WO2022092190A2 - Film conducteur transparent et procédé de production pour film conducteur transparent - Google Patents

Film conducteur transparent et procédé de production pour film conducteur transparent Download PDF

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Publication number
WO2022092190A2
WO2022092190A2 PCT/JP2021/039793 JP2021039793W WO2022092190A2 WO 2022092190 A2 WO2022092190 A2 WO 2022092190A2 JP 2021039793 W JP2021039793 W JP 2021039793W WO 2022092190 A2 WO2022092190 A2 WO 2022092190A2
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Prior art keywords
transparent conductive
conductive layer
film
conductive film
transparent
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PCT/JP2021/039793
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English (en)
Japanese (ja)
Inventor
泰介 鴉田
望 藤野
寛行 鷹尾
Original Assignee
日東電工株式会社
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Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to CN202180074002.3A priority Critical patent/CN116745867A/zh
Priority to JP2022559225A priority patent/JPWO2022092190A1/ja
Priority to KR1020237012198A priority patent/KR20230096992A/ko
Publication of WO2022092190A2 publication Critical patent/WO2022092190A2/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/025—Electric or magnetic properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/027—Thermal properties
    • B32B7/028—Heat-shrinkability
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports

Definitions

  • the present invention relates to a transparent conductive film and a method for producing a transparent conductive film.
  • a transparent conductive film having a transparent base film made of resin and a transparent conductive layer in order in the thickness direction is known.
  • the transparent conductive layer is used as a conductor film for forming a pattern of transparent electrodes in various devices such as liquid crystal displays, touch panels, and optical sensors.
  • an amorphous film of the transparent conductive material is formed on the base film by a sputtering method (film formation step).
  • film formation step an amorphous film of the transparent conductive material is formed on the base film by a sputtering method
  • the amorphous transparent conductive layer on the base film is crystallized by heating (crystallization step).
  • a technique relating to such a transparent conductive film is described in, for example, Patent Document 1 below.
  • thermal expansion or thermal contraction occurs in each component of the transparent conductive film.
  • cracks occur in a transparent conductive layer that is thin and fragile due to thermal expansion or contraction of each component.
  • the generation of cracks in the transparent conductive layer is not preferable from the viewpoint of, for example, the conductivity of the transparent conductive layer.
  • the present invention provides a transparent conductive film suitable for obtaining a transparent conductive film provided with a crystalline transparent conductive layer in which the generation of cracks is suppressed, and a method for producing the transparent conductive film.
  • the present invention [1] is a transparent conductive film comprising a transparent resin base material and a transparent conductive layer in this order in the thickness direction, at 165 ° C. and 60 minutes in the in-plane direction orthogonal to the thickness direction.
  • the transparent conductive film has a first direction in which the heat shrinkage rate by the heat treatment under the heating conditions is maximum and a second direction orthogonal to the first direction, and is subjected to the heat treatment under the heating conditions.
  • the first heat shrinkage rate T1 in the second direction and the second heat shrinkage rate T2 in the second direction due to the heat treatment of the transparent resin base material under the heating conditions are
  • the present invention [2] includes the transparent conductive film according to the above [1], wherein the transparent conductive layer contains krypton.
  • the present invention [3] includes the transparent conductive film according to the above [1] or [2], wherein the transparent conductive layer is amorphous.
  • the present invention [4] includes a method for producing a transparent conductive film, which comprises a step of preparing the transparent conductive film according to the above [3] and a step of heating and crystallizing the transparent conductive layer.
  • the first heat shrinkage rate T1 and the second heat shrinkage rate T2 in the transparent conductive layer satisfy
  • Such a transparent conductive film is suitable for obtaining a transparent conductive film provided with a crystalline transparent conductive layer in which the generation of cracks is suppressed.
  • the method for producing a transparent conductive film of the present invention is suitable for obtaining a transparent conductive film provided with a crystalline transparent conductive layer in which the generation of cracks is suppressed from such a transparent conductive film.
  • FIG. 3A shows a step of preparing a resin film
  • FIG. 3B shows a step of forming a functional layer on the resin film
  • FIG. 3C shows a step of forming a transparent conductive layer on the functional layer.
  • the transparent conductive film shown in FIG. 1 the case where the transparent conductive layer is patterned is shown.
  • an amorphous transparent conductive layer is converted into a crystalline transparent conductive layer. It is a graph which shows the relationship between the amount of oxygen introduction at the time of forming a transparent conductive layer by a sputtering method, and the specific resistance of the formed transparent conductive layer.
  • FIG. 1 is a schematic cross-sectional view of a transparent conductive film X, which is an embodiment of the transparent conductive film of the present invention.
  • the transparent conductive film X includes a transparent resin base material 10 and a transparent conductive layer 20 in this order toward one side in the thickness direction H.
  • the transparent conductive film X, the transparent resin base material 10, and the transparent conductive layer 20 each have a shape that spreads in a direction (plane direction) orthogonal to the thickness direction H.
  • the transmissive conductive film X is an element provided in a touch sensor, a dimming element, a photoelectric conversion element, a heat ray control member, an antenna member, an electromagnetic wave shielding member, a heater member, a lighting device, an image display device, and the like.
  • the transparent resin base material 10 includes the resin film 11 and the functional layer 12 in this order toward one side in the thickness direction H.
  • the resin film 11 is a transparent resin film having flexibility.
  • the material of the resin film 11 include polyester resin, polyolefin resin, acrylic resin, polycarbonate resin, polyether sulfone resin, polyarylate resin, melamine resin, polyamide resin, polyimide resin, cellulose resin, and polystyrene resin.
  • the polyester resin include polyethylene terephthalate (PET), polybutylene terephthalate, and polyethylene naphthalate.
  • PET polyethylene terephthalate
  • Polyolefin resins include, for example, polyethylene, polypropylene, and cycloolefin polymers (COPs).
  • the acrylic resin include polymethacrylate.
  • As the material of the resin film 11 at least one selected from the group consisting of polyester resin and polyolefin resin is preferably used from the viewpoint of transparency and strength, and more preferably selected from the group consisting of COP and PET. At least one is used.
  • the surface of the resin film 11 on the functional layer 12 side may be surface-modified.
  • Examples of the surface modification treatment include corona treatment, plasma treatment, ozone treatment, primer treatment, glow treatment, and coupling agent treatment.
  • the thickness of the resin film 11 is preferably 1 ⁇ m or more, more preferably 10 ⁇ m or more, and further preferably 30 ⁇ m or more.
  • the thickness of the resin film 11 is preferably 300 ⁇ m or less, more preferably 200 ⁇ m or less, still more preferably 100 ⁇ m or less, and particularly preferably 75 ⁇ m or less.
