemblies pass through the transverse direction. The staggered drive assembly is moved internally and externally in a staggered manner, and the vertical drive assembly lifts the lower material box assembly to be received to the top material receiving station. Specifically, the multi-layer material box 2000 includes a material box slide rail assembly, a material box assembly, a staggered driving component, a vertical guide rail assembly, a vertical driving component, a material change warning button and a material box controller that are arranged on the storage rack.

布置关系：多个所述料盒滑轨组件水平的且上下平行的设置于所述收纳架上；每个所述料盒滑轨组件上设置一个所述料盒组件，且多个所述料盒组件上下交错布置；交错驱动组件用于驱动上下相邻的两组料盒组件沿着所述料盒滑轨组件交错滑动，以将料盒组件送至接料位或换盒位；除顶层的料盒组件均通过所述竖直导轨组件转接至所述料盒滑轨组件；所述竖直驱动组件驱动连接至所述竖直导轨组件，用于驱动所述竖直导轨组件上下移动以便于达到预设接料高度或退出更换料盒；多个所述换料警示按钮用于提示对应料盒组件是否满料及空盒到位，并用于向所述料盒控制器发出料盒退出或装载信号；所述交错驱动组件、竖直驱动组件和换料警示按钮与所述料盒控制器电讯连接，通过料盒控制器控制驱动实现多个所述料盒组件的到位接料、满料退出和更换。Arrangement relationship: a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack. The box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive two groups of adjacent upper and lower box assemblies to slide staggered along the box slide rail assembly to send the box assemblies to the material receiving position or the box changing position; except for the top layer The material box assemblies are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down. In order to reach the preset material receiving height or exit and replace the material box; a plurality of the material changing warning buttons are used to prompt whether the corresponding material box assembly is full of material and the empty box is in place, and are used to send the material box exit or exit to the material box controller. Loading signal; the staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the in-place material receiving and filling of multiple material box components. Exit and replace.

进一步的，收纳架包括收纳主立板2101和收纳底板2102，用于支撑整个装置。收纳架还包括外端立板2103、主防护罩2014和电机防护罩2015，所述外端立板2103设置在所述收纳主立板2101外端，所述主防护罩2014设置在收纳主立板2101上与料盒组件相反的安装侧，所述电机防护罩2015设置在所述外端立板2103处。Further, the storage rack includes a main storage vertical plate 2101 and a storage bottom plate 2102 for supporting the entire device. The storage rack also includes an outer end vertical plate 2103, a main protective cover 2014 and a motor protective cover 2015. The outer end vertical plate 2103 is provided at the outer end of the main storage vertical plate 2101. The main protective cover 2014 is installed on the opposite installation side of the main storage vertical plate 2101 from the material box assembly. The motor protective cover 2015 is provided on the main storage vertical plate 2101. There are 2103 outer end vertical boards.

进一步的，所述料盒滑轨组件包括料盒滑轨2201、滑块2202、料盒垫块2203、外端缓冲块2204和滑块位置传感器2205。多个料盒滑轨2201(图5-7的示例为两个)上下平行的安装至所述收纳主立板2101的收纳面，滑块2202滑动套接在料盒滑轨2201上，所述料盒组件通过所述料盒垫块2203安装至所述滑块2202上；所述外端缓冲块2204安装至料盒滑轨2201的外端部，用于滑块2202的端部到位缓冲；多个滑块位置传感器2205安装至收纳主立板2101上并位于料盒滑轨2201下方布置。Further, the magazine slide rail assembly includes a magazine slide rail 2201, a slider 2202, a magazine pad 2203, an outer end buffer block 2204 and a slider position sensor 2205. A plurality of magazine slide rails 2201 (two in the example of Figures 5-7) are installed parallel to each other up and down on the storage surface of the main storage vertical plate 2101. The slider 2202 is slidably sleeved on the magazine slide rails 2201. The box assembly is installed on the slider 2202 through the box pad 2203; the outer end buffer block 2204 is installed on the outer end of the box slide rail 2201 for buffering the end of the slider 2202 in place; A plurality of slider position sensors 2205 are installed on the main storage vertical plate 2101 and are arranged below the magazine slide rail 2201 .

进一步的，所述料盒组件包括料盒转接件2301、料盒托架2302、料盒规格调整垫板2303、料盒导向止挡柱2304和树脂板2305；其中，顶层的料盒组件的料盒转接件2301直接连接至所述料盒垫块2203上，下层各级料盒组件的料盒转接件2301通过所述竖直导轨组件后再连接至所述料盒垫块2203上；所述料盒托架2302向外端下侧倾斜的连接至所述料盒转接件2301上，所述料盒规格调整垫板2303位置可调的安装至所述料盒托架2302上，并在料盒规格调整垫板2303的外端设置所述料盒导向止挡柱2304，规格可选的树脂板2305铺设在所述料盒规格调整垫板2303上，用以直接接收支撑硅片落料。Further, the cartridge assembly includes a cartridge adapter 2301, a cartridge bracket 2302, a cartridge specification adjustment pad 2303, a cartridge guide stop column 2304 and a resin plate 2305; wherein, the top layer of the cartridge assembly The material box adapter 2301 is directly connected to the material box pad 2203. The material box adapter 2301 of the lower material box assemblies passes through the vertical guide rail assembly and then is connected to the material box pad 2203. ; The material box bracket 2302 is connected to the material box adapter 2301 with an inclination toward the lower side of the outer end, and the material box specification adjustment pad 2303 is adjustable in position and installed on the material box bracket 2302 , and set the box guide stop column 2304 at the outer end of the box specification adjustment pad 2303, and a resin plate 2305 with optional specifications is laid on the box specification adjustment pad 2303 to directly receive the supporting silicon Piece blanking.

