WO2022211132A1 - マイクロ波の漏洩検出方法、及びマイクロ波の漏洩検出装置 - Google Patents
マイクロ波の漏洩検出方法、及びマイクロ波の漏洩検出装置 Download PDFInfo
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- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0807—Measuring electromagnetic field characteristics characterised by the application
- G01R29/0814—Field measurements related to measuring influence on or from apparatus, components or humans, e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning
Definitions
- the present invention relates to a leakage detection method and a leakage detection device for detecting microwave leakage, and a sensor device used therefor.
- explosion-proof areas In processes that handle combustible gases, vapors, dust, etc., areas where electronic devices can be used are usually defined as explosion-proof areas. This is because the electronic device may become an ignition source and cause an explosion. Therefore, in an explosion-proof area, electronic devices having an explosion-proof structure are used so as not to become an ignition source.
- the microwave irradiation process may be performed in an explosion-proof area.
- there is a demand to detect microwave leakage but at present, sensors with an explosion-proof structure that can detect microwave leakage are not widely available. There is a problem that it is difficult to detect microwave leakage during irradiation.
- the present invention has been made in view of such problems, and an object of the present invention is to detect leakage of microwaves during irradiation of microwaves in an explosion-proof area.
- the object is to provide a method and a microwave leak detection device and a sensor device used therein.
- a microwave leakage detection method provides an explosion-proof structure capable of detecting an increase in at least one of an electric field and a magnetic field at a location where microwave leakage is to be detected in an explosion-proof area. locating one or more sensors; and detecting microwave leakage in response to detecting an increase in the electric and/or magnetic field by the one or more sensors.
- the senor is an inductive or capacitive explosion-proof proximity sensor, and in the step of detecting microwave leakage, the output of the sensor is used for object detection. Microwave leakage may be detected when the corresponding output is obtained.
- one or two or more sensors are placed at the joint of the flange of the hollow member having the space into which the microwaves are introduced.
- detection of microwave leakage may occur when microwaves are being introduced into the space.
- the one or more sensors are arranged to emit microwaves from the inside of the container to which the microwaves are irradiated to the outside.
- the detection of leakage of microwaves may be performed while microwaves are being irradiated within the container.
- the sensors have directivity, and in the step of arranging the sensors, one or more sensors can detect microwaves in the direction of leakage.
- the sensors can be arranged as follows.
- a microwave leakage detection device includes a sensor with an explosion-proof structure capable of detecting an increase in at least one of an electric field and a magnetic field, and a detection unit for detecting wave leakage.
- the sensor may be an inductive or capacitive explosion-proof proximity sensor.
- a sensor device for microwave leakage detection includes an explosion-proof proximity sensor with an inductive or capacitive explosion-proof structure, and a microwave sensor provided to surround an object detection range of the explosion-proof proximity sensor. and a protective member that transmits the.
- a sensor device for detecting leakage of microwaves includes: an explosion-proof sensor capable of detecting an increase in at least one of an electric field and a magnetic field; and a reflective member.
- the sensor may be an inductive or capacitive explosion-proof proximity sensor.
- an explosion-proof sensor capable of detecting an increase in at least one of an electric field and a magnetic field detects microwave leakage in an explosion-proof area. Leakage of microwaves can be detected during irradiation of microwaves in an explosion-proof area.
- FIG. 1 is a schematic diagram showing the configuration of a microwave leakage detection device according to an embodiment of the present invention
- FIG. A diagram for explaining an experiment using an explosion-proof sensor according to the same embodiment.
- Schematic diagram showing another configuration of the microwave leakage detection device according to the same embodiment Schematic diagram showing another configuration of the microwave leakage detection device according to the same embodiment
- Schematic diagram showing another configuration of the microwave leakage detection device according to the same embodiment Schematic diagram showing another configuration of the microwave leakage detection device according to the same embodiment
- Schematic diagram showing another configuration of the microwave leakage detection device according to the same embodiment The figure which shows the sensor apparatus which has a protective member in the same embodiment.
- Sectional drawing which shows the sensor apparatus which has a reflecting member in the same embodiment A diagram for explaining the arrangement of explosion-proof sensors in the same embodiment.