  • the total light transmittance (JIS K 7375-2008) of the resin film 11 is preferably 60% or more, more preferably 80% or more, still more preferably 85% or more.
  • Such a configuration is when the transparent conductive film X is provided in a touch sensor, a dimming element, a photoelectric conversion element, a heat ray control member, an antenna member, an electromagnetic wave shielding member, a heater member, a lighting device, an image display device, and the like. It is suitable for ensuring the transparency required for the transparent conductive film X.
  • the total light transmittance of the resin film 11 is, for example, 100% or less.
  • the functional layer 12 is located on one surface of the resin film 11 in the thickness direction H. Further, in the present embodiment, the functional layer 12 is a hard coat layer for preventing scratches from being formed on the exposed surface (upper surface in FIG. 1) of the transparent conductive layer 20.
  • the hard coat layer is a cured product of a curable resin composition.
  • the resin contained in the curable resin composition include polyester resin, acrylic resin, urethane resin, amide resin, silicone resin, epoxy resin, and melamine resin.
  • the curable resin composition include an ultraviolet curable resin composition and a thermosetting resin composition.
  • an ultraviolet curable resin composition is preferably used from the viewpoint of helping to improve the production efficiency of the transparent conductive film X because it can be cured without heating at a high temperature.
  • Specific examples of the ultraviolet curable resin composition include the composition for forming a hard coat layer described in JP-A-2016-179686.
  • the curable resin composition may contain fine particles.
  • the formulation of the fine particles in the curable resin composition is useful for adjusting the hardness, the surface roughness, and the refractive index of the functional layer 12.
  • Examples of the fine particles include metal oxide particles, glass particles, and organic particles.
  • Materials for the metal oxide particles include, for example, silica, alumina, titania, zirconia, calcium oxide, tin oxide, indium oxide, cadmium oxide, and antimony oxide.
  • Materials for organic particles include, for example, polymethylmethacrylate, polystyrene, polyurethane, acrylic-styrene copolymers, benzoguanamines, melamines, and polycarbonates.
  • the blending of fine particles in the curable resin composition is useful for adjusting the hardness, surface roughness, and refractive index of the functional layer 12.
  • the thickness of the functional layer 12 as the hard coat layer is preferably 0.1 ⁇ m or more, more preferably 0.3 ⁇ m or more, and further preferably 0.5 ⁇ m or more. Such a configuration is suitable for exhibiting sufficient scratch resistance in the transparent conductive layer 20.
  • the thickness of the functional layer 12 as the hard coat layer is preferably 10 ⁇ m or less, more preferably 5 ⁇ m or less, still more preferably 3 ⁇ m or less, from the viewpoint of ensuring the transparency of the functional layer 12.
  • the surface of the functional layer 12 on the transparent conductive layer 20 side may be surface-modified.
  • Examples of the surface modification treatment include corona treatment, plasma treatment, ozone treatment, primer treatment, glow treatment, and coupling agent treatment.
  • the thickness of the transparent resin base material 10 is preferably 1 ⁇ m or more, more preferably 10 ⁇ m or more, still more preferably 15 ⁇ m or more, and particularly preferably 30 ⁇ m or more.
  • the thickness of the transparent resin base material 10 is preferably 310 ⁇ m or less, more preferably 210 ⁇ m or less, still more preferably 110 ⁇ m or less, and particularly preferably 80 ⁇ m or less.
  • the total light transmittance (JIS K 7375-2008) of the transparent resin base material 10 is preferably 60% or more, more preferably 80% or more, still more preferably 85% or more.
  • Such a configuration is when the transparent conductive film X is provided in a touch sensor, a dimming element, a photoelectric conversion element, a heat ray control member, an antenna member, an electromagnetic wave shielding member, a heater member, a lighting device, an image display device, and the like. It is suitable for ensuring the transparency required for the transparent conductive film X.
  • the total light transmittance of the transparent resin base material 10 is, for example, 100% or less.
  • the transparent conductive layer 20 is located on one surface of the transparent resin base material 10 in the thickness direction H.
  • the transparent conductive layer 20 is an amorphous film having both light transmittance and conductivity.
  • the amorphous transparent conductive layer 20 is converted into a crystalline transparent conductive layer (transparent conductive layer 20'described later) by heating, and the specific resistance is lowered.
  • the transparent conductive layer 20 is a layer formed of a light-transmitting conductive material.
  • the light-transmitting conductive material contains, for example, a conductive oxide as a main component.
  • the conductive oxide for example, at least one kind of metal selected from the group consisting of In, Sn, Zn, Ga, Sb, Ti, Si, Zr, Mg, Al, Au, Ag, Cu, Pd and W.
  • a metal oxide containing a metalloid may be mentioned.
  • the conductive oxide include an indium-containing conductive oxide and an antimony-containing conductive oxide.
  • the indium-containing conductive oxide include indium tin oxide composite oxide (ITO), indium zinc composite oxide (IZO), indium gallium composite oxide (IGO), and indium gallium zinc composite oxide (IGZO). Be done.
  • the antimony-containing conductive oxide include antimony tin composite oxide (ATO).
  • an indium-containing conductive oxide is preferably used, and more preferably ITO is used as the conductive oxide.
  • the ITO may contain a metal or a semimetal other than In and Sn in an amount smaller than the respective contents of In and Sn.
  • the ratio of the tin oxide content to the total content of indium (In 2 O 3 ) and tin oxide (SnO 2 ) in the ITO is preferably 0.1% by mass. As mentioned above, it is more preferably 3% by mass or more, further preferably 5% by mass or more, and particularly preferably 7% by mass or more.
  • the ratio of the number of tin atoms to the number of indium atoms in ITO is preferably 0.001 or more, more preferably 0.03 or more, still more preferably 0.05 or more, and particularly preferably 0. It is 07 or more.
  • the ratio of the tin oxide content to the total content of indium oxide (In 2 O 3 ) and tin oxide (SnO 2 ) in ITO is preferably 15% by mass or less, more preferably 13% by mass or less, still more preferable. Is 12% by mass or less.
  • the ratio of the number of tin atoms to the number of indium atoms in ITO is preferably 0.16 or less, more preferably 0.14 or less, still more preferably 0.13 or less.
  • the ratio of the number of tin atoms to the number of indium atoms in ITO can be obtained, for example, by specifying the abundance ratio of indium atoms and tin atoms in the object to be measured by X-ray Photoelectron Spectroscopy.
  • the above-mentioned content ratio of tin oxide in ITO is obtained from, for example, the abundance ratio of the indium atom and the tin atom thus specified.
  • the above-mentioned content ratio of tin oxide in ITO may be judged from the tin oxide (SnO 2 ) content ratio of the ITO target used at the time of sputtering film formation.
  • the transparent conductive layer 20 may contain a rare gas atom.