进一步的，下层各级料盒组件还包括升降顶部限位块2306，所述升降顶部限位块2306设置在所述料盒转接件2301上并位于所述竖直导轨组件正上方布置。Furthermore, the lower level material box assemblies also include lifting top limiting blocks 2306, which are provided on the material box adapter 2301 and are arranged directly above the vertical guide rail assembly.

一个示例中，所述料盒托架2302呈L形或凹形，优选L形，其前后和/或左右可调，其中，在所述料盒托架2302的底板上开设前后方向的长条槽孔，用于料盒规格调整垫板2303的位置调整。In one example, the cartridge bracket 2302 is L-shaped or concave, preferably L-shaped, and is adjustable front and rear and/or left and right, wherein a long strip in the front-to-back direction is opened on the bottom plate of the cartridge bracket 2302 slot, Used to adjust the position of the material box specification adjustment pad 2303.

进一步的，所述交错驱动组件包括料盒驱动电机2401、同步轮组、同步带组和同步带夹2402；所述料盒驱动电机2401和同步轮组安装于所述收纳主立板2101上。同步带组中与料盒滑轨2201平行的部分通过两个同步带夹2402与上下相邻的料盒滑轨组件连接，实现上下相邻两个料盒滑轨组件的交错驱动。Further, the staggered driving assembly includes a box driving motor 2401, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp 2402; the box driving motor 2401 and the synchronous wheel set are installed on the main storage vertical plate 2101. The part of the synchronous belt group that is parallel to the magazine slide rail 2201 is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps 2402 to realize staggered driving of the two upper and lower adjacent magazine slide rail assemblies.

平行传动的同步带通过两个同步带夹2402与所述料盒滑轨组件的滑块2202或料盒垫块2203连接，实现交错驱动组件驱动相邻两个料盒滑轨组件及料盒组件沿着料盒滑轨2201交错运动。The parallel-driven synchronous belt is connected to the slider 2202 or the magazine pad 2203 of the magazine slide rail assembly through two synchronous belt clamps 2402 to realize the staggered drive assembly to drive two adjacent magazine slide rail assemblies and the magazine assembly. Move staggered along the magazine slide rail 2201.

同步轮组包括驱动轮2403、双头传动轮2404和水平内端传动轮2405，其中所述水平内端传动轮2405与双头传动轮2404规格相同且水平平齐的设置。The synchronous wheel set includes a driving wheel 2403, a double-ended transmission wheel 2404 and a horizontal inner end transmission wheel 2405, wherein the horizontal inner end transmission wheel 2405 and the double-end transmission wheel 2404 have the same specifications and are arranged flush with each other.

一个示例中，所述同步带组包括驱动同步带2406和传动同步带2407，所述驱动同步带2406安装于驱动轮2403和双头传动轮2404中的一个轮头，实现动力输入；所述传动同步带2407设置于水平内端传动轮2405和与之同侧的双头传动轮2404的轮头。In one example, the synchronous belt set includes a driving synchronous belt 2406 and a transmission synchronous belt 2407. The driving synchronous belt 2406 is installed on one of the driving wheel 2403 and the double-ended transmission wheel 2404 to realize power input; the transmission The synchronous belt 2407 is arranged on the wheel head of the horizontal inner end transmission wheel 2405 and the double-ended transmission wheel 2404 on the same side.

当然也可以采用电机、带轮同侧设置，传送带对一组料盒组件采用一条带，这些可以根据实际安装空间和场景布置。Of course, the motor and pulley can also be arranged on the same side, and the conveyor belt uses one belt for a group of box components. These can be arranged according to the actual installation space and scene.

在与水平内端传动轮2405同侧的双头传动轮2404的轮头处设置带轮防护罩2408。A pulley protective cover 2408 is provided at the wheel head of the double-ended transmission wheel 2404 on the same side as the horizontal inner end transmission wheel 2405.

进一步的，所述竖直导轨组件包括升降滑轨2501和升降滑块2502；所述升降滑块2502与需升降的料盒组件对应的料盒滑轨组件的料盒垫块2203连接，所述升降滑轨2501的上部与需升降的料盒组件的料盒转接件2301连接，以此使得料盒组件沿竖直导轨组件上下滑动。 Further, the vertical guide rail assembly includes a lifting slide rail 2501 and a lifting slide block 2502; the lifting slide block 2502 is connected to the cartridge pad 2203 of the cartridge slide rail assembly corresponding to the cartridge assembly to be lifted, and the The upper part of the lifting slide rail 2501 is connected to the magazine adapter 2301 of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.

所述竖直驱动组件包括升降气缸2601、升降电磁阀2602、升降底板2603和升降底部限位块2604，所述升降气缸2601的缸体固定至所述收纳主立板2101，所述升降气缸2601的驱动杆底部连接至所述升降底板2603上，当竖直导轨组件运动至所述升降底部限位块2604时，升降电磁阀2602被激发驱动升降底板2603升降运动实现竖直导轨组件的升降驱动。The vertical drive assembly includes a lifting cylinder 2601, a lifting solenoid valve 2602, a lifting bottom plate 2603 and a lifting bottom limit block 2604. The cylinder body of the lifting cylinder 2601 is fixed to the main storage vertical plate 2101. The lifting cylinder 2601 The bottom of the driving rod is connected to the lifting bottom plate 2603. When the vertical guide rail assembly moves to the lifting bottom limit block 2604, the lifting solenoid valve 2602 is activated to drive the lifting bottom plate 2603 to move up and down to realize the lifting drive of the vertical guide rail assembly. .

进一步的，竖直驱动组件还包括一个料盒到位传感器组件2605，所述料盒到位传感器组件2605安装于收纳主立板2101上，用于检测下层对应料盒组件是否到达顶部接料位。Furthermore, the vertical drive assembly also includes a material box in-position sensor component 2605. The material box in-position sensor component 2605 is installed on the main storage vertical plate 2101 and is used to detect whether the corresponding material box component in the lower layer reaches the top material receiving position.