- a diagram for explaining the arrangement of explosion-proof sensors in the same embodiment. A diagram for explaining the arrangement of explosion-proof sensors in the same embodiment.
- microwave leakage detection method and a microwave leakage detection device according to one aspect of the present invention, and a sensor device used therefor will be described using embodiments. It should be noted that in the following embodiments, components denoted by the same reference numerals are the same or correspond to each other, and repetitive description may be omitted.
- the microwave leakage detection method and microwave leakage detection device detect microwave leakage using a sensor having an explosion-proof structure.
- the sensor device is a device used for detecting leakage of the microwave.
- the microwave leakage detection device 1 includes an explosion-proof sensor 10 having an explosion-proof structure capable of detecting an increase in at least one of an electric field and a magnetic field, and an explosion-proof sensor 10 detecting an increase in at least one of the electric field and the magnetic field. and a detection unit 20 for detecting wave leakage.
- FIG. 1 shows an explosion-proof sensor 10a that is an inductive explosion-proof proximity sensor
- FIGS. 3A and 3B show an explosion-proof sensor 10b that is a capacitive explosion-proof proximity sensor
- FIG. an explosion-proof sensor 10c, which is a magnetic type explosion-proof proximity sensor.
- the explosion-proof sensors 10a, 10b, and 10c are referred to as the explosion-proof sensor 10 as described above unless otherwise distinguished.
- the explosion-proof sensor 10 may be, for example, a pressure-resistant explosion-proof structure, an internal pressure explosion-proof structure, an increased safety explosion-proof structure, an oil-filled explosion-proof structure, or an intrinsically safe explosion-proof structure. It is preferable to select a type such as a pressure-resistant explosion-proof structure or an internal pressure explosion-proof structure that is suitable for the type of the explosion-proof area.
- an explosion-proof sensor 10a which is an inductive explosion-proof proximity sensor, has a detection coil 11 and an internal circuit 12.
- the internal circuit 12 causes the detection coil 11 to generate a high-frequency magnetic field. Then, when a metal object approaches, an induced current (eddy current) flows in the metal object, and the impedance of the detection coil 11 changes.
- the internal circuit 12 can detect the object by the change in its impedance. On the other hand, as shown in FIG. 1, even when the detection coil 11 is irradiated with the microwave 5, the high-frequency magnetic field is disturbed and the impedance of the detection coil 11 changes. to detect microwaves.
- the detection unit 20 may detect microwave leakage when the output from the explosion-proof sensor 10a becomes an output corresponding to object detection.
- the strength of the microwave electromagnetic field at the position of the detection coil 11 exceeds a certain value. Therefore, it can be said that the explosion-proof sensor 10a is a sensor capable of detecting an increase in at least one of the electric field and the magnetic field.
- Microwave detection experiments were performed using an inductive explosion-proof proximity sensor.
- the explosion-proof sensor 10a was arranged so that the distance from the flange joint of the waveguide was L. Wave detection was performed.
- a detection coil 11 indicated by a dashed line is located to the left of the explosion-proof sensor 10a.
- microwaves were detected under the condition that the microwave leakage amount at the position where the distance L is 5 cm in FIG. 2 is 3 (mW/cm 2 ).
- the amount of microwave leakage was measured with a Narda high-frequency electromagnetic field measuring device (display: NBM-520, probe: E0391).
- As the explosion-proof sensor 10a three explosion-proof proximity sensors with detection distances of 5 mm, 10 mm, and 15 mm manufactured by IDEC were used. The experimental results are shown in the following table.
- the explosion-proof sensor 10a was arranged as shown in FIG. 2B, the microwave could not be detected. Therefore, the explosion-proof sensor 10a used in the experiment could not detect the microwave 5 in the direction of the arrow D1 in FIG. 1, but could detect the microwave 5 in the direction of the arrow D2. Therefore, the explosion-proof sensor 10a, which is an inductive explosion-proof proximity sensor, has directivity.
- the detection distance of the proximity sensor is the distance at which the proximity sensor operates when the standard detection object is vertically approached from the detection surface.