  • Rare gas atoms include, for example, argon (Ar), krypton (Kr), and xenon (Xe).
  • the rare gas atom in the transparent conductive layer 20 is derived from the rare gas atom used as the sputtering gas in the sputtering method described later for forming the transparent conductive layer 20.
  • the transparent conductive layer 20 is a film (sputtered film) formed by a sputtering method.
  • the rare gas atom is preferably Kr.
  • the amorphous transparent conductive layer 20 is crystallized by heating to form a crystalline transparent conductive layer 20', good crystal growth is realized and large crystal grains are formed. Suitable and therefore suitable for obtaining a low resistance transparent conductive layer 20'(the larger the crystal grains in the transparent conductive layer 20', the lower the resistance of the transparent conductive layer 20').
  • the content ratio of the rare gas atom (including Kr) in the transparent conductive layer 20 is preferably 1 atom% or less, more preferably 0.5 atom% or less, still more preferably 0.3 atom in the entire thickness direction H. % Or less, particularly preferably 0.2 atomic% or less.
  • the noble gas atom content ratio in the transparent conductive layer 20 is preferably 0.0001 atomic% or more in the entire area in the thickness direction H.
  • the transparent conductive layer 20 may include a region having a rare gas atom content of less than 0.0001 atomic% in at least a part of the thickness direction H (that is, in a part of the thickness direction H, the thickness direction).
  • the abundance ratio of rare gas atoms in the cross section in the plane direction orthogonal to H may be less than 0.0001 atomic%).
  • the presence or absence of rare gas atoms in the transparent conductive layer 20 can be identified by, for example, fluorescent X-ray analysis.
  • the content ratio of Kr in the transparent conductive layer 20 may be non-uniform in the thickness direction H.
  • the Kr content ratio may be gradually increased or decreased as the distance from the transparent resin base material 10 increases.
  • the partial region where the Kr content ratio gradually increases as the distance from the transparent resin base material 10 increases is located on the transparent resin base material 10 side, and the Kr content ratio gradually decreases as the distance from the transparent resin base material 10 increases.
  • the partial region may be located on the opposite side of the transparent resin base material 10.
  • the partial region where the Kr content ratio gradually decreases as the distance from the transparent resin base material 10 increases is located on the transparent resin base material 10 side, and the Kr content ratio gradually increases as the distance from the transparent resin base material 10 increases.
  • the partial region may be located on the opposite side of the transparent resin base material 10.
  • the transparent conductive layer 20 may contain Kr in a part of the region in the thickness direction H.
  • FIG. 2A shows a case where the transparent conductive layer 20 includes the first region 21 and the second region 22 in this order from the transparent resin base material 10 side.
  • the first region 21 contains Kr.
  • the second region 22 does not contain Kr, for example, contains a noble gas atom other than Kr.
  • Ar is preferably mentioned.
  • FIG. 2B shows a case where the transparent conductive layer 20 includes the second region 22 and the first region 21 in this order from the transparent resin base material 10 side.
  • the boundary between the first region 21 and the second region 22 is drawn by a virtual line.
  • the transparent conductive layer 20 has a first region 21 (Kr-containing region) and a second region 22 (Kr-free region). ) Is included in this order from the transparent resin base material 10 side.
  • the ratio of the thickness of the first region 21 to the total thickness of the first region 21 and the second region 22 is preferably 10% or more. It is more preferably 20% or more, further preferably 30% or more, and particularly preferably 40% or more. The same ratio is less than 100%.
  • the ratio of the thickness of the second region 22 to the total thickness of the first region 21 and the second region 22 is preferably 90% or less, more preferably 80% or less, still more preferably 70% or less, and particularly preferably. Is 60% or less.
  • the content ratio of Kr in the first region 21 is the entire area of the first region 21 in the thickness direction H. It is preferably 1 atomic% or less, more preferably 0.5 atomic% or less, still more preferably 0.3 atomic% or less, and particularly preferably 0.2 atomic% or less. Such a configuration is preferable from the viewpoint of reducing the resistance of the transparent conductive layer 20 ′ obtained by crystallizing the transparent conductive layer 20. Further, the content ratio of Kr in the first region 21 is, for example, 0.0001 atomic% or more in the entire area of the thickness direction H of the first region 21.
  • the content ratio of Kr in the first region 21 may be non-uniform in the thickness direction H of the first region 21.
  • the Kr content ratio may be gradually increased or decreased as the distance from the transparent resin base material 10 increases.
  • the partial region where the Kr content ratio gradually increases as the distance from the transparent resin base material 10 increases is located on the transparent resin base material 10 side, and the distance from the transparent resin base material 10 increases.
  • the partial region where the Kr content ratio gradually decreases may be located on the opposite side of the transparent resin base material 10.
  • the partial region where the Kr content ratio gradually decreases as the distance from the transparent resin base material 10 increases is located on the transparent resin base material 10 side, and the distance from the transparent resin base material 10 increases.
  • the partial region where the Kr content ratio gradually increases may be located on the opposite side of the transparent resin base material 10.
  • the thickness of the transparent conductive layer 20 is preferably 10 nm or more, more preferably 20 nm or more, and further preferably 25 nm or more. Such a configuration is preferable from the viewpoint of reducing the resistance of the transparent conductive layer 20 ′ obtained by crystallizing the transparent conductive layer 20.
  • the thickness of the transparent conductive layer 20 is, for example, 1000 nm or less, preferably less than 300 nm, more preferably 250 nm or less, still more preferably 200 nm or less, still more preferably 160 nm or less, particularly preferably less than 150 nm, and most preferably. It is 148 nm or less. Such a configuration is suitable for suppressing warpage in the transparent conductive film X provided with the transparent conductive layer 20 ′ obtained by crystallizing the transparent conductive layer 20.
  • the specific resistance of the transparent conductive layer 20 is preferably 4 ⁇ 10 -4 ⁇ ⁇ cm or more, more preferably 4.5 ⁇ 10 -4 ⁇ ⁇ cm or more, still more preferably 5 ⁇ 10 -4 ⁇ ⁇ cm or more, and one layer. It is preferably 5.5 ⁇ 10 -4 ⁇ ⁇ cm or more, and particularly preferably 5.8 ⁇ 10 -4 ⁇ ⁇ cm or more.
  • the specific resistance of the transparent conductive layer 20 is preferably 20 ⁇ 10 -4 ⁇ ⁇ cm or less, more preferably 15 ⁇ 10 -4 ⁇ ⁇ cm or less, still more preferably 10 ⁇ 10 -4 ⁇ ⁇ cm or less, and particularly preferably. It is 8 ⁇ 10 -4 ⁇ ⁇ cm or less.
  • the specific resistance is obtained by multiplying the surface resistance by the thickness.