一个示例中，换料警示按钮2700的个数与料盒组件的个数相等，通过料盒按钮底板连接至所述收纳主立板2101的顶部，所述换料警示按钮采用不同显示颜色显示料盒到位、料盒满料和料盒装载完成状态，并在相应状态下按下按钮触发对应的驱控信号。In one example, the number of refueling warning buttons 2700 is equal to the number of material box assemblies. They are connected to the top of the main storage vertical plate 2101 through the bottom plate of the material box buttons. The refueling warning buttons use different display colors to display the material. The box is in place, the box is full, and the box loading is completed, and the corresponding drive signal is triggered by pressing the button in the corresponding state.

其中，参见图8，下料中轴皮带流线3000包括底架组件、皮带架组件、传送带组件、驱动组件和物料位置监测组件。布置关系为：皮带架组件架设在所述底架组件上，用以支撑整个流线；所述传送带组件和驱动组件设只在所述皮带架组件上，用以提供皮带的驱动和物料传送；多组所述物料位置监测组件设置在所述皮带架组件处，用于感应对应位置是否来料及空料。Among them, referring to Figure 8, the unloading center axis belt flow line 3000 includes a chassis assembly, a belt frame assembly, a conveyor belt assembly, a driving assembly and a material position monitoring assembly. The arrangement relationship is as follows: the belt frame assembly is installed on the bottom frame assembly to support the entire streamline; the conveyor belt assembly and the driving assembly are installed only on the belt frame assembly to provide belt driving and material transportation; Multiple groups of the material position monitoring components are provided at the belt frame component, and are used to sense whether the corresponding positions have incoming materials or empty materials.

进一步的，底架组件包括多根流线底柱3001和底板3002，所述流线底柱3001通过底板3002固定至机台或底面。Further, the chassis assembly includes a plurality of streamlined bottom columns 3001 and a bottom plate 3002. The streamlined bottom columns 3001 are fixed to the machine platform or the bottom surface through the bottom plate 3002.

进一步的，皮带架组件包括两根相对设置的流线支撑条3003、多个流线连接块3004、两个轴承支撑座3005和两组端轴组件3006；两根流线支撑条3003通过中间设置的流线连接块3004支撑在所述流线底柱3001的顶部；在两根流线支撑条3003的端部分别设置两个所述轴承支撑座3005，所述端轴组件3006的两端支撑在相对设置的两个轴承支撑座3005上。Further, the belt frame assembly includes two oppositely arranged streamline support bars 3003, a plurality of streamline connection blocks 3004, two bearing support seats 3005 and two sets of end shaft assemblies 3006; the two streamline support bars 3003 are arranged through the middle The streamline connection block 3004 is supported on the top of the streamline bottom column 3001; two bearing support seats 3005 are respectively provided at the ends of the two streamline support bars 3003, and the end shaft group Both ends of the member 3006 are supported on two opposite bearing support seats 3005.

进一步的，传送带组件包括两根传送带3008和安装在所述端轴组件3006两端的传送带轮3007，所述传送带3008套接在两个传送带轮3007上，用于直接水平传送物料。Further, the conveyor belt assembly includes two conveyor belts 3008 and conveyor pulleys 3007 installed at both ends of the end shaft assembly 3006. The conveyor belt 3008 is sleeved on the two conveyor pulleys 3007 for directly horizontally conveying materials.

进一步的，驱动组件包括中间轮3009、驱动带3010、主动轮3011和驱动电机3012，所述中间轮3009安装至所述端轴组件3006的传送轴上，所述驱动电机3012安装至所述流线底柱3001上，所述驱动带3010安装至所述中间轮3009和驱动电机3012输出端设置的主动轮3011上，用于驱动传送带组件传送物料。Further, the driving assembly includes an intermediate wheel 3009, a driving belt 3010, a driving wheel 3011 and a driving motor 3012. The intermediate wheel 3009 is installed on the transmission shaft of the end shaft assembly 3006, and the driving motor 3012 is installed on the flow path. On the line bottom column 3001, the driving belt 3010 is installed on the intermediate wheel 3009 and the driving wheel 3011 provided at the output end of the driving motor 3012 for driving the conveyor belt assembly to transport materials.

进一步的，沿着所述流线支撑条3003设置多个吸附分料位，在每个吸附分料位处设置一组物料位置监测组件，每组物料位置监测组件包括两个感应传感器3013和传感器安装板件3014；每组物料位置监测组件的上游侧的感应传感器3013用于感应是否到料，下游侧的感应传感器3013用于感应是否空料。Further, multiple adsorption and material distribution positions are provided along the streamline support bar 3003, and a set of material position monitoring components is provided at each adsorption and distribution position. Each group of material position monitoring components includes two induction sensors 3013 and sensors. Install the plate 3014; the induction sensor 3013 on the upstream side of each group of material position monitoring components is used to sense whether the material has arrived, and the induction sensor 3013 on the downstream side is used to sense whether the material is empty.

其中，参见图9-图12所示的尾料盒4000，包括料盒固定座4001、料盒转接块4002、料盒垫高块4003、料盒本体4004、主垫板4005、多规格的上垫板4006和物料感应器4007。布置关系为：料盒本体4004依次通过料盒垫高块4003、料盒转接块4002向尾部倾斜的连接至所述料盒固定座4001，并通过所述料盒本体4004固定至机台或机架尾端；开设多向调整槽40051的主垫板4005位置可调的连接至所述料盒本体4004上；多种规格的所述上垫板4006铺设在所述主垫板4005上，用于缓冲的接收尾料；所述物料感应器4007安装至所述料盒本体4004底部，用于感应料盒本体4004上是否来料。Among them, refer to the tail box 4000 shown in Figures 9 to 12, which includes a box fixing seat 4001, a box adapter block 4002, a box raising block 4003, a box body 4004, a main pad 4005, and multiple specifications. Upper pad 4006 and material sensor 4007. The arrangement relationship is: the material box body 4004 is connected to the material box fixing seat 4001 through the material box raising block 4003 and the material box adapter block 4002 in sequence, and is fixed to the machine platform or the machine through the material box body 4004. The rear end of the frame; the main pad 4005 with a multi-directional adjustment groove 40051 is adjustable in position and connected to the box body 4004; the upper pads 4006 of various specifications are laid on the main pad 4005. Receive tail material for buffering; the material sensor 4007 is installed at the bottom of the material box body 4004 and is used to sense whether material is coming to the material box body 4004.