- an explosion-proof sensor 10b which is a capacitive explosion-proof proximity sensor, has an electrode 13 and an internal circuit 14.
- the internal circuit 14 has, for example, a high-frequency oscillation circuit, and when an object such as a dielectric approaches, the charge of the electrode 13 changes and changes accordingly. An object can be detected by the oscillation state.
- the detection unit 20 may detect microwave leakage when the output from the explosion-proof sensor 10b becomes an output corresponding to object detection.
- the explosion-proof sensor 10b When the output from the explosion-proof sensor 10b corresponds to the object detection, it means that the intensity of the microwave electric field at the position of the electrode 13 has exceeded a certain value. Therefore, it can be said that the explosion-proof sensor 10b is a sensor capable of detecting an increase in at least one of the electric field and the magnetic field.
- the microwave 5 in the direction of the arrow D1 in FIG. 3A can change the charge in the electrode 13 more than the microwave 5 in the direction of the arrow D2. Therefore, the explosion-proof sensor 10b can more easily detect the microwaves 5 in the direction of the arrow D1 than the microwaves 5 in the direction of the arrow D2, and has directivity.
- the configuration in which 23 was arranged had higher detection sensitivity for microwaves, and was able to detect weaker microwaves.
- This metal plate 23 is usually a flat plate and preferably has a size similar to that of the electrode 13 or is larger than the electrode 13 .
- explosion-proof sensor 10b may have electrode 13, internal circuit 14, and metal plate 23 provided to face electrode 13, as shown in FIG. 3B.
- the metal plate 23 is arranged on the object detection side of the proximity sensor with respect to the electrode 13 .
- the explosion-proof sensor 10b shown in FIG. 3B also has directivity.
- an explosion-proof sensor 10c which is a magnetic explosion-proof proximity sensor, has a Hall IC 15 and an internal circuit 16.
- the explosion-proof sensor 10c when used as a proximity sensor, when an object that generates a magnetic field (for example, a permanent magnet) approaches, the magnetic field generates a Hall voltage in the Hall IC 15 .
- the internal circuit 16 can detect the object by amplifying and detecting the Hall voltage.
- the microwaves 5 can be detected.
- the detection unit 20 may detect microwave leakage when the output from the explosion-proof sensor 10c becomes an output corresponding to object detection.
- the output from the explosion-proof sensor 10c corresponds to the object detection, it means that the strength of the microwave magnetic field at the position of the Hall IC 15 has exceeded a certain value. Therefore, it can be said that the explosion-proof sensor 10c is a sensor capable of detecting an increase in at least one of the electric field and the magnetic field.
- the explosion-proof sensor 10c is an explosion-proof proximity sensor having the Hall IC 15, which is a Hall element, has been described. good too.
- microwaves may be detected according to the increase in resistance of the magnetoresistive element. Since the Hall IC 15 detects a magnetic field in one direction, the explosion-proof sensor 10c using the Hall IC 15 has directivity. On the other hand, since the magnetoresistive element detects an increase in the magnetic field at the detection position, the explosion-proof sensor 10c using the magnetoresistive element does not have directivity, and the microwave 5 in the direction of arrow D1 also reaches the direction of arrow D2. Directional microwaves 5 can also be detected.
- the explosion-proof sensor 10c using the Hall IC 15 is configured to cover a plurality of detection directions, for example, by using a plurality of Hall ICs 15, the explosion-proof sensor 10c having no directivity can be used. can do.
- the explosion-proof sensors 10a, 10b, and 10c which are inductive, capacitive, or magnetic explosion-proof proximity sensors, are already on the market, so detailed description thereof will be omitted.
- the frequencies of the microwaves detected using the explosion-proof sensor 10 may be, for example, around 915 MHz, 2.45 GHz, 5.8 GHz, 24 GHz, or other frequencies within the range of 300 MHz to 300 GHz.
- the explosion-proof sensor 10 with an explosion-proof structure that can detect an increase in at least one of an electric field and a magnetic field may be a sensor whose output changes when the intensity of the microwave at the sensing position exceeds a threshold. If the threshold can be adjusted, the threshold may be calibrated prior to placement of the explosion-proof sensor 10 so that microwave leakage of desired intensity can be detected. On the other hand, when using the explosion-proof sensor 10 which is a commercially available explosion-proof proximity sensor, it is usually difficult to calibrate. In this case, by adjusting the distance between the location where the microwave leaks and the explosion-proof sensor 10, it may be possible to detect microwave leakage of desired intensity.