  • the resistivity can be controlled by, for example, adjusting various conditions when the transparent conductive layer 20 is sputter-deposited.
  • the conditions include, for example, the temperature of the substrate (transparent resin base material 10 in this embodiment) on which the transparent conductive layer 20 is formed, the amount of oxygen introduced into the film forming chamber, the atmospheric pressure in the film forming chamber, and the target.
  • the specific resistance of the transparent conductive layer 20 after heat treatment at 165 ° C. for 60 minutes is preferably 3 ⁇ 10 -4 ⁇ ⁇ cm or less, more preferably 2.8 ⁇ 10 -4 ⁇ ⁇ cm or less, still more preferably. It is 2.5 ⁇ 10 -4 ⁇ ⁇ cm or less, more preferably 2.2 ⁇ 10 -4 ⁇ ⁇ cm or less, and particularly preferably 2.0 ⁇ 10 -4 ⁇ ⁇ cm or less.
  • the specific resistance of the transparent conductive layer 20 after heat treatment at 165 ° C. for 60 minutes is preferably 0.1 ⁇ 10 -4 ⁇ ⁇ cm or more, more preferably 0.5 ⁇ 10 -4 ⁇ ⁇ cm or more.
  • the transparent conductive layer in touch sensors, dimming elements, photoelectric conversion elements, heat ray control members, antenna members, electromagnetic wave shield members, heater members, lighting devices, image display devices, and the like. Suitable for.
  • the total light transmittance (JIS K 7375-2008) of the transparent conductive layer 20 is preferably 60% or more, more preferably 80% or more, still more preferably 85% or more.
  • Such a configuration is when the transparent conductive film X is provided in a touch sensor, a dimming element, a photoelectric conversion element, a heat ray control member, an antenna member, an electromagnetic wave shielding member, a heater member, a lighting device, an image display device, and the like. It is suitable for ensuring the transparency required for the transparent conductive film X.
  • the total light transmittance of the transparent conductive layer 20 is, for example, 100% or less.
  • the transparent conductive layer is amorphous, for example, as follows. First, the transparent conductive layer (in the transparent conductive film X, the transparent conductive layer 20 on the transparent resin base material 10) is immersed in hydrochloric acid having a concentration of 5% by mass at 20 ° C. for 15 minutes. Next, the transparent conductive layer is washed with water and then dried. Next, on the exposed plane of the transparent conductive layer (in the transparent conductive film X, the surface of the transparent conductive layer 20 opposite to the transparent resin base material 10), the resistance between the pair of terminals having a separation distance of 15 mm (between terminals). Resistance) is measured. In this measurement, when the resistance between terminals exceeds 10 k ⁇ , the transparent conductive layer is amorphous.
  • the direction in which the transparent conductive film X shrinks most when subjected to heat treatment under heating conditions of 165 ° C. and 60 minutes is defined as the first direction.
  • the heat shrinkage rate of the transparent conductive film X in the first direction is preferably 1% or less from the viewpoint of suppressing the warp of the transparent conductive film X and from the viewpoint of suppressing the generation of cracks in the transparent conductive layer 20. It is preferably 0.8% or less, more preferably 0.7% or less, and particularly preferably 0.6% or less.
  • the heat shrinkage rate is, for example, 0% or more.
  • the direction orthogonal to each of the first direction and the thickness direction H when the transparent conductive film X has undergone the above heat treatment is defined as the second direction.
  • the heat shrinkage rate (first heat shrinkage rate T1) of the transparent conductive film X in the second direction is from the viewpoint of suppressing the warp of the transparent conductive film X and from the viewpoint of suppressing the generation of cracks in the transparent conductive layer 20. It is preferably 1% or less, more preferably 0.8% or less, still more preferably 0.7% or less, and particularly preferably 0.6% or less.
  • the heat shrinkage rate is, for example, 0% or more, preferably 0.0% or more.
  • the heat shrinkage rate of the transparent conductive film X is measured by measuring the dimensional change of the transparent conductive film X after sequentially undergoing heat treatment and standing at room temperature for, for example, 30 minutes. (The heat shrinkage of the transparent resin base material 10 is also obtained). Further, the first direction in which the heat shrinkage rate of the transparent conductive film X is maximum is, for example, in increments of 15 ° from the reference axis with the axis extending in an arbitrary direction in the transparent conductive film X as the reference axis (0 °). It is obtained by measuring the dimensional change rate before and after the heat treatment in the axial direction of.
  • the first direction is, for example, the MD direction for the transparent conductive film X (that is, the film running direction in the manufacturing process described later in the roll-to-roll method).
  • the second direction is the TD direction orthogonal to each of the MD direction and the thickness direction H.
  • the heat shrinkage rate of the transparent resin base material 10 in the first direction is that the warpage of the transparent resin base material 10 is suppressed. From the viewpoint and from the viewpoint of suppressing the generation of cracks in the transparent conductive layer 20, it is preferably 1% or less, more preferably 0.8% or less, still more preferably 0.7% or less, and particularly preferably 0.6% or less. Is. Further, the heat shrinkage rate (second heat shrinkage rate T2) of the transparent resin base material 10 in the second direction when the transparent resin base material 10 is subjected to the heat treatment is the suppression of warpage of the transparent conductive film X.
  • the heat shrinkage rate is, for example, 0% or more, preferably 0.0% or more.
  • the first heat shrinkage rate T1 of the transparent conductive film X and the second heat shrinkage rate T2 of the transparent resin base material 10 satisfy
  • the transparent conductive film X is manufactured as follows, for example.
  • the resin film 11 is prepared.
  • the functional layer 12 is formed on one surface of the resin film 11 in the thickness direction H.
  • the transparent resin base material 10 is produced by forming the functional layer 12 on the resin film 11.
  • the above-mentioned functional layer 12 as a hard coat layer can be formed by applying a curable resin composition on a resin film 11 to form a coating film, and then curing the coating film.
  • the curable resin composition contains an ultraviolet-type resin
  • the coating film is cured by irradiation with ultraviolet rays.
  • the curable resin composition contains a thermosetting resin
  • the coating film is cured by heating.
  • the exposed surface of the functional layer 12 formed on the resin film 11 is surface-modified, if necessary.
  • plasma treatment for example, argon gas is used as the inert gas.
  • the discharge power in the plasma processing is, for example, 10 W or more, and for example, 5000 W or less.
  • the transparent conductive layer 20 is formed on the transparent resin base material 10. Specifically, a material is formed on the functional layer 12 of the transparent resin base material 10 by a sputtering method to form the transparent conductive layer 20.
  • a sputtering film forming apparatus capable of carrying out the film forming process by the roll-to-roll method.
  • the long transparent resin base material 10 is run from the feeding roll to the winding roll provided in the apparatus to be transparent.