进一步的，料盒本体4004为矩形敞口料盒，包括料盒底板40041、料盒尾板40042和料盒侧板40043；在所述料盒底板40041上开设物料感应口 400411和多个取料缺口400412；所述物料感应器4007临近所述物料感应口400411安装至所述料盒底板40041上，并将其感应方向朝上布置；多个所述取料缺口400412开设在料盒底板40041上未设料盒尾板40042和料盒侧板40043的边上，用于方便取料下料。Further, the material box body 4004 is a rectangular open material box, including a material box bottom plate 40041, a material box tail plate 40042 and a material box side plate 40043; a material sensing port is provided on the material box bottom plate 40041 400411 and multiple material-taking gaps 400412; the material sensor 4007 is installed on the bottom plate 40041 of the material box adjacent to the material sensing port 400411, and its sensing direction is arranged upward; multiple material-taking gaps 400412 are opened There is no magazine tail plate 40042 and magazine side plate 40043 on the edge of the magazine bottom plate 40041 for convenience of picking up and unloading materials.

一个示例中，主垫板4005和上垫板4006为弹性垫，用于缓冲的接收来料。其中，所述主垫板4005的厚度大于上垫板4006的厚度。In one example, the main pad 4005 and the upper pad 4006 are elastic pads for buffering and receiving incoming materials. Wherein, the thickness of the main pad 4005 is greater than the thickness of the upper pad 4006.

对应料盒底板40041上的取料缺口400412，在所述主垫板4005和上垫板4006上也开设垫板缺口，便于尾料的取料。Corresponding to the material retrieval gap 400412 on the bottom plate 40041 of the material box, the main pad 4005 and the upper pad 4006 are also provided with pad gaps to facilitate the retrieval of tail materials.

另一示例中，参见图11，尾料盒4000还包括小料挡板4008，所述小料挡板4008位置可调的安装至所述主垫板4005上，以适应不同规格的上垫板4006的来料限位。In another example, referring to Figure 11, the tail material box 4000 also includes a small material baffle 4008. The small material baffle 4008 is adjustable in position and installed on the main backing plate 4005 to adapt to upper backing plates of different specifications. 4006 incoming material limit.

另一示例中，参见图12，尾料盒4000还包括辅助挡块4009，所述辅助挡块4009安装至所述主垫板4005和小料挡板4008上，用于接收辅助小型号物料的限位。In another example, referring to Figure 12, the tail material box 4000 also includes an auxiliary block 4009, which is installed on the main backing plate 4005 and the small material baffle 4008 for receiving auxiliary small-sized materials. Limit.

进一步的，所述小料挡板4008和辅助挡块4009为弹性板，用于缓冲的为来料止挡限位。弹性垫和弹性板采用树脂、橡胶等材质，根据实际需求，可以设置不同的弹性材料。物料感应器4007采用光电传感器，对应的上垫板4006为透明或半透明弹性板。Further, the small material baffle 4008 and the auxiliary stop 4009 are elastic plates, and are used for buffering as incoming material stop limits. The elastic pad and elastic plate are made of resin, rubber and other materials. Different elastic materials can be set according to actual needs. The material sensor 4007 adopts a photoelectric sensor, and the corresponding upper pad 4006 is a transparent or translucent elastic plate.

其中，参见图13和图14，顶板架5000包括顶架柱座5001、顶架支撑框5002、顶架防护板5003、外接块5004和顶板加强梁5005，所述顶架柱座5001的底部安装至下料机架6000上，所述顶架支撑框5002通过多根所述顶架柱座5001的顶部连接支撑；在所述顶架支撑框5002的下表面设置多个所述外接块5004，用于悬吊的连接所述分片装置1000；在所述顶架支撑框5002的中部设置多根顶板加强梁5005，在所述顶架支撑框5002的顶部全覆盖的设置所述顶架防护板5003。Among them, referring to Figures 13 and 14, the top frame 5000 includes a top frame column base 5001, a top frame support frame 5002, a top frame protective plate 5003, an external block 5004 and a top plate reinforcing beam 5005. The bottom of the top frame column base 5001 is installed On the unloading frame 6000, the top frame support frame 5002 is supported by the top connections of multiple top frame column seats 5001; a plurality of the external connection blocks 5004 are provided on the lower surface of the top frame support frame 5002, Used to connect the slicing device 1000 for suspension; set in the middle of the top frame support frame 5002 A plurality of roof reinforcing beams 5005 are provided, and the roof protection plate 5003 is provided to fully cover the top of the roof support frame 5002.

进一步的，参见图1，下料分选设备10000还包括下料过渡机构7000、急停机构8000和蜂鸣器9000，所述下料过渡机构7000设置在下料中轴皮带流线3000的前端，用于将上游流程检测完的硅片过渡引导至顶面平齐的下料中轴皮带流线3000。多个所述急停机构8000设置在所述下料机架6000的四周，便于工作人员在遇到紧急情况时便利快速的按下停机。所述蜂鸣器9000安装在下料机架6000的外周。图未示的，三色灯等报警器也可以设置在下料机架6000处。Further, referring to Figure 1, the blanking and sorting equipment 10000 also includes a blanking transition mechanism 7000, an emergency stop mechanism 8000 and a buzzer 9000. The blanking transition mechanism 7000 is provided at the front end of the blanking center axis belt streamline 3000. It is used to transitionally guide the silicon wafers that have been inspected in the upstream process to the blanking center axis belt streamline 3000 with a flush top surface. A plurality of the emergency stop mechanisms 8000 are arranged around the unloading frame 6000, so that workers can conveniently and quickly stop the machine when encountering an emergency. The buzzer 9000 is installed on the outer periphery of the unloading frame 6000 . Not shown in the figure, alarms such as three-color lights can also be set at the unloading rack 6000.