- microwave leakage when detecting microwaves leaking from a flange joint of a waveguide, by arranging the explosion-proof sensor 10 at a position closer to the joint, weaker microwave leakage can be detected. By locating the explosion-proof sensor 10 at a position farther from the joint, microwave leakage can be detected when the intensity of the leaked microwave is higher.
- the detection unit 20 detects microwave leakage in response to the explosion-proof sensor 10 detecting an increase in at least one of the electric field and the magnetic field. If the explosion-proof sensor 10 is an explosion-proof proximity sensor, the detection unit 20 may detect microwave leakage when the output of the explosion-proof sensor 10 becomes an output corresponding to object detection.
- the detecting unit 20 detecting microwave leakage may mean, for example, outputting the detection result by a predetermined method. may be performed.
- the output of the detection result may be, for example, display of the detection result, sound output, transmission, or the like.
- the detection unit 20 causes the microwave generator to stop generating microwaves in order to stop irradiation of microwaves. may be controlled.
- the explosion-proof sensor 10 is usually arranged in an explosion-proof area.
- the detector 20 is usually arranged outside the explosion-proof area. In this way, when the detection unit 20 is arranged outside the explosion-proof area, the detection unit 20 does not have to have an explosion-proof structure.
- 1, 3A, 3B, and 4 show the case where one explosion-proof sensor 10 is connected to the detection unit 20, two or more explosion-proof sensors 10 are connected to the detection unit 20. It goes without saying that it is acceptable. Therefore, the microwave leakage detection device 1 may have two or more explosion-proof sensors 10 .
- the detection unit 20 detects that at least one of the two or more explosion-proof sensors 10 detects an increase in at least one of the electric field and the magnetic field. Microwave leakage may be detected depending on .
- FIG. 5 is a diagram showing a sensor device 8 having a protective member 30 provided in the object detection range 31 of the explosion-proof sensor 10, and FIGS. Fig. 3 shows a sensor device 8 with a reflective member 40 for guiding;
- the sensor device 8 may be used instead of the explosion-proof sensor 10 .
- the sensor device 8 has an explosion-proof sensor 10 and a protective member 30.
- the explosion-proof sensor 10 may be, for example, the explosion-proof proximity sensor described above.
- the protective member 30 is provided so as to surround an object detection range 31 of the explosion-proof sensor 10 .
- This protection member 30 is for preventing an object from entering the object detection range 31 . Therefore, it is preferable that the protection member 30 be provided so as to surround the entire object detection range 31 .
- the protection member 30 is made of a material that can be detected by the explosion-proof sensor 10, the protection member 30 has an object detection range in order to prevent the protection member 30 from being detected by the explosion-proof sensor 10. 31 is preferred.
- the protection member 30 may exist within the object detection range 31 .
- the protection member 30 is provided so as to surround the object detection range 31 of the explosion-proof sensor 10, it means that the protection member 30 made of a material that cannot be detected by the explosion-proof sensor 10 is within the object detection range 31. It is a concept that includes existence.
- the explosion-proof sensor 10 detects not an approaching object but microwaves.
- the protection member 30 is preferably made of a material that transmits microwaves.
- the material that transmits microwaves is a material with a small relative dielectric loss, and is not particularly limited, but may be, for example, fluororesins such as polytetrafluoroethylene, quartz, glass, ceramics, resins, and the like.
- the relative dielectric loss of the microwave transparent material is preferably less than 1, more preferably less than 0.1, for example, at the frequency of the microwave to be detected and the temperature at which leakage is detected. , is less than 0.01.
- the sensor device 8 has an explosion-proof sensor 10 and a reflecting member 40a for guiding the microwaves 5 to the explosion-proof sensor 10.
- the reflecting member 40a is provided around the explosion-proof sensor 10, and may be horn-shaped as shown in FIG. 6A.