  • a material is formed on the resin base material 10 to form a transparent conductive layer 20.
  • a sputtering film forming apparatus provided with one film forming chamber may be used, or sputtering forming provided with a plurality of film forming chambers sequentially arranged along a traveling path of the transparent resin base material 10.
  • a film device may be used (when the transparent conductive layer 20 including the first region 21 and the second region 22 described above is formed, a sputtering film forming apparatus provided with a plurality of film forming chambers is used).
  • a sputtering gas in the sputtering method, specifically, while introducing a sputtering gas (inert gas) into the film forming chamber provided in the sputtering film forming apparatus under vacuum conditions, a negative voltage is applied to the target arranged on the cathode in the film forming chamber. Is applied. As a result, a glow discharge is generated to ionize the gas atom, the gas ion collides with the target surface at high speed, the target material is ejected from the target surface, and the ejected target material is used as the functional layer 12 in the transparent resin base material 10. Deposit on top.
  • a sputtering gas in the film forming chamber provided in the sputtering film forming apparatus under vacuum conditions
  • the above-mentioned conductive oxide for forming the transparent conductive layer 20 is used, and ITO is preferably used.
  • the ratio of the tin oxide content to the total content of tin oxide and indium oxide in ITO is preferably 0.1% by mass or more, more preferably 1% by mass or more, still more preferably 3% by mass or more, still more preferably 5. It is by mass or more, particularly preferably 7% by mass or more, preferably 15% by mass or less, more preferably 13% by mass or less, still more preferably 12% by mass or less.
  • the sputtering method is preferably a reactive sputtering method.
  • a reactive gas is introduced into the film forming chamber in addition to the sputtering gas.
  • the gas introduced into one or more film forming chambers provided in the sputtering film forming apparatus is sputtering. It contains Kr as a gas and oxygen as a reactive gas.
  • the sputtering gas may contain an inert gas other than Kr. Examples of the inert gas other than Kr include rare gas atoms other than Kr. Examples of the noble gas atom include Ar and Xe.
  • the content ratio is preferably 80% by volume or less, more preferably 50% by volume or less.
  • the gas introduced into the film forming chamber for forming the first region 21 is a sputtering gas.
  • oxygen as a reactive gas.
  • the sputtering gas may contain an inert gas other than Kr.
  • the type and content ratio of the inert gas other than Kr are the same as those described above for the inert gas other than Kr in the first case.
  • the gas introduced into the film forming chamber for forming the second region 22 contains an inert gas other than Kr as a sputtering gas and oxygen as a reactive gas.
  • the inert gas other than Kr include the above-mentioned inert gas as the inert gas other than Kr in the first case.
  • the ratio of the amount of oxygen introduced to the total amount of sputtering gas and oxygen introduced into the film forming chamber in the reactive sputtering method is, for example, 0.01 flow rate% or more, and for example, 15 flow rate% or less.
  • the air pressure in the film formation chamber during film formation (sputter film formation) by the sputtering method is, for example, 0.02 Pa or more, and for example, 1 Pa or less.
  • the temperature of the transparent resin base material 10 during the sputtering film formation is, for example, 100 ° C. or lower, preferably 50 ° C. or lower, more preferably 30 ° C. or lower, still more preferably 10 ° C. or lower, particularly preferably 0 ° C. or lower, and also.
  • it is ⁇ 50 ° C. or higher, preferably ⁇ 20 ° C. or higher, more preferably ⁇ 10 ° C. or higher, still more preferably ⁇ 7 ° C. or higher.
  • Examples of the power supply for applying a voltage to the target include a DC power supply, an AC power supply, an MF power supply, and an RF power supply.
  • a DC power source and an RF power source may be used in combination.
  • the absolute value of the discharge voltage during the sputtering film formation is, for example, 50 V or more, and is, for example, 500 V or less, preferably 400 V or less.
  • the transparent conductive film X can be manufactured as described above.
  • the transparent conductive layer 20 in the transparent conductive film X may be patterned as schematically shown in FIG.
  • the transparent conductive layer 20 can be patterned by etching the transparent conductive layer 20 through a predetermined etching mask.
  • the patterned transparent conductive layer 20 functions as, for example, a wiring pattern.
  • the transparent conductive layer 20 in the transparent conductive film X is converted into a crystalline transparent conductive layer 20'(shown in FIG. 5) by heating.
  • the heating means include an infrared heater and an oven (heat medium heating type oven, hot air heating type oven).
  • the heating environment may be either a vacuum environment or an atmospheric environment.
  • heating is carried out in the presence of oxygen.
  • the heating temperature is, for example, 100 ° C. or higher, preferably 120 ° C. or higher, from the viewpoint of ensuring a high crystallization rate.
  • the heating temperature is, for example, 200 ° C. or lower, preferably 180 ° C. or lower, more preferably 170 ° C. or lower, still more preferably 165 ° C.
  • the heating time is, for example, less than 600 minutes, preferably less than 120 minutes, more preferably 90 minutes or less, still more preferably 60 minutes or less, and for example, 1 minute or more, preferably 5 minutes or more.
  • the above-mentioned patterning of the transparent conductive layer 20 may be performed before heating for crystallization or after heating for crystallization.
  • the specific resistance of the transparent conductive layer 20' is preferably 3 ⁇ 10 -4 ⁇ ⁇ cm or less, more preferably 2.8 ⁇ 10 -4 ⁇ ⁇ cm or less, and further preferably 2.5 ⁇ 10 -4 ⁇ ⁇ cm. Below, it is more preferably 2.2 ⁇ 10 -4 ⁇ ⁇ cm or less, and particularly preferably 2.0 ⁇ 10 -4 ⁇ ⁇ cm or less.
  • the specific resistance of the transparent conductive layer 20' is preferably 0.1 ⁇ 10 -4 ⁇ ⁇ cm or more, more preferably 0.5 ⁇ 10 -4 ⁇ ⁇ cm or more, and further preferably 1.0 ⁇ 10 ⁇ . It is 4 ⁇ ⁇ cm or more.
  • the total light transmittance (JIS K 7375-2008) of the transparent conductive layer 20' is preferably 65% or more, more preferably 80% or more, still more preferably 85% or more. Further, the total light transmittance of the transparent conductive layer 20 is, for example, 100% or less.
  • the transparent conductive layer 20 is amorphous, and the first heat shrinkage rate T1 of the transparent conductive film X and the second heat shrinkage of the transparent resin base material 10
  • the rate T2 satisfies
  • Such a transparent conductive film X is suitable for obtaining a transparent conductive film provided with a crystalline transparent conductive layer in which the generation of cracks is suppressed.
  • the functional layer 12 is for realizing high adhesion of the transparent conductive layer 20 (the transparent conductive layer 20'after the crystallization of the transparent conductive layer 20; the same applies hereinafter) to the transparent resin base material 10. It may be an adhesion improving layer.