分选***sorting system

一种智能硅片分选***，参见图15，分选***包括上料设备30000、检测设备20000和采用前述的下料分选设备10000；在所述上料设备30000和检测设备20000之间设置料型检测装置40000和碎片剔除装置50000，用于检测硅片型号以及是否发生破碎，并将破碎的硅片剔除，避免破碎硅片流入检测设备20000。An intelligent silicon wafer sorting system, see Figure 15. The sorting system includes a loading equipment 30000, a detection equipment 20000 and the aforementioned unloading and sorting equipment 10000; it is set between the loading equipment 30000 and the detection equipment 20000. The material type detection device 40000 and the fragment removal device 50000 are used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment 20000.

下料方法Blanking method

一种根据前述下料分选设备的下料方法，参见图16和图17，下料方法包括：A cutting method based on the aforementioned cutting and sorting equipment, see Figure 16 and Figure 17. The cutting method includes:

主流线输送物料，物料通过下料中轴皮带流线3000被持续传输；The main line transports materials, and the materials are continuously transported through the unloading center axis belt streamline 3000;

分片装置分料多层料盒收料，在下料中轴皮带流线3000上对应物料瑕疵类型的吸附分料位上感应到来料时，该吸附分料位上方对应的分片装置1000非接触的吸附拾取下方的物料，并输送给对应端的多层料盒2000内； The slicing device separates the multi-layer material boxes and collects the materials. When the incoming material is sensed on the adsorption and distribution position corresponding to the material defect type on the unloading center axis belt streamline 3000, the corresponding slicing device 1000 above the adsorption and distribution position is non-contact. The adsorption picks up the material below and transports it to the multi-layer material box 2000 at the corresponding end;

尾料接收，对于无对应瑕疵类型储存的杂料或未来记得分析的物料，由所述下料中轴皮带流线3000输送至尾端设置的尾料盒4000内。For tail material reception, miscellaneous materials stored without corresponding defect types or materials that need to be analyzed in the future are transported to the tail material box 4000 set at the tail end by the unloading central axis belt streamline 3000.

其中，分片装置分料多层料盒收料包括以下步骤。Among them, the slicing device separates and collects materials from multi-layer boxes including the following steps.

S11、上层料盒接料：分片装置1000将物料传输至两端多层料盒2000处的接料位，破真空将物料输送给接料位处的空置的上层料盒，直至上层料盒满料；S11. Material receiving in the upper material box: The slicing device 1000 transfers the material to the material receiving positions of the multi-layer material boxes 2000 at both ends, breaks the vacuum and transports the material to the empty upper material box at the material receiving position, until the upper material box Full of materials;

S16、下层料盒卸料上层料盒开始接料：将满料的下层料盒卸料，接料位处空置的上层料盒开始接料；S16. The lower material box is unloaded and the upper material box begins to receive material: the full lower material box is unloaded, and the empty upper material box at the material receiving position begins to receive material;

本发明还提供了一种计算机可读存储介质，其上存储有计算机指令，所述计算机指令运行时执行前述方法的步骤。其中，所述方法请参见前述部分的详细介绍，此处不再赘述。 The invention also provides a computer-readable storage medium on which computer instructions are stored, and when the computer instructions are run, the steps of the foregoing method are executed. For the method, please refer to the detailed introduction in the previous section and will not be described again here.

本领域普通技术人员可以理解上述实施例的各种方法中的全部或部分步骤是可以通过程序来指令相关的硬件来完成，该程序可以存储于计算机可读存储介质中，计算机可读介质包括永久性和非永久性、可移动和非可移动媒体可以由任何方法或技术来实现信息存储。信息可以是计算机可读指令、数据结构、程序的模块或其他数据。计算机的存储介质的例子包括，但不限于相变内存(PRAM)、静态随机存取存储器(SRAM)、动态随机存取存储器(DRAM)、其他类型的随机存取存储器(RAM)、只读存储器(ROM)、电可擦除可编程只读存储器(EEPROM)、快闪记忆体或其他内存技术、只读光盘只读存储器(CD-ROM)、数字多功能光盘(DVD)或其他光学存储、磁盒式磁带，磁带磁磁盘存储或其他磁性存储设备或任何其他非传输介质，可用于存储可以被计算设备访问的信息。按照本文中的界定，计算机可读介质不包括暂存电脑可读媒体(transitory media)，如调制的数据信号和载波。Those of ordinary skill in the art can understand that all or part of the steps in the various methods of the above embodiments can be completed by instructing relevant hardware through a program. The program can be stored in a computer-readable storage medium. The computer-readable medium includes a permanent Permanent and non-permanent, removable and non-removable media may be implemented by any method or technology for information storage. Information may be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), and read-only memory. (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disc read-only memory (CD-ROM), digital versatile disc (DVD) or other optical storage, Magnetic tape cassettes, tape magnetic disk storage or other magnetic storage devices or any other non-transmission medium can be used to store information that can be accessed by a computing device. As defined in this article, computer-readable media does not include transitory media, such as modulated data signals and carrier waves.

本发明还提供了一种终端，包括存储器和处理器，所述存储器上储存有数据提供方信息和能够在所述处理器上运行的计算机指令，所述处理器运行所述计算机指令时执行前述方法的步骤。其中，所述方法请参见前述部分的详细介绍，此处不再赘述。The present invention also provides a terminal, including a memory and a processor. The memory stores data provider information and computer instructions that can be run on the processor. When the processor runs the computer instructions, it executes the foregoing. Method steps. For the method, please refer to the detailed introduction in the previous section and will not be described again here.