- the sensor device 8 has an explosion-proof sensor 10 and a reflecting member 40b for guiding the microwaves 5 to the explosion-proof sensor 10.
- the reflecting member 40b is provided around the explosion-proof sensor 10 and may be parabolic as shown in FIG. 6B.
- the reflecting members 40a and 40b are not particularly distinguished, they are called the reflecting member 40 as described above. The same applies to other reflecting members.
- the reflective member 40 may be made of, for example, a microwave reflective material.
- a microwave reflective material may be, for example, a metal.
- the metal is not particularly limited, and may be, for example, stainless steel, carbon steel, aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy, or the like.
- the microwave 5 can be reflected and guided to the directional explosion-proof sensor 10 such as an inductive explosion-proof proximity sensor, and the microwave 5 can be guided in a direction different from the directivity. Microwaves can also be detected.
- the directional explosion-proof sensor 10 such as an inductive explosion-proof proximity sensor
- the sensor device 8 has an explosion-proof sensor 10, a protective member 30, and a reflecting member 40a.
- sensor device 8 may have both protective member 30 and reflective member 40 .
- FIGS. 7A and 7B are diagrams showing a sensor device 8 having a rectangular parallelepiped reflecting member 40c with one side open and the explosion-proof sensor 10 arranged inside the reflecting member 40c.
- 7A is a view of the sensor device 8 viewed from the opening 41 side
- FIG. 7B is a cross-sectional view taken along the line VIIB-VIIB of FIG. 7A.
- the reflective member 40c may also be made of the microwave reflective material described above.
- the explosion-proof sensor 10 is preferably arranged inside the reflecting member 40 c so that the reflecting member 40 c does not exist within the object detection range 31 . In this sensor device 8 , microwaves introduced inside through the opening 41 are reflected by the inner surface of the reflecting member 40 c and detected by the explosion-proof sensor 10 .
- the microwave leakage detection method includes the steps of arranging one or more explosion-proof sensors 10 at a location where it is desired to detect microwave leakage in an explosion-proof area; and detecting microwave leakage in response to detecting an increase in at least one of the electric and magnetic fields by either.
- one or two or more explosion-proof sensors 10 are arranged at locations where it is desired to detect microwave leakage in the explosion-proof area. If the explosion-proof sensor 10 has directivity, it is preferable to arrange one or more of the explosion-proof sensors 10 so as to detect microwaves directed in a leaking direction.
- a location where it is desired to detect microwave leakage may be, for example, a flange joint of a hollow member having a space into which microwaves are introduced. This is because microwaves may leak from the joint portion if the joint portion of the flange is not properly joined.
- the hollow member having a space into which microwaves are introduced may be, for example, a waveguide, a container inside which microwave irradiation is performed, or a connecting pipe connected to the container. or any other hollow member having a space into which microwaves are introduced.
- the connecting tube may be, for example, a viewing window, an inlet for raw materials, an outlet for products, a cleaning line, an inlet, or an outlet.
- one or two or more explosion-proof sensors 10 may be arranged at the joints of flanges of hollow members having a space into which microwaves are introduced.
- Arranging the explosion-proof sensor 10 at the joint portion of the flange may mean, for example, arranging the explosion-proof sensor 10 around the joint portion of the flange. It may be arranged.
- the former will be explained using FIGS. 8A to 8C, and the latter will be explained using FIG.
- FIGS. 8A and 8B are diagrams showing an example in which four explosion-proof sensors 10 are arranged around the joint 50 between the flanges 51a and 52a of the waveguides 51 and 52.
- FIG. 8A is a view of waveguides 51 and 52 viewed from a direction perpendicular to the central axes of waveguides 51 and 52
- FIG. 8B is a cross-sectional view taken along line VIIIB-VIIIB of FIG. 8A.
- the flange 51 a of the circular waveguide 51 and the flange 52 a of the circular waveguide 52 are connected by bolts 53 and nuts 54 .
- FIGS. 8A and 8B are shown in FIGS. 8A and 8B because of its directivity. That is, it is preferable that the explosion-proof sensor 10 is arranged so that the leaking microwaves are directed in the direction indicated by the arrow D2 in FIG. In addition, as shown in FIG.