  • the configuration in which the functional layer 12 is an adhesion improving layer is suitable for ensuring the adhesion between the transparent resin base material 10 and the transparent conductive layer 20.
  • the functional layer 12 may be a refractive index adjusting layer (index-matching layer) for adjusting the reflectance of the surface (one surface of the thickness direction H) of the transparent resin base material 10.
  • the configuration in which the functional layer 12 is the refractive index adjusting layer is suitable for making it difficult to visually recognize the pattern shape of the transparent conductive layer 20 when the transparent conductive layer 20 on the transparent resin base material 10 is patterned.
  • the functional layer 12 may be a peeling functional layer for practically peeling the transparent conductive layer 20 from the transparent resin base material 10.
  • the configuration in which the functional layer 12 is a peeling functional layer is suitable for peeling the transparent conductive layer 20 from the transparent resin base material 10 and transferring the transparent conductive layer 20 to another member.
  • the functional layer 12 may be a composite layer in which a plurality of layers are connected in the thickness direction H.
  • the composite layer preferably includes two or more layers selected from the group consisting of a hard coat layer, an adhesion improving layer, a refractive index adjusting layer, and a peeling functional layer. Such a configuration is suitable for complex expression of the above-mentioned functions of each selected layer in the functional layer 12.
  • the functional layer 12 includes an adhesion improving layer, a hard coat layer, and a refractive index adjusting layer on the resin film 11 in this order toward one side in the thickness direction H.
  • the functional layer 12 includes a peeling functional layer, a hard coat layer, and a refractive index adjusting layer on the resin film 11 in this order toward one side in the thickness direction H. Further, in the transparent conductive film X, the functional layer 12 may not be provided. That is, the transparent conductive film X may include the above-mentioned resin film 11 as the transparent resin base material 10.
  • the transparent conductive film X is used in a state where it is fixed to an article and the transparent conductive layer 20'is patterned as needed.
  • the transparent conductive film X is attached to the article via, for example, a fixing functional layer.
  • Examples of articles include elements, members, and devices. That is, examples of the article with a transparent conductive film include an element with a transparent conductive film, a member with a transparent conductive film, and a device with a transparent conductive film.
  • Examples of the element include a dimming element and a photoelectric conversion element.
  • Examples of the dimming element include a current-driven dimming element and an electric field-driven dimming element.
  • Examples of the current-driven dimming element include an electrochromic (EC) dimming element.
  • Examples of the electric field drive type dimming element include a PDLC (polymer dispersed liquid crystal) dimming element, a PNLC (polymer network liquid crystal) dimming element, and an SPD (suspended particle device) dimming element.
  • Examples of the photoelectric conversion element include a solar cell and the like.
  • Examples of the solar cell include an organic thin-film solar cell and a dye-sensitized solar cell.
  • Examples of the member include an electromagnetic wave shield member, a heat ray control member, a heater member, and an antenna member.
  • Examples of the device include a touch sensor device, a lighting device, and an image display device.
  • the fixing functional layer examples include an adhesive layer and an adhesive layer.
  • the material of the fixing function layer any material having transparency and exhibiting the fixing function can be used without particular limitation.
  • the fixing functional layer is preferably formed of a resin.
  • the resin include acrylic resin, silicone resin, polyester resin, polyurethane resin, polyamide resin, polyvinyl ether resin, vinyl acetate / vinyl chloride copolymer, modified polyolefin resin, epoxy resin, fluororesin, natural rubber, and synthetic rubber. Be done.
  • Acrylic resin is preferable as the resin because it exhibits adhesive properties such as cohesiveness, adhesiveness, and appropriate wettability, is excellent in transparency, and is excellent in weather resistance and heat resistance.
  • a corrosion inhibitor may be added to the fixing functional layer (resin forming the fixing functional layer) in order to suppress corrosion of the transparent conductive layer 20'.
  • a migration inhibitor (for example, a material disclosed in Japanese Patent Application Laid-Open No. 2015-0222397) may be added to the fixing functional layer (resin forming the fixing functional layer) in order to suppress migration of the transparent conductive layer 20'. ..
  • the fixing functional layer (resin forming the fixing functional layer) may be mixed with an ultraviolet absorber in order to suppress deterioration of the article when it is used outdoors. Examples of the ultraviolet absorber include benzophenone compounds, benzotriazole compounds, salicylic acid compounds, oxalic acid anilide compounds, cyanoacrylate compounds, and triazine compounds.
  • the transparent conductive film X when the transparent base material 10 of the transparent conductive film X is fixed to the article via the fixing functional layer, the transparent conductive film X includes the transparent conductive layer 20'(the transparent conductive layer 20' after patterning). ) Is exposed.
  • the cover layer may be arranged on the exposed surface of the transparent conductive layer 20'.
  • the cover layer is a layer that covers the transparent conductive layer 20', and can improve the reliability of the transparent conductive layer 20'and suppress functional deterioration due to damage to the transparent conductive layer 20'.
  • Such a cover layer is preferably formed of a dielectric material, more preferably of a composite material of a resin and an inorganic material. Examples of the resin include the above-mentioned resins for the fixing functional layer.
  • Examples of the inorganic material include inorganic oxides and fluorides.
  • Examples of the inorganic oxide include silicon oxide, titanium oxide, niobium oxide, aluminum oxide, zirconium dioxide, and calcium oxide.
  • Examples of the fluoride include magnesium fluoride.
  • the above-mentioned corrosion inhibitor, migration inhibitor, and ultraviolet absorber may be blended in the cover layer (mixture of resin and inorganic material).
  • the present invention will be specifically described below with reference to examples.
  • the present invention is not limited to the examples.
  • the specific numerical values such as the compounding amount (content), the physical property value, the parameter, etc. described below are the compounding amounts corresponding to them described in the above-mentioned "form for carrying out the invention” (forms for carrying out the invention). It can be replaced with an upper limit (numerical value defined as “less than or equal to” or “less than”) or a lower limit (numerical value defined as "greater than or equal to” or “greater than or equal to”) such as content), physical property value, and parameter.
  • Example 1 An ultraviolet curable resin containing an acrylic resin was applied to one surface of a long polyethylene terephthalate (PET) film (thickness 50 ⁇ m, manufactured by Toray Industries, Inc.) as a transparent resin film to form a coating film. Next, the coating film was cured by irradiation with ultraviolet rays to form a hard coat layer (thickness 2 ⁇ m). In this way, a transparent resin base material having a resin film and a hard coat layer as a functional layer was produced.
  • PET polyethylene terephthalate
  • an amorphous transparent conductive layer having a thickness of 130 nm was formed on the hard coat layer of the transparent resin base material by the reactive sputtering method.