最后应说明的是：以上实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。 Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be used Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent substitutions are made to some of the technical features; however, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

一种下料分选设备，其特征在于：下料分选设备(10000)包括安装于下料机架(6000)上的分片装置(1000)、安装在分片装置(1000)两出料端的多层料盒(2000)、下料中轴皮带流线(3000)、尾料盒(4000)和顶板架(5000)；A kind of blanking and sorting equipment, characterized in that: the blanking and sorting equipment (10000) includes a slicing device (1000) installed on the blanking frame (6000), two discharging devices installed on the slicing device (1000) The multi-layer material box at the end (2000), the unloading center axis belt streamline (3000), the tail material box (4000) and the top plate frame (5000);

所述下料中轴皮带流线(3000)沿着中轴线安装至所述下料机架(6000)上，所述顶板架(5000)设置在所述下料中轴皮带流线(3000)上方；多个分片装置(1000)沿着所述下料中轴皮带流线(3000)间隔的设置，并且其顶部连接至所述顶板架(5000)的顶板下表面上；每个分片装置(1000)的左右两端均设置一个多层料盒(2000)；The blanking central axis belt streamline (3000) is installed on the blanking frame (6000) along the central axis, and the top plate frame (5000) is arranged on the blanking central axis belt streamline (3000) Above; multiple slicing devices (1000) are arranged at intervals along the unloading central axis belt streamline (3000), and their tops are connected to the lower surface of the top plate of the top plate frame (5000); each slicing device A multi-layer material box (2000) is provided at both left and right ends of the device (1000);

其中，所述分片装置(1000)采用非接触吸附式分片装置，每个分片装置(1000)均集成有吸附模块和皮带驱动模块，在对应物料吸附位将下方的物料非接触吸附拾取并可选的向两侧传输；Among them, the slicing device (1000) adopts a non-contact adsorption slicing device. Each slicing device (1000) is integrated with an adsorption module and a belt drive module, and the material below is picked up by non-contact adsorption at the corresponding material adsorption position. And optionally transmits to both sides;

所述多层料盒(2000)采用多层交错式料盒收纳装置，每个料盒收纳装置包括交错驱动的多个料盒组件，相邻的两个料盒组件通过横向交错驱动组件被交错的内外交错移动，并通过竖直驱动组件将下层待接料的料盒组件顶升至顶层处的接料工位；The multi-layer material box (2000) adopts a multi-layer staggered material box storage device. Each material box storage device includes a plurality of material box assemblies that are staggeredly driven. Two adjacent material box assemblies are staggered through transverse staggered driving assemblies. It moves internally and externally in a staggered manner, and lifts the lower material box component to be received to the top material receiving station through the vertical drive component;

所述尾料盒(4000)正对所述下料中轴皮带流线(3000)的尾端设置，用于承载杂项硅片或未检测的硅片。The tail material box (4000) is placed directly opposite the tail end of the blanking axis belt streamline (3000), and is used to carry miscellaneous silicon wafers or untested silicon wafers.
根据权利要求1所述的下料分选设备，其特征在于：所述分片装置(1000)包括吸附分选主模组(100)、第一吸附支线模组(200)、第二吸附支线模组(300)、第一连接件(400)、第二连接件(500)、第三连接件(600)和控制器；所述吸附分选主模组(100)、第一吸附支线模组(200)、第二吸附支线模组(300)均包括皮带驱动模块和吸附模块； The blanking and sorting equipment according to claim 1, characterized in that: the slicing device (1000) includes an adsorption and sorting main module (100), a first adsorption branch line module (200), a second adsorption branch line Module (300), first connector (400), second connector (500), third connector (600) and controller; the adsorption and sorting main module (100), the first adsorption branch line module The group (200) and the second adsorption branch line module (300) both include a belt drive module and an adsorption module;

其中，所述第一吸附支线模组(200)和第二吸附支线模组(300)通过所述第一连接件(400)、第二连接件(500)和第三连接件(600)悬吊的布置在所述吸附分选主模组(100)的两个出料端；所述第一连接件(400)和第二连接件(500)相对距离可调的连接至所述第三连接件(600)，以此实现所述第一吸附支线模组(200)至第二吸附支线模组(300)的流线距离可调；设置在所述吸附分选主模组(100)、第一吸附支线模组(200)、第二吸附支线模组(300)上的吸附模块的吸附底面平齐且吸盘间距可调，以适应不同规格的硅片；Wherein, the first adsorption branch line module (200) and the second adsorption branch line module (300) are suspended through the first connector (400), the second connector (500) and the third connector (600). The crane is arranged at the two discharge ends of the main adsorption and sorting module (100); the first connecting piece (400) and the second connecting piece (500) are connected to the third connecting piece with an adjustable relative distance. Connector (600) to realize the adjustable streamline distance from the first adsorption branch line module (200) to the second adsorption branch line module (300); provided on the main adsorption and sorting module (100) , the adsorption bottom surfaces of the adsorption modules on the first adsorption branch line module (200) and the second adsorption branch line module (300) are flush and the distance between the suction cups is adjustable to adapt to silicon wafers of different specifications;