- the four explosion-proof sensors 10 are arranged at even angles, that is, every 90 degrees around the longitudinal central axis of the waveguides 51 and 52. is preferred. Therefore, when three explosion-proof sensors 10 are arranged, as shown in FIG. 8C, they are preferably arranged at intervals of 120 degrees around the central axes of waveguides 51 and 52. be. In this way, when a plurality of explosion-proof sensors 10 are arranged around the joint portion of the flange, it is preferable that they are arranged at even angles around the central axis of the flange.
- the number of explosion-proof sensors 10 arranged around the joint 50 of the flanges 51a and 51b does not matter.
- two explosion-proof sensors 10 may be arranged around the joint 50 of the flanges 51a and 51b, or five or more explosion-proof sensors 10 may be arranged. Since it is usually not known in advance at which position of the joint 50 the microwave leaks, the explosion-proof sensor 10 is arranged so that the microwave leaked from any position of the joint 50 can be detected. is preferred. Further, when the distance between the arranged explosion-proof sensors 10 and the joint portion 50 is short, more explosion-proof sensors 10 may be arranged, and when the distance is long, fewer explosion-proof sensors 10 are arranged. may
- FIG. 9 is a diagram showing an example in which the explosion-proof sensor 10 is arranged in the hollow portion 56 provided in the joint portion 50 between the flanges 51a and 52a of the waveguides 51 and 52.
- a plurality of hollow portions 56 (for example, three, four, etc.) may be provided at equal angles around the central axes of the waveguides 51 and 52 .
- One explosion-proof sensor 10 may be arranged in each hollow portion 56 .
- wiring for output of the explosion-proof sensor 10 may extend outside the waveguides 51 and 52 through wiring holes provided in the joint 50 or the flange 51a. .
- the location where it is desired to detect microwave leakage may be, for example, the installation position of a choke structure for preventing microwave leakage from the inside of the container where microwave irradiation is performed to the outside.
- a choke structure for preventing microwave leakage from the inside of the container where microwave irradiation is performed to the outside.
- one or more explosion-proof sensors 10 may be arranged on the outside of the choke structure for preventing microwaves from leaking from the inside of the container to which the microwaves are irradiated. good.
- the choke structure may be provided, for example, in a gap between a container to be irradiated with microwaves and a stirring shaft extending from the outside of the container to the inside. It may be provided in a gap with a possible door or shutter.
- FIG. 10 is a cross-sectional view showing an example of a container 61 inside which microwave irradiation is performed and a stirring shaft 62 extending from the outside of the container 61 to the inside.
- a chalk structure is provided in a gap 63 between the boss portion 61a of the container 61 and the stirring shaft 62.
- a plurality of explosion-proof sensors 10 are provided outside the choke structure.
- FIGS. 11A and 11B are diagrams showing a situation in which one explosion-proof sensor 10 and a cylindrical reflecting member 40d are arranged around the joint of the flanges 51a and 52a.
- 11A is a view of waveguides 51 and 52 viewed from a direction perpendicular to the central axes of waveguides 51 and 52
- FIG. 11B is a cross-sectional view taken along line XIB-XIB of FIG. 11A.
- FIGS. 11A and 11B illustration of a fixture for attaching the reflecting member 40d to the waveguides 51 and 52 is omitted.
- FIGS. 11A and 11B around the junction of the flanges 51a and 52a of the waveguides 51 and 52, there is a cylindrical shape whose central axis coincides with the central axis of the waveguides 51 and 52. of the reflecting member 40d is arranged. Therefore, microwaves leaking from any part of the joints of the flanges 51a and 52a are reflected by the inner peripheral surface of the cylindrical reflecting member 40d or the outer peripheral surfaces of the waveguides 51 and 52 to form one explosion-proof It is guided to the sensor 10 and detected by the explosion-proof sensor 10 . Thus, the number of explosion-proof sensors 10 can be reduced by appropriately arranging the reflecting member 40 .