  • a sputter film forming apparatus DC magnetron sputtering apparatus capable of carrying out a film forming process by a roll-to-roll method was used.
  • the conditions for sputter film formation in this embodiment are as follows.
  • a sintered body of indium oxide and tin oxide (tin oxide concentration was 10% by mass) was used.
  • a DC power supply was used as the power supply for applying the voltage to the target (horizontal magnetic field strength on the target is 90 mT).
  • the film formation temperature (the temperature of the transparent resin base material on which the transparent conductive layer is laminated) was set to ⁇ 5 ° C. Further, after the film forming chamber is evacuated until the ultimate vacuum degree in the film forming chamber of the apparatus reaches 0.9 ⁇ 10 -4 Pa, Kr as a sputtering gas and a reactive gas in the film forming chamber are used. Oxygen was introduced and the air pressure in the film forming chamber was set to 0.2 Pa.
  • the ratio of the oxygen introduction amount to the total introduction amount of Kr and oxygen introduced into the film forming chamber is about 2.6 flow rate%, and the oxygen introduction amount is the specific resistance-oxygen introduction amount curve as shown in FIG.
  • the value of the specific resistance of the formed ITO film was adjusted to be 6.7 ⁇ 10 -4 ⁇ ⁇ cm within the region R of.
  • the resistivity-oxygen introduction amount curve shown in FIG. 6 depends on the oxygen introduction amount of the specific resistance of the transparent conductive layer when the transparent conductive layer is formed by the reactive sputtering method under the same conditions as above except for the oxygen introduction amount. Gender can be investigated and created in advance.
  • the transparent conductive layer (thickness 130 nm, amorphous) of the transparent conductive film of Example 1 is composed of a single Kr-containing ITO layer.
  • Example 2 Except for the following, the transparent conductive film of Example 2 was produced in the same manner as the transparent conductive film of Example 1.
  • the air pressure in the film formation chamber is set to 0.2 Pa, and the amount of oxygen introduced into the film formation chamber is set so that the value of the specific resistance of the formed ITO film is 6.0 ⁇ 10 -4 ⁇ ⁇ cm.
  • an amorphous transparent conductive layer having a thickness of 25 nm.
  • the transparent conductive layer (thickness 25 nm, amorphous) of the transparent conductive film of Example 2 is composed of a single Kr-containing ITO layer.
  • Example 3 In the formation of the transparent conductive layer, the first sputter film formation in which the first region (thickness 26 nm) of the transparent conductive layer is formed on the transparent resin base material and the second region (thickness) of the transparent conductive layer on the first region.
  • the transparent conductive film of Example 3 was produced in the same manner as the transparent conductive film of Example 1 except that the second sputter film formation for forming (104 nm) was sequentially carried out.
  • the conditions for the first sputter film formation in this embodiment are as follows.
  • a target a sintered body of indium oxide and tin oxide (tin oxide concentration was 10% by mass) was used.
  • a DC power supply was used as the power supply for applying the voltage to the target (horizontal magnetic field strength on the target is 90 mT).
  • the film formation temperature was ⁇ 5 ° C.
  • Kr as a sputtering gas and oxygen as a reactive gas were introduced into the film forming chamber.
  • the air pressure in the film forming chamber was set to 0.2 Pa.
  • the amount of oxygen introduced into the film forming chamber was adjusted so that the value of the specific resistance of the formed ITO film was 6.5 ⁇ 10 -4 ⁇ ⁇ cm.
  • the conditions for the second sputter film formation in this embodiment are as follows. After setting the ultimate vacuum degree in the second film forming chamber of the device to 0.9 ⁇ 10 -4 Pa, Ar as a sputtering gas and oxygen as a reactive gas are introduced into the film forming chamber to form a film. The air pressure in the room was set to 0.4 Pa. In this embodiment, the other conditions in the second sputter film formation are the same as those in the first sputter film formation.
  • the transparent conductive layer (thickness 130 nm, amorphous) of the transparent conductive film of Example 3 has a first region (thickness 26 nm) made of a Kr-containing ITO layer and a second region (thickness) made of an Ar-containing ITO layer. It has a thickness of 104 nm in order from the transparent resin base material side (the ratio of the thickness of the first region to the thickness of the transparent conductive layer is 20%, and the ratio of the thickness of the second region is 80%. be).
  • Example 4 Except for the following, the transparent conductive film of Example 4 was produced in the same manner as the transparent conductive film of Example 3.
  • the amount of oxygen introduced into the film forming chamber is adjusted so that the value of the specific resistance of the formed ITO film is 6.2 ⁇ 10 -4 ⁇ ⁇ cm, and the thickness is 52 nm.
  • the first region was formed.
  • the amount of oxygen introduced into the film forming chamber is adjusted so that the value of the specific resistance of the formed ITO film is 6.2 ⁇ 10 -4 ⁇ ⁇ cm, and the thickness is 78 nm.
  • a second region was formed.
  • the transparent conductive layer (thickness 130 nm, amorphous) of the transparent conductive film of Example 4 has a first region (thickness 52 m) made of a Kr-containing ITO layer and a second region (thickness) made of an Ar-containing ITO layer. It has a thickness of 78 nm in order from the transparent resin base material side (the ratio of the thickness of the first region to the thickness of the transparent conductive layer is 40%, and the ratio of the thickness of the second region is 60%. be).
  • Example 5 Except for the following, the transparent conductive film of Example 5 was produced in the same manner as the transparent conductive film of Example 3. In the first sputter film formation, a first region having a thickness of 63 nm was formed. In the second sputter film formation, a second region having a thickness of 27 nm was formed.
  • the transparent conductive layer (thickness 90 nm, amorphous) of the transparent conductive film of Example 5 has a first region (thickness 63 nm) made of a Kr-containing ITO layer and a second region (thickness) made of an Ar-containing ITO layer. It has a thickness of 27 nm in order from the transparent resin base material side (the ratio of the thickness of the first region to the thickness of the transparent conductive layer is 70%, and the ratio of the thickness of the second region is 30%. be).
  • Example 6 A transparent conductive film of Example 6 was produced in the same manner as the transparent conductive film of Example 1 except for the following matters in the sputtering film formation.
  • a mixed gas of krypton and argon (Kr85% by volume, Ar15% by volume) was used as the sputtering gas.
  • the amount of oxygen introduced into the film forming chamber was adjusted so that the value of the specific resistance of the film to be formed was 5.9 ⁇ 10 -4 ⁇ ⁇ cm.
  • the thickness of the transparent conductive layer formed was 145 nm.
  • the transparent conductive layer (thickness 145 nm, amorphous) of the transparent conductive film of Example 6 is composed of a single ITO layer containing Kr and Ar.