所述吸附分选主模组(100)、第一吸附支线模组(200)、第二吸附支线模组(300)的吸附模块的吸附底面高于皮带驱动模块的皮带底面布置，所述吸附分选主模组(100)在控制器的控制下向所述第一吸附支线模组(200)或第二吸附支线模组(300)输送硅片，从而使得硅片被非接触的吸附传输至对应料位上。The adsorption bottom surfaces of the adsorption modules of the main adsorption and sorting module (100), the first adsorption branch line module (200), and the second adsorption branch line module (300) are arranged higher than the belt bottom surface of the belt drive module. The main sorting module (100) transports silicon wafers to the first adsorption branch line module (200) or the second adsorption branch line module (300) under the control of the controller, so that the silicon wafers are adsorbed and transported in a non-contact manner to the corresponding material level.
根据权利要求2所述的下料分选设备，其特征在于：所述多层料盒(2000)包括设置于收纳架上的料盒滑轨组件、料盒组件、交错驱动组件、竖直导轨组件、竖直驱动组件、换料警示按钮和料盒控制器，The blanking and sorting equipment according to claim 2, characterized in that: the multi-layer material box (2000) includes a material box slide rail assembly, a material box assembly, a staggered driving assembly, and a vertical guide rail that are arranged on the storage rack. components, vertical drive components, material change warning buttons and material box controllers,

其中，多个所述料盒滑轨组件水平的且上下平行的设置于所述收纳架上；Wherein, a plurality of the magazine slide rail assemblies are arranged horizontally and parallel up and down on the storage rack;

每个所述料盒滑轨组件上设置一个所述料盒组件，且多个所述料盒组件上下交错布置；One of the magazine assemblies is provided on each of the magazine slide rail assemblies, and a plurality of the magazine assemblies are arranged staggered up and down;

交错驱动组件用于驱动上下相邻的两组料盒组件沿着所述料盒滑轨组件交错滑动，以将料盒组件送至接料位或换盒位；The staggered driving assembly is used to drive two groups of upper and lower adjacent material box assemblies to slide staggered along the box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position;

除顶层的料盒组件均通过所述竖直导轨组件转接至所述料盒滑轨组件； All the material box assemblies except the top layer are connected to the material box slide rail assembly through the vertical guide rail assembly;

所述竖直驱动组件驱动连接至所述竖直导轨组件，用于驱动所述竖直导轨组件上下移动以便于达到预设接料高度或退出更换料盒；The vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down to reach a preset material receiving height or exit the replacement material box;

多个所述换料警示按钮用于提示对应料盒组件是否满料及空盒到位，并用于向所述料盒控制器发出料盒退出或装载信号；A plurality of the refueling warning buttons are used to prompt whether the corresponding material box assembly is full of material and the empty box is in place, and are used to send a material box exit or loading signal to the material box controller;

所述交错驱动组件、竖直驱动组件和换料警示按钮与所述料盒控制器电讯连接，通过料盒控制器控制驱动实现多个所述料盒组件的到位接料、满料退出和更换。The staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the material receiving, full material withdrawal and replacement of multiple material box components. .
根据权利要求3所述的下料分选设备，其特征在于：所述下料中轴皮带流线(3000)包括底架组件、皮带架组件、传送带组件、驱动组件和物料位置监测组件；The blanking and sorting equipment according to claim 3, characterized in that: the blanking central axis belt streamline (3000) includes a chassis assembly, a belt frame assembly, a conveyor belt assembly, a driving assembly and a material position monitoring assembly;

其中，所述皮带架组件架设在所述底架组件上，用以支撑整个流线；所述传送带组件和驱动组件设只在所述皮带架组件上，用以提供皮带的驱动和物料传送；多组所述物料位置监测组件设置在所述皮带架组件处，用于感应对应位置是否来料及空料。Wherein, the belt frame assembly is installed on the bottom frame assembly to support the entire streamline; the conveyor belt assembly and the driving assembly are installed only on the belt frame assembly to provide belt driving and material transportation; Multiple groups of the material position monitoring components are provided at the belt frame component, and are used to sense whether the corresponding positions have incoming materials or empty materials.
根据权利要求1所述的下料分选设备，其特征在于：所述尾料盒(4000)包括料盒固定座(4001)、料盒转接块(4002)、料盒垫高块(4003)、料盒本体(4004)、主垫板(4005)、多规格的上垫板(4006)和物料感应器(4007)；The blanking and sorting equipment according to claim 1, characterized in that: the tail material box (4000) includes a material box fixing seat (4001), a material box transfer block (4002), and a material box raising block (4003 ), material box body (4004), main pad (4005), multi-specification upper pad (4006) and material sensor (4007);