- microwave leakage in response to detection of an increase in at least one of the electric field and the magnetic field by at least one of the one or more explosion-proof sensors 10 arranged. to detect This step may be performed while the microwave irradiation process is being performed. That is, when microwaves are introduced into the internal space of the hollow member, or when microwaves are irradiated within the container provided with the choke structure, microwave leakage is detected. good too. Detection of this microwave leakage may be performed by the detector 20, for example. Further, in the step of detecting microwave leakage, when at least one of the explosion-proof sensors 10 detects an increase in at least one of the electric field and the magnetic field, for example, it may be output that there is microwave leakage. Alternatively, processing may be performed to deal with microwave leakage, such as processing to turn off the microwave generator.
- the microwave leakage detection device 1 and the microwave leakage detection method according to the present embodiment it is possible to use the commercially available explosion-proof sensor 10 capable of detecting an increase in at least one of the electric field and the magnetic field. Therefore, microwave leakage can be detected inexpensively in an explosion-proof area.
- the explosion-proof sensor 10 at the joint of the flange, it is possible to detect microwave leakage from that joint.
- the explosion-proof sensor 10 on the outside of the choke structure, it is possible to detect microwave leakage from the choke structure.
- the protective member 30 provided in the sensing range of the explosion-proof sensor 10, it is possible to prevent the explosion-proof sensor 10 from sensing anything other than microwaves. It is possible to avoid erroneous detection of anything other than microwaves.
- the sensor device 8 has a reflecting member 40 that guides microwaves to the explosion-proof sensor 10, for example, the direction of directivity can be changed, or a smaller number of sensor devices 8 can be used to prevent leakage of microwaves. can be detected, and the range in which a single sensor device 8 can detect microwave leakage can be widened.
- the explosion-proof sensor 10 may be an explosion-proof sensor capable of detecting an increase in at least one of an electric field and a magnetic field, other than the explosion-proof proximity sensor.
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Description
Claims (8)
- 防爆エリアにおいて、マイクロ波が導入される空間を有する中空部材のフランジの接合部、または前記中空部材の内部から外部へのマイクロ波の漏洩を防止するためのチョーク構造の外部側に、電界及び磁界の少なくとも一方の増加を検出可能な防爆構造の1個または2個以上のセンサを配置するステップと、
前記1個または2個以上のセンサの少なくともいずれかによって電界及び磁界の少なくとも一方の増加を検出したことに応じてマイクロ波の漏洩を検出するステップと、
を含むマイクロ波の漏洩検出方法。 - 前記センサは、誘導型または静電容量型の防爆近接センサである、請求項1記載のマイクロ波の漏洩検出方法。
- 前記センサは、指向性を有する、請求項1または請求項2記載の漏洩検出方法。
- 前記マイクロ波の漏洩を検出するステップでは、前記防爆センサの出力が物体検出に応じた出力となった際にマイクロ波の漏洩を検出する、請求項1から請求項3のいずれかに記載のマイクロ波の漏洩検出方法。
- 電界及び磁界の少なくとも一方の増加を検出可能な防爆構造のセンサと、
前記センサによって電界及び磁界の少なくとも一方の増加を検出したことに応じてマイクロ波の漏洩を検出する検出部と、
を備え、
前記センサは、防爆エリアにおいて、マイクロ波が導入される空間を有する中空部材のフランジの接合部または前記中空部材の内部から外部へのマイクロ波の漏洩を防止するためのチョーク構造の外部側に配置される、マイクロ波の漏洩検出装置。 - 前記センサは、誘導型または静電容量型の防爆近接センサである、請求項5記載のマイクロ波の漏洩検出装置。
- 前記センサの検出範囲を囲うように設けられた、マイクロ波を透過する保護部材をさらに備えた、請求項5または請求項6記載のマイクロ波の漏洩検出装置。
- 前記センサの周囲に設けられた、マイクロ波を前記センサに導くための反射部材をさらに備えた、請求項5から請求項7のいずれか記載のマイクロ波の漏洩検出装置。
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- 2022-04-04 CN CN202280038835.9A patent/CN117396762A/zh active Pending
- 2022-04-04 WO PCT/JP2022/017025 patent/WO2022211132A1/ja active Application Filing
- 2022-04-04 EP EP22781339.1A patent/EP4317998A1/en active Pending
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