  • Example 7 Except for the following, the transparent conductive film of Example 7 was produced in the same manner as the transparent conductive film of Example 1.
  • a long polyethylene terephthalate (PET) film (thickness 125 ⁇ m, manufactured by Mitsubishi Chemical Corporation) was used as the transparent resin base material.
  • the transparent resin base material is made of a PET film (thickness 125 ⁇ m), and the transparent conductive layer (thickness 130 nm, amorphous) is made of a single Kr-containing ITO layer.
  • Example 8 Except for the following, the transparent conductive film of Example 8 was produced in the same manner as the transparent conductive film of Example 1.
  • Ar is used as the sputtering gas
  • the pressure in the film formation chamber is 0.4 Pa
  • the amount of oxygen introduced into the film formation chamber is such that the specific resistance value of the formed ITO film is 6.2 ⁇ 10 ⁇ . Adjusted to 4 ⁇ ⁇ cm.
  • the transparent conductive layer (thickness 130 nm, amorphous) of the transparent conductive film of Example 8 is composed of a single Ar-containing ITO layer.
  • Comparative Example 1 A transparent conductive film of Comparative Example 1 was produced in the same manner as the transparent conductive film of Example 1 except for the following. In the sputter film formation, the amount of oxygen introduced into the film formation chamber was adjusted so that the value of the specific resistance of the formed ITO film was 5.7 ⁇ 10 -4 ⁇ ⁇ cm.
  • the transparent conductive layer (thickness 130 nm, amorphous) of the transparent conductive film of Comparative Example 1 is composed of a single Kr-containing ITO layer.
  • Comparative Example 2 A transparent conductive film of Comparative Example 2 was produced in the same manner as the transparent conductive film of Example 3 except for the following. In the first sputter film formation, a first region having a thickness of 98 nm was formed. In the second sputter film formation, a second region having a thickness of 32 nm was formed.
  • the transparent conductive layer (thickness 130 nm, amorphous) of the transparent conductive film of Comparative Example 2 has a first region (thickness 98 nm) composed of a Kr-containing ITO layer and a second region (thickness) composed of an Ar-containing ITO layer. 32 nm in order from the transparent resin base material side (the ratio of the thickness of the first region to the thickness of the transparent conductive layer is 75%, and the ratio of the thickness of the second region is 25%). be).
  • each transparent conductive layer in Examples 1 to 8 and Comparative Examples 1 and 2 was measured by FE-TEM observation. Specifically, first, a cross-section observation sample of each transparent conductive layer in Examples 1 to 8 and Comparative Examples 1 and 2 was prepared by the FIB microsampling method. In the FIB microsampling method, a FIB device (trade name "FB2200", manufactured by Hitachi) was used, and the acceleration voltage was set to 10 kV. Next, the thickness of the transparent conductive layer in the cross-section observation sample was measured by FE-TEM observation. In the FE-TEM observation, an FE-TEM device (trade name "JEM-2800", manufactured by JEOL) was used, and the acceleration voltage was set to 200 kV.
  • FE-TEM observation an FE-TEM device (trade name "JEM-2800", manufactured by JEOL) was used, and the acceleration voltage was set to 200 kV.
  • the thickness of the first region of each transparent conductive layer in Examples 3 to 5 and Comparative Example 2 a sample for cross-section observation was prepared from the intermediate product before forming the second region on the first region. The sample was measured by FE-TEM observation. The thickness of the second region of each transparent conductive layer in Examples 3 to 5 and Comparative Example 2 was obtained by subtracting the thickness of the first region from the total thickness of the transparent conductive layer.
  • the detection limit value is the transparency attached to the measurement. It may vary depending on the thickness of the conductive layer).
  • the Kr content of each transparent conductive layer in Examples 1 and 3 to 7 and Comparative Examples 1 and 2 is less than 0.2 atomic% (detection limit value), and also in Examples.
  • the Kr content of the transparent conductive layer of No. 2 was less than 0.1 atomic% (detection limit value).
  • ⁇ Heat shrinkage rate> The heat shrinkage of each of the transparent conductive films of Examples 1 to 8 and Comparative Examples 1 and 2 after being heat-treated was examined. Specifically, first, three first sample films having a size of 10 cm on the first side and 10 cm on the second side were prepared for each transparent conductive film.
  • the first side is a side extending in the MD direction for the transparent conductive film (that is, the film running direction in the above-mentioned manufacturing process in the roll-to-roll method) (the same applies to the first sample film described later).
  • the second side is a side extending in the TD direction (that is, a direction orthogonal to the film traveling direction) for the transparent conductive film (the same applies to the first sample film described later).
  • each first sample film was measured by a non-contact CNC image measuring machine (trade name "QV ACCEL606-PRO", manufactured by Mitutoyo Co., Ltd.) (first measurement).
  • the first sample film was heat-treated in a hot air oven. In the heat treatment, the heating temperature was 165 ° C. and the heating time was 60 minutes.
  • the shape of each first sample film cooled to room temperature after the heat treatment was measured by the non-contact CNC image measuring machine (second measurement). Then, based on the shape data obtained by the first measurement and the shape data obtained by the second measurement, the direction in which the heat shrinkage rate due to the above heat treatment is maximum in any of the first sample films (first). It was specified that (1 direction) is the MD direction. Further, the average of the heat shrinkage rates of the six second sides of the three first sample films for each transparent conductive film due to the heat treatment was determined as the first heat shrinkage rate T1 (%) in the second direction. .. The values are shown in Table 1.
  • the heat shrinkage rate of each of the transparent resin substrates of the transparent conductive films of Examples 1 to 8 and Comparative Examples 1 and 2 after being heat-treated was investigated. Specifically, first, three first sample films having a size of 10 cm on the first side and 10 cm on the second side were prepared for each transparent conductive film. Next, the first sample film was immersed in hydrochloric acid having a concentration of 5% by mass at 20 ° C. for 30 minutes. As a result, the transparent conductive layer was removed from the first sample film to obtain a second sample film made of a transparent resin base material.
  • the transparent conductive film of the present invention can be used as a feed material for a conductor film for forming a pattern of transparent electrodes in various devices such as liquid crystal displays, touch panels, and optical sensors.

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  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
PCT/JP2021/039793 2020-10-29 2021-10-28 Film conducteur transparent et procédé de production pour film conducteur transparent WO2022092190A2 (fr)

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CN202180074002.3A CN116745867A (zh) 2020-10-29 2021-10-28 透明导电性薄膜以及透明导电性薄膜的制造方法
JP2022559225A JPWO2022092190A1 (fr) 2020-10-29 2021-10-28
KR1020237012198A KR20230096992A (ko) 2020-10-29 2021-10-28 투명 도전성 필름 및 투명 도전성 필름의 제조 방법

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