其中，所述料盒本体(4004)依次通过料盒垫高块(4003)、料盒转接块(4002)向尾部倾斜的连接至所述料盒固定座(4001)，并通过所述料盒本体(4004)固定至机台或机架尾端；开设多向调整槽(40051)的主垫板(4005)位置可调的连接至所述料盒本体(4004)上；多种规格的所述上垫板(4006)铺设在所述主垫板(4005)上，用于缓冲的接收尾料；所述物料感应器(4007)安装至所述料盒本体(4004)底部，用于感应料盒本体(4004)上是否来料。 Among them, the material box body (4004) is connected to the material box fixing seat (4001) by tilting toward the tail through the material box lifting block (4003) and the material box adapter block (4002), and is connected to the material box fixing seat (4001) through the material box lifting block (4003) and the material box adapter block (4002). The box body (4004) is fixed to the machine platform or the rear end of the frame; the main backing plate (4005) with a multi-directional adjustment groove (40051) is adjustable in position and connected to the material box body (4004); various specifications The upper pad (4006) is laid on the main pad (4005) for buffering the receiving tail material; the material sensor (4007) is installed at the bottom of the material box body (4004) for Sensing whether material is coming from the material box body (4004).
根据权利要求1所述的下料分选设备，其特征在于：所述顶板架(5000)包括顶架柱座(5001)、顶架支撑框(5002)、顶架防护板(5003)、外接块(5004)和顶板加强梁(5005)，所述顶架柱座(5001)的底部安装至下料机架(6000)上，所述顶架支撑框(5002)通过多根所述顶架柱座(5001)的顶部连接支撑；在所述顶架支撑框(5002)的下表面设置多个所述外接块(5004)，用于悬吊的连接所述分片装置(1000)；在所述顶架支撑框(5002)的中部设置多根顶板加强梁(5005)，在所述顶架支撑框(5002)的顶部全覆盖的设置所述顶架防护板(5003)。The blanking and sorting equipment according to claim 1, characterized in that: the top frame (5000) includes a top frame column base (5001), a top frame support frame (5002), a top frame protective plate (5003), an external block (5004) and top plate reinforcing beam (5005), the bottom of the top frame column seat (5001) is installed on the unloading frame (6000), and the top frame support frame (5002) passes through multiple top frame The top connection support of the column base (5001); a plurality of the external blocks (5004) are provided on the lower surface of the top support frame (5002) for suspended connection to the slicing device (1000); A plurality of roof reinforcing beams (5005) are provided in the middle of the top frame support frame (5002), and the top frame protection plate (5003) is provided to fully cover the top of the top frame support frame (5002).
一种智能硅片分选***，其特征在于：分选***包括上料设备(30000)、检测设备(20000)和采用权利要求1-6任一项所述的下料分选设备(10000)；在所述上料设备(30000)和检测设备(20000)之间设置料型检测装置(40000)和碎片剔除装置(50000)，用于检测硅片型号以及是否发生破碎，并将破碎的硅片剔除，避免破碎硅片流入检测设备(20000)。An intelligent silicon wafer sorting system, characterized in that: the sorting system includes a loading device (30000), a detection device (20000) and a discharging and sorting device (10000) according to any one of claims 1-6 ; A material type detection device (40000) and a fragment removal device (50000) are provided between the loading equipment (30000) and the detection equipment (20000) to detect the silicon wafer model and whether it is broken, and to remove the broken silicon wafers. The wafers are removed to prevent broken silicon wafers from flowing into the detection equipment (20000).
一种根据权利要求1-6任一项所述下料分选设备的下料方法，其特征在于，下料方法包括：A blanking method for the blanking and sorting equipment according to any one of claims 1 to 6, characterized in that the blanking method includes:

主流线输送物料，物料通过下料中轴皮带流线(3000)被持续传输；The main line transports materials, and the materials are continuously transported through the unloading center axis belt streamline (3000);

分片装置分料多层料盒收料，在下料中轴皮带流线(3000)上对应物料瑕疵类型的吸附分料位上感应到来料时，该吸附分料位上方对应的分片装置(1000)非接触的吸附拾取下方的物料，并输送给对应端的多层料盒(2000)内；The slicing device separates and collects materials from multi-layer boxes. When the incoming material is sensed on the adsorption and distribution position corresponding to the type of material defect on the unloading center axis belt streamline (3000), the corresponding slicing device (3000) above the adsorption and distribution position 1000) Non-contact adsorption picks up the materials below and transports them to the multi-layer material box (2000) at the corresponding end;

尾料接收，对于无对应瑕疵类型储存的杂料或未来记得分析的物料，由所述下料中轴皮带流线(3000)输送至尾端设置的尾料盒(4000)内。For tail material reception, miscellaneous materials stored without corresponding defect types or materials that need to be analyzed in the future are transported to the tail material box (4000) set at the tail end by the unloading central axis belt streamline (3000).
根据权利要求8所述的下料方法，其特征在于：分片装置分料多层料盒收料包括：The cutting method according to claim 8, characterized in that: the slicing device divides the multi-layer material boxes Materials received include:

S11、上层料盒接料：分片装置(1000)将物料传输至两端多层料盒(2000)处的接料位，破真空将物料输送给接料位处的空置的上层料盒，直至上层料盒满料；S11. Receiving material from the upper material box: The slicing device (1000) transfers the material to the material receiving position at the multi-layer material boxes (2000) at both ends, breaks the vacuum and transports the material to the empty upper material box at the material receiving position. Until the upper material box is full;

S12、上下层料盒横向交互：通过交错驱动组件交错的驱动，满料的上层料盒由上层料盒滑轨组件移至外端，同步的，空盒的下层料盒由下层料盒滑轨组件移至内端接料位的正下方；S12. Horizontal interaction between upper and lower material boxes: Through the staggered driving of the staggered driving components, the full upper material box is moved to the outer end by the upper material box slide rail assembly, and simultaneously, the empty lower material box is moved by the lower material box slide rail. The component is moved to just below the inner end connection position;

S13、下层料盒上移并将上层料盒卸料：由竖直驱动组件驱动下层料盒沿着竖直导轨组件上移至接料位，并将上层料盒内的物料卸料；S13. Move the lower material box upward and unload the upper material box: the vertical drive assembly drives the lower material box to move upward along the vertical guide rail assembly to the material receiving position, and unload the materials in the upper material box;

S14、下层料盒接料：位于接料位处的下层料盒接料直至满料，满料后经由竖直驱动组件驱动下层料盒沿着竖直导轨组件下移至退料位；S14. The lower material box receives material: The lower material box located at the material receiving position receives material until it is full. After it is full, the vertical drive assembly drives the lower material box to move downward along the vertical guide rail assembly to the material withdrawal position;

S15、上下层料盒二次横向交互：通过交错驱动组件交错的驱动，满料的下层料盒沿着下层料盒滑轨组件移至外端，同步的，空盒的上层料盒由上层料盒滑轨组件移至内端接料位；S15. Secondary lateral interaction between the upper and lower material boxes: Through the staggered driving of the staggered driving assembly, the full lower material box moves to the outer end along the lower material box slide rail assembly. Synchronously, the empty upper material box is driven by the upper material box. The box slide rail assembly moves to the inner end material connection position;

S16、下层料盒卸料上层料盒开始接料：将满料的下层料盒卸料，接料位处空置的上层料盒开始接料；S16. The lower material box is unloaded and the upper material box begins to receive material: the full lower material box is unloaded, and the empty upper material box at the material receiving position begins to receive material;

重复步骤S11-S16，实现料盒交互的持续接料卸料。 Repeat steps S11-S16 to realize continuous receiving and unloading of materials and boxes.